Abstract: Provided is a nitride semiconductor device including a p-type region having a high concentration, and a method of manufacturing the same. The nitride semiconductor device includes a nitride crystal layer, and a p-type region provided in the nitride crystal layer. The p-type region includes Mg at a concentration in a range of 3×1018 cm?3 or greater and 1×1021 cm?3 or less, and at least either a group-13 element or an acceptor element at a concentration in a range of 3×1017 cm?3 or greater and 5×1021 cm?3 or less.

Abstract: The nitride semiconductor device includes a field effect transistor formed in a gallium nitride layer. The field effect transistor includes: a gate insulator film formed on a side of a first principal face of the gallium nitride layer; a p type region being in contact with the gate insulator film; an n type region being in contact with the p type region in a direction parallel to an interface between the p type region and the gate insulator film; a first electrode being in contact with the n type region. The p type region includes a first region that is in contact with the gate insulator film and a second region that is in contact with the gate insulator film and lies in the first direction between the first region and the n type region. The second region has a higher concentration of p type impurities than the first region.

Abstract: A manufacturing method of a semiconductor apparatus including: setting, depending on a distribution of the carrier concentrations that the buffer region should have, a dose amount of hydrogen ions to be implanted into a plurality of depth positions corresponding to the plurality of concentration peaks; and implanting, depending on the dose amount that is set in the setting, the hydrogen ions into the semiconductor substrate is provided. In the setting, among the plurality of concentration peaks, the dose amount of the hydrogen ions for a deepest peak farthest from the lower surface of the semiconductor substrate is set depending on a carbon concentration of the semiconductor substrate, and the dose amount for at least one of the concentration peaks other than the deepest peak is set regardless of the carbon concentration of the semiconductor substrate.

Abstract: A method for manufacturing a nitride semiconductor device includes: selectively ion-implanting an element that is other than p-type impurities and n-type impurities into a first region in a first primary surface of a gallium nitride layer so as to generate crystal defects in the first region; selectively ion-implanting a p-type impurity into a second region in the gallium nitride layer, the second region being shallower than the first region in a depth direction and being within the first region in a plan view; and thermally treating said gallium nitride layer that has been ion-implanted with said element and said p-type impurity so as to thermally diffuse said p-type impurity in the second region into a third region that is within the first region and that surrounds a bottom and sides of the second region.

Abstract: A nitride semiconductor device is provided, comprising: a first nitride semiconductor layer of a first conductivity-type; a second nitride semiconductor layer of a second conductivity-type provided above the first nitride semiconductor layer; a junction region of a first conductivity-type which is provided to extend in a direction from a front surface of the second nitride semiconductor layer to the first nitride semiconductor layer and has a doping concentration NJFET equal to or higher than that of the first nitride semiconductor layer; and a source region of a first conductivity-type which is provided more shallowly than the junction region and has a doping concentration equal to or higher than the doping concentration NJFET, wherein a dopant of the source region is an element with an atomic weight larger than that of a dopant in the junction region.

Abstract: A nitride semiconductor device including: a gallium nitride substrate; and a vertical MOSFET provided on the gallium nitride substrate, the vertical MOSFET including: an N-type drift region provided in the gallium nitride substrate; a P-type well region provided in the drift region; an N-type source region provided in the well region; a gate insulating film provided on a surface of the well region; and a gate electrode provided on the surface of the well region via the gate insulating film, wherein the well region includes a first well region and a second well region higher in acceptor element concentration than the first well region, the second well region being located between the first well region and the gate insulating film and being in contact with the source region.

Abstract: An impurity region of P-type that the field effect transistor of the nitride semiconductor device includes has a peak position at which concentration of P-type impurities reaches a maximum at a position located away from an interface with a gate insulating film. The impurity region has an inflection point at which concentration of the P-type impurities changes from increase to decrease toward the interface or a rate of decrease in the concentration of the P-type impurities increases toward the interface at a position located between the interface and the peak position.

Abstract: A method for manufacturing a nitride semiconductor device including: forming N-type regions in a nitride semiconductor layer; implanting ions of an acceptor element into a region sandwiched by the N-type regions in the nitride semiconductor layer; and forming a P-type region sandwiched by the N-type regions by subjecting the nitride semiconductor layer to heat treatment and activating the acceptor element. The forming the N-type regions includes implanting ions of a donor element to the nitride semiconductor layer such that concentration of the donor element in the N-type regions is equal to or greater than concentration of the acceptor element in the P-type region. The implanting ions of the acceptor element includes implanting ions of the acceptor element such that concentration of the acceptor element in the P-type region is 1×1019 cm?3 or more and 1×1021 cm?3 or less.

Abstract: A method for manufacturing a nitride semiconductor device including: forming an N-type region in a nitride semiconductor layer; implanting ions of an acceptor element into a region under the N-type region in the nitride semiconductor layer; and forming a first P-type region under the N-type region by subjecting the nitride semiconductor layer to heat treatment and activating the acceptor element. The forming the N-type region includes implanting ions of a donor element into the nitride semiconductor layer such that concentration of the donor element in the N-type region is equal to or greater than concentration of the acceptor element in the first P-type region. The implanting ions of the acceptor element into a region under the N-type region includes implanting ions of the acceptor element such that concentration of the acceptor element in the first P-type region is 1×1019 cm?3 or more and 1×1021 cm?3 or less.

Abstract: The disclosure provides a voice authentication apparatus including an output unit that preferentially outputs a question with which text information indicating an answer is associated than a question with which text information indicating an answer is not associated, and an authentication unit that performs voice authentication using voice information in which an answer to a question output by the output unit is uttered.

Abstract: A gallium nitride based semiconductor device is provided, where when a thickness of a transition layer is defined as the followings, the thickness of the transition layer is less than 1.5 nm: (i) a distance between a depth position at which an atomic composition of nitrogen element constituting the gallium nitride based semiconductor layer is ½ relative to that at a position on the GaN based semiconductor layer side sufficiently away from the transition layer, and a depth position at which an atomic composition of a metal element is ½ of a value of a maximum if an atomic composition of the metal element constituting an insulating layer has the maximum, or a depth position at which an atomic composition of the metal element is ½ relative to that at a position on the insulating layer side sufficiently away from the transition layer if not having the maximum.

Abstract: According to at least one example embodiment of the present invention, provided is a face authentication system including: a criterion setting unit that sets a criterion of face authentication performed on a user so as to be different in accordance with a state of an access target system accessed by the user; and a face authentication unit that performs face authentication of the user based on the criterion.

Abstract: According to at least one example embodiment of the present invention, provided is a face authentication system including: a criterion setting unit that sets a criterion of face authentication performed on a user so as to be different in accordance with a state of an access target system accessed by the user; and a face authentication unit that performs face authentication of the user based on the criterion.

Abstract: A nitride semiconductor device is provide, the nitride semiconductor device including: an epitaxial layer; and an ion implantation layer that is provided on the epitaxial layer over a continuous depth range that extends over 100 nm or longer, and has a P type doping concentration equal to or higher than 1×1017 cm?3, wherein the ion implantation layer has a region with a crystal defect density equal to or lower than 1×1016 cm?3, the region being located in a range which is on an upper-surface-side of an interface between the epitaxial layer and the ion implantation layer, and is within 100 nm from the interface.

Abstract: A nitride semiconductor device is provided, comprising: a first nitride semiconductor layer of a first conductivity-type; a second nitride semiconductor layer of a second conductivity-type provided above the first nitride semiconductor layer; a junction region of a first conductivity-type which is provided to extend in a direction from a front surface of the second nitride semiconductor layer to the first nitride semiconductor layer and has a doping concentration NJFET equal to or higher than that of the first nitride semiconductor layer; and a source region of a first conductivity-type which is provided more shallowly than the junction region and has a doping concentration equal to or higher than the doping concentration NJFET, wherein a dopant of the source region is an element with an atomic weight larger than that of a dopant in the junction region.

Abstract: A method for manufacturing a nitride semiconductor device includes: selectively ion-implanting an element that is other than p-type impurities and n-type impurities into a first region in a first primary surface of a gallium nitride layer so as to generate crystal defects in the first region; selectively ion-implanting a p-type impurity into a second region in the gallium nitride layer, the second region being shallower than the first region in a depth direction and being within the first region in a plan view; and thermally treating said gallium nitride layer that has been ion-implanted with said element and said p-type impurity so as to thermally diffuse said p-type impurity in the second region into a third region that is within the first region and that surrounds a bottom and sides of the second region.

Abstract: A manufacturing method of a vertical GaN-based semiconductor device having: a GaN-based semiconductor substrate; a GaN-based semiconductor layer including a drift region having doping concentration of an n type impurity, which is lower than that of the GaN-based semiconductor substrate, and is provided on the GaN-based semiconductor substrate; and MIS structure having the GaN-based semiconductor layer, an insulating film contacting the GaN-based semiconductor layer, and a conductive portion contacting the insulating film, the method includes: implanting an n type dopant in a back surface of the GaN-based semiconductor substrate after forming of the MIS structure, and annealing the GaN-based semiconductor substrate after the implanting of the n type dopant.

Abstract: A nitride semiconductor device includes a transistor having a channel region in a gallium nitride-based semiconductor layer. The transistor includes: a gate insulating film provided above the gallium nitride-based semiconductor layer; an intermediate layer arranged between the gallium nitride-based semiconductor layer and the gate insulating film, having a band gap smaller than that of the gate insulating film, and having a band offset with the gallium nitride-based semiconductor layer; a gate electrode provided on the gate insulating film; a first conductivity type source region provided in the gallium nitride-based semiconductor layer; and a source electrode provided on the gallium nitride-based semiconductor layer and being in contact with the source region. The intermediate layer is arranged at a position opposed to the gate electrode through the gate insulating film and avoids a source contact region in which the source electrode is in contact with the source region.

Abstract: Provided is a manufacturing method of a semiconductor device including a vertical MOSFET having a planar gate. The manufacturing method of a semiconductor device includes forming a n-type gallium nitride layer on a gallium nitride monocrystalline substrate, and forming an impurity-implanted region that contains impurities at a uniform concentration in a direction parallel to a main surface of the gallium nitride monocrystalline substrate, by ion-implanting the impurities into the n-type gallium nitride layer, where the impurities include at least one type selected from among magnesium, beryllium, calcium and zinc. Here, at least part of the impurity-implanted region serves as a channel forming region of the vertical MOSFET.

Abstract: According to at least one example embodiment of the present invention, provided is a face authentication system including: a criterion setting unit that sets a criterion of face authentication performed on a user so as to be different in accordance with a state of an access target system accessed by the user; and a face authentication unit that performs face authentication of the user based on the criterion.