Abstract: A communication device is attached to an animal in a facility, for example, using a band. The communication device transmits at least a position of the communication device (hereinafter referred to as position information) and identification information of the communication device (hereinafter referred to as a communication device ID) to a position information transmission device. The position information transmission device uses the position information and the identification information received from the communication device to select an animal whose position information is to be delivered. The position information transmission device transmits the position information about the selected animal to at least one of an in-zoo display device, a user terminal, and a staff member terminal.

Abstract: A method of manufacturing a cooling device of a substrate processing apparatus includes: providing an aluminum plate having a through hole; forming a temperature control portion by anodizing the aluminum plate; and arranging the temperature control portion below a substrate support portion, wherein the temperature control portion is arranged so that a support rod of the substrate support portion passes through the through hole.

Abstract: A method for fabricating a layer structure in a trench includes: simultaneously forming a dielectric film containing a Si—N bond on an upper surface, and a bottom surface and sidewalls of the trench, wherein a top/bottom portion of the film formed on the upper surface and the bottom surface and a sidewall portion of the film formed on the sidewalls are given different chemical resistance properties by bombardment of a plasma excited by applying voltage between two electrodes between which the substrate is place in parallel to the two electrodes; and substantially removing the sidewall portion of the film by wet etching which removes the sidewall portion of the film more predominantly than the top/bottom portion according to the different chemical resistance properties.

Abstract: A gas generator includes a housing constructed by combining and joining a plurality of shell members. One of the plurality of shell members includes a cylindrical portion and a flange portion. The cylindrical portion is provided with a plurality of gas discharge openings including gas discharge openings different in opening area from one another. The flange portion is shaped such that a distance from an axial line of the cylindrical portion to an outer edge of the flange portion is non-uniform. When a perpendicular line is drawn to the axial line from a maximum outer geometry position in the outer edge of the flange portion most distant from the axial line, a gas discharge opening arranged closest to the perpendicular line is a gas discharge opening other than a gas discharge opening largest in opening area among the plurality of gas discharge openings.

Abstract: A method and system for forming a film on a substrate are disclosed. Exemplary methods include using a first plasma condition to form a layer of deposited material having a good film thickness uniformity, using a second plasma condition to treat the deposited material and thereby form treated material, and using a third plasma condition to form a surface-modified layer—e.g., reactive sites on the treated material.

Abstract: Provided is a substrate processing method capable of filling a film in a gap structure without forming voids or seams in a gap, the substrate processing method including: a first step of forming a thin film on a structure including a gap by performing a first cycle including supplying a first reaction gas and supplying a second reaction gas to the structure a plurality of times; a second step of etching a portion of the thin film by supplying a fluorine-containing gas onto the thin film; a third step of supplying a hydrogen-containing gas onto the thin film; a fourth step of supplying an inhibiting gas to an upper portion of the gap; and a fifth step of forming a thin film by performing a second cycle including supplying the first reaction gas and supplying a second reaction gas onto the thin film a plurality of times.

Abstract: A communication device is attached to an animal in a facility, for example, using a band. The communication device transmits at least a position of the communication device (hereinafter referred to as position information) and identification information of the communication device (hereinafter referred to as a communication device ID) to a position information transmission device. The position information transmission device uses the position information and the identification information received from the communication device to select an animal whose position information is to be delivered. The position information transmission device transmits the position information about the selected animal to at least one of an in-zoo display device, a user terminal, and a staff member terminal.

Abstract: Methods of depositing material on a surface of a substrate are disclosed. The methods include exposing a surface of the substrate to a precursor within a reaction chamber to form adsorbed species on the surface and removing at least a portion of the adsorbed species prior to introducing a reactant to the reaction chamber.

Abstract: Methods of forming silicon nitride on a sidewall of a feature are disclosed. Exemplary methods include providing a substrate comprising a feature comprising a sidewall surface and a surface adjacent the sidewall surface, forming a silicon oxide layer overlying the sidewall surface and the surface adjacent the sidewall surface, using a cyclical deposition process, depositing a silicon nitride layer overlying the silicon oxide layer, and exposing the silicon nitride layer to activated species generated from a hydrogen-containing gas. Exemplary methods can additionally include selectively removing a portion of the silicon nitride layer. Structures formed using the methods and systems for performing the methods are also disclosed.

Abstract: Methods of depositing material on a surface of a substrate are disclosed. The methods include using a fluorine reactant to reduce a growth rate per cycle of silicon oxide and/or silicon nitride deposited onto a surface of a substrate.

Abstract: A gas generator includes an igniter, a cup-shaped member, and a fixing member. The cup-shaped member accommodating an enhancer agent bursts or melts at the time of activation. The fixing member fixing a filter does not burst and melt even at the time of activation. Ra and Ha satisfy a condition of Ra/Ha 1.00 where Ra represents an inner diameter of a sidewall portion of the cup-shaped member and Ha represents a distance between a top wall portion of the cup-shaped member and the igniter. The sidewall portion includes a first region surrounded by a partition wall portion of the fixing member and a second region not surrounded by the partition wall portion. The partition wall portion has an end portion arranged closer to a top plate portion than the igniter. A gas generating agent is arranged to face the top wall portion, the second region, and the partition wall portion.

Abstract: A gas generator includes a housing constructed by combining and joining a plurality of shell members. One of the plurality of shell members includes a cylindrical portion and a flange portion. The cylindrical portion is provided with a plurality of gas discharge openings including gas discharge openings different in opening area from one another. The flange portion is shaped such that a distance from an axial line of the cylindrical portion to an outer edge of the flange portion is non-uniform. When a perpendicular line is drawn to the axial line from a maximum outer geometry position in the outer edge of the flange portion most distant from the axial line, a gas discharge opening arranged closest to the perpendicular line is a gas discharge opening other than a gas discharge opening largest in opening area among the plurality of gas discharge openings.

Abstract: A water receiving member is reduced in size and is therefore made difficult to visually recognize. A cooking device (1) includes a main body (11), a front door (12), and a waste receiving member (41). The front door (12) has a water droplet restraining part (33) provided on a lower portion of an inner surface of the front door (12) which inner surface faces the heating room (13). While the front door (12) is closed, the water droplet restraining part (33) protrudes diagonally downwardly or horizontally from the inner surface of the front door (12) toward a rear side of the main body (11).

Abstract: Methods for depositing on a surface of a substrate are disclosed. Exemplary methods include depositing a silicon oxide material using a cyclical deposition process, and reflowing the material during one or more of the step of depositing and a post-deposition anneal step. Structures including a layer of the material are also disclosed.

Abstract: A gas generator includes a housing constructed by combining and joining a plurality of shell members. One of the plurality of shell members includes a cylindrical portion and a flange portion. The cylindrical portion is provided with a plurality of gas discharge openings including gas discharge openings different in opening area from one another. The flange portion is shaped such that a distance from an axial line of the cylindrical portion to an outer edge of the flange portion is non-uniform. When a perpendicular line is drawn to the axial line from a maximum outer geometry position in the outer edge of the flange portion most distant from the axial line, a gas discharge opening arranged closest to the perpendicular line is a gas discharge opening other than a gas discharge opening largest in opening area among the plurality of gas discharge openings.

Abstract: A water receiving member is reduced in size and is therefore made difficult to visually recognize. A cooking device (1) includes a main body (11), a front door (12), and a waste receiving member (41). The front door (12) has a water droplet restraining part (33) provided on a lower portion of an inner surface of the front door (12) which inner surface faces the heating room (13). While the front door (12) is closed, the water droplet restraining part (33) protrudes diagonally downwardly or horizontally from the inner surface of the front door (12) toward a rear side of the main body (11).

Abstract: Provided is a heating cooker that can efficiently apply steam to the entire food and can also cook the food quickly. A heating cooker (1A) includes a toasting grill (16) provided within a cooking chamber (10) and a lower heater (17b) provided at a lower section within the cooking chamber (10). Steam is blown between the toasting grill (16) and the lower heater (17b) from a steam outlet (25) provided in at least one sidewall of the cooking chamber (10).

Abstract: Methods of depositing material on a surface of a substrate are disclosed. The methods include exposing a surface of the substrate to a precursor within a reaction chamber to form adsorbed species on the surface and removing at least a portion of the adsorbed species prior to introducing a reactant to the reaction chamber.

Abstract: A method for fabricating a layer structure in a trench includes: simultaneously forming a dielectric film containing a Si—N bond on an upper surface, and a bottom surface and sidewalls of the trench, wherein a top/bottom portion of the film formed on the upper surface and the bottom surface and a sidewall portion of the film formed on the sidewalls are given different chemical resistance properties by bombardment of a plasma excited by applying voltage between two electrodes between which the substrate is place in parallel to the two electrodes; and substantially removing the sidewall portion of the film by wet etching which removes the sidewall portion of the film more predominantly than the top/bottom portion according to the different chemical resistance properties.

Abstract: A gas generator includes a housing containing an accommodation space, a gas generating agent, an igniter, and a sealing tape. The housing includes a cylindrical circumferential wall portion including plural gas discharge openings and the plural gas discharge openings are closed by the sealing tape. The plural gas discharge openings include gas discharge openings set to be different from one another in opening pressure so as to be opened stepwise with increase in pressure in the accommodation space as a result of burning of the gas generating agent. A condition of T?1.8 [mm] and SA?60 [mm2] is satisfied where T represents a thickness of a portion of the housing and SA represents a total opening area of the plurality of gas discharge openings. At least one of the plural gas discharge openings is in a shape of an elongated hole.