Patents by Inventor Shoji Ikeda

Shoji Ikeda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11121310
    Abstract: A structure used in the formation of a spintronics element, the spintronics element to include a plurality of laminated layers, includes a substrate, a plurality of laminated layers formed on the substrate, an uppermost layer of the plurality of laminated layers being a non-magnetic layer containing oxygen, and a protection layer directly formed on the uppermost layer, the protection layer preventing alteration of characteristics of the uppermost layer while exposed in an atmosphere including H2O, a partial pressure of H2O in the atmosphere being equal to or larger than 10?4 Pa, no other layer being directly formed on the protection layer.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: September 14, 2021
    Assignee: TOHOKU UNIVERSITY
    Inventors: Soshi Sato, Masaaki Niwa, Hiroaki Honjo, Shoji Ikeda, Hideo Ohno, Tetsuo Endo
  • Patent number: 11081641
    Abstract: The present invention provides a magnetoresistance effect element which has a high thermal stability factor ? and in which a magnetization direction of a recording layer is a perpendicular direction with respect to a film surface, and a magnetic memory including the same. Magnetic layers of a recording layer of the magnetoresistance effect element are divided into at least two, and an Fe composition with respect to a sum total of atomic fractions of magnetic elements in each magnetic layer is changed before stacking the magnetic layers.
    Type: Grant
    Filed: January 18, 2017
    Date of Patent: August 3, 2021
    Assignee: TOHOKU UNIVERSITY
    Inventors: Hiroaki Honjo, Tetsuo Endoh, Shoji Ikeda, Hideo Sato, Hideo Ohno
  • Publication number: 20210233577
    Abstract: The present invention provides a magnetoresistance effect element with a high read operation speed, a magnetic memory array, a magnetic memory device, and a write method for a magnetoresistance effect element.
    Type: Application
    Filed: April 10, 2019
    Publication date: July 29, 2021
    Inventors: Yoshiaki Saito, Shoji Ikeda, Tetsuo Endoh
  • Patent number: 11062876
    Abstract: An evaluation method for an electronic device provided with an insulating film between a pair of electrode layers includes preparing a sample that has a tunnel barrier insulating film as the insulating film; irradiating the sample with electron beams from a plurality of angles to acquire a plurality of images; and performing image processing using the plurality of images to reconstruct a stereoscopic image and generate a cross-sectional image of the sample from the stereoscopic image.
    Type: Grant
    Filed: March 21, 2019
    Date of Patent: July 13, 2021
    Assignee: TOHOKU UNIVERSITY
    Inventors: Masaaki Niwa, Tetsuo Endoh, Shoji Ikeda, Kosuke Kimura
  • Publication number: 20210158849
    Abstract: Provided are a magnetoresistive element, a magnetic memory device, and a writing and reading method for a magnetic memory device, in which an aspect ratio of a junction portion can be decreased. A magnetoresistive element 1 of the invention, includes: a heavy metal layer 2 that is an epitaxial layer; and a junction portion 3 including a recording layer 31 that is provided on the heavy metal layer 2 and includes a ferromagnetic layer of an epitaxial layer magnetized in an in-plane direction, which is an epitaxial layer, a barrier layer 32 that is provided on the recording layer 31 and includes an insulating body, and a reference layer 33 that is provided on the barrier layer 32 and has magnetization fixed in the in-plane direction, in which the recording layer 31 is subjected to magnetization reversal by applying a write current to the heavy metal layer 2.
    Type: Application
    Filed: April 11, 2019
    Publication date: May 27, 2021
    Inventors: Yoshiaki Saito, Shoji Ikeda, Hideo Sato, Tetsuo Endoh
  • Publication number: 20210135094
    Abstract: Provided are a magnetoresistance effect element and a magnetic memory having a shape magnetic anisotropy and using a recording layer having an anti-parallel coupling. A first magnetic layer (3) and a second magnetic layer (5) of the magnetoresistance effect element include a ferromagnetic substance, have a magnetization direction variable to the direction perpendicular to a film surface and are magnetically coupled in an anti-parallel direction, and a junction size D (nm), which is a length of the longest straight line on an end face perpendicular to the thickness direction of the first magnetic layer (3) and the second magnetic layer (5), a film thickness t1 (nm) of the first magnetic layer (3), and a film thickness t2 (nm) of the second magnetic layer (5) satisfy relationships D<t1 and D?t1 or D?t1 and D<t2.
    Type: Application
    Filed: February 19, 2019
    Publication date: May 6, 2021
    Inventors: Hiroaki HONJO, Tetsuo ENDOH, Shoji IKEDA, Hideo SATO, Koichi NlSHIOKA
  • Publication number: 20210125654
    Abstract: A magnetic memory device includes: a memory cell array including a plurality of lines arranged parallel to one another at predetermined intervals and extending in one direction, and a plurality of memory cells connected to the plurality of lines and arranged in a matrix along an extending direction of the plurality of lines and along an arrangement direction of the plurality of lines, each of the plurality of memory cells including a magnetoresistance effect element; a selection circuit connected to the plurality of lines and configured to select non-adjacent lines that are not adjacent to one another, from the plurality of lines; and a controller connected to the selection circuit and configured to cause the selection circuit to select the non-adjacent lines and allow a write current to flow through the non-adjacent lines simultaneously in writing data on the memory cell array.
    Type: Application
    Filed: June 20, 2019
    Publication date: April 29, 2021
    Inventors: Tetsuo Endoh, Yoshiaki Saito, Shoji Ikeda
  • Publication number: 20210110857
    Abstract: An integrated circuit device of the invention, includes: a first resistance variable memory element provided on a semiconductor substrate; a second resistance variable memory element provided on the semiconductor substrate; and a semiconductor circuit for controlling write and read of the first resistance variable memory element and the second resistance variable memory element, which is provided on the semiconductor substrate, in which the second resistance variable memory element has a write current that is smaller than a write current of the first resistance variable memory element, and the second resistance variable memory element is disposed farther from the semiconductor substrate than the first resistance variable memory element.
    Type: Application
    Filed: March 12, 2019
    Publication date: April 15, 2021
    Inventors: Tetsuo Endoh, Shoji Ikeda, Hiroki Koike
  • Publication number: 20210091304
    Abstract: [Problem] Provided are a magnetic memory element in which an improvement in properties, such as an improvement in coercive properties or a reduction in a leak current, can be attained, a method for producing the same, and a magnetic memory. [Means for Resolution] The magnetic memory element, includes: a columnar stack ST in which a reference layer FX having a fixed magnetization direction, a barrier layer TL including a non-magnetic body, and a recording layer FR having a reversible magnetization direction are stacked in this order; and an insulating film (a second insulating film 20) which contains nitrogen and is provided to cover a lateral surface of the columnar stack, in which in one or both of the recording layer and the barrier layer, a nitrogen concentration is 7×1030 atoms/m2 or more in a position of 2 nm inside from an outer circumferential end of the columnar stack.
    Type: Application
    Filed: August 18, 2020
    Publication date: March 25, 2021
    Inventors: Tetsuo Endoh, Masaaki Niwa, Hiroaki Honjo, Hideo Sato, Shoji Ikeda, Toshinari Watanabe
  • Publication number: 20210074910
    Abstract: A perpendicular magnetization type three-terminal SOT-MRAM that does not need an external magnetic field is provided. A magnetoresistance effect element where a first magnetic layer/nonmagnetic spacer layer/recording layer are disposed in order, and the first magnetic layer and the nonmagnetic spacer layer are provided to a channel layer.
    Type: Application
    Filed: February 13, 2019
    Publication date: March 11, 2021
    Inventors: Yoshiaki SAITO, Shoji IKEDA, Hideo SATO, Tetsuo ENDOH
  • Publication number: 20210057641
    Abstract: Provided are a magnetic tunnel junction dement suppressing diffusion and penetration of constituent elements between a hard mask film, and a magnetic tunnel junction film and a protection layer, and a method for manufacturing the magnetic tunnel junction element. The magnetic tunnel junction element has a configuration in which a non-magnetic insertion layer (7) including Ta or the like is inserted beneath a hard mask layer (8).
    Type: Application
    Filed: March 11, 2019
    Publication date: February 25, 2021
    Inventors: Koichi NISHIOKA, Tetsuo ENDOH, Shoji IKEDA, Hiroaki HONJO, Hideo SATO, Sadahiko MIURA
  • Patent number: 10833256
    Abstract: A magnetic tunnel junction element includes, in a following stack order, an underlayer formed of a metal material, a fixed layer formed of a ferromagnetic body, a magnetic coupling layer formed of a nonmagnetic body, a reference layer formed of a ferromagnetic body, a barrier layer formed of a nonmagnetic body, and a recording layer formed of a ferromagnetic body, or alternatively, the magnetic tunnel junction element includes, in a following stack order, a recording layer formed of a ferromagnetic body, a barrier layer formed of a nonmagnetic body, a reference layer formed of a ferromagnetic body, a magnetic coupling layer formed of a nonmagnetic body, an underlayer formed of a metal material, and a fixed layer formed of a ferromagnetic body, wherein the fixed layer is formed and stacked after performing plasma treatment to a surface of the underlayer having been formed.
    Type: Grant
    Filed: March 21, 2017
    Date of Patent: November 10, 2020
    Assignee: TOHOKU UNIVERSITY
    Inventors: Hiroaki Honjo, Tetsuo Endoh, Shoji Ikeda, Hideo Sato, Hideo Ohno
  • Publication number: 20200343442
    Abstract: An object of the invention is to provide a magnetoresistance effect element which includes a reference layer having three or more magnetic layers and which improves a thermal stability factor ? by decreasing a write error rate using an element structure that enables a wide margin to be secured between a current at which magnetization of the reference layer is reversed and a writing current Ic of a recording layer and by reducing an effect of a stray magnetic field from the reference layer. The magnetoresistance effect element includes: a first recording layer (A1); a first non-magnetic layer (11); and a first reference layer (B1), wherein the first reference layer (B1) including n-number of a plurality of magnetic layers (21, 22, . . . , 2n) and (n-1)-number of a plurality of non-magnetic insertion layers (31, 32, . . . 3(n-1)) adjacently sandwiched by each of the plurality of magnetic layers, where n?3.
    Type: Application
    Filed: April 8, 2020
    Publication date: October 29, 2020
    Inventors: Hiroaki HONJO, Tetsuo ENDOH, Hideo SATO, Shoji IKEDA
  • Patent number: 10804457
    Abstract: A magnetoresistive element includes a reference layer having a fixed magnetization direction and including a ferromagnetic material containing Fe or Co, a recording layer having a variable magnetization direction and including a ferromagnetic material, and one non-magnetic layer that is formed between the reference layer and the recording layer and that contains oxygen. One of the reference layer and the recording layer contains Fe. The three layers are arranged so that a magnetization direction of the one of the reference layer and the recording layer becomes perpendicular to a layer surface by an interfacial perpendicular magnetic anisotropy at an interface between the one of the reference layer and the recording layer and the one non-magnetic layer resulting from the one of the reference layer and the recording layer having a predetermined thickness. The one of the reference layer and the recording layer has a bcc structure.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: October 13, 2020
    Assignee: TOHOKU UNIVERSITY
    Inventors: Hideo Ohno, Shoji Ikeda, Fumihiro Matsukura, Masaki Endoh, Shun Kanai, Katsuya Miura, Hiroyuki Yamamoto
  • Patent number: 10749107
    Abstract: A magnetic tunnel junction element configured by stacking, in a following stack order, a fixed layer formed of a ferromagnetic body and in which a magnetization direction is fixed, a magnetic coupling layer formed of a nonmagnetic body, a reference layer formed of a ferromagnetic body and in which the magnetization direction is fixed, a barrier layer formed of a nonmagnetic body, and a recording layer formed of a ferromagnetic body, a barrier layer formed of a nonmagnetic body, and a recording layer formed by sandwiching an insertion layer formed of a nonmagnetic body between first and second ferromagnetic layers, wherein the magnetic coupling layer is formed using a sputtering gas in which a value of a ratio in which a mass number of an element used in the magnetic coupling layer divided by the mass number of the sputtering gas itself is 2.2 or smaller.
    Type: Grant
    Filed: March 17, 2017
    Date of Patent: August 18, 2020
    Assignee: TOHOKU UNIVERSITY
    Inventors: Hiroaki Honjo, Shoji Ikeda, Hideo Sato, Tetsuo Endoh, Hideo Ohno
  • Patent number: 10706996
    Abstract: A magnetic material includes a structure in which a first magnetic layer 1 and a second magnetic layer 2 are stacked such that each layer is formed at least partially in a stacking direction by substantially one atomic layer. The first magnetic layer contains Co as a principal component. The second magnetic layer includes at least Ni. The magnetic material has magnetic anisotropy in the stacking direction. Preferably, an atomic arrangement within a film surface of the first magnetic layer and the second magnetic layer has six-fold symmetry.
    Type: Grant
    Filed: November 11, 2013
    Date of Patent: July 7, 2020
    Assignee: TOHOKU UNIVERSITY
    Inventors: Shunsuke Fukami, Hideo Sato, Michihiko Yamanouchi, Shoji Ikeda, Hideo Ohno
  • Patent number: 10658572
    Abstract: A magnetoresistance effect element includes first and second magnetic layers having a perpendicular magnetization direction, and a first non-magnetic layer disposed adjacent to the first magnetic layer and on a side opposite to a side on which the second magnetic layer is disposed. An interfacial perpendicular magnetic anisotropy exists at an interface between the first magnetic layer and the first non-magnetic layer, and the anisotropy causes the first magnetic layer to have a magnetization direction perpendicular to the surface of the layers. An atomic fraction of all magnetic elements to all magnetic and non-magnetic elements included in the second magnetic layer is smaller than that of the first magnetic layer.
    Type: Grant
    Filed: November 2, 2018
    Date of Patent: May 19, 2020
    Assignee: TOHOKU UNIVERSITY
    Inventors: Hideo Sato, Shoji Ikeda, Mathias Bersweiler, Hiroaki Honjo, Kyota Watanabe, Shunsuke Fukami, Fumihiro Matsukura, Kenchi Ito, Masaaki Niwa, Tetsuo Endoh, Hideo Ohno
  • Patent number: 10651369
    Abstract: Provided are a magneto resistive effect element with a stable magnetization direction perpendicular to a film plane and with a controlled magnetoresistance ratio, and a magnetic memory using the magneto resistive effect element. Ferromagnetic layers of the magneto resistive effect element are formed from a ferromagnetic material containing at least one type of 3d transition metal such that the magnetoresistance ratio is controlled, and the film thickness of the ferromagnetic layers is controlled on an atomic layer level such that the magnetization direction is changed from a direction in the film plane to a direction perpendicular to the film plane.
    Type: Grant
    Filed: December 28, 2016
    Date of Patent: May 12, 2020
    Assignee: TOHOKU UNIVERSITY
    Inventors: Hideo Ohno, Shoji Ikeda, Fumihiro Matsukura, Masaki Endoh, Shun Kanai, Hiroyuki Yamamoto, Katsuya Miura
  • Patent number: 10644234
    Abstract: A method for producing a magnetic memory includes: forming a magnetic film having a non-magnetic layer between a first magnetic layer and a second magnetic layer on a substrate having an electrode layer; performing annealing treatment at a first treatment temperature in a state where a magnetic field is applied in a direction perpendicular to a film surface of the first or the second magnetic layer in vacuum; forming a magnetic tunnel junction element; forming a protective film protecting the magnetic tunnel junction element; a formation accompanied by thermal history, in which a constituent element of a magnetic memory is formed after the protective film formation on the substrate; and implementing annealing treatment at a second treatment temperature lower than the first treatment temperature on the substrate in an annealing treatment chamber, in vacuum or inert gas wherein no magnetic field is applied.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: May 5, 2020
    Assignee: TOHOKU UNIVERSITY
    Inventors: Kenchi Ito, Tetsuo Endoh, Shoji Ikeda, Hideo Sato, Hideo Ohno, Sadahiko Miura, Masaaki Niwa, Hiroaki Honjo
  • Publication number: 20200090719
    Abstract: Provided is a magnetoresistance effect element in which the magnetization direction of the recording layer is perpendicular to the film surface and which has a high thermal stability factor ?, and a magnetic memory. A recording layer having a configuration of first magnetic layer/first non-magnetic coupling layer/first magnetic insertion layer/second non-magnetic coupling layer/second magnetic layer is sandwiched between the first and second non-magnetic layers and stacked so that a magnetic coupling force is generated between the first magnetic layer and the second magnetic layer.
    Type: Application
    Filed: December 28, 2017
    Publication date: March 19, 2020
    Inventors: Koichi NISHIOKA, Tetsuo ENDOH, Shoji IKEDA, Hiroaki HONJO, Hideo SATO, Hideo OHNO