Patents by Inventor Shu Ling

Shu Ling has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11244823
    Abstract: Semiconductor device structures having dielectric features and methods of forming dielectric features are described herein. In some examples, the dielectric features are formed by an ALD process followed by a varying temperature anneal process. The dielectric features can have high density, low carbon concentration, and lower k-value. The dielectric features formed according to the present disclosure has improved resistance against etching chemistry, plasma damage, and physical bombardment in subsequent processes while maintaining a lower k-value for target capacitance efficiency.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: February 8, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shu Ling Liao, Chung-Chi Ko, Wan-Yi Kao
  • Publication number: 20210287948
    Abstract: An embodiment is a device including a first fin extending from a substrate, a first gate stack over and along sidewalls of the first fin, a first gate spacer disposed along a sidewall of the first gate stack, a first epitaxial source/drain region in the first fin and adjacent the first gate spacer, the first epitaxial source/drain region, and a protection layer between the first epitaxial source/drain region and the first gate spacer and between the first gate spacer and the first gate stack.
    Type: Application
    Filed: May 28, 2021
    Publication date: September 16, 2021
    Inventors: Shu Ling Liao, Chung-Chi Ko
  • Publication number: 20210202235
    Abstract: Semiconductor device structures having low-k features and methods of forming low-k features are described herein. Some examples relate to a surface modification layer, which may protect a low-k feature during subsequent processing. Some examples relate to gate spacers that include a low-k feature. Some examples relate to a low-k contact etch stop layer. Example methods are described for forming such features.
    Type: Application
    Filed: March 15, 2021
    Publication date: July 1, 2021
    Inventors: Wan-Yi Kao, Chung-Chi Ko, Li Chun Te, Hsiang-Wei Lin, Te-En Cheng, Wei-Ken Lin, Guan-Yao Tu, Shu Ling Liao
  • Patent number: 11024550
    Abstract: An embodiment is a device including a first fin extending from a substrate, a first gate stack over and along sidewalls of the first fin, a first gate spacer disposed along a sidewall of the first gate stack, a first epitaxial source/drain region in the first fin and adjacent the first gate spacer, the first epitaxial source/drain region, and a protection layer between the first epitaxial source/drain region and the first gate spacer and between the first gate spacer and the first gate stack.
    Type: Grant
    Filed: February 14, 2019
    Date of Patent: June 1, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shu Ling Liao, Chung-Chi Ko
  • Patent number: 10959720
    Abstract: A knot may be formed in suture material using a device having an elongated body with a longitudinal axis and a holder. A rail portion of the suture material is secured with a first grasper on the elongated body and a non-rail portion of the suture material is secured with a second grasper on the holder. A plurality of helical windings may be created with the non-rail portion. Detaching the holder from the elongated body in a motion away from the longitudinal axis of the elongated body completes the knot. The holder may be wrapped around the elongated body in a knot-forming pattern.
    Type: Grant
    Filed: October 20, 2016
    Date of Patent: March 30, 2021
    Assignee: Terumo Medical Corporation
    Inventors: Chun-Chia Juan, Yu-Shih Weng, Shu-Ling Cheng
  • Patent number: 10950431
    Abstract: Semiconductor device structures having low-k features and methods of forming low-k features are described herein. Some examples relate to a surface modification layer, which may protect a low-k feature during subsequent processing. Some examples relate to gate spacers that include a low-k feature. Some examples relate to a low-k contact etch stop layer. Example methods are described for forming such features.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: March 16, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Wan-Yi Kao, Chung-Chi Ko, Li Chun Te, Hsiang-Wei Lin, Te-En Cheng, Wei-Ken Lin, Guan-Yao Tu, Shu Ling Liao
  • Publication number: 20210034041
    Abstract: A factory management system and control system are provided. The factory management system includes: a machine; multiple sensors disposed corresponding to the machine and generates multiple first sensing data; a server; and a control system coupled to the machine and the server. The control system receives the first sensing data to generate multiple corresponding control commands in real time and transmits the control commands to the machine. The control system receives a user login message and receives multiple second sensing data and displays the second sensing data in a user login status. The control system receives a user control command and transmits a second control command corresponding to the user control command to the machine. When the control system determines that an abnormal condition occurs according to the second sensing data in the user login status, the control system sends a warning message.
    Type: Application
    Filed: April 29, 2020
    Publication date: February 4, 2021
    Applicant: Grade Upon Technology Corporation
    Inventors: Tai-Yu Fang, Shu-Ling Chang, Wei Chang
  • Publication number: 20200377796
    Abstract: Disclosed is a negative dielectric anisotropic liquid crystal compound represented by Formula (I): wherein R1, R2, R3, and n are as defined herein. A process for preparing the negative dielectric anisotropic liquid crystal compound, a negative dielectric anisotropic liquid crystal composition including the negative dielectric anisotropic liquid crystal compound, and use of the negative dielectric anisotropic liquid crystal compound are also disclosed.
    Type: Application
    Filed: August 16, 2019
    Publication date: December 3, 2020
    Applicants: Daily-Xianhua Optoelectronics Materials Co., Ltd., Yantai Xianhua Chem-Tech Co., Ltd.
    Inventors: Tsung-Yu Tsai, Shu-Ling Lo, Meng-Yun Tseng, Zhaochang Luan, Peichuan Feng
  • Publication number: 20200369423
    Abstract: A sealing film indenting device includes an indentation cutter pad, a movable rod movable relative to the indentation cutter pad along a moving axis, an indentation cutter mounted to the movable rod, and a drive unit. The drive unit is coupled to the movable rod for driving the movable rod to move along the moving axis between a standby position where a film lidding receiving space defined between the indentation cutter and the indentation cutter pad for receiving a film lidding to be indented, and an indentation cutting position where the indentation cutter moved toward the indentation cutter pad across the film lidding to cut indentations on the film lidding.
    Type: Application
    Filed: November 18, 2019
    Publication date: November 26, 2020
    Inventor: SHU-LING LIN
  • Patent number: 10748760
    Abstract: Semiconductor device structures having dielectric features and methods of forming dielectric features are described herein. In some examples, the dielectric features are formed by an ALD process followed by a varying temperature anneal process. The dielectric features can have high density, low carbon concentration, and lower k-value. The dielectric features formed according to the present disclosure has improved resistance against etching chemistry, plasma damage, and physical bombardment in subsequent processes while maintaining a lower k-value for target capacitance efficiency.
    Type: Grant
    Filed: August 10, 2018
    Date of Patent: August 18, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shu Ling Liao, Chung-Chi Ko, Wan-Yi Kao
  • Publication number: 20200251812
    Abstract: An antenna device is provided. The antenna device includes a first substrate, a multilayer electrode, a second substrate, and a liquid-crystal layer. The multilayer electrode is disposed on the first substrate, and the multilayer electrode includes a first conductive layer, a second conductive layer, and a third conductive layer. The second conductive layer is disposed on the first conductive layer. The third conductive layer is disposed on the second conductive layer. The liquid-crystal layer is disposed between the first substrate and the second substrate. In addition, the third conductive layer includes a first portion that extends beyond the second conductive layer.
    Type: Application
    Filed: January 2, 2020
    Publication date: August 6, 2020
    Inventors: Chia-Ping TSENG, Ker-Yih KAO, Chia-Chi HO, Ming-Yen WENG, Hung-I TSENG, Shu-Ling WU, Huei-Ying CHEN
  • Publication number: 20200189899
    Abstract: A fluid dispensing device includes a housing unit, a storage unit and a discharge module that are disposed within the housing unit. A weighing module includes weighing sensors. Each weighing sensor has an attachment portion attached to a bottom wall of the housing unit, and an abutment portion disposed below the bottom wall oppositely to the attachment portion. A control module controls the discharge module to dispense predetermined amount of fluid outside of the housing unit. The control module is able to determine whether a weight of fluid in the storage unit is smaller than a predetermined value according to a weight of the housing unit measured by the weighing sensors.
    Type: Application
    Filed: July 11, 2019
    Publication date: June 18, 2020
    Inventor: Shu-Ling Lin
  • Publication number: 20200058561
    Abstract: An embodiment is a device including a first fin extending from a substrate, a first gate stack over and along sidewalls of the first fin, a first gate spacer disposed along a sidewall of the first gate stack, a first epitaxial source/drain region in the first fin and adjacent the first gate spacer, the first epitaxial source/drain region, and a protection layer between the first epitaxial source/drain region and the first gate spacer and between the first gate spacer and the first gate stack.
    Type: Application
    Filed: February 14, 2019
    Publication date: February 20, 2020
    Inventors: Shu Ling Liao, Chung-Chi Ko
  • Publication number: 20200027719
    Abstract: Semiconductor device structures having dielectric features and methods of forming dielectric features are described herein. In some examples, the dielectric features are formed by an ALD process followed by a varying temperature anneal process. The dielectric features can have high density, low carbon concentration, and lower k-value. The dielectric features formed according to the present disclosure has improved resistance against etching chemistry, plasma damage, and physical bombardment in subsequent processes while maintaining a lower k-value for target capacitance efficiency.
    Type: Application
    Filed: September 30, 2019
    Publication date: January 23, 2020
    Inventors: Shu Ling Liao, Chung-Chi Ko, Wan-Yi Kao
  • Publication number: 20190390114
    Abstract: A liquid crystal composition includes at least one polar compound represented by Formula (I), at least one polar compound represented by Formula (II), at least one compound represented by Formula (III), and at least one compound represented by Formula (IV), in which Formulae (I) to (IV) are as defined herein.
    Type: Application
    Filed: March 18, 2019
    Publication date: December 26, 2019
    Applicants: DAILY-XIANHUA OPTOELECTRONICS MATERIALS CO., LTD., Yantai Xianhua Chem-Tech Co., Ltd.
    Inventors: Ziqian Shi, Tsung-Yu Tsai, Shu-Ling Lo, Ming-Chuan Yang, Hanlei Shan, Peichuan Feng, Zhaochang Luan
  • Publication number: 20190367812
    Abstract: A liquid crystal composition includes at least one polar compound represented by Formula (I), at least one polar compound represented by Formula (II), at least one compound represented by Formula (III), at least one compound represented by Formula (IV), and at least one compound represented by Formula (V), in which Formulae (I) to (V) are as defined herein.
    Type: Application
    Filed: February 28, 2019
    Publication date: December 5, 2019
    Applicants: DAILY-XIANHUA OPTOELECTRONICS MATERIALS CO., LTD., Yantai Xianhua Chem-Tech Co., Ltd.
    Inventors: Tsung-Yu Tsai, Shu-Ling Lo, Ziqian Shi, Huan Yin, Fengmei Fang, Xiangbo Dong, Peichuan Feng
  • Publication number: 20190283535
    Abstract: An automatic temperature regulation device for a vehicle passenger space. A flexible solar panel (2) is arranged on the roof (10) of a vehicle (1); solar energy is used for charging a vehicle battery (11) or a special battery (4), and an isolation cooling effect is generated; and when the vehicle is stopped for a long time, the temperature in the passenger space is detected by a temperature detection element (3) of an electric control system (14), and a vehicle air conditioning system (13) of an internal combustion engine vehicle or a pure electric vehicle is timely started by the vehicle electric control system to operate, or only the fan of the vehicle air conditioning system (13) operates, so as to regulate the temperature in the vehicle passenger space and achieve a cooling effect, thus a driver who enters the vehicle passenger space will not suffer from high temperature.
    Type: Application
    Filed: July 20, 2017
    Publication date: September 19, 2019
    Applicant: SHENG FU KANG INDUSTRIAL CO., LTD.
    Inventor: SHU-LING CHEN
  • Publication number: 20190279863
    Abstract: Semiconductor device structures having low-k features and methods of forming low-k features are described herein. Some examples relate to a surface modification layer, which may protect a low-k feature during subsequent processing. Some examples relate to gate spacers that include a low-k feature. Some examples relate to a low-k contact etch stop layer. Example methods are described for forming such features.
    Type: Application
    Filed: May 24, 2019
    Publication date: September 12, 2019
    Inventors: Wan-Yi Kao, Chung-Chi Ko, Li Chun Te, Hsiang-Wei Lin, Te-En Cheng, Wei-Ken Lin, Guan-Yao Tu, Shu Ling Liao
  • Publication number: 20190164743
    Abstract: Semiconductor device structures having dielectric features and methods of forming dielectric features are described herein. In some examples, the dielectric features are formed by an ALD process followed by a varying temperature anneal process. The dielectric features can have high density, low carbon concentration, and lower k-value. The dielectric features formed according to the present disclosure has improved resistance against etching chemistry, plasma damage, and physical bombardment in subsequent processes while maintaining a lower k-value for target capacitance efficiency.
    Type: Application
    Filed: August 10, 2018
    Publication date: May 30, 2019
    Inventors: Shu Ling Liao, Chung-Chi Ko, Wan-Yi Kao
  • Patent number: D875014
    Type: Grant
    Filed: June 28, 2018
    Date of Patent: February 11, 2020
    Inventor: Shu-Ling Chen