Patents by Inventor Shu-Ying Cho

Shu-Ying Cho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Anti-type dosage as LDD implant
    Patent number: 6734085
    Abstract: A method is provided for turning off MOS transistors through an anti-code (type) LDD implant without the need for high energy implant that causes poly damage. The method also negates any deleterious effects due to the variations in the thickness of the poly gate. The anti-code LDD implant can be performed vertically, or at a tilt angle, or in a combination of vertical and tilt angle. The method can be made part of a Flash-ROM process that is applicable to both polycide and silicide processes.
    Type: Grant
    Filed: December 2, 2002
    Date of Patent: May 11, 2004
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Shu-Ying Cho, Chien-Chung Wang, Chien-Ming Chung, Yuan-Chang Huang