Abstract: Provided are a vibration-suppressing mechanism that has excellent maintainability and can effectively control vibration of a column, and a charged particle beam device using the same.

Abstract: A thermoelectric power generation device including: a heating unit having a heat medium passage in which a heat medium flows; a cooling unit having a cooling liquid passage in which a cooling liquid flows; a thermoelectric element having the heating unit and the cooling unit so as to generate power by utilizing a temperature difference between a condensation temperature of the heat medium and a temperature of the cooling liquid; a power generation output detection unit configured to detect a power generation output of the thermoelectric element; a heat medium pressure detection unit configured to detect a pressure of the heat medium; a storage unit for storing, in advance, a relationship between a power generation output of the thermoelectric element and the pressure of the heat medium; and an abnormality detection unit configured to detect an abnormality taking place in the thermoelectric power generation device.

Abstract: In a vehicle body structure, an end portion of a first vehicle body member having a plate shape is coupled to a second vehicle body member having a plate shape. The first vehicle body member is made of a first metal and the second vehicle body member is made of a second metal. The vehicle body structure includes a third vehicle body member made of the first metal. The third vehicle body member includes an interposed portion having general portions and a convex portion. The convex portion has a weld-joint portion configured to be joined to the end portion of the first vehicle body member by welding. Each of the general portion has a swage-joint portion configured to be swaged and jointed to the second vehicle body member in a circular shape viewed from a thickness direction, and a cutout portion.

Abstract: A display device with a narrower frame can be provided. In the display device, a first layer, a second layer, and a third layer are provided to be stacked. The first layer includes a gate driver circuit and a data driver circuit, the second layer includes a demultiplexer circuit, and the third layer includes a display portion. In the display portion, pixels are arranged in a matrix, an input terminal of the demultiplexer circuit is electrically connected to the data driver circuit, and an output terminal of the demultiplexer circuit is electrically connected to some of the pixels. The gate driver circuit and the data driver circuit are provided to include a region overlapping some of the pixels. The gate driver circuit and the data driver circuit have a region where they are not strictly separated from each other and overlap each other. Five or more gate driver circuits and five or more data driver circuits can be provided.

Abstract: An object of the present disclosure is to provide a charged particle beam device that can suppress an influence to a device generated according to the preliminary exhaust. In order to achieve the object, suggested is a charged particle beam device including a vacuum sample chamber that maintains an atmosphere around a sample to be irradiated with a charged particle beam in a vacuum state; and a preliminary exhaust chamber to which a vacuum pump for vacuuming an atmosphere of the sample introduced into the vacuum sample chamber is connected, in which the vacuum sample chamber is a box-shaped body including a top plate, and a portion between the top plate and a side wall of the box-shaped body positioned below the top plate includes a portion in which the top plate and the side wall are not in contact with each other.

Abstract: A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.

Abstract: A pedal board includes an attached member and a plate. The attached member includes an attached surface on which an effect device is arranged, and at least one accommodation part formed on the attached surface as a recess capable of accommodating a wiring connected to the effect device. The plate has elasticity, formed with an opening and placed on an attached surface side of the attached member, wherein the effect device is fittable into the opening.

Abstract: A charged particle beam apparatus includes a sample stage on which a sample is mounted, a control device that controls to drive the sample stage, a linear scale that detects a position of the sample stage, laser position detection means for detecting the position of the sample stage, an optical microscope that observes the sample mounted on the sample stage, and a barrel that irradiates the sample mounted on the sample stage with an electron beam, and generates a secondary electron. Image data of a first correction sample mounted on the sample stage is acquired by the optical microscope, and position data of the sample stage is detected by the laser position detection means. The sample stage is positioned with respect to the barrel based on the image data acquired by the optical microscope and the position data of the sample stage detected by the laser position detection means.

Abstract: In order to improve the accuracy of stage movement in a charged particle beam apparatus, this stage movement control apparatus is characterized by comprising: a storage device in which overshoot amount data in which the movement distance of a stage and the overshoot amount of the stage are associated is stored; a movement target position setting unit which sets the movement target position of the stage; a stage movement amount calculation unit which calculates a stage movement amount that is an amount by which the stage moves to the movement target position in future; an overshoot estimation unit which, on the basis of the calculated stage movement amount and the overshoot amount data, estimates an overshoot amount corresponding to the stage movement amount; a movement target position correction unit which sets a corrected movement target position obtained by correcting the movement target position closer than the movement target position by the calculated overshoot amount; and a stage movement control unit w

Abstract: A semiconductor processing apparatus according to the present invention includes a main body cover that covers a main body device and a control device. The main body cover has a transfer opening for transferring a semiconductor, and the main body cover further has an intake port that generates an air flow in a horizontal direction inside the main body cover.

Abstract: A charged particle beam apparatus includes a sample stage on which a sample is mounted, a control device that controls to drive the sample stage, a linear scale that detects a position of the sample stage, laser position detection means for detecting the position of the sample stage, an optical microscope that observes the sample mounted on the sample stage, and a barrel that irradiates the sample mounted on the sample stage with an electron beam, and generates a secondary electron. Image data of a first correction sample mounted on the sample stage is acquired by the optical microscope, and position data of the sample stage is detected by the laser position detection means. The sample stage is positioned with respect to the barrel based on the image data acquired by the optical microscope and the position data of the sample stage detected by the laser position detection means.

Abstract: A stage includes a sample table on which a sample is placed, a first drive mechanism moving the sample table in a first direction; a position measurement element measuring a position in the first direction that is a driving direction of the sample table. The stage also has a scale element having a scale measurement axis that is parallel to a first measurement axis in the first direction based on the position measurement element and is different from the first measurement axis in height, and measuring the position of the sample table in the first direction. A controller calculates the orientation of the sample table by using a measurement value by the position measurement element and a measurement value by the scale element and correcting the Abbe error of the sample table.

Abstract: A thermoelectric power generation system including a plurality of thermoelectric power generation devices. Each of the thermoelectric power generation devices includes: a heating unit having a heat medium passage in which a heat medium flows; a cooling unit having a cooling liquid passage in which a cooling liquid flows; a thermoelectric element having the heating unit and the cooling unit so as to generate power by utilizing a temperature difference between a condensation temperature of the heat medium and a temperature of the cooling liquid; and a heat transfer pipe communicated with the heat medium passage to form a circulation path in which the heat medium circulates. The heat transfer pipes of the respective thermoelectric power generation devices are arranged in a single flow path in which a high temperature fluid flows. The heat medium passages of the thermoelectric power generation devices are structured to communicate with each other.

Abstract: A thermoelectric power generation device including: a heating unit having a heat medium passage in which a heat medium flows, a cooling unit having a cooling liquid passage in which a cooling liquid flows, a thermoelectric element having the heating unit on one side and the cooling unit on another side, the thermoelectric element configured to generate power by utilizing a temperature difference between a condensation temperature of the heat medium that undergoes latent heat transfer in the heat medium passage and a temperature of the cooling liquid; and the thermoelectric power generation device further including a heat medium adjusting unit configured to adjust the pressure or the temperature of the heat medium.

Abstract: An object of the present disclosure is to provide a charged particle beam device that can suppress an influence to a device generated according to the preliminary exhaust. In order to achieve the object, suggested is a charged particle beam device including a vacuum sample chamber that maintains an atmosphere around a sample to be irradiated with a charged particle beam in a vacuum state; and a preliminary exhaust chamber to which a vacuum pump for vacuuming an atmosphere of the sample introduced into the vacuum sample chamber is connected, in which the vacuum sample chamber is a box-shaped body including a top plate, and a portion between the top plate and a side wall of the box-shaped body positioned below the top plate includes a portion in which the top plate and the side wall are not in contact with each other.

Abstract: A thermoelectric generation system is provided with: a thermoelectric element; a heating unit; a cooling unit; a heat transfer unit; a pressure gauge; a first valve; and a control unit. The thermoelectric element uses a temperature difference to generate power. The heating unit has a first heat medium path through which a heat medium passes, and heats the thermoelectric element by means of the heat of the heat medium. The cooling unit cools the thermoelectric element. The heat transfer unit has a second heat medium path through which the heat medium passes and which is connected to the first heat medium path, and heats, by using a heat source, the heat medium reduced in temperature as a result of heating the thermoelectric element. The pressure gauge detects the rise or fall of a value (pressure of heat medium) in accordance with the temperature of the heat source.

Abstract: Provided is a stage apparatus that reduces thermal deformation and temperature rise in an upper table on which a sample is mounted and a charged particle beam apparatus including the stage apparatus. The stage apparatus includes: an upper stage that moves an upper table on which a sample is mounted in a first direction; a middle stage that moves a middle table on which the upper stage is mounted in a second direction orthogonal to the first direction; and a lower stage that moves a lower table on which the middle stage is mounted in a third direction orthogonal to the first direction and the second direction. The upper table and the middle table use a material having a smaller thermal expansion coefficient than in a material of the lower table, and the lower table uses a material having higher thermal conductivity than in the material of the upper table and the middle table.

Abstract: The purpose of the present invention is to provide a charged particle radiation device capable of performing appropriate vibration suppression control in accordance with a device condition. To achieve the purpose, proposed is a charged particle radiation device provided with: a sample stage for supporting a sample irradiated with a charged particle beam emitted from a charged particle source; and a vacuum chamber for placing the atmosphere in which the sample is disposed in a vacuum state.

Abstract: A thermoelectric power generation device including a thermoelectric element having a first side provided to a heating unit and a second side provided to a cooling unit, and a heat transfer pipe arranged in a passage in which a high temperature fluid flows. The heating unit and the heat transfer pipe have internal spaces communicating with each other. The internal space of the heating unit and the internal space of the heat transfer pipe form a circulation path in which a heat medium is circulated. An outlet of the heat transfer pipe from which the heat medium is discharged is provided in a position higher than an inlet of the heat transfer pipe into which the heat medium flows. The heat transfer pipe vaporizes the heat medium flowing in the circulation path by using heat of the high temperature fluid. The heating unit condenses the heat medium vaporized.