Abstract: A pedal board includes an attached member and a plate. The attached member includes an attached surface on which an effect device is arranged, and at least one accommodation part formed on the attached surface as a recess capable of accommodating a wiring connected to the effect device. The plate has elasticity, formed with an opening and placed on an attached surface side of the attached member, wherein the effect device is fittable into the opening.

Abstract: Provided is a stage device comprising a stage, a Z-axis motor that magnetically floats the stage, and an X-axis motor that drives, in one axial direction within a plane, the stage floated by the Z-axis motor, wherein: the X-axis motor is provided with an X-axis coil, a pair of X-axis magnets that face each other and that sandwich the X-axis coil in the vertical direction without contacting the X-axis coil, and an X-axis yoke that holds the pair of X-axis magnets; the Z-axis motor is provided with a Z-axis coil, a Z-axis magnet, and a Z-axis yoke that holds the Z-axis magnet; and the Z-axis motor is disposed at a position that is below the X-axis motor such that the magnetic field which has leaked from the Z-axis motor is blocked by the X-axis yoke. Thus, it is possible to suppress magnetic field leakage and to perform high-speed positioning.

Abstract: In a vehicle body structure, an end portion of a first vehicle body member having a plate shape is coupled to a second vehicle body member having a plate shape. The first vehicle body member is made of a first metal and the second vehicle body member is made of a second metal. The vehicle body structure includes a third vehicle body member made of the first metal. The third vehicle body member includes an interposed portion having general portions and a convex portion. The convex portion has a weld-joint portion configured to be joined to the end portion of the first vehicle body member by welding. Each of the general portion has a swage-joint portion configured to be swaged and jointed to the second vehicle body member in a circular shape viewed from a thickness direction, and a cutout portion.

Abstract: A semiconductor processing apparatus according to the present invention includes a main body cover that covers a main body device and a control device. The main body cover has a transfer opening for transferring a semiconductor, and the main body cover further has an intake port that generates an air flow in a horizontal direction inside the main body cover.

Abstract: A thermoelectric power generation device including a thermoelectric element having a first side provided to a heating unit and a second side provided to a cooling unit, and a heat transfer pipe arranged in a passage in which a high temperature fluid flows. The heating unit and the heat transfer pipe have internal spaces communicating with each other. The internal space of the heating unit and the internal space of the heat transfer pipe form a circulation path in which a heat medium is circulated. An outlet of the heat transfer pipe from which the heat medium is discharged is provided in a position higher than an inlet of the heat transfer pipe into which the heat medium flows. The heat transfer pipe vaporizes the heat medium flowing in the circulation path by using heat of the high temperature fluid. The heating unit condenses the heat medium vaporized.

Abstract: A thermoelectric generation system is provided with: a thermoelectric element; a heating unit; a cooling unit; a heat transfer unit; a pressure gauge; a first valve; and a control unit. The thermoelectric element uses a temperature difference to generate power. The heating unit has a first heat medium path through which a heat medium passes, and heats the thermoelectric element by means of the heat of the heat medium. The cooling unit cools the thermoelectric element. The heat transfer unit has a second heat medium path through which the heat medium passes and which is connected to the first heat medium path, and heats, by using a heat source, the heat medium reduced in temperature as a result of heating the thermoelectric element. The pressure gauge detects the rise or fall of a value (pressure of heat medium) in accordance with the temperature of the heat source.

Abstract: The present invention provides: a stage device that can suppress bending deformation of a mirror, and that can reduce the positioning error of a stage by reducing the measurement error of the position of the stage; and a charged particle beam device comprising this stage device.

Abstract: A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.

Abstract: The present invention provides a charged particle beam device (1) capable of attenuating intrinsic vibrations of an ion pump (104) which is connected to a lens barrel (101), regardless of the length of the lens barrel (101). A charged particle beam device (1) according to the present invention comprises: a lens barrel (101) for irradiating a sample (108) with a charged particle beam (106); an ion pump (104) which is connected to the lens barrel (101) and which evacuates the air inside the lens barrel (101); and a support member (117), one end of which is connected to the ion pump (104), and the other end of which is connected the lens barrel (101). The support member (117) includes a viscoelastic body (118) which is provided substantially parallel to the central axis (114) of the lens barrel (101).

Abstract: Provided are a vibration-suppressing mechanism that has excellent maintainability and can effectively control vibration of a column, and a charged particle beam device using the same.

Abstract: A thermoelectric power generation device including: a heating unit having a heat medium passage in which a heat medium flows; a cooling unit having a cooling liquid passage in which a cooling liquid flows; a thermoelectric element having the heating unit and the cooling unit so as to generate power by utilizing a temperature difference between a condensation temperature of the heat medium and a temperature of the cooling liquid; a power generation output detection unit configured to detect a power generation output of the thermoelectric element; a heat medium pressure detection unit configured to detect a pressure of the heat medium; a storage unit for storing, in advance, a relationship between a power generation output of the thermoelectric element and the pressure of the heat medium; and an abnormality detection unit configured to detect an abnormality taking place in the thermoelectric power generation device.

Abstract: In a vehicle body structure, an end portion of a first vehicle body member having a plate shape is coupled to a second vehicle body member having a plate shape. The first vehicle body member is made of a first metal and the second vehicle body member is made of a second metal. The vehicle body structure includes a third vehicle body member made of the first metal. The third vehicle body member includes an interposed portion having general portions and a convex portion. The convex portion has a weld-joint portion configured to be joined to the end portion of the first vehicle body member by welding. Each of the general portion has a swage-joint portion configured to be swaged and jointed to the second vehicle body member in a circular shape viewed from a thickness direction, and a cutout portion.

Abstract: An object of the present disclosure is to provide a charged particle beam device that can suppress an influence to a device generated according to the preliminary exhaust. In order to achieve the object, suggested is a charged particle beam device including a vacuum sample chamber that maintains an atmosphere around a sample to be irradiated with a charged particle beam in a vacuum state; and a preliminary exhaust chamber to which a vacuum pump for vacuuming an atmosphere of the sample introduced into the vacuum sample chamber is connected, in which the vacuum sample chamber is a box-shaped body including a top plate, and a portion between the top plate and a side wall of the box-shaped body positioned below the top plate includes a portion in which the top plate and the side wall are not in contact with each other.

Abstract: A pedal board includes an attached member and a plate. The attached member includes an attached surface on which an effect device is arranged, and at least one accommodation part formed on the attached surface as a recess capable of accommodating a wiring connected to the effect device. The plate has elasticity, formed with an opening and placed on an attached surface side of the attached member, wherein the effect device is fittable into the opening.

Abstract: A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.

Abstract: A charged particle beam apparatus includes a sample stage on which a sample is mounted, a control device that controls to drive the sample stage, a linear scale that detects a position of the sample stage, laser position detection means for detecting the position of the sample stage, an optical microscope that observes the sample mounted on the sample stage, and a barrel that irradiates the sample mounted on the sample stage with an electron beam, and generates a secondary electron. Image data of a first correction sample mounted on the sample stage is acquired by the optical microscope, and position data of the sample stage is detected by the laser position detection means. The sample stage is positioned with respect to the barrel based on the image data acquired by the optical microscope and the position data of the sample stage detected by the laser position detection means.