Abstract: There is provided an apparatus as well as a method for polishing, observing, and additionally polishing a sample in a vacuum with a charged particle beam apparatus furnished with no other apparatus. The charged particle beam apparatus has a vacuum chamber equipped with a liquid bath containing an ion liquid and a supersonic vibration means. With the ion liquid kept in contact with a polishing target area of the sample, supersonic vibration is propagated in the ion liquid to polish the sample. Because the charged particle beam apparatus permits polishing, observation, and additional polishing of the sample in a vacuum without being furnished with any additional apparatus, throughput is improved and the effects of the atmosphere on the sample are prevented.

Abstract: There is provided an RFID tag, which includes: a first substrate having flexibility and configured to include an antenna provided on a first surface of the first substrate; a second substrate; an IC chip mounted on a first surface of the second substrate; an anisotropic conductive rubber configured to contact the first substrate to the second substrate with the IC chip facing the first surface of the first substrate and to contact a terminal of the IC chip to the antenna; and an exterior rubber configured to cover the first substrate, the second substrate, and the IC chip.

Abstract: An objective optical system for information recording/reproducing, at least one of optical surfaces of the objective optical system comprising a diffraction surface including a first region contributing to converging first, second and third beams and including a diffraction structure formed such that use diffraction orders for the first, second and third beams are 1st-orders and a condition 0.03<(?B11??1)/?1<0.40 is satisfied; a second region contributing to converging only the first and second beams and including a diffraction structure formed such that the use diffraction orders are 1st-orders and a condition: ?0.35<(?B12??B11)/?1<0.35 is satisfied; and a third region contributing to converging only the first beam and including a diffraction structure formed such that the use diffraction order for the first beam is an odd order and a condition: ?0.23<m13 ((?B13??1)/?1)<0.23 is satisfied.

Abstract: An objective optical system for information recording/reproducing, at least one of optical surfaces of the objective optical system comprising a diffraction surface including a first region contributing to converging first, second and third beams and including a diffraction structure formed such that use diffraction orders for the first, second and third beams are 1st-orders and a condition 0.03<(?B11??1)/?1<0.40 is satisfied; a second region contributing to converging only the first and second beams and including a diffraction structure formed such that the use diffraction orders are 1st-orders and a condition: ?0.35<(?B12??B11)/?1<0.35 is satisfied; and a third region contributing to converging only the first beam and including a diffraction structure formed such that the use diffraction order for the first beam is an odd order and a condition: ?0.23<m13 ((?B13??1)/?1)<0.23 is satisfied.

Abstract: A method for adjusting a tilt angle of an objective lens with respect to one of a multilayer optical disc having a plurality of recording layers and an optical axis of an optical information recording/reproducing apparatus, wherein a use wavelength ? and a numerical aperture NA are defined by conditions: 390<?<420 and 0.75<NA<0.90. The method includes determining the tilt angle of the objective lens such that a spot quality defined through a predetermined transparent parallel flat plate matches a predetermined standard, and tilting the objective lens to have the determined tilt angle. When t1 represents a thickness of the predetermined transparent parallel flat plate and t2 represents a design protective layer thickness at which a coma caused when off-axis light is incident on the objective lens becomes smallest, t1 and t2 satisfy: ?0.015<t1?t2<0.005.

Abstract: An objective optical system for information recording/reproducing, at least one of optical surfaces of the objective optical system comprising a diffraction surface including a first region contributing to converging first, second and third beams and including a diffraction structure formed such that use diffraction orders for the first, second and third beams are 1st-orders and a condition 0.03<(?B11??1)/?1<0.40 is satisfied; a second region contributing to converging only the first and second beams and including a diffraction structure formed such that the use diffraction orders are 1st-orders and a condition: ?0.35<(?B12??B11)/?1<0.35 is satisfied; and a third region contributing to converging only the first beam and including a diffraction structure formed such that the use diffraction order for the first beam is an odd order and a condition: ?0.23<m13×((?B13??1)/?1)<0.23 is satisfied.

Abstract: An objective optical system for an optical information recording/reproducing apparatus, at least one surface of the objective optical system being configured to be a phase shift surface having a phase shift structure, wherein: the phase shift surface has a first area contributing to converging first, second and third light beams onto recording surfaces of first, second and third optical discs, respectively; in the first area, the phase shift surface has at least two types of phase shift structures including a first phase shift structure having first steps and a second phase shift structure having second steps; the phase shift surface has a plurality of combinations of annular zones which satisfy a condition: 0.95<P1/P2<1.05??(1), and the phase shift surface satisfies a following condition: ?3.00<??1/??2<?0.10??(2).

Abstract: An optical information recording/reproducing apparatus for an optical disc using a light beam having a wavelength of ? including: an objective lens that converges the light beam onto a recording surface of the optical disc and satisfies a condition: 0.48 < d · ( n - 1 ) f 2 < 0.75 ( 1 ) where f represents a focal length (unit: mm) of the objective lens with respect to the wavelength ?, d represents a thickness (unit: mm) of the objective lens along an optical axis of the objective lens, and n represents a refractive index with respect to the wavelength ?; a photoreceptor to receive the beam reflected from the optical disc; a detector to detect quality of a signal, and an objective lens driving unit to tilt the objective lens in a direction to improve the quality of the signal based on a result of detection by the detector.

Abstract: A rotation detector includes a first distance sensor disposed to face a rotating body with a gear portion formed non-parallel to a rotation axis for continuously measuring a distance from the gear portion during rotation of the rotating body, a second distance sensor disposed at a position different from the first distance sensor in a direction of the rotation axis for continuously measuring a distance from the gear portion during rotation of the rotating body, and an axis shift detecting portion for detecting an axis shift of the rotation axis based on a variation in the distance measured by at least one of the first and second distance sensors.

Abstract: A multichip module includes a package substrate, a first semiconductor device, a second semiconductor device and a conductive bump. The first semiconductor device is flip-chip bonded to the package substrate. The first semiconductor device includes a first chip pad on a surface thereof. The second semiconductor device is mounted on the first semiconductor device. The second semiconductor device includes a second chip pad facing the first chip pad. The conductive bump connects the first chip pad to the second chip pad. The conductive bump includes a first metallic body that has a first diffusion rate and a second metallic body that has a second diffusion rate lower than the first diffusion rate.

Abstract: A rotational angle detector provided with a circular rotary plate integrally rotatable with a rotor of a motor and including a circumferential surface having marks, which are spaced apart by different angular intervals in a circumferential direction. A rotational angle detection unit is arranged along the circumferential direction of the rotary plate to detect a rotational angle of each mark, rotated together with the rotary plate, in a predetermined detection zone. The rotational angle detector determines, when adjacent marks are located in the detection zone, angular intervals between the adjacent marks based on the rotational angle of each mark, specifies a mark that is located in the detection zone based on the determined angular intervals, and detects the rotational angle of the rotor based on the rotational angle of the specified mark rotating in the detection zone.

Abstract: An objective optical system for an optical information recording/reproducing apparatus, at least one surface of the objective optical system being configured to be a phase shift surface having a phase shift structure, wherein: the phase shift surface has a first area contributing to converging first, second and third light beams onto recording surfaces of first, second and third optical discs, respectively; in the first area, the phase shift surface has at least two types of phase shift structures including a first phase shift structure having first steps and a second phase shift structure having second steps; the phase shift surface has a plurality of combinations of annular zones which satisfy a condition: 0.95<P1/P2<1.05??(1), and the phase shift surface satisfies a following condition: ?3.00<??1/??2<?0.10??(2).

Abstract: An RFID tag includes an inlet on which an antenna pattern serving as an antenna for communication and an IC chip electrically connected to the antenna pattern are mounted. The RFID tag also includes an exterior body that encloses the inlet from outside and a hollow space that is formed by the inlet and the exterior body and that is filled with gas or a gel material.

Abstract: There is provided an objective lens for information recording/reproducing for three types of optical discs, which includes a first area contributing to converging a third light beam onto a record surface of a third optical disc. The first area includes a phase shift structure having refractive surface zones concentrically formed about a predetermined axis. The phase shift structure includes first and second step groups. The first step group is configured such that an optical path length difference ?OPD1 (nm) given by each step of the first step group to a first light beam satisfies a condition: 2N1+1.10<|?OPD1/?1|<2N1+1.40, where N1 is an integer or zero, and the second step group is configured such that an optical path length difference ?OPD2 (nm) given by each step of the second step group to the first light beam satisfies a condition: 2N2?0.10<|?OPD2/?1|<2N2+0.10, where N2 is an integer.

Abstract: An objective lens for an optical information recording/reproducing apparatus, at least one of optical surfaces of the objective lens comprising a diffraction surface having a diffraction structure defined by an optical path difference function, and wherein: the diffraction surface has a first region contributing to converging first and second light beams and having a diffraction structure configured such that diffraction orders at which the diffraction efficiencies are maximized for the first and second light beams are 1st order; the diffraction surface has a second region located outside the first region, and the second region is configured to contribute to converging the first light beam and not to contribute to convergence of the second light beam; and the objective lens satisfies a condition: 35<P2×f2<200 ??(1).

Abstract: An electronic device includes an interposer, a first chip being mounted on a first surface of the interposer, the first chip having a first surface facing the first surface of the interposer and a second surface opposite to the first surface of the first chip, a second chip being mounted on a second surface of the interposer opposite to the first surface of the interposer, the second chip having a first surface facing the second surface of the interposer and a second surface opposite to the first surface of the second chip, a first metal plate being connected to the second surface of the first chip, a second metal surface being provided over the second surface of the second chip, and a via penetrating through the interposer and connected to the first metal plate and the second metal plate.

Abstract: There is provided an optical disc drive, which includes a light source emitting a light beam, a beam dividing element that divides the light beam into main and sub-beams, an objective lens, an astigmatism producing unit that gives astigmatism to the main and sub-beams, a signal generation unit that has sensors for the beams and generates a focus error signal based on output signals of the sensors; and an optical element that has a function of adjusting intensity distribution of the main beam such that the main beam incident on the optical disc has a predetermined intensity distribution where a maximum intensity level is positioned at a predetermined height within a range of 70% of a pupil diameter, the predetermined height is not equal to an optical axis, and an intensity of the main beam decreases gradually from the predetermined height to a peripheral portion of the pupil.

Abstract: There is provided an objective lens for an optical pick-up. The objective lens is formed to be a single-element plastic lens having a first surface and a second surface. The first surface is configured to have, within an effective diameter, an inflection point at which a second derivative of a sag of the first surface takes a value of 0. Further, the objective lens having a numerical aperture larger than or equal to 0.75.

Abstract: An objective optical system for an optical information recording/reproducing apparatus for recording/reproducing for first, second and third optical discs by selectively using three types of substantially collimated light beams including first, second and third light beams respectively having first, second and third wavelengths, wherein at least one of optical surfaces of the objective optical system comprises a diffraction surface having a diffraction structure, the diffraction surface includes a first region defined by first and second optical path difference functions, a second region defined by at least one type of optical path difference function, and a third region defined by at least one type of optical path difference function, the first region satisfies a condition: ?0.15<f1/fD11<?0.03??(1), where fD11=?1/(2×P112×m11×?), and the diffraction surface satisfies a condition: ?0.05<(?13(h3)??13(h2))/(m13×f1)<?0.005??(2).

Abstract: According to an aspect of the invention, an electronic part includes a substrate having a first planar surface, a first bump affixed to the first planar surface of the substrate, a second bump affixed to the first planar surface of the substrate a predetermined distance from the first bump, a MEMS chip including a element, the MEMS chip coupled to the first bump and the second bump, the MEMS chip distanced from the first planar surface, an adhesive region bonding with the first bump, the substrate and the MEMS chip.