Patents by Inventor Shun Liao

Shun Liao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210193667
    Abstract: A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.0×10?4 ?cm to 1.0×104 ?cm or a sheet resistance in a range from 1.0×102?/? to 1.0×1010?/?.
    Type: Application
    Filed: December 28, 2020
    Publication date: June 24, 2021
    Inventors: Jenn-Gwo HWU, Samuel C. PAN, Chien-Shun LIAO, Kuan-Hao TSENG
  • Publication number: 20210119026
    Abstract: Charge storage and sensing devices having a tunnel diode operable to sense charges stored in a charge storage structure are provided. In some embodiments, a device includes a substrate, a charge storage device on the substrate, and tunnel diode on the substrate adjacent to the charge storage device. The tunnel diode includes a tunnel diode dielectric layer on the substrate, and a tunnel diode electrode on the tunnel diode dielectric layer. A substrate electrode is disposed on the doped region of the substrate, and the tunnel diode electrode is positioned between the charge storage device and the substrate electrode.
    Type: Application
    Filed: December 3, 2020
    Publication date: April 22, 2021
    Inventors: Jenn-Gwo Hwu, Chien-Shun Liao, Wei-Chih Kao
  • Publication number: 20210119025
    Abstract: Gated MIS tunnel diode devices having a controllable negative transconductance behavior are provided. In some embodiments, a device includes a substrate, a tunnel diode dielectric layer on a surface of the substrate, and a gate dielectric layer on the surface of the substrate and adjacent to the tunnel diode dielectric layer. A tunnel diode electrode is disposed on the tunnel diode dielectric layer, and a gate electrode is disposed on the gate dielectric layer. A substrate electrode is disposed on the surface of the substrate, and the tunnel diode electrode is positioned between the gate electrode and the substrate electrode.
    Type: Application
    Filed: December 3, 2020
    Publication date: April 22, 2021
    Inventors: Jenn-Gwo Hwu, Chien-Shun Liao
  • Patent number: 10971602
    Abstract: An embodiment is a method of semiconductor processing. The method includes depositing a high-k gate dielectric layer over a semiconductor fin. A barrier layer is deposited over the high-k gate dielectric layer. A silicon passivation layer is deposited over the barrier layer. A nitrogen treatment is performed on the silicon passivation layer. A capping layer is deposited over the silicon passivation layer. The capping layer is annealed.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: April 6, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chien-Shun Liao, Huai-Tei Yang, Chun Chieh Wang, Yueh-Ching Pai, Chun-I Wu
  • Patent number: 10879249
    Abstract: A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.0×10?4 ?cm to 1.0×104 ?cm or a sheet resistance in a range from 1.0×102?/? to 1.0×1010?/?.
    Type: Grant
    Filed: August 12, 2019
    Date of Patent: December 29, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jenn-Gwo Hwu, Samuel C. Pan, Chien-Shun Liao, Kuan-Hao Tseng
  • Patent number: 10868157
    Abstract: Gated MIS tunnel diode devices having a controllable negative transconductance behavior are provided. In some embodiments, a device includes a substrate, a tunnel diode dielectric layer on a surface of the substrate, and a gate dielectric layer on the surface of the substrate and adjacent to the tunnel diode dielectric layer. A tunnel diode electrode is disposed on the tunnel diode dielectric layer, and a gate electrode is disposed on the gate dielectric layer. A substrate electrode is disposed on the surface of the substrate, and the tunnel diode electrode is positioned between the gate electrode and the substrate electrode.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: December 15, 2020
    Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., National Taiwan University
    Inventors: Jenn-Gwo Hwu, Chien-Shun Liao
  • Patent number: 10868158
    Abstract: Charge storage and sensing devices having a tunnel diode operable to sense charges stored in a charge storage structure are provided. In some embodiments, a device includes a substrate, a charge storage device on the substrate, and tunnel diode on the substrate adjacent to the charge storage device. The tunnel diode includes a tunnel diode dielectric layer on the substrate, and a tunnel diode electrode on the tunnel diode dielectric layer. A substrate electrode is disposed on the doped region of the substrate, and the tunnel diode electrode is positioned between the charge storage device and the substrate electrode.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: December 15, 2020
    Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., National Taiwan University
    Inventors: Jenn-Gwo Hwu, Chien-Shun Liao, Wei-Chih Kao
  • Publication number: 20200251574
    Abstract: An embodiment is a method of semiconductor processing. The method includes depositing a high-k gate dielectric layer over a semiconductor fin. A barrier layer is deposited over the high-k gate dielectric layer. A silicon passivation layer is deposited over the barrier layer. A nitrogen treatment is performed on the silicon passivation layer. A capping layer is deposited over the silicon passivation layer. The capping layer is annealed.
    Type: Application
    Filed: April 20, 2020
    Publication date: August 6, 2020
    Inventors: Chien-Shun Liao, Huai-Tei Yang, Chun-Chieh Wang, Yueh-Ching Pai, Chun-I Wu
  • Publication number: 20200243672
    Abstract: Charge storage and sensing devices having a tunnel diode operable to sense charges stored in a charge storage structure are provided. In some embodiments, a device includes a substrate, a charge storage device on the substrate, and tunnel diode on the substrate adjacent to the charge storage device. The tunnel diode includes a tunnel diode dielectric layer on the substrate, and a tunnel diode electrode on the tunnel diode dielectric layer. A substrate electrode is disposed on the doped region of the substrate, and the tunnel diode electrode is positioned between the charge storage device and the substrate electrode.
    Type: Application
    Filed: April 9, 2020
    Publication date: July 30, 2020
    Inventors: Jenn-Gwo Hwu, Chien-Shun Liao, Wei-Chih Kao
  • Patent number: 10651300
    Abstract: Charge storage and sensing devices having a tunnel diode operable to sense charges stored in a charge storage structure are provided. In some embodiments, a device includes a substrate, a charge storage device on the substrate, and tunnel diode on the substrate adjacent to the charge storage device. The tunnel diode includes a tunnel diode dielectric layer on the substrate, and a tunnel diode electrode on the tunnel diode dielectric layer. A substrate electrode is disposed on the doped region of the substrate, and the tunnel diode electrode is positioned between the charge storage device and the substrate electrode.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: May 12, 2020
    Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., National Taiwan University
    Inventors: Jenn-Gwo Hwu, Chien-Shun Liao, Wei-Chih Kao
  • Patent number: 10629700
    Abstract: An embodiment is a method of semiconductor processing. The method includes depositing a high-k gate dielectric layer over a semiconductor fin. A barrier layer is deposited over the high-k gate dielectric layer. A silicon passivation layer is deposited over the barrier layer. A nitrogen treatment is performed on the silicon passivation layer. A capping layer is deposited over the silicon passivation layer. The capping layer is annealed.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: April 21, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chien-Shun Liao, Huai-Tei Yang, Wang Chun-Chieh, Yueh-Ching Pai, Chun-I Wu
  • Publication number: 20200105532
    Abstract: An embodiment is a method of semiconductor processing. The method includes depositing a high-k gate dielectric layer over a semiconductor fin. A barrier layer is deposited over the high-k gate dielectric layer. A silicon passivation layer is deposited over the barrier layer. A nitrogen treatment is performed on the silicon passivation layer. A capping layer is deposited over the silicon passivation layer. The capping layer is annealed.
    Type: Application
    Filed: September 28, 2018
    Publication date: April 2, 2020
    Inventors: Chien-Shun Liao, Huai-Tei Yang, Chun-Chieh Wang, Yueh-Ching Pai, Chun-I Wu
  • Publication number: 20200098901
    Abstract: Charge storage and sensing devices having a tunnel diode operable to sense charges stored in a charge storage structure are provided. In some embodiments, a device includes a substrate, a charge storage device on the substrate, and tunnel diode on the substrate adjacent to the charge storage device. The tunnel diode includes a tunnel diode dielectric layer on the substrate, and a tunnel diode electrode on the tunnel diode dielectric layer. A substrate electrode is disposed on the doped region of the substrate, and the tunnel diode electrode is positioned between the charge storage device and the substrate electrode.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Jenn-Gwo Hwu, Chien-Shun Liao, Wei-Chih Kao
  • Publication number: 20200098900
    Abstract: Gated MIS tunnel diode devices having a controllable negative transconductance behavior are provided. In some embodiments, a device includes a substrate, a tunnel diode dielectric layer on a surface of the substrate, and a gate dielectric layer on the surface of the substrate and adjacent to the tunnel diode dielectric layer. A tunnel diode electrode is disposed on the tunnel diode dielectric layer, and a gate electrode is disposed on the gate dielectric layer. A substrate electrode is disposed on the surface of the substrate, and the tunnel diode electrode is positioned between the gate electrode and the substrate electrode.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 26, 2020
    Inventors: Jenn-Gwo Hwu, Chien-Shun Liao
  • Publication number: 20190363089
    Abstract: A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.0×10?4 ?cm to 1.0×104 ?cm or a sheet resistance in a range from 1.0×102 ?/? to 1.0×1010 ?/?.
    Type: Application
    Filed: August 12, 2019
    Publication date: November 28, 2019
    Inventors: Jenn-Gwo HWU, Samuel C. PAN, Chien-Shun LIAO, Kuan-Hao TSENG
  • Patent number: 10381353
    Abstract: A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.0×10?4 ?cm to 1.0×104 ?cm or a sheet resistance in a range from 1.0×102?/? to 1.0×1010?/?.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: August 13, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jenn-Gwo Hwu, Samuel C. Pan, Chien-Shun Liao, Kuan-Hao Tseng
  • Publication number: 20180308851
    Abstract: A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.0×10?4 ?cm to 1.0×104 ?cm or a sheet resistance in a range from 1.0×102?/? to 1.0×1010?/?.
    Type: Application
    Filed: September 28, 2017
    Publication date: October 25, 2018
    Inventors: Jenn-Gwo HWU, Samuel C. PAN, Chien-Shun LIAO, Kuan-Hao TSENG
  • Publication number: 20180115398
    Abstract: A coordinated multipoint (CoMP) transmission and reception method and a CoMP transmission and reception base station are provided. The CoMP transmission and reception method include the following steps. Forming a plurality of base stations into a CoMP set. Calculating a corresponding Doppler shift value between each of the base stations in the CoMP set and a mobile device respectively. Performing, by each of the base stations in the CoMP set, a Doppler compensation on a reference signal according to the corresponding Doppler shift value to generate a corresponding Doppler compensated reference signal, determining whether a corresponding carrier frequency offset (CFO) value of the corresponding Doppler compensated reference signal is converged, and if all of the CFO values are converged, then each of the base stations in the CoMP set performs a frequency correction according to the corresponding CFO value.
    Type: Application
    Filed: December 20, 2016
    Publication date: April 26, 2018
    Inventors: Hsuan-Jung SU, Wei-Shun LIAO, Yu-Cheng LIN, Hsien-Wen CHANG
  • Patent number: 9813122
    Abstract: A method of coordination multi-point transmission is provided, which let a plurality of base stations perform communication with at least one access point of a vehicle. A first coordination multi-point set corresponding to a first position of the vehicle is obtained by looking up a database according to the first position. The first coordination multi-point set is a set of a plurality of first coordinated base stations among the plurality of base stations. A first beamforming weighted matrix correspondingly using by each of the plurality of first coordinated base stations is obtained by looking up the database. A coordination multi-point transmission is performed with the at least one access point of the vehicle by the each of the plurality of first coordinated base stations using the corresponding first beamforming weighted matrix of the each of the plurality of first coordinated base stations.
    Type: Grant
    Filed: March 2, 2016
    Date of Patent: November 7, 2017
    Assignee: Industrial Technology Research Institute
    Inventors: Hsuan-Jung Su, Wei-Shun Liao, Yu-Cheng Lin, Jian-Ming Liao, Hsien-Wen Chang
  • Patent number: 9748379
    Abstract: The present disclosure relates to a tunnel FET device with a steep sub-threshold slope, and a corresponding method of formation. In some embodiments, the tunnel FET device has a dielectric layer arranged over a substrate. A conductive gate electrode and a conductive drain electrode are arranged over the dielectric layer. A conductive source electrode contacts the substrate at a first position located along a first side of the conductive gate electrode. The conductive drain electrode is arranged at a second position located along the first side of the conductive gate electrode. By arranging the conductive gate electrode over the dielectric layer at a position laterally offset from the conductive drain electrode, the conductive gate electrode is able to generate an electric field that controls tunneling of minority carriers, which can change the effective barrier height of the tunnel barrier, and thereby improving a sub-threshold slope of the tunnel FET device.
    Type: Grant
    Filed: August 26, 2015
    Date of Patent: August 29, 2017
    Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., National Taiwan University
    Inventors: Jenn-Gwo Hwu, Samuel C. Pan, Chien-Shun Liao