Abstract: An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.

Abstract: An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.

Abstract: An actuator includes a vibration plate area displaced by an electrostatic force, and electrodes facing each other via a first space in the vibration plate area The first space is formed by a sacrificial layer process using a sacrificial layer removing hole. A barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.

Abstract: An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.

Abstract: An ink-jet head includes a nozzle which discharges an ink drop to a recording medium. A discharging chamber communicates with the nozzle and contains ink therein. An oscillation plate is provided on a first substrate of silicon, the oscillation plate defining a bottom surface of the discharging chamber, the oscillation plate pressurizing the ink in the discharging chamber when the oscillation plate is actuated. An electrode is provided on a second substrate of silicon, the electrode facing the oscillation plate via a gap between the oscillation plate and the electrode. In the ink-jet head, at least one of a first bonding area of the first substrate and a second bonding area of the second substrate is provided with a silicon oxide film, and the silicon oxide film contains boron on a surface thereof where the first substrate and the second substrate are bonded together.

Abstract: An electrostatic ink jet head includes nozzles, ink passages, a diaphragm that forms a part of the ink passages, individual electrodes that face the diaphragm. A driving voltage is applied between a common substrate formed on the diaphragm and the individual electrodes, thereby generating electrostatic force. The diaphragm is deformed by the electrostatic force. As a result, the ink in the ink passages are pressurized, so that ink droplets are discharged through the nozzles. Spacers are employed to form a gap between the diaphragm and each individual electrode. At least one of the spacers is made of the same material as the individual electrodes, so that the individual electrodes have high voltage resistance. Furthermore, voltage of both polarities can be used, and gap formation can be carried out with high precision through simpler production steps.

Abstract: An ink jet head includes a nozzle plate which has a nozzle hole. An ink-chamber substrate is provided on a back of the nozzle plate and includes an integrally-formed oscillation plate and a pressure chamber. The pressure chamber contains ink and is arranged to communicate with the nozzle hole. The oscillation plate defines a bottom of the pressure chamber. A counter-electrode substrate has an electrically-isolated counter electrode. The counter electrode is arranged to face the oscillation plate via a gap between the oscillation plate and the counter electrode. A dielectric layer is interposed between the ink-chamber substrate and the counter-electrode substrate. The dielectric layer is arranged to define the gap between the oscillation plate and the counter electrode. A pad metal piece is provided on a back of the counter electrode.

Abstract: An ink-jet head includes a nozzle which discharges an ink drop to a recording medium. A discharging chamber communicates with the nozzle and contains ink therein. An oscillation plate is provided on a first substrate of silicon, the oscillation plate defining a bottom surface of the discharging chamber, the oscillation plate pressurizing the ink in the discharging chamber when the oscillation plate is actuated. An electrode is provided on a second substrate of silicon, the electrode facing the oscillation plate via a gap between the oscillation plate and the electrode. In the ink-jet head, at least one of a first bonding area of the first substrate and a second bonding area of the second substrate is provided with a silicon oxide film, and the silicon oxide film contains boron on a surface thereof where the first substrate and the second substrate are bonded together.