Patents by Inventor Shyue Seng Tan
Shyue Seng Tan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240136395Abstract: Structures for a junction field-effect transistor and methods of forming a structure for a junction field-effect transistor. The structure comprises a first gate on a top surface of a semiconductor substrate, a second gate beneath the top surface of the semiconductor substrate, and a channel region in the semiconductor substrate. The first gate is positioned between a source and a drain, and the channel region positioned between the first gate and the second gate.Type: ApplicationFiled: October 19, 2022Publication date: April 25, 2024Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik
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Publication number: 20240114682Abstract: The present disclosure relates to a structure which includes a semiconductor substrate, a recessed shallow trench isolation structure within the semiconductor substrate, and a gate structure provided at least partially over the recessed shallow isolation structure.Type: ApplicationFiled: October 3, 2022Publication date: April 4, 2024Inventors: Xinshu CAI, Shyue Seng TAN, Eng Huat TOH
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Publication number: 20240088173Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a single-photon avalanche diode with isolated junctions and methods of manufacture. The structure includes a first p-n junction in a semiconductor material; and a second p-n junction in a second semiconductor material isolated from the first p-n junction by a buried insulator layer.Type: ApplicationFiled: September 13, 2022Publication date: March 14, 2024Inventors: Xinshu CAI, Shyue Seng TAN, Eng Huat TOH, Kiok Boone Elgin QUEK
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Patent number: 11901445Abstract: A transistor may include a buffer layer, source and drain contacts on the buffer layer, a barrier layer on the buffer layer, a conductive member on the barrier layer, a dielectric stack, and a gate metal. The barrier layer may be between the source and drain contacts. The conductive member may include a p-doped III-V compound. The dielectric stack may be on the barrier layer and on the conductive member. The dielectric stack may include a first dielectric layer and a second dielectric layer on the first dielectric layer. First and second trenches may extend through the dielectric stack to the conductive member and to the first dielectric layer, respectively. The gate metal may be on the dielectric stack, and may contact the conductive member through the first trench and may contact the first dielectric layer through the second trench.Type: GrantFiled: November 13, 2020Date of Patent: February 13, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Jiacheng Lei, James Jerry Joseph, Lawrence Selvaraj Susai, Shyue Seng Tan
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Patent number: 11901425Abstract: A non-volatile memory device is provided. The non-volatile memory device includes a substrate having an active region, a source region, a drain region, and a floating gate. The source region and the drain region may be arranged in the active region, the drain region may be arranged adjacent to the source region. The source region and the drain region may define a channel region therebetween. The floating gate may be arranged over the active region, and may include a first section over the channel region, a plurality of second sections over the drain region, and a connecting section arranged between the first section and the plurality of second sections.Type: GrantFiled: August 31, 2021Date of Patent: February 13, 2024Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Shyue Seng Tan, Xinshu Cai, Eng Huat Toh
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Publication number: 20240047347Abstract: The present disclosure relates to semiconductor structures and, more particularly, to e-fuse structures and methods of manufacture. The structure includes: a silicided fuse structure which includes a narrow portion and wider, end portions; dummy structures on opposing sides of the silicided fuse structure; and sidewall spacer material separating the dummy structures from the silicided fuse structure.Type: ApplicationFiled: August 2, 2022Publication date: February 8, 2024Inventors: XINSHU CAI, SHYUE SENG TAN, ENG HUAT TOH
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Publication number: 20240006517Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises silicon based material; an intrinsic base; and an extrinsic base overlapping the emitter region and the intrinsic base; an extrinsic base overlapping the emitter region and the intrinsic base; and an inverted âTâ shaped spacer which separates the emitter region from the extrinsic base and the collector region from the emitter region.Type: ApplicationFiled: September 19, 2023Publication date: January 4, 2024Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
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Patent number: 11855196Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises silicon based material; an intrinsic base; and an extrinsic base overlapping the emitter region and the intrinsic base; an extrinsic base overlapping the emitter region and the intrinsic base; and an inverted âTâ shaped spacer which separates the emitter region from the extrinsic base and the collector region from the emitter region.Type: GrantFiled: October 25, 2021Date of Patent: December 26, 2023Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
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Patent number: 11855195Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises mono-crystal silicon based material; an intrinsic base under the emitter region and comprising semiconductor material; and an extrinsic base surrounding the emitter and over the intrinsic base.Type: GrantFiled: October 25, 2021Date of Patent: December 26, 2023Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
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Patent number: 11844292Abstract: The disclosed subject matter relates generally to structures, memory devices and a method of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices with an electrode having tapered sides. The present disclosure provides a memory device including a first electrode having a tapered shape and including a tapered side, a top surface, and a bottom surface, in which the bottom surface has a larger surface area than the top surface, a resistive layer on and conforming to at least the tapered side of the first electrode, and a second electrode laterally adjacent to the tapered side of the first electrode, the second electrode including a top surface and a side surface abutting the resistive layer, in which the side surface forms an acute angle with the top surface.Type: GrantFiled: June 24, 2021Date of Patent: December 12, 2023Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
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Patent number: 11839166Abstract: A resistive random access memory (RRAM) device may be provided, including: a base layer, a vertical electrode stack arranged over the base layer, where the vertical electrode stack may include alternating mask elements and first electrodes, and each first electrode may include an extended portion extending beyond at least one side surface of at least one mask element adjoining the first electrode, a switching layer arranged along the extended portion of each first electrode and along the at least one side surface of the at least one mask element adjoining the first electrode, and a second electrode including a surface in contact with the switching layer. The RRAM device may have a 3D structure.Type: GrantFiled: April 6, 2020Date of Patent: December 5, 2023Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Xinshu Cai, Shyue Seng Tan, Eng Huat Toh
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Patent number: 11823889Abstract: A sensor may be provided, including a substrate having a first semiconductor layer, a second semiconductor layer, and a buried insulator layer arranged between the first semiconductor layer and the second semiconductor layer. The sensor may further include a photodiode arranged in the first semiconductor layer; and a quenching resistive element electrically connected in series with the photodiode. The quenching resistive element is arranged in the second semiconductor layer, and the quenching resistive element is arranged over the photodiode but separated from the photodiode by the buried insulator layer.Type: GrantFiled: May 11, 2022Date of Patent: November 21, 2023Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Lanxiang Wang, Shyue Seng Tan, Eng Huat Toh
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Publication number: 20230361236Abstract: A structure includes a photodetector including alternating p-type semiconductor layers and n-type semiconductor layers in contact with each other in a stack. Each semiconductor layer includes an extension extending beyond an end of an adjacent semiconductor layer of the alternating p-type semiconductor layers and n-type semiconductor layers. The extensions provide an area for operative coupling to a contact. The extensions can be arranged in a cascading, staircase arrangement, or may extend from n-type semiconductor layers on one side of the stack and from p-type semiconductor layers on another side of the stack. The photodetector can be on a substrate in a first region, and a complementary metal-oxide semiconductor (CMOS) device may be on the substrate on a second region separated from the first region by a trench isolation. The photodetector is capable of detecting and converting near-infrared (NIR) light, e.g., having wavelengths of greater than 0.75 micrometers.Type: ApplicationFiled: May 5, 2022Publication date: November 9, 2023Inventors: Xinshu Cai, Yongshun Sun, Kiok Boone Elgin Quek, Khee Yong Lim, Shyue Seng Tan, Eng Huat Toh, Thanh Hoa Phung, Cancan Wu
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Patent number: 11810982Abstract: A nonvolatile memory device is provided. The nonvolatile memory device comprises an n-doped source, an n-doped drain, and a doped region in a first p-well in a substrate. A floating gate may be arranged over the first p-well, whereby the doped region may be arranged at least partially under the floating gate.Type: GrantFiled: August 2, 2021Date of Patent: November 7, 2023Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Yongshun Sun, Shyue Seng Tan, Eng Huat Toh, Xinshu Cai
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Patent number: 11793004Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices. The present disclosure provides a memory device including a first electrode, a dielectric cap above the first electrode, a second electrode laterally adjacent to the first electrode, in which an upper surface of the second electrode is substantially coplanar with an upper surface of the dielectric cap, and a resistive layer between the first electrode and the second electrode. An edge of the first electrode is electrically coupled to an edge of the second electrode by at least the resistive layer.Type: GrantFiled: August 16, 2020Date of Patent: October 17, 2023Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
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Publication number: 20230320240Abstract: According to an aspect of the present disclosure, a memory device is provided. The memory device includes a dielectric layer having a top surface, a first electrode having a bottom surface, a switching layer, and a second electrode. The bottom surface of the first electrode is arranged below the top surface of the dielectric layer. The first electrode includes a first corner having a first acute angle and a second corner having a second acute angle arranged over the top surface of the dielectric layer. The switching layer is arranged over the first electrode. The second electrode is arranged over the switching layer, and at least the first corner of the first electrode extends into the second electrode.Type: ApplicationFiled: March 23, 2022Publication date: October 5, 2023Inventors: XINSHU CAI, SHYUE SENG TAN, ENG HUAT TOH
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Patent number: 11774402Abstract: According to various embodiments, there is provided a sensor device that includes: a substrate and two semiconductor structures. Each semiconductor structure includes a source region and a drain region at least partially disposed within the substrate, a channel region between the source region and the drain region, and a gate region. A first semiconductor structure of the two semiconductor structures further includes a sensing element electrically connected to the first gate structure. The sensing element is configured to receive a solution. The drain regions of the two semiconductor structures are electrically coupled. The source regions of the two semiconductor structures are also electrically coupled. A mobility of charge carriers of the channel region of a second semiconductor structure of the two semiconductor structures is lower than a mobility of charge carriers of the channel region of the first semiconductor structure.Type: GrantFiled: March 21, 2022Date of Patent: October 3, 2023Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Lanxiang Wang, Bin Liu, Eng Huat Toh, Shyue Seng Tan, Kiok Boone Elgin Quek
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Patent number: 11744166Abstract: Structures for a resistive memory element and methods of forming a structure for a resistive memory element. The resistive memory element has a first electrode, a second electrode, a third electrode, and a switching layer. The first electrode is coupled to the switching layer, the second electrode is coupled to a side surface of the switching layer, and the third electrode is coupled to the switching layer.Type: GrantFiled: August 31, 2020Date of Patent: August 29, 2023Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Lanxiang Wang, Shyue Seng Tan, Eng Huat Toh
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Publication number: 20230255034Abstract: The disclosed subject matter relates generally to structures, memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices having two resistive layers and a conductive layer arranged between two electrodes. The present disclosure provides a memory device including a first electrode above an interlayer dielectric region, a second electrode above the interlayer dielectric region, the second electrode is laterally adjacent to the first electrode, a conductive layer between the first electrode and the second electrode, in which the conductive layer is electrically isolated, a first resistive layer between the first electrode and the conductive layer, and a second resistive layer between the second electrode and the conductive layer.Type: ApplicationFiled: February 7, 2022Publication date: August 10, 2023Inventors: DESMOND JIA JUN LOY, ENG HUAT TOH, SHYUE SENG TAN
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Patent number: 11721731Abstract: A nonvolatile memory device is provided. The device comprises an active region, a floating gate over the active region and a wordline next to the floating gate. The floating gate has at least two narrow tips adjacent to the wordline and a portion of the floating gate between the narrow tips has a concave profile.Type: GrantFiled: August 3, 2021Date of Patent: August 8, 2023Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Zar Lwin Zin, Shyue Seng Tan, Eng Huat Toh