Patents by Inventor Silvia Borsari

Silvia Borsari has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190378843
    Abstract: Some embodiments include a method of forming an integrated assembly. A construction is formed to include a conductive structure having a top surface, and a pair of sidewall surfaces extending downwardly from the top surface. Insulative material is over the top surface, and rails are along the sidewall surfaces. The rails include sacrificial material. The sacrificial material is removed to leave openings. Sealant material is formed to extend within the openings. The sealant material has a lower dielectric constant than the insulative material. Some embodiments include an integrated assembly having a conductive structure with a top surface and a pair of opposing sidewall surfaces extending downwardly from the top surface. Insulative material is over the top surface. Voids are along the sidewall surfaces and are capped by sealant material. The sealant material has a lower dielectric constant than the insulative material.
    Type: Application
    Filed: May 22, 2019
    Publication date: December 12, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Guangjun Yang, Mohd Kamran Akhtar, Silvia Borsari, Alex J. Schrinsky
  • Publication number: 20190348419
    Abstract: Some embodiments include an integrated assembly having semiconductor material structures which each have a transistor channel region, and which are over metal-containing structures. Carbon-doped oxide is adjacent regions of each of the semiconductor material structures and sidewalls of the metal-containing structures. Some embodiments include an integrated assembly having pillars of semiconductor material. Each of the pillars has four sidewalls. Two of the four sidewalls of each pillar are gated sidewalls. The other two of the four sidewalls are non-gated sidewalls. Carbon-doped silicon dioxide is adjacent and directly against the non-gated sidewalls. Some embodiments include a method of forming an integrated assembly. Rails of semiconductor material are formed. A layer of carbon-doped silicon dioxide is formed adjacent top surfaces and sidewall surfaces of each of the rails. Trenches are formed which slice the semiconductor material of the rails into pillars.
    Type: Application
    Filed: July 25, 2019
    Publication date: November 14, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Silvia Borsari, Sau Ha Cheung
  • Patent number: 10381352
    Abstract: Some embodiments include an integrated assembly having semiconductor material structures which each have a transistor channel region, and which are over metal-containing structures. Carbon-doped oxide is adjacent regions of each of the semiconductor material structures and sidewalls of the metal-containing structures. Some embodiments include an integrated assembly having pillars of semiconductor material. Each of the pillars has four sidewalls. Two of the four sidewalls of each pillar are gated sidewalls. The other two of the four sidewalls are non-gated sidewalls. Carbon-doped silicon dioxide is adjacent and directly against the non-gated sidewalls. Some embodiments include a method of forming an integrated assembly. Rails of semiconductor material are formed. A layer of carbon-doped silicon dioxide is formed adjacent top surfaces and sidewall surfaces of each of the rails. Trenches are formed which slice the semiconductor material of the rails into pillars.
    Type: Grant
    Filed: May 4, 2018
    Date of Patent: August 13, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Silvia Borsari, Sau Ha Cheung
  • Patent number: 10347643
    Abstract: Some embodiments include a method of forming an integrated assembly. A construction is formed to include a conductive structure having a top surface, and a pair of sidewall surfaces extending downwardly from the top surface. Insulative material is over the top surface, and rails are along the sidewall surfaces. The rails include sacrificial material. The sacrificial material is removed to leave openings. Sealant material is formed to extend within the openings. The sealant material has a lower dielectric constant than the insulative material. Some embodiments include an integrated assembly having a conductive structure with a top surface and a pair of opposing sidewall surfaces extending downwardly from the top surface. Insulative material is over the top surface. Voids are along the sidewall surfaces and are capped by sealant material. The sealant material has a lower dielectric constant than the insulative material.
    Type: Grant
    Filed: June 7, 2018
    Date of Patent: July 9, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Guangjun Yang, Mohd Kamran Akhtar, Silvia Borsari, Alex J. Schrinsky
  • Publication number: 20190139893
    Abstract: A method of forming an elevationally-extending conductor laterally between a pair of structures comprises forming a pair of structures individually comprising an elevationally-extending-conductive via and a conductive line electrically coupled to and crossing above the conductive via. The conductive line and the conductive via respectively have opposing sides in a vertical cross-section. Elevationally-extending-insulative material is formed along the opposing sides of the conductive via and the conductive line in the vertical cross-section. The forming of the insulative material comprises forming a laterally-inner-insulator material comprising silicon, oxygen, and carbon laterally-outward of the opposing sides of the conductive via and the conductive line in the vertical cross-section. A laterally-intervening-insulator material comprising silicon and oxygen is formed laterally-outward of opposing sides of the laterally-inner-insulator material in the vertical cross-section.
    Type: Application
    Filed: November 7, 2018
    Publication date: May 9, 2019
    Applicant: Micron Tecnology, Inc.
    Inventor: Silvia Borsari
  • Patent number: 10157841
    Abstract: A method includes forming insulative material along the opposing sides of a conductive via and a conductive line in a vertical cross-section comprising forming a laterally-inner-insulator material comprising silicon, oxygen, and carbon laterally-outward of the opposing sides of the conductive via and the conductive line in the vertical cross-section. A laterally-intervening-insulator material comprising silicon and oxygen is formed laterally-outward of opposing sides of the laterally-inner-insulator material in the vertical cross-section. The laterally-intervening-insulator material comprises less carbon, if any, than the laterally-inner-insulator material. A laterally-outer-insulator material comprising silicon, oxygen, and carbon is formed laterally-outward of opposing sides of the laterally-intervening-insulator material in the vertical cross-section. The laterally-outer-insulator material comprises more carbon than the laterally-inner-insulator material.
    Type: Grant
    Filed: April 17, 2017
    Date of Patent: December 18, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Silvia Borsari
  • Publication number: 20180301412
    Abstract: A method includes forming insulative material along the opposing sides of a conductive via and a conductive line in a vertical cross-section comprising forming a laterally-inner-insulator material comprising silicon, oxygen, and carbon laterally-outward of the opposing sides of the conductive via and the conductive line in the vertical cross-section. A laterally-intervening-insulator material comprising silicon and oxygen is formed laterally-outward of opposing sides of the laterally-inner-insulator material in the vertical cross-section. The laterally-intervening-insulator material comprises less carbon, if any, than the laterally-inner-insulator material. A laterally-outer-insulator material comprising silicon, oxygen, and carbon is formed laterally-outward of opposing sides of the laterally-intervening-insulator material in the vertical cross-section. The laterally-outer-insulator material comprises more carbon than the laterally-inner-insulator material.
    Type: Application
    Filed: April 17, 2017
    Publication date: October 18, 2018
    Inventor: Silvia Borsari
  • Patent number: 9093266
    Abstract: An isolation structure, such as a trench isolation structure, may be formed by forming an aperture in a semiconductor substrate and then filling the aperture with boron. In some embodiments, the aperture filling may use atomic layer deposition. In some cases, the boron may be amorphous boron. The aperture may be a high aspect ratio aperture, such as a trench, in some embodiments.
    Type: Grant
    Filed: April 11, 2011
    Date of Patent: July 28, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Silvia Borsari, Carla Maria Lazzari
  • Publication number: 20130284998
    Abstract: A heater for a phase change memory may be thrilled by depositing a first material into a trench such that the material is thicker on the side wall than on the bottom of the trench. In one embodiment, because the trench side walls are of a different material than the bottom, differential deposition occurs. Then a heater material is deposited thereover. The heater material may react with the first material at the bottom of the trench to make Ohmic contact with an underlying metal layer. As a result, a vertical heater may be formed which is capable of making a small area contact with an overlying chalcogenide material.
    Type: Application
    Filed: April 15, 2013
    Publication date: October 31, 2013
    Inventors: Carla Maria Lazzari, Silvia Borsari
  • Patent number: 8420171
    Abstract: A heater for a phase change memory may be formed by depositing a first material into a trench such that the material is thicker on the side wall than on the bottom of the trench. In one embodiment, because the trench side walls are of a different material than the bottom, differential deposition occurs. Then a heater material is deposited thereover. The heater material may react with the first material at the bottom of the trench to make Ohmic contact with an underlying metal layer. As a result, a vertical heater may be formed which is capable of making a small area contact with an overlying chalcogenide material.
    Type: Grant
    Filed: November 11, 2010
    Date of Patent: April 16, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Carla Maria Lazzari, Silvia Borsari
  • Publication number: 20120256289
    Abstract: An isolation structure, such as a trench isolation structure, may be formed by forming an aperture in a semiconductor substrate and then filling the aperture with boron. In some embodiments, the aperture filling may use atomic layer deposition. In some cases, the boron may be amorphous boron. The aperture may be a high aspect ratio aperture, such as a trench, in some embodiments.
    Type: Application
    Filed: April 11, 2011
    Publication date: October 11, 2012
    Inventors: Silvia Borsari, Carla Maria Lazzari
  • Publication number: 20120121864
    Abstract: A heater for a phase change memory may be formed by depositing a first material into a trench such that the material is thicker on the side wall than on the bottom of the trench. In one embodiment, because the trench side walls are of a different material than the bottom, differential deposition occurs. Then a heater material is deposited thereover. The heater material may react with the first material at the bottom of the trench to make Ohmic contact with an underlying metal layer. As a result, a vertical heater may be formed which is capable of making a small area contact with an overlying chalcogenide material.
    Type: Application
    Filed: November 11, 2010
    Publication date: May 17, 2012
    Inventors: Carla Maria Lazzari, Silvia Borsari