Patents by Inventor Silviu Reinhorn

Silviu Reinhorn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190259571
    Abstract: An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, including a scintillator configured with a scintillator layer formed with a scintillating surface. The scintillator layer emits light signals corresponding to impingement of electrons upon the scintillating surface. A light guide plate is coupled to the scintillator layer and includes a peripheral surface. One or more silicon photomultiplier devices are positioned upon the peripheral surface, wherein one or more silicon photomultiplier devices are arranged perpendicularly or obliquely relative to the scintillating surface. The silicon photomultiplier device is configured to yield an electrical signal from an electron impinging upon the scintillator surface.
    Type: Application
    Filed: March 18, 2019
    Publication date: August 22, 2019
    Inventors: ELI CHEIFETZ, AMIT WEINGARTEN, SEMYON SHOFMAN, SILVIU REINHORN, DMITRY SHUR
  • Patent number: 10236155
    Abstract: An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, comprising a scintillator including a scintillator layer, the scintillator layer emitting light signals corresponding to impingement of electrons thereupon, a light guide plate coupled to the scintillator layer and comprising a peripheral surface, and a single or plurality of silicon photomultiplier devices positioned upon the peripheral surface and arranged perpendicularly or obliquely relative to the scintillating surface, the silicon photomultiplier device being configured to yield an electrical signal from an electron impinging upon the scintillator layer.
    Type: Grant
    Filed: September 1, 2016
    Date of Patent: March 19, 2019
    Assignee: EL-MUL TECHNOLOGIES LTD.
    Inventors: Eli Cheifetz, Amit Weingarten, Semyon Shofman, Silviu Reinhorn
  • Publication number: 20170069459
    Abstract: An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, comprising a scintillator including a scintillator layer, the scintillator layer emitting light signals corresponding to impingement of electrons thereupon, a light guide plate coupled to the scintillator layer and comprising a peripheral surface, and a single or plurality of silicon photomultiplier devices positioned upon the peripheral surface and arranged perpendicularly or obliquely relative to the scintillating surface, the silicon photomultiplier device being configured to yield an electrical signal from an electron impinging upon the scintillator layer.
    Type: Application
    Filed: September 1, 2016
    Publication date: March 9, 2017
    Inventors: ELI CHEIFETZ, AMIT WEINGARTEN, SEMYON SHOFMAN, SILVIU REINHORN
  • Patent number: 9076632
    Abstract: A STEM system is disclosed wherein an imaging system is used to image the electron scatter pattern plane of the HAADF detector onto a two-dimensional array detector. A data acquisition system stores and processes the data from the two-dimensional array detector. For each illumination pixel of the STEM, one frame of data is generated and stored Each frame includes data of all scattered angles and can be analyzed in real time or in off-line at any time after the scan. A method is disclosed for detecting electrons emitted from a sample by detecting electrons scattered from the sample and generating plurality of corresponding signals, each signal indicative of scattering angle of a scattered electron; generating a plurality of signal groups, each signal group being a collection of signals of a user selected scattering angle.
    Type: Grant
    Filed: February 12, 2013
    Date of Patent: July 7, 2015
    Assignee: EL-MUL TECHNOLOGIES LTD.
    Inventors: Silviu Reinhorn, Eli Cheifetz, Amit Weingarten
  • Publication number: 20150034822
    Abstract: A STEM system is disclosed wherein an imaging system is used to image the electron scatter pattern plane of the HAADF detector onto a two-dimensional array detector. A data acquisition system stores and processes the data from the two-dimensional array detector. For each illumination pixel of the STEM, one frame of data is generated and stored Each frame includes data of all scattered angles and can be analyzed in real time or in off-line at any time after the scan. A method is disclosed for detecting electrons emitted from a sample by detecting electrons scattered from the sample and generating plurality of corresponding signals, each signal indicative of scattering angle of a scattered electron; generating a plurality of signal groups, each signal group being a collection of signals of a user selected scattering angle.
    Type: Application
    Filed: February 12, 2013
    Publication date: February 5, 2015
    Inventors: Silviu Reinhorn, Eli Cheifetz, Amit Weingarten
  • Patent number: 7973919
    Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.
    Type: Grant
    Filed: April 1, 2010
    Date of Patent: July 5, 2011
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
  • Publication number: 20110141462
    Abstract: Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.
    Type: Application
    Filed: February 24, 2011
    Publication date: June 16, 2011
    Inventors: Silviu Reinhorn, Daniel Some, Gilad Almogy
  • Publication number: 20100188658
    Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information.
    Type: Application
    Filed: April 1, 2010
    Publication date: July 29, 2010
    Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
  • Patent number: 7714999
    Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.
    Type: Grant
    Filed: December 6, 2007
    Date of Patent: May 11, 2010
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
  • Patent number: 7463352
    Abstract: A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.
    Type: Grant
    Filed: January 21, 2005
    Date of Patent: December 9, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Avner Karpol, Silviu Reinhorn, Emanuel Elysaf, Shimon Yalov, Boaz Kenan
  • Publication number: 20080231845
    Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information.
    Type: Application
    Filed: December 6, 2007
    Publication date: September 25, 2008
    Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
  • Patent number: 7399647
    Abstract: Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: July 15, 2008
    Assignee: Applied Materials, Inc.
    Inventor: Silviu Reinhorn
  • Patent number: 7190459
    Abstract: Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.
    Type: Grant
    Filed: February 24, 2004
    Date of Patent: March 13, 2007
    Assignee: Applied Materials, Inc.
    Inventor: Silviu Reinhorn
  • Publication number: 20060232578
    Abstract: A collapsible portable video display is provided, which incorporates a mini-projector, a folding mirror, and a rear projection foldable screen. In one type of implementation the display is incorporated into a mobile device, such as a cellphone, mobile DVD player, etc. In other type of implementation the display device is a stand-alone device having inputs for video and audio signals.
    Type: Application
    Filed: June 27, 2005
    Publication date: October 19, 2006
    Inventor: Silviu Reinhorn
  • Publication number: 20060234784
    Abstract: A collapsible portable video display is provided, which incorporates a mini-projector, a folding mirror, and a rear projection foldable screen. In one type of implementation the display is incorporated into a mobile consumer appliance, such as a cellphone, mobile DVD player, etc. In other type of implementation the display device is a stand-alone device having inputs for video and audio signals.
    Type: Application
    Filed: June 27, 2005
    Publication date: October 19, 2006
    Inventor: Silviu Reinhorn
  • Patent number: 7053395
    Abstract: A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.
    Type: Grant
    Filed: July 11, 2003
    Date of Patent: May 30, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Haim Feldman, Emanuel Elyasaf, Nissim Elmaliach, Ron Naftali, Boris Golberg, Silviu Reinhorn
  • Patent number: 7049586
    Abstract: Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.
    Type: Grant
    Filed: February 21, 2002
    Date of Patent: May 23, 2006
    Assignee: Applied Material Israel, Ltd.
    Inventor: Silviu Reinhorn
  • Publication number: 20060028649
    Abstract: Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.
    Type: Application
    Filed: October 7, 2005
    Publication date: February 9, 2006
    Inventor: Silviu Reinhorn
  • Publication number: 20060012791
    Abstract: Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.
    Type: Application
    Filed: June 21, 2005
    Publication date: January 19, 2006
    Inventors: Silviu Reinhorn, Daniel Some, Gilad Almogy
  • Patent number: 6924891
    Abstract: A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.
    Type: Grant
    Filed: April 29, 2004
    Date of Patent: August 2, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Avner Karpol, Silviu Reinhorn, Emanuel Elysaf, Shimon Yalov, Boaz Kenan