Patents by Inventor Simon Armbruster

Simon Armbruster has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10840107
    Abstract: A method for forming a cavity in a silicon substrate, a surface of the silicon substrate having a tilting angle relative to a first plane of the silicon substrate, and the first plane being a {111} plane of the silicon substrate, and situation of an etching mask on the surface of the silicon substrate. The etching mask has a retarding structure that protrudes into the mask opening, and a first etching projection region. All further edges of the mask opening outside the first etching projection region are situated essentially parallel to {111} planes of the silicon substrate. The method includes an anisotropic etching of the silicon substrate during a defined etching duration. An etching rate in the <111> directions of the silicon substrate is lower than in other spatial directions, and the first retarding structure is undercut in a first undercut direction going out from the first etching projection region.
    Type: Grant
    Filed: July 23, 2019
    Date of Patent: November 17, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Simon Armbruster, Benjamin Steuer, Stefan Pinter, Dietmar Haberer, Jochen Tomaschko
  • Patent number: 10589988
    Abstract: A mechanical component has: a mounting; a movable part which, with the aid of at least one first spring and one second spring, is connected to the mounting in such a way that the movable part is movable about a rotational axis extending through a first anchoring area of the first spring on the mounting and a second anchoring area of the second spring on the mounting; a first sensor device with at least one first resistor which is situated on and/or in the first spring; and a second sensor device with at least one second resistor situated on and/or in the second spring. The first sensor device includes a first Wheatstone half bridge and the second sensor device includes a second Wheatstone half bridge. The first and second Wheatstone half bridges are connected to form a Wheatstone full bridge.
    Type: Grant
    Filed: October 23, 2013
    Date of Patent: March 17, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Wolfgang Heinzelmann, Mohamad Iyad Al Dibs, Rainer Straub, Stefan Pinter, Frederic Njikam Njimonzie, Joerg Muchow, Helmut Grutzeck, Simon Armbruster, Sebastian Reiss
  • Publication number: 20190348300
    Abstract: A method for forming a cavity in a silicon substrate, a surface of the silicon substrate having a tilting angle relative to a first plane of the silicon substrate, and the first plane being a {111} plane of the silicon substrate, and situation of an etching mask on the surface of the silicon substrate. The etching mask has a retarding structure that protrudes into the mask opening, and a first etching projection region. All further edges of the mask opening outside the first etching projection region are situated essentially parallel to {111} planes of the silicon substrate. The method includes an anisotropic etching of the silicon substrate during a defined etching duration. An etching rate in the <111> directions of the silicon substrate is lower than in other spatial directions, and the first retarding structure is undercut in a first undercut direction going out from the first etching projection region.
    Type: Application
    Filed: July 23, 2019
    Publication date: November 14, 2019
    Inventors: Simon Armbruster, Benjamin Steuer, Stefan Pinter, Dietmar Haberer, Jochen Tomaschko
  • Patent number: 10431474
    Abstract: A method for forming a cavity in a silicon substrate, a surface of the silicon substrate having a tilting angle relative to a first plane of the silicon substrate, and the first plane being a {111} plane of the silicon substrate, and situation of an etching mask on the surface of the silicon substrate. The etching mask has a retarding structure that protrudes into the mask opening, and a first etching projection region. All further edges of the mask opening outside the first etching projection region are situated essentially parallel to {111} planes of the silicon substrate. The method includes an anisotropic etching of the silicon substrate during a defined etching duration. An etching rate in the <111> directions of the silicon substrate is lower than in other spatial directions, and the first retarding structure is undercut in a first undercut direction going out from the first etching projection region.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: October 1, 2019
    Assignee: Robert Bosch GmbH
    Inventors: Simon Armbruster, Benjamin Steuer, Stefan Pinter, Dietmar Haberer, Jochen Tomaschko
  • Patent number: 9885866
    Abstract: A mirror system including a mirror that is mounted in a manner that permits oscillation, having a coil and at least one first spring that intercouples the mirror and the coil in a way that allows the coil to be placed as a counterweight to the oscillating mirror. Also a corresponding projection device.
    Type: Grant
    Filed: January 21, 2015
    Date of Patent: February 6, 2018
    Assignee: ROBERT BOSCH GMBH
    Inventors: Rainer Straub, Kerrin Doessel, Johannes Baader, Frederic Njikam Njimonzie, Joerg Muchow, Frank Schatz, Helmut Grutzeck, Simon Armbruster, Zoltan Lestyan, Stefan Leidich, Jochen Franz
  • Patent number: 9764945
    Abstract: A micromechanical component and a corresponding test method for a micromechanical component are described. The micromechanical component includes at least one first region, which is elastically connected to a second region via a spring device, a resistor element, which is situated in and/or on the spring device and is at least partially interruptible in the event of damage to the spring device, and a detection device, which is electrically connected to the resistor element, for detecting an interruption in the resistor element and for generating a corresponding detection signal.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: September 19, 2017
    Assignee: ROBERT BOSCH GMBH
    Inventors: Sebastian Reiss, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader, Rainer Straub, Wolfgang Heinzelmann
  • Patent number: 9725311
    Abstract: A micromechanical component includes: a hermetically sealed housing; a first functional element that is situated inside the housing; a first structured electrically conductive layer that contacts the first functional element and that is situated inside the housing; and a second structured electrically conductive layer, the first conductive layer being electrically contacted via the second conductive layer, and the second conductive layer being electrically contacted laterally through the housing via a hermetic through-contacting in the second conductive layer.
    Type: Grant
    Filed: February 4, 2015
    Date of Patent: August 8, 2017
    Assignee: Robert Bosch GmbH
    Inventors: Jochen Franz, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Andreas Duell, Johannes Baader, Stefan Liebing, Rainer Straub
  • Patent number: 9663351
    Abstract: A production method for a wafer equipped with transparent plates includes: formation of a row of through-holes in a wafer; formation of at least one strip-shaped recess in a wafer surface, each of the through-holes of the same row intersecting partly with the respectively associated strip-shaped recess; an uninterrupted groove being formed in each intermediate region between two adjacent through-holes of the same row, the floor surface of the groove being oriented so as to be inclined relative to the wafer surface by an angle of inclination greater than 0° and less than 90°; and covering at least one through-hole with at least one transparent plate made of at least one material transparent to at least a sub-spectrum of electromagnetic radiation.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: May 30, 2017
    Assignee: ROBERT BOSCH GMBH
    Inventors: Simon Armbruster, Dietmar Haberer, Stefan Pinter, Jochen Tomaschko, Benjamin Steuer
  • Publication number: 20170140943
    Abstract: A method for forming a cavity in a silicon substrate, a surface of the silicon substrate having a tilting angle relative to a first plane of the silicon substrate, and the first plane being a {111} plane of the silicon substrate, and situation of an etching mask on the surface of the silicon substrate. The etching mask has a retarding structure that protrudes into the mask opening, and a first etching projection region. All further edges of the mask opening outside the first etching projection region are situated essentially parallel to {111} planes of the silicon substrate. The method includes an anisotropic etching of the silicon substrate during a defined etching duration. An etching rate in the <111> directions of the silicon substrate is lower than in other spatial directions, and the first retarding structure is undercut in a first undercut direction going out from the first etching projection region.
    Type: Application
    Filed: May 29, 2015
    Publication date: May 18, 2017
    Inventors: Simon Armbruster, Benjamin Steuer, Stefan Pinter, Dietmar Haberer, Jochen Tomaschko
  • Patent number: 9618740
    Abstract: A micromirror for a micromirror device includes: a mirror side; and a back side which is directed away from the mirror side, at least one central area of the back side having at least one surface which is plane parallel to the mirror side, the back side being shaped in such a way that on two opposite sides of the central area, a side area having at least one side surface of the back side in each case, which is curved and/or oriented inclined toward the mirror side borders on the central area of the back side, and a height of the micromirror continuously decreasing starting from the central area along a cross section of the micromirror, which runs through the central area and the two side areas.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: April 11, 2017
    Assignee: ROBERT BOSCH GMBH
    Inventors: Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader, Stefan Pinter, Rainer Straub, Zoltan Lestyan
  • Publication number: 20170081183
    Abstract: A micromechanical layer system, having at least two mechanically active functional layers patterned independently of each other, which are arranged vertically one on top of the other and are functionally coupled to each other.
    Type: Application
    Filed: May 29, 2015
    Publication date: March 23, 2017
    Inventors: Simon Armbruster, Rainer Straub, Stefan Pinter, Ralf Hausner, Dietmar Haberer, Johannes Baader
  • Publication number: 20170052363
    Abstract: A mirror system including a mirror that is mounted in a manner that permits oscillation, having a coil and at least one first spring that intercouples the mirror and the coil in a way that allows the coil to be placed as a counterweight to the oscillating mirror. Also a corresponding projection device.
    Type: Application
    Filed: January 21, 2015
    Publication date: February 23, 2017
    Inventors: Rainer Straub, Kerrin Doessel, Johannes Baader, Frederic Njikam Njimonzie, Joerg Muchow, Frank Schatz, Helmut Grutzeck, Simon Armbruster, Zoltan Lestyan, Stefan Leidich, Jochen Franz
  • Patent number: 9490137
    Abstract: A method for structuring a layered structure, for example, of a micromechanical component, from two semiconductor layers between which an insulating and/or etch stop layer is situated includes forming a first etching mask on a first side of the first semiconductor layer, carrying out a first etching step, starting from a first outer side, for structuring the first semiconductor layer, forming a second etching mask on a second side of the second semiconductor layer, and carrying out a second etching step, starting from the second outer side, for structuring the second semiconductor layer. After carrying out the first etching step and prior to carrying out the second etching step, at least one etching protection material is deposited on at least one trench wall of at least one first trench, which is etched in the first etching step.
    Type: Grant
    Filed: February 6, 2015
    Date of Patent: November 8, 2016
    Assignee: ROBERT BOSCH GMBH
    Inventors: Simon Armbruster, Frank Fischer, Johannes Baader, Rainer Straub
  • Patent number: 9360664
    Abstract: A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: June 7, 2016
    Assignee: Robert Bosch GmbH
    Inventors: Simon Armbruster, Helmut Grutzeck, Frank Schatz, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader, Kerrin Doessel, Rainer Straub
  • Publication number: 20150232328
    Abstract: A production method for a wafer equipped with transparent plates includes: formation of a row of through-holes in a wafer; formation of at least one strip-shaped recess in a wafer surface, each of the through-holes of the same row intersecting partly with the respectively associated strip-shaped recess; an uninterrupted groove being formed in each intermediate region between two adjacent through-holes of the same row, the floor surface of the groove being oriented so as to be inclined relative to the wafer surface by an angle of inclination greater than 0° and less than 90°; and covering at least one through-hole with at least one transparent plate made of at least one material transparent to at least a sub-spectrum of electromagnetic radiation.
    Type: Application
    Filed: January 30, 2015
    Publication date: August 20, 2015
    Inventors: Simon ARMBRUSTER, Dietmar Haberer, Stefan Pinter, Jochen Tomaschko, Benjamin Steuer
  • Publication number: 20150232330
    Abstract: A micromechanical component includes: a hermetically sealed housing; a first functional element that is situated inside the housing; a first structured electrically conductive layer that contacts the first functional element and that is situated inside the housing; and a second structured electrically conductive layer, the first conductive layer being electrically contacted via the second conductive layer, and the second conductive layer being electrically contacted laterally through the housing via a hermetic through-contacting in the second conductive layer.
    Type: Application
    Filed: February 4, 2015
    Publication date: August 20, 2015
    Inventors: Jochen FRANZ, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Andreas Duell, Johannes Baader, Stefan Liebing, Rainer Straub
  • Publication number: 20150235859
    Abstract: A method for structuring a layered structure, for example, of a micromechanical component, from two semiconductor layers between which an insulating and/or etch stop layer is situated includes forming a first etching mask on a first side of the first semiconductor layer, carrying out a first etching step, starting from a first outer side, for structuring the first semiconductor layer, forming a second etching mask on a second side of the second semiconductor layer, and carrying out a second etching step, starting from the second outer side, for structuring the second semiconductor layer. After carrying out the first etching step and prior to carrying out the second etching step, at least one etching protection material is deposited on at least one trench wall of at least one first trench, which is etched in the first etching step.
    Type: Application
    Filed: February 6, 2015
    Publication date: August 20, 2015
    Inventors: Simon ARMBRUSTER, Frank FISCHER, Johannes BAADER, Rainer STRAUB
  • Patent number: 9082831
    Abstract: A component having a via includes: (i) a first layer having a first via portion, a first trench structure, and a first surrounding layer portion, the first via portion being separated by the first trench structure from the first surrounding layer portion; (ii) a second layer having a second via portion, a second trench structure, and a second surrounding layer portion, the second via portion being separated by the second trench structure from the second surrounding layer portion; (iii) an insulation layer disposed between the first and the second layer, the insulation layer having an opening so that the first and the second via portions of the first and the second layers are directly connected to one another in the region of the opening. The first via portion and the second surrounding layer portion at least partially overlap.
    Type: Grant
    Filed: September 7, 2011
    Date of Patent: July 14, 2015
    Assignee: ROBERT BOSCH GMBH
    Inventors: Marcus Ahles, Jochen Reinmuth, Hubert Benzel, Simon Armbruster
  • Publication number: 20150153566
    Abstract: A micromirror for a micromirror device includes: a mirror side; and a back side which is directed away from the mirror side, at least one central area of the back side having at least one surface which is plane parallel to the mirror side, the back side being shaped in such a way that on two opposite sides of the central area, a side area having at least one side surface of the back side in each case, which is curved and/or oriented inclined toward the mirror side borders on the central area of the back side, and a height of the micromirror continuously decreasing starting from the central area along a cross section of the micromirror, which runs through the central area and the two side areas.
    Type: Application
    Filed: November 25, 2014
    Publication date: June 4, 2015
    Inventors: Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader, Stefan Pinter, Rainer Straub, Zoltan Lestyan
  • Publication number: 20150061695
    Abstract: A micromechanical component and a corresponding test method for a micromechanical component are described. The micromechanical component includes at least one first region, which is elastically connected to a second region via a spring device, a resistor element, which is situated in and/or on the spring device and is at least partially interruptible in the event of damage to the spring device, and a detection device, which is electrically connected to the resistor element, for detecting an interruption in the resistor element and for generating a corresponding detection signal.
    Type: Application
    Filed: August 28, 2014
    Publication date: March 5, 2015
    Applicant: Robert Bosch GmbH
    Inventors: Sebastian REISS, Simon ARMBRUSTER, Helmut GRUTZECK, Joerg MUCHOW, Frederic Njikam NJIMONZIE, Johannes BAADER, Rainer STRAUB, Wolfgang HEINZELMANN