Patents by Inventor Simone Sassolini
Simone Sassolini has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7009799Abstract: In an actuator device for hard disks a suspension element carries a slider that is subject to undesired vibrations which give rise to rotations of the slider with respect to a nominal position. An electrostatically controlled position-control structure is arranged between the suspension and the slider and is controlled in an active way so as to generate torsions of the platform that counter the undesired rotations. The position-control structure comprises a platform of conductive material and control electrodes arranged underneath the platform. The platform is connected to a load-bearing structure by spring elements that enable movements of roll and pitch. Four control electrodes are arranged according to the quadrants of a square and can be selectively biased for generating electrical forces acting on the platform.Type: GrantFiled: May 30, 2002Date of Patent: March 7, 2006Assignee: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Benedetto Vigna
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Publication number: 20060042385Abstract: The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is formed by a plurality of fixed electrodes facing respective mobile electrodes. The suspended mass is supported by elastic suspension elements. The suspended mass has a first, larger, thickness, and the elastic suspension elements have a second thickness, smaller than the first thickness.Type: ApplicationFiled: July 25, 2005Publication date: March 2, 2006Applicant: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Marco Del Sarto, Lorenzo Baldo, Mauro Marchi
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Patent number: 6924166Abstract: A process for the fabrication of devices that integrate protected microstructures, comprising the following steps: forming, in a body of semiconductor material, at least one microstructure having at least one first portion and one second portion which are relatively mobile with respect to one another and are separated from one another by at least one gap region, which is accessible through a face of the body; and sealing the gap. The sealing step includes depositing on the face of the body a layer of protective material, in such a way as to close the gap region, the protective layer being such as to enable relative motion between the first portion and the second portion of the microstructure.Type: GrantFiled: November 12, 2002Date of Patent: August 2, 2005Assignee: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Marco Del Sarto, Giovanni Frezza, Lorenzo Baldo
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Patent number: 6924958Abstract: Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.Type: GrantFiled: November 13, 2001Date of Patent: August 2, 2005Assignee: STMicroelectronics S.r.l.Inventors: Benedetto Vigna, Simone Sassolini, Sarah Zerbini, Lorenzo Baldo
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Publication number: 20040256686Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.Type: ApplicationFiled: April 8, 2004Publication date: December 23, 2004Applicant: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Mauro Marchi, Marco Del Sarto, Lorenzo Baldo
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Patent number: 6809907Abstract: A microactuator comprises a motor element including a stator and a rotor capacitively coupled to the stator; an actuator element having a circular structure; and a transmission structure interposed between the motor element and the actuator element to transmit a rotary movement of the motor element into a corresponding rotary movement of the actuator element. In particular, the transmission structure comprises a pair of transmission arms identical to each other, arranged symmetrically with respect to a symmetry axis of the microactuator. The transmission arms extend between two approximately diametrically opposed regions of the rotor to diametrically opposed regions of the actuator element.Type: GrantFiled: July 20, 1999Date of Patent: October 26, 2004Assignee: STMicroelectronics S.r.lInventors: Benedetto Vigna, Sarah Zerbini, Simone Sassolini, Carlo Menescardi
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Publication number: 20040070888Abstract: A micro-electro-mechanical device formed by a body of semiconductor material having a thickness and defining a mobile part and a fixed part. The mobile part is formed by a mobile platform, supporting arms extending from the mobile platform to the fixed part, and by mobile electrodes fixed to the mobile platform. The fixed part has fixed electrodes facing the mobile electrodes, a first biasing region fixed to the fixed electrodes, a second biasing region fixed to the supporting arms, and an insulation region of insulating material extending through the entire thickness of the body. The insulation region insulates electrically at least one between the first and the second biasing regions from the rest of the fixed part.Type: ApplicationFiled: June 20, 2003Publication date: April 15, 2004Applicant: STMicroelectronics S.r.I.Inventors: Ubaldo Mastromatteo, Bruno Murari, Paolo Ferrari, Simone Sassolini
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Patent number: 6696364Abstract: A method for manipulating MEMS devices integrated on a semiconductor wafer and intended to be diced one from the other includes bonding of the semiconductor wafer including the MEMS devices on a support with interposition of a bonding sheet. The method may also include completely cutting or dicing of the semiconductor wafer into a plurality of independent MEMS devices, and processing the MEMS devices diced and bonded on the support in a treatment environment for semiconductor wafers. A support for manipulating MEMS devices is also included.Type: GrantFiled: August 8, 2002Date of Patent: February 24, 2004Assignee: STMicroelectronics S.r.l.Inventors: Ilaria Gelmi, Simone Sassolini, Stefano Pozzi, Massimo Garavaglia
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Publication number: 20030235013Abstract: A read/write assembly for magnetic hard disks includes at least: one supporting element; one read/write (R/W) transducer; one micro-actuator, set between the R/W transducer and the supporting element; one electrical-connection structure for connection to a remote device carried by the supporting element and connected to the R/W transducer and to the micro-actuator. In addition, a protective structure, set so as to cover the micro-actuator is made of a single piece with the electrical-connection structure.Type: ApplicationFiled: May 2, 2003Publication date: December 25, 2003Applicant: STMicroelectronics S.r.I.Inventors: Marco Del Sarto, Mauro Marchi, Lorenzo Baldo, Simone Sassolini
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Patent number: 6638836Abstract: The manufacture process includes: forming a first wafer of semiconductor material housing integrated electronic components forming a microactuator control circuit and a signal preamplification circuit; forming microactuators, each including a rotor and a stator, in a surface portion of a second wafer of semiconductor material; attaching the second wafer to the first wafer, with the surface portion of the second wafer facing the first wafer; thinning the second wafer; attaching the second wafer to a third wafer to obtain a composite wafer; thinning the first wafer; cutting the composite wafer into a plurality of dice connected to a protection chip; removing the protection chip; attaching read/write transducers to the dice; and attaching the dice to supporting blocks for hard-disk drivers.Type: GrantFiled: November 30, 2000Date of Patent: October 28, 2003Assignee: STMicroelectronics S.r.l.Inventors: Bruno Murari, Benedetto Vigna, Simone Sassolini, Francesco Ratti, Alberto Alessandri
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Publication number: 20030143773Abstract: A process for the fabrication of devices that integrate protected microstructures, comprising the following steps: forming, in a body of semiconductor material, at least one microstructure having at least one first portion and one second portion which are relatively mobile with respect to one another and are separated from one another by at least one gap region, which is accessible through a face of the body; and sealing the gap. The sealing step includes depositing on the face of the body a layer of protective material, in such a way as to close the gap region, the protective layer being such as to enable relative motion between the first portion and the second portion of the microstructure.Type: ApplicationFiled: November 12, 2002Publication date: July 31, 2003Applicant: STMicroelectronics S.r.I.Inventors: Simone Sassolini, Marco Del Sarto, Giovanni Frezza, Lorenzo Baldo
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Patent number: 6587312Abstract: An electrical connection structure having connection elements which electrically connect a movable part to a fixed part of a microelectromechanical device, for example a microactuator. The movable part and fixed part are separated by trenches and are mechanically connected by spring elements, which determine, together with the connection elements, the torsional rigidity of the microelectromechanical device. Each connection element is formed by multiple sub-arms connected in parallel and having a common movable anchorage region anchored to the movable part, and a common fixed anchorage region anchored to the fixed part, whereby the mechanical resistance of the connection elements is negligible. The sub-arms have a width equal to a sub-multiple of the width necessary in case of a single connection element for the latter to have a preset electrical resistance, which is determined in the design.Type: GrantFiled: February 22, 2001Date of Patent: July 1, 2003Assignee: STMicroelectronics S.r.l.Inventors: Bruno Murari, Benedetto Vigna, Simone Sassolini
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Publication number: 20030077881Abstract: A method for manipulating MEMS devices integrated on a semiconductor wafer and intended to be diced one from the other includes bonding of the semiconductor wafer including the MEMS devices on a support with interposition of a bonding sheet. The method may also include completely cutting or dicing of the semiconductor wafer into a plurality of independent MEMS devices, and processing the MEMS devices diced and bonded on the support in a treatment environment for semiconductor wafers. A support for manipulating MEMS devices is also included.Type: ApplicationFiled: August 8, 2002Publication date: April 24, 2003Applicant: STMicroelectronics S.r.l.Inventors: Ilaria Gelmi, Simone Sassolini, Stefano Pozzi, Massimo Garavaglia
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Patent number: 6508124Abstract: A microelectromechanical structure includes a rotor element having a barycentric axis and suspended regions arranged a distance with respect to the barycentric axis. The rotor element is supported and biased via a suspension structure having a single anchoring portion extending along the barycentric axis. The single anchoring portion is integral with a body of semiconductor material on which electric connections are formed.Type: GrantFiled: September 7, 2000Date of Patent: January 21, 2003Assignee: STMicroelectronics S.r.l.Inventors: Sarah Zerbini, Simone Sassolini, Benedetto Vigna
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Publication number: 20030002195Abstract: In an actuator device for hard disks a suspension element carries a slider that is subject to undesired vibrations which give rise to rotations of the slider with respect to a nominal position. An electrostatically controlled position-control structure is arranged between the suspension and the slider and is controlled in an active way so as to generate torsions of the platform that counter the undesired rotations. The position-control structure comprises a platform of conductive material and control electrodes arranged underneath the platform. The platform is connected to a load-bearing structure by spring elements that enable movements of roll and pitch. Four control electrodes are arranged according to the quadrants of a square and can be selectively biased for generating electrical forces acting on the platform.Type: ApplicationFiled: May 30, 2002Publication date: January 2, 2003Applicant: STMicroelectronics S.r.lInventors: Simone Sassolini, Benedetto Vigna
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Patent number: 6501623Abstract: A microactuator is attached to a first face of a coupling formed on a suspension, so that an R/W transducer projects from an opposite face. A hole in the coupling permits passage of an adhesive mass interposed between a rotor of the microactuator and the R/W transducer. A strip of adhesive material extends between a die accommodating the microactuator and the coupling, and externally surrounds the microactuator. The coupling acts as a protective shield for the microactuator, both mechanically and electrically. The coupling covers the microactuator at the front, and prevents foreign particles from blocking the microactuator. In addition, the coupling electrically insulates the R/W transducer, which is sensitive to magnetic fields, from regions of the microactuator biased to a high voltage. With the coupling, the strip forms a sealing structure, which in practice surrounds the microactuator on all sides.Type: GrantFiled: July 20, 1999Date of Patent: December 31, 2002Assignee: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Sarah Zerbini, Benedetto Vigna, Ubaldo Mastromatteo
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Patent number: 6483671Abstract: The microstructure, of semiconductor material, includes a micromotor and an encapsulation structure. The micromotor is externally delimited by a first and a second faces, opposed to one another, and by a side delimitation trench. The encapsulation structure surrounds the micromotor and has a bottom portion facing the second face of the micromotor, and an outer lateral portion facing the side delimitation trench. An outer separation trench extends through the bottom portion of the encapsulation structure, separates a mobile region from the external side portion, and defines, together with the side delimitation trench, a labyrinthic path for contaminating particles. A sealing ring extends on the bottom portion of the encapsulation structure around an inner separation trench separating the mobile region from a fixed central region and closes a gap between the bottom portion and a mobile component connected to the mobile region of the encapsulation structure.Type: GrantFiled: February 1, 2001Date of Patent: November 19, 2002Assignee: STMicroelectronics, S.r.l.Inventors: Benedetto Vigna, Simone Sassolini, Francesco Ratti
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Publication number: 20020109931Abstract: Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.Type: ApplicationFiled: November 13, 2001Publication date: August 15, 2002Applicant: STMicroelectronics S.r.I.Inventors: Benedetto Vigna, Simone Sassolini, Sarah Zerbini, Lorenzo Baldo
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Patent number: 6391741Abstract: A process for assembling a microactuator on a R/W transducer that includes forming a first wafer of semiconductor material having a plurality of microactuators including suspended regions and fixed regions separated from each other by first trenches; forming a second wafer of semiconductor material comprising blocking regions connecting mobile and fixed intermediate regions separated from each other by second trenches; bonding the two wafers so as to form a composite wafer wherein the suspended regions of the first wafer are connected to the mobile intermediate regions of the second wafer, and the fixed regions of the first wafer are connected to the fixed intermediate regions of the second wafer; cutting the composite wafer into a plurality of units; fixing the mobile intermediate region of each unit to a respective R/W transducer; and removing the blocking regions. The blocking regions are made of silicon oxide, and the intermediate regions are made of polycrystalline silicon.Type: GrantFiled: July 14, 2000Date of Patent: May 21, 2002Assignee: STMicroelectronics S.r.l.Inventors: Ubaldo Mastromatteo, Sarah Zerbini, Simone Sassolini, Benedetto Vigna
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Publication number: 20010040772Abstract: An electrical connection structure having connection elements which electrically connect a movable part to a fixed part of a microelectromechanical device, for example a microactuator. The movable part and fixed part are separated by trenches and are mechanically connected by spring elements, which determine, together with the connection elements, the torsional rigidity of the microelectromechanical device. Each connection element is formed by multiple sub-arms connected in parallel and having a common movable anchorage region anchored to the movable part, and a common fixed anchorage region anchored to the fixed part, whereby the mechanical resistance of the connection elements is negligible. The sub-arms have a width equal to a sub-multiple of the width necessary in case of a single connection element for the latter to have a preset electrical resistance, which is determined in the design.Type: ApplicationFiled: February 22, 2001Publication date: November 15, 2001Inventors: Bruno Murari, Benedetto Vigna, Simone Sassolini