Patents by Inventor Sriram Krishnaswami

Sriram Krishnaswami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090255911
    Abstract: Laser scribing can be performed on a workpiece (104) such as substrates with layers formed thereon for use in a solar panel without need to rotate the workpiece (104) during the scribing process. A series of lasers (602, 622) can be used to concurrently remove material from multiple positions on the workpiece (104). Each laser (602, 622) can have at least one scanning device (614, 630, 632) positioned along a beam path thereof in order to adjust a position of the laser output relative to the workpiece (104). By adjusting the beam or pulse positions using the scanning devices (614, 630, 632) while translating the workpiece (104), substantially any pattern can be scribed into at least one layer of the workpiece (104) without the need for any rotation of the workpiece (104).
    Type: Application
    Filed: April 10, 2009
    Publication date: October 15, 2009
    Applicant: Applied Materials, Inc.
    Inventors: Sriram Krishnaswami, Shinichi Kurita, Bassam Shamoun, Benjamin M. Johnston, John M. White, Jiafa Fan, Inchen Huang, Antoine P. Manens, Wei-Sheng Lei, Wei-Yung Hsu
  • Patent number: 7602199
    Abstract: An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.
    Type: Grant
    Filed: May 9, 2007
    Date of Patent: October 13, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Benjamin M. Johnston, Sriram Krishnaswami, Hung T. Nguyen, Matthias Brunner, Yong Liu
  • Publication number: 20090195262
    Abstract: A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
    Type: Application
    Filed: April 10, 2009
    Publication date: August 6, 2009
    Inventors: Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner, Ralf Schmid, John M. White, Shinichi Kurita, James C. Hunter
  • Patent number: 7535238
    Abstract: A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
    Type: Grant
    Filed: March 14, 2006
    Date of Patent: May 19, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner, Ralf Schmid, John M. White, Shinichi Kurita, James C. Hunter
  • Publication number: 20080251019
    Abstract: The present invention comprises a system and method for transferring a substrate into and out of a chamber configured to accommodate multiple substrates. In one embodiment, the system comprises a chamber housing that includes a first substrate support tray and a second substrate support tray independently movable along a vertical axis, and a substrate conveyor movable into and out of the chamber housing. The first substrate support tray and the second substrate support tray are movable to a position where a portion of the second substrate support tray is received in the first substrate support tray.
    Type: Application
    Filed: October 12, 2007
    Publication date: October 16, 2008
    Inventors: SRIRAM KRISHNASWAMI, Hung T. Nguyen, George Tzeng, Matthias Brunner
  • Publication number: 20070296426
    Abstract: An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.
    Type: Application
    Filed: May 9, 2007
    Publication date: December 27, 2007
    Inventors: SRIRAM KRISHNASWAMI, Matthias Brunner, William Beaton, Yong Liu, Benjamin Johnston, Hung Nguyen, Ludwig Ledl, Ralf Schmid
  • Publication number: 20070296437
    Abstract: An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.
    Type: Application
    Filed: May 9, 2007
    Publication date: December 27, 2007
    Inventors: Benjamin Johnston, Sriram Krishnaswami, Hung Nguyen, Matthias Brunner, Yong Liu
  • Publication number: 20060244467
    Abstract: A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
    Type: Application
    Filed: March 14, 2006
    Publication date: November 2, 2006
    Inventors: Fayez Abboud, Sriram Krishnaswami, Benjamin Johnston, Hung Nguyen, Matthias Brunner, Ralf Schmid, John White, Shinichi Kurita, James Hunter