Patents by Inventor Stefan Pompl

Stefan Pompl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11916059
    Abstract: An ESD protection device may include: a first vertically integrated ESD protection structure comprising a first semiconductor portion, a first contact region disposed on a first side of the first semiconductor portion and a first terminal exposed on a second side of the first semiconductor portion opposite the first side of the first semiconductor portion, a second vertically integrated ESD protection structure comprising a second semiconductor portion, a second contact region disposed on a first side of the second semiconductor portion and a second terminal exposed on a second side of the second semiconductor portion opposite the first side of the second semiconductor portion, an electrical connection layer, wherein the first vertically integrated ESD protection structure and the second vertically integrated ESD protection structure are disposed on the electrical connection layer laterally separated from each other and are electrically connected with each other anti-serially via the electrical connection lay
    Type: Grant
    Filed: August 25, 2021
    Date of Patent: February 27, 2024
    Assignee: Infineon Technologies AG
    Inventors: Andre Schmenn, Stefan Pompl, Damian Sojka, Katharina Umminger
  • Publication number: 20220045046
    Abstract: An ESD protection device may include: a first vertically integrated ESD protection structure comprising a first semiconductor portion, a first contact region disposed on a first side of the first semiconductor portion and a first terminal exposed on a second side of the first semiconductor portion opposite the first side of the first semiconductor portion, a second vertically integrated ESD protection structure comprising a second semiconductor portion, a second contact region disposed on a first side of the second semiconductor portion and a second terminal exposed on a second side of the second semiconductor portion opposite the first side of the second semiconductor portion, an electrical connection layer, wherein the first vertically integrated ESD protection structure and the second vertically integrated ESD protection structure are disposed on the electrical connection layer laterally separated from each other and are electrically connected with each other anti-serially via the electrical connection lay
    Type: Application
    Filed: August 25, 2021
    Publication date: February 10, 2022
    Inventors: Andre SCHMENN, Stefan POMPL, Damian SOJKA, Katharina UMMINGER
  • Patent number: 11127733
    Abstract: An ESD protection device may include: a first vertically integrated ESD protection structure comprising a first semiconductor portion, a first contact region disposed on a first side of the first semiconductor portion and a first terminal exposed on a second side of the first semiconductor portion opposite the first side of the first semiconductor portion, a second vertically integrated ESD protection structure comprising a second semiconductor portion, a second contact region disposed on a first side of the second semiconductor portion and a second terminal exposed on a second side of the second semiconductor portion opposite the first side of the second semiconductor portion, an electrical connection layer, wherein the first vertically integrated ESD protection structure and the second vertically integrated ESD protection structure are disposed on the electrical connection layer laterally separated from each other and are electrically connected with each other anti-serially via the electrical connection lay
    Type: Grant
    Filed: February 6, 2020
    Date of Patent: September 21, 2021
    Assignee: Infineon Technologies AG
    Inventors: Andre Schmenn, Stefan Pompl, Damian Sojka, Katharina Umminger
  • Publication number: 20200176438
    Abstract: An ESD protection device may include: a first vertically integrated ESD protection structure comprising a first semiconductor portion, a first contact region disposed on a first side of the first semiconductor portion and a first terminal exposed on a second side of the first semiconductor portion opposite the first side of the first semiconductor portion, a second vertically integrated ESD protection structure comprising a second semiconductor portion, a second contact region disposed on a first side of the second semiconductor portion and a second terminal exposed on a second side of the second semiconductor portion opposite the first side of the second semiconductor portion, an electrical connection layer, wherein the first vertically integrated ESD protection structure and the second vertically integrated ESD protection structure are disposed on the electrical connection layer laterally separated from each other and are electrically connected with each other anti-serially via the electrical connection lay
    Type: Application
    Filed: February 6, 2020
    Publication date: June 4, 2020
    Inventors: Andre SCHMENN, Stefan POMPL, Damian SOJKA, Katharina UMMINGER
  • Patent number: 10672758
    Abstract: According an embodiment, an electrostatic discharge protection structure includes: a semiconductor layer doped with a dopant of a first doping type, a first well region extending from a surface of the semiconductor layer into the semiconductor layer, wherein the first well region is doped with a dopant of a second doping type opposite the first doping type; a second well region next to the first well region and extending from the surface of the semiconductor layer into the semiconductor layer, wherein the second well region is doped with a dopant of the first doping type; an isolation structure extending from the surface of the semiconductor layer into the semiconductor layer with a depth similar to the depth of at least one of the first well region or the second well region, wherein the isolation structure is arranged laterally adjacent to the first well region and the second well region.
    Type: Grant
    Filed: October 18, 2017
    Date of Patent: June 2, 2020
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Vadim Valentinovic Vendt, Stefan Pompl, Andre Schmenn, Joost Willemen
  • Patent number: 10622346
    Abstract: A method for manufacturing an electronic device includes: providing a semiconductor carrier including first and second vertically integrated electronic structures laterally spaced apart from each other, an electrical connection layer disposed over a first side of the semiconductor carrier and electrically connecting the first and second vertically integrated electronic structures with each other; mounting the semiconductor carrier on a support carrier with the first side of the semiconductor carrier facing the support carrier; thinning the semiconductor carrier from a second side opposite the first side; and removing material of the semiconductor carrier in a separation region between the first and second vertically integrated electronic structures to separate a first semiconductor region of the first vertically integrated electronic structure from a second semiconductor region of the second vertically integrated electronic structure with the first and second vertically integrated electronic structures remain
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: April 14, 2020
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Andre Schmenn, Stefan Pompl, Damian Sojka, Katharina Umminger
  • Publication number: 20180108648
    Abstract: According an embodiment, an electrostatic discharge protection structure includes: a semiconductor layer doped with a dopant of a first doping type, a first well region extending from a surface of the semiconductor layer into the semiconductor layer, wherein the first well region is doped with a dopant of a second doping type opposite the first doping type; a second well region next to the first well region and extending from the surface of the semiconductor layer into the semiconductor layer, wherein the second well region is doped with a dopant of the first doping type; an isolation structure extending from the surface of the semiconductor layer into the semiconductor layer with a depth similar to the depth of at least one of the first well region or the second well region, wherein the isolation structure is arranged laterally adjacent to the first well region and the second well region.
    Type: Application
    Filed: October 18, 2017
    Publication date: April 19, 2018
    Inventors: Vadim Valentinovic Vendt, Stefan Pompl, Andre Schmenn, Joost Willemen
  • Publication number: 20180096984
    Abstract: A method for manufacturing an electronic device includes: providing a semiconductor carrier including first and second vertically integrated electronic structures laterally spaced apart from each other, an electrical connection layer disposed over a first side of the semiconductor carrier and electrically connecting the first and second vertically integrated electronic structures with each other; mounting the semiconductor carrier on a support carrier with the first side of the semiconductor carrier facing the support carrier; thinning the semiconductor carrier from a second side opposite the first side; and removing material of the semiconductor carrier in a separation region between the first and second vertically integrated electronic structures to separate a first semiconductor region of the first vertically integrated electronic structure from a second semiconductor region of the second vertically integrated electronic structure with the first and second vertically integrated electronic structures remain
    Type: Application
    Filed: September 29, 2017
    Publication date: April 5, 2018
    Inventors: Andre SCHMENN, Stefan POMPL, Damian SOJKA, Katharina UMMINGER
  • Patent number: 9881991
    Abstract: A method for manufacturing a semiconductor device and a semiconductor device are disclosed. The method comprises forming a trench in a substrate, partially filling the trench with a first semiconductive material, forming an interface along a surface of the first semiconductive material, and filling the trench with a second semiconductive material. The semiconductor device includes a first electrode arranged along sidewalls of a trench and a dielectric arranged over the first electrode. The semiconductor device further includes a second electrode at least partially filling the trench, wherein the second electrode comprises an interface within the second electrode.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: January 30, 2018
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Michael Stadtmueller, Stefan Pompl, Markus Meyer
  • Patent number: 9583559
    Abstract: In one embodiment a method of forming a compressive polycrystalline semiconductive material layer is disclosed. The method comprises forming a polycrystalline semiconductive seed layer over a substrate and forming a silicon layer by depositing silicon directly on the polycrystalline silicon seed layer under amorphous process conditions at a temperature below 600 C.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: February 28, 2017
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Stefan Pompl, Markus Meyer
  • Patent number: 9508790
    Abstract: A method of forming a semiconductor device includes forming an opening having a sidewall in a substrate and forming a first epitaxial layer in the opening. The first epitaxial layer is formed in a first portion of the sidewall without growing in a second portion of the sidewall. A second epitaxial layer is formed in the opening after forming the first epitaxial layer. The second epitaxial layer is formed in the second portion of the sidewall. The first epitaxial layer is removed after forming the second epitaxial layer.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: November 29, 2016
    Assignee: Infineon Technologies AG
    Inventors: Thomas Popp, Stefan Pompl, Rudolf Berger
  • Publication number: 20160043164
    Abstract: A method for manufacturing a semiconductor device and a semiconductor device are disclosed. The method comprises forming a trench in a substrate, partially filling the trench with a first semiconductive material, forming an interface along a surface of the first semiconductive material, and filling the trench with a second semiconductive material. The semiconductor device includes a first electrode arranged along sidewalls of a trench and a dielectric arranged over the first electrode. The semiconductor device further includes a second electrode at least partially filling the trench, wherein the second electrode comprises an interface within the second electrode.
    Type: Application
    Filed: October 20, 2015
    Publication date: February 11, 2016
    Inventors: Wolfgang Lehnert, Michael Stadtmueller, Stefan Pompl, Markus Meyer
  • Patent number: 9196675
    Abstract: A method for manufacturing a semiconductor device and a semiconductor device are disclosed. The method comprises forming a trench in a substrate, partially filling the trench with a first semiconductive material, forming an interface along a surface of the first semiconductive material, and filling the trench with a second semiconductive material. The semiconductor device includes a first electrode arranged along sidewalls of a trench and a dielectric arranged over the first electrode. The semiconductor device further includes a second electrode at least partially filling the trench, wherein the second electrode comprises an interface within the second electrode.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: November 24, 2015
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Michael Stadtmueller, Stefan Pompl, Markus Meyer
  • Publication number: 20150263083
    Abstract: A method of forming a semiconductor device includes forming an opening having a sidewall in a substrate and forming a first epitaxial layer in the opening. The first epitaxial layer is formed in a first portion of the sidewall without growing in a second portion of the sidewall. A second epitaxial layer is formed in the opening after forming the first epitaxial layer. The second epitaxial layer is formed in the second portion of the sidewall. The first epitaxial layer is removed after forming the second epitaxial layer.
    Type: Application
    Filed: May 28, 2015
    Publication date: September 17, 2015
    Inventors: Thomas Popp, Stefan Pompl, Rudolf Berger
  • Patent number: 9111781
    Abstract: A method of forming a semiconductor device includes forming an opening having a sidewall in a substrate and forming a first epitaxial layer in the opening. The first epitaxial layer is formed in a first portion of the sidewall without growing in a second portion of the sidewall. A second epitaxial layer is formed in the opening after forming the first epitaxial layer. The second epitaxial layer is formed in the second portion of the sidewall. The first epitaxial layer is removed after forming the second epitaxial layer.
    Type: Grant
    Filed: February 24, 2012
    Date of Patent: August 18, 2015
    Assignee: Infineon Technologies AG
    Inventors: Thomas Popp, Stefan Pompl, Rudolf Berger
  • Publication number: 20150194480
    Abstract: In one embodiment a method of forming a compressive polycrystalline semiconductive material layer is disclosed. The method comprises forming a polycrystalline semiconductive seed layer over a substrate and forming a silicon layer by depositing silicon directly on the polycrystalline silicon seed layer under amorphous process conditions at a temperature below 600 C.
    Type: Application
    Filed: March 23, 2015
    Publication date: July 9, 2015
    Inventors: Wolfgang Lehnert, Stefan Pompl, Markus Meyer
  • Patent number: 9012295
    Abstract: In one embodiment a method of forming a compressive polycrystalline semiconductive material layer is disclosed. The method comprises forming a polycrystalline semiconductive seed layer over a substrate and forming a silicon layer by depositing silicon directly on the polycrystalline silicon seed layer under amorphous process conditions at a temperature below 600 C.
    Type: Grant
    Filed: October 25, 2012
    Date of Patent: April 21, 2015
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Stefan Pompl, Markus Meyer
  • Publication number: 20140145305
    Abstract: A method for manufacturing a semiconductor device and a semiconductor device are disclosed. The method comprises forming a trench in a substrate, partially filling the trench with a first semiconductive material, forming an interface along a surface of the first semiconductive material, and filling the trench with a second semiconductive material. The semiconductor device includes a first electrode arranged along sidewalls of a trench and a dielectric arranged over the first electrode. The semiconductor device further includes a second electrode at least partially filling the trench, wherein the second electrode comprises an interface within the second electrode.
    Type: Application
    Filed: January 31, 2014
    Publication date: May 29, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Wolfgang Lehnert, Michael Stadtmueller, Stefan Pompl, Markus Meyer
  • Patent number: 8685828
    Abstract: A method for manufacturing a semiconductor device and a semiconductor device are disclosed. The method comprises forming a trench in a substrate, partially filling the trench with a first semiconductive material, forming an interface along a surface of the first semiconductive material, and filling the trench with a second semiconductive material. The semiconductor device includes a first electrode arranged along sidewalls of a trench and a dielectric arranged over the first electrode. The semiconductor device further includes a second electrode at least partially filling the trench, wherein the second electrode comprises an interface within the second electrode.
    Type: Grant
    Filed: January 14, 2011
    Date of Patent: April 1, 2014
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Michael Stadtmueller, Stefan Pompl, Markus Meyer
  • Publication number: 20130221483
    Abstract: A method of forming a semiconductor device includes forming an opening having a sidewall in a substrate and forming a first epitaxial layer in the opening. The first epitaxial layer is formed in a first portion of the sidewall without growing in a second portion of the sidewall. A second epitaxial layer is formed in the opening after forming the first epitaxial layer. The second epitaxial layer is formed in the second portion of the sidewall. The first epitaxial layer is removed after forming the second epitaxial layer.
    Type: Application
    Filed: February 24, 2012
    Publication date: August 29, 2013
    Applicant: Infineon Technologies AG
    Inventors: Thomas Popp, Stefan Pompl, Rudolf Berger