Patents by Inventor Stefan Pompl

Stefan Pompl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8318575
    Abstract: In one embodiment a method of forming a compressive polycrystalline semiconductive material layer is disclosed. The method comprises forming a polycrystalline semiconductive seed layer over a substrate and forming a silicon layer by depositing silicon directly on the polycrystalline silicon seed layer under amorphous process conditions at a temperature below 600 C.
    Type: Grant
    Filed: February 7, 2011
    Date of Patent: November 27, 2012
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Stefan Pompl, Markus Meyer
  • Publication number: 20120202327
    Abstract: In one embodiment a method of forming a compressive polycrystalline semiconductive material layer is disclosed. The method comprises forming a polycrystalline semiconductive seed layer over a substrate and forming a silicon layer by depositing silicon directly on the polycrystalline silicon seed layer under amorphous process conditions at a temperature below 600 C.
    Type: Application
    Filed: February 7, 2011
    Publication date: August 9, 2012
    Inventors: Wolfgang Lehnert, Stefan Pompl, Markus Meyer
  • Publication number: 20120181656
    Abstract: A method for manufacturing a semiconductor device and a semiconductor device are disclosed. The method comprises forming a trench in a substrate, partially filling the trench with a first semiconductive material, forming an interface along a surface of the first semiconductive material, and filling the trench with a second semiconductive material. The semiconductor device includes a first electrode arranged along sidewalls of a trench and a dielectric arranged over the first electrode. The semiconductor device further includes a second electrode at least partially filling the trench, wherein the second electrode comprises an interface within the second electrode.
    Type: Application
    Filed: January 14, 2011
    Publication date: July 19, 2012
    Inventors: Wolfgang Lehnert, Michael Stadtmueller, Stefan Pompl, Markus Meyer
  • Patent number: 8143659
    Abstract: A capacitor is described which includes a substrate with a doped area of the substrate forming a first electrode of the capacitor. A plurality of trenches is arranged in the doped area of the substrate, the plurality of trenches forming a second electrode of the capacitor. An electrically insulating layer is arranged between each of the plurality of trenches and the doped area for electrically insulating the trenches from the doped area. The doped area includes first open areas and at least one second open area arranged between neighboring trenches of the plurality of trenches, wherein the at least one open area is arranged below the at least one substrate contact. A shortest first distance between neighboring trenches is separated by the first open areas and is shorter than a shortest second distance between neighboring trenches separated by the at least one second open area.
    Type: Grant
    Filed: April 14, 2008
    Date of Patent: March 27, 2012
    Assignee: Infineon Technologies AG
    Inventor: Stefan Pompl
  • Publication number: 20090256239
    Abstract: A capacitor is described which includes a substrate with a doped area of the substrate forming a first electrode of a first capacitor. A plurality of trenches is arranged in the doped area of the substrate, the plurality of trenches forming a second electrode of the capacitor. An electrically insulating layer is arranged between each of the plurality of the trenches and the doped area for electrically insulating the trenches from the doped area. At least one substrate contact structure electrically connects the doped area, wherein the doped area comprises first open areas and at least one second open area arranged between neighboring trenches of the plurality of trenches, wherein the at least one open area is arranged below the at least one substrate contact. A shortest first distance between neighboring trenches is separated by the first open areas and is shorter than a shortest second distance between neighboring trenches separated by the at least one second open area.
    Type: Application
    Filed: April 14, 2008
    Publication date: October 15, 2009
    Inventor: Stefan Pompl
  • Publication number: 20090122460
    Abstract: A semiconductor device includes a semiconductor layer with a first electrode formed by a sintered, conductive, porous granulate and formed in or on the semiconductor layer or in or on at least one insulating layer arranged on the semiconductor layer; furthermore dielectric material covering the surface of the sintered, conductive, porous granulate, and a second electrode at least partially covering the dielectric material, wherein the dielectric material electrically insulates the second electrode from the first electrode.
    Type: Application
    Filed: November 12, 2007
    Publication date: May 14, 2009
    Inventors: Alexander Gschwandtner, Stefan Pompl, Wolfgang Lehnert, Raimund Foerg
  • Patent number: 7307329
    Abstract: An electronic device includes a substrate, an insulating layer arranged on the substrate, the insulating layer having an opening in an area of the surface of the substrate, an active layer arranged within the opening on the surface of the substrate, the active layer including a guard ring in those areas of the surface and of the active layer which are adjacent to the insulating layer, and a contacting layer arranged on an area of the active layer, the contact layer being adjacent to an area of the guard ring. The device may be produced by a process of three-fold self-alignment, to be precise utilizing a spacer process by means of which a diffusion source having a lateral extension far below the lithography limit is made possible.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: December 11, 2007
    Assignee: Infineon Technologies AG
    Inventors: Cartens Ahrens, Ulf Bartl, Bernd Eisener, Wolfgang Hartung, Christian Herzum, Raimund Peichl, Stefan Pompl, Hubert Werthmann
  • Patent number: 7208814
    Abstract: A resistive device includes a resistive region of a semiconductor material that includes a first region and a second region, wherein the first region has a higher dopant concentration than the second region, and wherein a resistance-determining width of a current path through the first region is determined by a portion of a doping boundary between the first region and the second region.
    Type: Grant
    Filed: August 20, 2004
    Date of Patent: April 24, 2007
    Assignee: Infineon Technologies AG
    Inventor: Stefan Pompl
  • Publication number: 20050077579
    Abstract: A resistive device includes a resistive region of a semiconductor material that includes a first region and a second region, wherein the first region has a higher dopant concentration than the second region, and wherein a resistance-determining width of a current path through the first region is determined by a portion of a doping boundary between the first region and the second region.
    Type: Application
    Filed: August 20, 2004
    Publication date: April 14, 2005
    Applicant: Infineon Technologies AG
    Inventor: Stefan Pompl
  • Publication number: 20050035423
    Abstract: An electronic device includes a substrate, an insulating layer arranged on the substrate, the insulating layer having an opening in an area of the surface of the substrate, an active layer arranged within the opening on the surface of the substrate, the active layer including a guard ring in those areas of the surface and of the active layer which are adjacent to the insulating layer, and a contacting layer arranged on an area of the active layer, the contact layer being adjacent to an area of the guard ring. The device may be produced by a process of three-fold self-alignment, to be precise utilizing a spacer process by means of which a diffusion source having a lateral extension far below the lithography limit is made possible.
    Type: Application
    Filed: July 8, 2004
    Publication date: February 17, 2005
    Applicant: Infineon Technologies AG
    Inventors: Cartens Ahrens, Ulf Bartl, Bernd Eisener, Wolfgang Hartung, Christian Herzum, Raidmund Peichl, Stefan Pompl, Hubert Werthmann