Patents by Inventor Stefan Schubert

Stefan Schubert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190039686
    Abstract: Disclosed is a gearbox having a central shaft (1), which is rotatably mounted relative to a stationary frame element (2) by means of at least one central shaft bearing (3), a first sun gear (4a) arranged concentrically around the central shaft (1) and fixedly secured to the frame element (2), a power transmission means (5) that is fixed in relation to the central shaft (1), and at least one first gearbox assembly (6a) rotating relative to the frame element (2) and comprising: a support plate (7), the first section (7a) of which is non-rotatably connected to the central shaft (1) and on the second section (7b) of which a planetary gear (8) is mounted by means of a planetary gear bearing (9), wherein the planetary gear (8) meshes with the first sun gear (4a) and a crank arm (10) engages rigidly with the planetary gear (8); and a driving crank (11), on which the crank arm (10) is hingedly mounted by means of a driving crank-crank arm bearing (12) and which is supported relative to the support plate (7) by means
    Type: Application
    Filed: February 10, 2017
    Publication date: February 7, 2019
    Applicant: Moves Bikes GmbH
    Inventors: Tobias Sprote, Marcus Rochlitzer, Stefan Schubert, Frederik Wassmann, Sixtus Godehard Feindt
  • Patent number: 10163603
    Abstract: A particle beam system includes a particle source to produce a first beam of charged particles. The particle beam system also includes a multiple beam producer to produce a plurality of partial beams from a first incident beam of charged particles. The partial beams are spaced apart spatially in a direction perpendicular to a propagation direction of the partial beams. The plurality of partial beams includes at least a first partial beam and a second partial beam. The particle beam system further includes an objective to focus incident partial beams in a first plane so that a first region, on which the first partial beam is incident in the first plane, is separated from a second region, on which a second partial beam is incident. The particle beam system also a detector system including a plurality of detection regions and a projective system.
    Type: Grant
    Filed: July 19, 2017
    Date of Patent: December 25, 2018
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Dirk Zeidler, Stefan Schubert
  • Patent number: 10147002
    Abstract: A method and an apparatus determine a road condition using a vehicle camera. At least one image is acquired using the camera. A first image area that includes an image of the road surface is determined in the at least one image. A classifier assigns the first image area to at least one class (among pre-established classes) that represents a specific road condition of the road surface. Information regarding this specific road condition is output.
    Type: Grant
    Filed: February 14, 2014
    Date of Patent: December 4, 2018
    Assignees: Conti Temic microelectronic GmbH, Continental Teves AG & Co. OHG
    Inventors: Bernd Hartmann, Dieter Kroekel, Stefan Fritz, Joachim Denzler, Bjoern Froehlich, Michael Kemmler, Stefan Schubert, Eric Bach
  • Patent number: 10121635
    Abstract: A method of operating a charged particle beam system, the method comprises extracting a particle beam from a source; performing a first accelerating of the particles of the beam; forming a plurality of particle beamlets from the beam after the performing of the first accelerating; performing a second accelerating of the particles of the beamlets; performing a first decelerating of the particles of the beamlets after the performing of the second accelerating; deflecting the beamlets in a direction oriented transverse to a direction of propagation of the particles of the beamlets after the performing of the first decelerating; performing a second decelerating of the particles of the beamlets after the deflecting of the beamlets; and allowing the particles of the beamlets to be incident on an object surface after the performing of the second decelerating.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: November 6, 2018
    Assignees: CARL ZEISS MICROSCOPY GMBH, APPLIED MATERIALS ISRAEL LTD.
    Inventors: Stefan Schubert, Thomas Kemen, Rainer Knippelmeyer
  • Publication number: 20170316912
    Abstract: A particle beam system includes a particle source to produce a first beam of charged particles. The particle beam system also includes a multiple beam producer to produce a plurality of partial beams from a first incident beam of charged particles. The partial beams are spaced apart spatially in a direction perpendicular to a propagation direction of the partial beams. The plurality of partial beams includes at least a first partial beam and a second partial beam. The particle beam system further includes an objective to focus incident partial beams in a first plane so that a first region, on which the first partial beam is incident in the first plane, is separated from a second region, on which a second partial beam is incident. The particle beam system also a detector system including a plurality of detection regions and a projective system.
    Type: Application
    Filed: July 19, 2017
    Publication date: November 2, 2017
    Inventors: Dirk Zeidler, Stefan Schubert
  • Publication number: 20170305403
    Abstract: A method for detecting a movement of a vehicle that has been shut down in a parked state, including: detecting a movement variable which describes a movement of the vehicle, integrating the movement variable, in a manner dependent on a movement direction of the vehicle, to obtain a movement travel, and, if the movement travel meets a predetermined condition, making a decision on the movement for detection.
    Type: Application
    Filed: December 8, 2015
    Publication date: October 26, 2017
    Inventors: Christof MARON, Stefan SCHUBERT
  • Publication number: 20170294287
    Abstract: An objective lens arrangement includes a first, second and third pole pieces, each being substantially rotationally symmetric. The first, second and third pole pieces are disposed on a same side of an object plane. An end of the first pole piece is separated from an end of the second pole piece to form a first gap, and an end of the third pole piece is separated from an end of the second pole piece to form a second gap. A first excitation coil generates a focusing magnetic field in the first gap, and a second excitation coil generates a compensating magnetic field in the second gap. First and second power supplies supply current to the first and second excitation coils, respectively. A magnetic flux generated in the second pole piece is oriented in a same direction as a magnetic flux generated in the second pole piece.
    Type: Application
    Filed: June 26, 2017
    Publication date: October 12, 2017
    Inventors: Rainer KNIPPELMEYER, Stefan SCHUBERT
  • Patent number: 9653255
    Abstract: The disclosure provides a scanning particle beam microscope for inspecting an object. The scanning particle beam microscope includes a particle optical system having an objective lens. The microscope further includes a detector system having a particle optical detector component configured to generate an electrostatic field in the beam path of particles emitted from the object. The detector system is configured to spatially filter the emitted particles after the emitted particles have passed through the electrostatic field and to detect a portion of the filtered emitted particles. The particle optical detector component is configured such that the spatial filtering filters the emitted particles according to a kinetic energy of the emitted particles.
    Type: Grant
    Filed: April 14, 2014
    Date of Patent: May 16, 2017
    Assignee: Carl Zeiss Microscopy GmbH
    Inventor: Stefan Schubert
  • Patent number: 9530613
    Abstract: A charged particle beam focusing apparatus includes a charged particle beam generator configured to project simultaneously at least one non-astigmatic charged particle beam and at least one astigmatic charged particle beam onto locations on a surface of a specimen, thereby causing released electrons to be emitted from the locations. The apparatus also includes an imaging detector configured to receive the released electrons from the locations and to form images of the locations from the released electrons. A processor analyzes the image produced by the at least one astigmatic charged particle beam and in response thereto adjusts a focus of the at least one non-astigmatic charged particle beam.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: December 27, 2016
    Assignees: Applied Materials Israel, Ltd., Carl Zeiss Microscopy GmbH
    Inventors: Steven R. Rogers, Rainer K. Knippelmeyer, Thomas Kemen, Stefan Schubert, Nissim Elmaliah
  • Publication number: 20160247663
    Abstract: A method of operating a charged particle beam system, the method comprises extracting a particle beam from a source; performing a first accelerating of the particles of the beam; forming a plurality of particle beamlets from the beam after the performing of the first accelerating; performing a second accelerating of the particles of the beamlets; performing a first decelerating of the particles of the beamlets after the performing of the second accelerating; deflecting the beamlets in a direction oriented transverse to a direction of propagation of the particles of the beamlets after the performing of the first decelerating; performing a second decelerating of the particles of the beamlets after the deflecting of the beamlets; and allowing the particles of the beamlets to be incident on an object surface after the performing of the second decelerating.
    Type: Application
    Filed: September 30, 2014
    Publication date: August 25, 2016
    Applicants: CARL ZEISS MICROSCOPY GMBH, APPLIED MATERIALS ISRAEL LTD.
    Inventors: Stefan SCHUBERT, Thomas KEMEN, Rainer KNIPPELMEYER
  • Publication number: 20160240344
    Abstract: The present invention relates to a charged particle system comprising: a charged particle source; a first multi aperture plate; a second multi aperture plate disposed downstream of the first multi aperture plate, the second multi aperture plate; a controller configured to selectively apply at least first and second voltage differences between the first and second multi aperture plates; wherein the charged particle source and the first and second multi aperture plates are arranged such that each of a plurality of charged particle beamlets traverses an aperture pair, said aperture pair comprising one aperture of the first multi aperture plate and one aperture of the second multi aperture plate, wherein plural aperture pairs are arranged such that a center of the aperture of the first multi aperture plate is, when seen in a direction of incidence of the charged particle beamlet traversing the aperture of the first multi aperture plate, displaced relative to a center of the aperture of the second multi aperture p
    Type: Application
    Filed: April 25, 2016
    Publication date: August 18, 2016
    Inventors: Thomas KEMEN, Rainer KNIPPELMEYER, Stefan SCHUBERT
  • Publication number: 20160181054
    Abstract: An objective lens arrangement includes a first, second and third pole pieces, each being substantially rotationally symmetric. The first, second and third pole pieces are disposed on a same side of an object plane. An end of the first pole piece is separated from an end of the second pole piece to form a first gap, and an end of the third pole piece is separated from an end of the second pole piece to form a second gap. A first excitation coil generates a focusing magnetic field in the first gap, and a second excitation coil generates a compensating magnetic field in the second gap. First and second power supplies supply current to the first and second excitation coils, respectively. A magnetic flux generated in the second pole piece is oriented in a same direction as a magnetic flux generated in the second pole piece.
    Type: Application
    Filed: February 29, 2016
    Publication date: June 23, 2016
    Inventors: Rainer KNIPPELMEYER, Stefan SCHUBERT
  • Patent number: 9324537
    Abstract: The present invention relates to a charged particle system comprising: a charged particle source; a first multi aperture plate; a second multi aperture plate disposed downstream of the first multi aperture plate, the second multi aperture plate; a controller configured to selectively apply at least first and second voltage differences between the first and second multi aperture plates; wherein the charged particle source and the first and second multi aperture plates are arranged such that each of a plurality of charged particle beamlets traverses an aperture pair, said aperture pair comprising one aperture of the first multi aperture plate and one aperture of the second multi aperture plate, wherein plural aperture pairs are arranged such that a center of the aperture of the first multi aperture plate is, when seen in a direction of incidence of the charged particle beamlet traversing the aperture of the first multi aperture plate, displaced relative to a center of the aperture of the second multi aperture p
    Type: Grant
    Filed: June 19, 2014
    Date of Patent: April 26, 2016
    Assignees: APPLIED MATERIALS ISRAEL, LTD., CARL ZEISS MICROSCOPY GMBH
    Inventors: Thomas Kemen, Rainer Knippelmeyer, Stefan Schubert
  • Patent number: 9263233
    Abstract: A charged particle multi-beam inspection system comprises a beam generator directing a plurality of primary charged particle beams onto an object to produce an array of beam spots; an array of a first number of detection elements generating detection signals upon incidence of electrons; imaging optics imaging the array of beam spots onto the array of detection elements; wherein the beam generator includes a multi-aperture plate having an array of a second number of apertures greater than the first number; wherein the beam generator includes a selector having plural different states, wherein, in each of the plural different states, the apertures of a different group of apertures are each traversed by one primary charged particle beam, wherein a number of the apertures of the different group of apertures is equal to the first number.
    Type: Grant
    Filed: September 28, 2014
    Date of Patent: February 16, 2016
    Assignees: CARL ZEISS MICROSCOPY GMBH, APPLIED MATERIALS ISRAEL, LTD.
    Inventors: Dirk Zeidler, Rainer Knippelmeyer, Thomas Kemen, Mario Muetzel, Stefan Schubert, Nissim Elmaliah, Steven Rogers
  • Publication number: 20150371095
    Abstract: This invention relates to a method and apparatus for determining a road condition using a vehicle camera (6), and it includes the following steps: at least one image (I) is taken using the vehicle camera (S10); a first image area (R1) is determined that includes an image of the road surface (1) (S16); said first image area (R1) is fed to a classifier, wherein the classifier assigns at least one class to said first image area that represents a specific road condition (S18); and information is output with respect to this at least one road condition (S20).
    Type: Application
    Filed: February 14, 2014
    Publication date: December 24, 2015
    Inventors: Bernd HARTMANN, Dieter KROEKEL, Stefan FRITZ, Joachim DENZLER, Bjoern FROEHLICH, Michael KEMMLER, Stefan SCHUBERT, Eric BACH
  • Publication number: 20150287568
    Abstract: A charged particle beam focusing apparatus includes a charged particle beam generator configured to project simultaneously at least one non-astigmatic charged particle beam and at least one astigmatic charged particle beam onto locations on a surface of a specimen, thereby causing released electrons to be emitted from the locations. The apparatus also includes an imaging detector configured to receive the released electrons from the locations and to form images of the locations from the released electrons. A processor analyzes the image produced by the at least one astigmatic charged particle beam and in response thereto adjusts a focus of the at least one non-astigmatic charged particle beam.
    Type: Application
    Filed: February 17, 2012
    Publication date: October 8, 2015
    Inventors: Steven R. Rodgers, Rainer K. Knippelmeyer, Thomas Kemen, Stefan Schubert, Nissim Elmaliah
  • Patent number: 9099282
    Abstract: A charged particle beam focusing apparatus includes a charged particle beam generator configured to project simultaneously at least one non-astigmatic charged particle beam and at least one astigmatic charged particle beam onto locations on a surface of a specimen, thereby causing released electrons to be emitted from the locations. The apparatus also includes an imaging detector configured to receive the released electrons from the locations and to form images of the locations from the released electrons. A processor analyzes the image produced by the at least one non-astigmatic charged particle beam and in response thereto adjusts a focus of the at least one non-astigmatic charged particle beam.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: August 4, 2015
    Assignee: APPLIED MATERIALS ISRAEL, LTD.
    Inventors: Steven R. Rogers, Rainer K. Knippelmeyer, Thomas Kemen, Stefan Schubert, Nissim Elmaliah
  • Publication number: 20150090879
    Abstract: A charged particle multi-beam inspection system comprises a beam generator directing a plurality of primary charged particle beams onto an object to produce an array of beam spots; an array of a first number of detection elements generating detection signals upon incidence of electrons; imaging optics imaging the array of beam spots onto the array of detection elements; wherein the beam generator includes a multi-aperture plate having an array of a second number of apertures greater than the first number; wherein the beam generator includes a selector having plural different states, wherein, in each of the plural different states, the apertures of a different group of apertures are each traversed by one primary charged particle beam, wherein a number of the apertures of the different group of apertures is equal to the first number.
    Type: Application
    Filed: September 28, 2014
    Publication date: April 2, 2015
    Inventors: Dirk Zeidler, Rainer Knippelmeyer, Thomas Kemen, Mario Muetzel, Stefan Schubert, Nissim Elmaliah, Steven Rogers
  • Publication number: 20150008331
    Abstract: The present invention relates to a charged particle system comprising: a charged particle source; a first multi aperture plate; a second multi aperture plate disposed downstream of the first multi aperture plate, the second multi aperture plate; a controller configured to selectively apply at least first and second voltage differences between the first and second multi aperture plates; wherein the charged particle source and the first and second multi aperture plates are arranged such that each of a plurality of charged particle beamlets traverses an aperture pair, said aperture pair comprising one aperture of the first multi aperture plate and one aperture of the second multi aperture plate, wherein plural aperture pairs are arranged such that a center of the aperture of the first multi aperture plate is, when seen in a direction of incidence of the charged particle beamlet traversing the aperture of the first multi aperture plate, displaced relative to a center of the aperture of the second multi aperture p
    Type: Application
    Filed: June 19, 2014
    Publication date: January 8, 2015
    Inventors: Thomas KEMEN, Rainer KNIPPELMEYER, Stefan SCHUBERT
  • Publication number: 20140306110
    Abstract: The disclosure provides a scanning particle beam microscope for inspecting an object. The scanning particle beam microscope includes a particle optical system having an objective lens. The microscope further includes a detector system having a particle optical detector component configured to generate an electrostatic field in the beam path of particles emitted from the object. The detector system is configured to spatially filter the emitted particles after the emitted particles have passed through the electrostatic field and to detect a portion of the filtered emitted particles. The particle optical detector component is configured such that the spatial filtering filters the emitted particles according to a kinetic energy of the emitted particles.
    Type: Application
    Filed: April 14, 2014
    Publication date: October 16, 2014
    Inventor: Stefan Schubert