Abstract: A method determines the servicing requirements of axes of a robot arm of an industrial robot. The data of a movement sequence of at least one axis during at least one working cycle of the industrial robot is made available. The rotational movements of the at least one axis are established on the basis of the data, and a servicing interval for the at least one axis is determined by an assessment of the rotational movements established. A system for determining a servicing requirement performs the method.

Abstract: The invention is based on refining and developing an arrangement such that reliable diagnosis of the state and/or of the operating parameters of an apparatus can be performed inexpensively.

Abstract: A heat exchanger that includes a collecting tank having a collecting tank edge, a tube plate including a tube plate edge, and a seal arrangement with a seal between the collecting tank and tube plate. The heat exchanger further includes a seal support frame, and the seal is arranged on the seal support frame and the seal is inlaid together with the seal support frame between the tube plate edge and the collecting tank edge.

Abstract: The invention relates to a layer system comprising a contact element (5) and a substrate (1). A multilayer system (14) that is disposed on the substrate (1) has at least one top layer (3; 4) and a bottom layer (2; 3) as well as a contact element (5) which penetrates the at least one top layer (3; 4) and contacts the bottom layer (2; 3). The invention further relates to a method for producing a contact element (5) of a multi-layer system (14).

Abstract: A method of manufacturing integrated circuits includes determining a process-induced displacement (e.g., a stress-induced displacement) between primary structures on a substrate and providing a photomask with mask features assigned to the primary structures. The distances between the mask features are set such that the process-induced displacement is compensated.

Abstract: A method determines the wear of axles of a robot arm of an industrial robot. A torque profile of at least one axle taken during at least one working cycle of the industrial robot is used as a basis for an analysis. The torque profile is analyzed for portions of the torque profile that exceed a previously fixed torque band, and current axial wear is determined by assessing the frequency and/or the curve profile of the portions of the torque profile. A system is provided for determining the wear.

Abstract: A drive system of a forming press for driving the plunger with a crank mechanism controllable by a servomotor is refined in such a way that on the one hand a high pressure force is achievable with the available torques of servomotors and that on the other hand the technical complexity of the drive is reduced during the design of the drive with multiple mechanically synchronized pressure points and also with pressure points that can each be controlled independently of one another.

Abstract: A method assesses a state of at least one axial joint of an industrial robot, on the basis of data of a mechanical backlash present at the axial joint of the industrial robot, a state of wear of the axial joint being determined. On the basis of data of a torque profile, a first loading state of the axial joint is determined at the axial joint during at a first working cycle of the industrial robot. On a basis of data of a movement sequence at the axial joint during a second working cycle of the industrial robot, a second loading state of the axial joint is determined. An assessment of the state is carried out by pre-assessing the state of wear, the first loading state and the second loading state and a subsequent comparison with an empirically obtained comparison value matrix.

Abstract: A method measures the backlash at an axial joint of an industrial robot having a first and a second robot knuckle that are movably connected to each other in a direction of rotation by the axial joint. A load-transmitting device applies a predeterminable force alternately in a measuring line to the first robot knuckle, connected to the free end of a robot arm. A deflection sensor measures the deflection of the first robot knuckle at a predetermined distance from the axis of rotation of the axial joint, and an evaluation device connected to the displacement sensor calculates a turning angle of the first robot knuckle as a measure of a backlash present at the axial joint, taking into account the geometrical arrangement data in the measurement of the deflection sensor and the industrial robot and also the measured deflection.

Abstract: A method determines the servicing requirements of axes of a robot arm of an industrial robot. The data of a movement sequence of at least one axis during at least one working cycle of the industrial robot is made available. The rotational movements of the at least one axis are established on the basis of the data, and a servicing interval for the at least one axis is determined by an assessment of the rotational movements established. A system for determining a servicing requirement performs the method.

Abstract: A method determines the wear of axes of a robot arm of an industrial robot. A torque profile of at least one axis taken during at least one working cycle of the industrial robot is used as a basis for an analysis. The torque profile is analyzed for portions of the torque profile that exceed a previously fixed torque band, and current axial wear is determined by assessing the frequency and/or the curve profile of the portions of the torque profile. A system is provided for determining the wear.

Abstract: A method assesses a state of at least one axial joint of an industrial robot, on the basis of data of a mechanical backlash present at the axial joint of the industrial robot, a state of wear of the axial joint being determined. On the basis of data of a torque profile, a first loading state of the axial joint is determined at the axial joint during at a first working cycle of the industrial robot. On a basis of data of a movement sequence at the axial joint during a second working cycle of the industrial robot, a second loading state of the axial joint is determined. An assessment of the state is carried out by pre-assessing the state of wear, the first loading state and the second loading state and a subsequent comparison with an empirically obtained comparison value matrix.

Abstract: A method measures the backlash at an axial joint of an industrial robot having a first and a second robot knuckle that are movably connected to each other in a direction of rotation by the axial joint. A load-transmitting device applies a predeterminable force alternately in a measuring line to the first robot knuckle, connected to the free end of a robot arm. A deflection sensor measures the deflection of the first robot knuckle at a predetermined distance from the axis of rotation of the axial joint, and an evaluation device connected to the displacement sensor calculates a turning angle of the first robot knuckle as a measure of a backlash present at the axial joint, taking into account the geometrical arrangement data in the measurement of the deflection sensor and the industrial robot and also the measured deflection.

Abstract: A process for producing a sensor membrane substrate, in particular, for a mass flow sensor or a pressure sensor, the substrate having on its front a membrane, which is fixed at the edge of an opening that is etched free from the back. The process includes the following steps: providing a substrate; local thickening the substrate in an area on the front opposite the edge, the thickened portion having a continuous transition to the substrate; depositing a membrane layer on the front having the locally oxidized area; and etching free the opening from the back to clear the membrane in such a way that the edge is located underneath the thickened area.

Abstract: With a sensor and method, it is possible for platinum resistor elements to be used advantageously as heating elements, temperature sensors, printed circuit traces, or as chemically resistant electron beam sensitive layers. To ensure a long-lasting adhesion of the platinum resistance layer to a dielectric substrate, even during exposure to temperatures which are elevated over ambient temperature and under dry and most atmospheric conditions, a thin adhesion layer of platinum silicide, for example, is deposited between the platinum resistance layer and the dielectric substrate. Resistor elements patterned from the platinum layer can advantageously be used in temperature sensors, mass flow sensors, chemical sensors, gas sensors, or humidity sensors.

Abstract: A sensor has a membrane, on which at least one resistor element is situated. The membrane has a membrane layer which is composed of a plurality of partial layers. In addition, a covering layer is provided which is composed of a plurality of partial layers. The partial layers of the membrane and the covering layer are selected so that both in the membrane and in the covering layer light tensile stresses are set, the tensile stresses preferably being roughly the same.

Abstract: In a mass flow sensor having a frame of monocrystalline silicon and a membrane fixed therein, a heating element and, if indicated, temperature-measuring elements are provided on the membrane. A heat-conducting element, which extends from the membrane across the frame, is provided in the edge area of the membrane. The heating element, the heat-conducting element and, if indicated, temperature-measuring elements are patterned out of a single metal layer.

Abstract: In a measuring element for a flow sensor and a method for manufacturing the measuring element, a heater, a temperature sensor, and a printed circuit trace are patterned out of a platinum layer. Furthermore, an interconnection region is used for contacting the measuring chip with bonding wires. An additional metal layer is provided for the interconnection region.

Abstract: A force sensor employing a silicon chip having a force application area on a top surface and attached to a support at a bottom surface. Piezoresistive elements are arranged on the silicon chip in areas of high mechanical tension and produce signals. Circuits, which receive the signals produced by the piezoresistive elements, are arranged on the silicon chip in areas of low mechanical tension. The areas of mechanical tension may be influenced by providing grooves and/or recesses in the bottom surface of the silicon chip and by providing grooves in the top surface of the silicon chip.

Abstract: In a pressure sensor, a force is transferred via a pressure plunger end made of relatively hard material onto a measurement element including a sensor membrane on a support. The sensor membrane is part of a micromechanical arrangement made of silicon. A metal structure made of a metal of lower hardness compared with the hardness of the material of the pressure plunger end is applied onto the sensor membrane. This metal structure can be impressed and plastically deformed with increased force by the contact surface of the pressure plunger end, in such a way that conforming contact of the contact surface is achieved, and potential angular errors are compensated for.