Patents by Inventor Stephan A. Cohen

Stephan A. Cohen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Carbon-free hydrogen silsesquioxane with dielectric constant less than 3.2 annealed in hydrogen for integrated circuits
    Patent number: 5530293
    Abstract: An insulator for covering an interconnection wiring level in a surface thereof on a semiconductor substrate containing semiconductor devices formed by curing a flowable oxide layer and annealing is provided. The annealing is carried out in the presence of hydrogen and aluminum to obtain a dielectric constant of the oxide layer to a value below 3.2. Also provided is electrical insulation between neighboring devices using the flowable oxide which is cured and annealed. In this case, the annealing can be carried out in hydrogen with or without the presence of aluminum.
    Type: Grant
    Filed: November 28, 1994
    Date of Patent: June 25, 1996
    Assignee: International Business Machines Corporation
    Inventors: Stephan A. Cohen, Vincent J. McGahay, Ronald R. Uttecht