Patents by Inventor Stephane Pocas
Stephane Pocas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10797103Abstract: A method for producing a bolometric detector comprising producing a stack, on an interconnect level of a read-out circuit, comprising a sacrificial layer positioned between a carrier layer and an etch stop layer, the sacrificial layer comprising a mineral material; producing a conducting via passing through the stack such that it is in contact with a conducting portion of said interconnect level; depositing a conducting layer onto the carrier layer and the via; etching the conducting layer and the carrier layer, forming a bolometer membrane electrically connected to the via by a remaining portion of the conducting layer that covers an upper part of the via; and elimination of the sacrificial layer by selective chemical etching, and such that the membrane is suspended by the via.Type: GrantFiled: May 2, 2018Date of Patent: October 6, 2020Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Patrick Leduc, Sebastien Cortial, Stephane Pocas, Jean-Jacques Yon
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Publication number: 20180331155Abstract: A method for producing a bolometric detector comprising: producing a stack, on an interconnect level of a read-out circuit, comprising a sacrificial layer positioned between a carrier layer and an etch stop layer, the sacrificial layer comprising a mineral material; producing a conducting via passing through the stack such that it is in contact with a conducting portion of said interconnect level; depositing a conducting layer onto the carrier layer and the via; etching the conducting layer and the carrier layer, forming a bolometer membrane electrically connected to the via by a remaining portion of the conducting layer that covers an upper part of the via; elimination of the sacrificial layer by selective chemical etching, and such that the membrane is suspended by the via.Type: ApplicationFiled: May 2, 2018Publication date: November 15, 2018Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Patrick LEDUC, Sebastien CORTIAL, Stephane POCAS, Jean-Jacques YON
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Patent number: 10060797Abstract: A device for detecting electromagnetic radiation, including a readout circuit, which is located in a substrate, and an electrical connection pad, which is placed on the substrate, including a metal section that is raised above the substrate and electrically connected to the readout circuit. The detection device furthermore includes a protection wall that extends under the raised metal section so as to define therewith at least one portion of a cavity, and what is called a reinforcing layer section that is located in the cavity and on which the raised metal section rests.Type: GrantFiled: February 24, 2017Date of Patent: August 28, 2018Assignees: Commissariat A L'Energie Atomique et aux Energies Alternatives, ULISInventors: Stephane Pocas, Agnes Arnaud, Sebastien Cortial, Jean-Jacques Yon
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Patent number: 9933309Abstract: A device for detecting electromagnetic radiation is provided, including a substrate; a matrix of thermal detectors disposed on the substrate; and a structure encapsulating the matrix of thermal detectors, including an encapsulating layer extending continuously around and above the matrix of thermal detectors so as to define with the substrate a cavity in which the matrix of thermal detectors is disposed, the encapsulating layer including at least one internal bearing section, which bears directly against the substrate between two adjacent thermal detectors of said matrix, said at least one internal bearing section including a sidewall and a peripheral wall, the sidewall being separate from the peripheral wall in a plane parallel to a plane of the substrate, and the peripheral wall encircling the matrix of thermal detectors.Type: GrantFiled: February 19, 2016Date of Patent: April 3, 2018Assignee: Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Jean-Jacques Yon, Geoffroy Dumont, Laurent Carle, Pierre Imperinetti, Stephane Pocas
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Patent number: 9851254Abstract: A device for detecting electromagnetic radiation, including a substrate; at least one thermal detector, placed on the substrate, including an absorbing membrane suspended above the substrate; and an encapsulating structure encapsulating the thermal detector, including an encapsulating layer extending around and above the thermal detector so as to define with the substrate a cavity in which the thermal detector is located; wherein the encapsulating layer includes at least one through-orifice that is what is referred to as an exhaust vent, each exhaust vent being placed so that at least one thermal detector has a single exhaust vent located facing the corresponding absorbing membrane, preferably plumb with the center of said absorbing membrane.Type: GrantFiled: February 19, 2016Date of Patent: December 26, 2017Assignee: Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Geoffroy Dumont, Laurent Carle, Pierre Imperinetti, Stephane Pocas, Jean-Jacques Yon
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Patent number: 9831371Abstract: A device for detecting electromagnetic radiation is provided, including a substrate; at least one thermal detector placed on the substrate; and an encapsulating structure encapsulating the detector, including a thin encapsulating layer of a material that is transparent to said radiation, extending around and above the detector so as to define with the substrate a cavity in which the detector is located; wherein the thin encapsulating layer comprises a peripheral wall that encircles the detector, and that has a cross section, in a plane parallel to the plane of the substrate, of square or rectangular shape, corners of which are rounded.Type: GrantFiled: February 19, 2016Date of Patent: November 28, 2017Assignee: Commissariat A L'Energie Atomique et aux Engergies AltrnativesInventors: Geoffroy Dumont, Laurent Carle, Pierre Imperinetti, Stephane Pocas, Jean-Jacques Yon
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Patent number: 9784623Abstract: A bolometric detector of LWIR wavelengths, including: a substrate; a membrane suspended above the substrate by supporting elements; an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each MIM structure and with a dielectric element positioned between the lower and upper metal elements; a thermometric element comprising at least one thermometric material; wherein: the membrane includes the upper metal element, the thermometric material and one portion of the dielectric element of each MIM structure, the upper metal elements of at least two MIM structure have different dimensions relatively to each other in the main plane of the membrane, and the dielectric element of each of the MIM structures includes at least one of the following materials having vibrational modes in the LWIR range: Al2O3, AlN, TiO2.Type: GrantFiled: September 25, 2015Date of Patent: October 10, 2017Assignee: Commissariat à l'énergie atomique et aux énergies alternativesInventors: Ujwol Palanchoke, Salim Boutami, Stephane Pocas, Wilfried Rabaud
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Publication number: 20170241840Abstract: A device for detecting electromagnetic radiation, including a readout circuit, which is located in a substrate, and an electrical connection pad, which is placed on the substrate, including a metal section that is raised above the substrate and electrically connected to the readout circuit. The detection device furthermore includes a protection wall that extends under the raised metal section so as to define therewith at least one portion of a cavity, and what is called a reinforcing layer section that is located in the cavity and on which the raised metal section rests.Type: ApplicationFiled: February 24, 2017Publication date: August 24, 2017Applicants: Commissariat a l'energie atomique et aux energies alternatives, ULISInventors: Stephane POCAS, Agnes ARNAUD, Sebastien CORTIAL, Jean-Jacques YON
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Publication number: 20160245701Abstract: The invention relates to a device for detecting electromagnetic radiation, comprising: a substrate; a matrix of thermal detectors, which matrix is placed on the substrate; and a detector-encapsulating structure, including an encapsulating layer extending around and above the matrix of detectors so as to define with the substrate a cavity in which the matrix of detectors is located; in which the encapsulating layer comprises at least one section, which is what is referred to as an internal bearing section, located between two adjacent detectors, and which bears directly against the substrate.Type: ApplicationFiled: February 19, 2016Publication date: August 25, 2016Applicant: Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Jean-Jacques YON, Geoffroy DUMONT, Laurent CARLE, Pierre IMPERINETTI, Stephane POCAS
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Publication number: 20160247955Abstract: The invention relates to a device for detecting electromagnetic radiation, comprising: a substrate (3); at least one thermal detector (2), placed on the substrate; and an encapsulating structure (5) encapsulating the detector, including a thin encapsulating layer (6) made of a material that is transparent to said radiation, extending around and above the detector so as to define with the substrate a cavity (4) in which the detector (2) is located; characterized in that the thin encapsulating layer comprises a peripheral wall (6a) that encircles the detector, and that has a cross section, in a plane parallel to the plane of the substrate, of square or rectangular shape the corners (6a-3) of which are rounded.Type: ApplicationFiled: February 19, 2016Publication date: August 25, 2016Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: GEOFFROY DUMONT, LAURENT CARLE, PIERRE IMPERINETTI, STEPHANE POCAS, JEAN-JACQUES YON
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Publication number: 20160245702Abstract: A device for detecting electromagnetic radiation, including a substrate; at least one thermal detector, placed on the substrate, including an absorbing membrane suspended above the substrate; and an encapsulating structure encapsulating the thermal detector, including an encapsulating layer extending around and above the thermal detector so as to define with the substrate a cavity in which the thermal detector is located; wherein the encapsulating layer includes at least one through-orifice that is what is referred to as an exhaust vent, each exhaust vent being placed so that at least one thermal detector has a single exhaust vent located facing the corresponding absorbing membrane, preferably plumb with the centre of said absorbing membrane.Type: ApplicationFiled: February 19, 2016Publication date: August 25, 2016Applicant: Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Geoffroy DUMONT, Laurent CARLE, Pierre IMPERINETTI, Stephane POCAS, Jean-Jacques YON
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Patent number: 9389125Abstract: An infrared detection device including an infrared heat detector and a connection pad each spaced apart from an etching stop layer by a non-zero distance substantially equal relatively to each other, wherein first and second electrically conducting vias are respectively electrically connected to first and second portions of a metal line of a penultimate level of electrical interconnections, and wherein an empty space formed in a first inter-metal dielectric layer surrounds the first electrically conducting via and extends under the infrared heat detector.Type: GrantFiled: December 16, 2013Date of Patent: July 12, 2016Assignee: Commissariat à l'énergie atomique et aux énergies alternativesInventors: Jean-Jacques Yon, Geoffroy Dumont, Pierre Imperinetti, Stephane Pocas
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Publication number: 20160091371Abstract: A bolometric detector of LWIR wavelengths, including: a substrate; a membrane suspended above the substrate by supporting elements; an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each MIM structure and with a dielectric element positioned between the lower and upper metal elements; a thermometric element comprising at least one thermometric material; wherein: the membrane includes the upper metal element, the thermometric material and one portion of the dielectric element of each MIM structure, the upper metal elements of at least two MIM structure have different dimensions relatively to each other in the main plane of the membrane, and the dielectric element of each of the MIM structures includes at least one of the following materials having vibrational modes in the LWIR range: Al2O3, AlN, TiO2.Type: ApplicationFiled: September 25, 2015Publication date: March 31, 2016Applicant: Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Ujwol PALANCHOKE, Salim BOUTAMI, Stephane POCAS, Wilfried RABAUD
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Patent number: 8975156Abstract: A method of sealing a first wafer and a second wafer each made of semiconducting materials, including: implanting a metallic species in at least the first wafer, assembling the first wafer and the second wafer by molecular bonding, and after the molecular bonding, forming a metallic ohmic contact including alloys formed between the implanted metallic species and the semiconducting materials of the first wafer and the second wafer, the metallic ohmic contact being formed at an assembly interface between the first wafer and the second wafer, wherein the forming includes causing the implanted metallic species to diffuse towards the interface between the first wafer with the second wafer and beyond the interface.Type: GrantFiled: December 21, 2004Date of Patent: March 10, 2015Assignee: Commissariat a l'Energie AtomiqueInventors: Stephane Pocas, Hubert Moriceau, Jean-Francois Michaud
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Patent number: 8895924Abstract: This bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared or terahertz wavelengths comprises a substrate and an array of bolometric micro-plates for detecting said radiation that are suspended above the substrate by support arms. It comprises a metallic membrane located above and around each micro-plate and in which openings are formed; said openings in metallic membrane are periodically located in it along at least one predetermined axis with a period equal to or less than ? n , where ? is a wavelength in the wavelength range that is to be detected and n is the average refraction index of the medium that separates the micro-plate from metallic membrane.Type: GrantFiled: November 15, 2011Date of Patent: November 25, 2014Assignee: Commissariat a l'Energie Atomique et aux Energies AlternativesInventors: Geoffroy Dumont, Agnès Arnaud, Salim Boutami, Pierre Imperinetti, Alexandre Mary, Stéphane Pocas, Wilfried Rabaud
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Publication number: 20140319350Abstract: An infrared detection device including an infrared heat detector and a connection pad each spaced apart from an etching stop layer by a non-zero distance substantially equal relatively to each other, wherein first and second electrically conducting vias are respectively electrically connected to first and second portions of a metal line of a penultimate level of electrical interconnections, and wherein an empty space formed in a first inter-metal dielectric layer surrounds the first electrically conducting via and extends under the infrared heat detector.Type: ApplicationFiled: December 16, 2013Publication date: October 30, 2014Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALTInventors: Jean-Jacques YON, Geoffroy DUMONT, Pierre IMPERINETTI, Stephane POCAS
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Patent number: 8598528Abstract: A bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared wavelengths includes a substrate; an array of bolometric micro-plates for detecting the radiation suspended above the substrate by support arms; and metallic reflectors formed on the substrate underneath the micro-plates to reflect that portion of the radiation which has passed through said micro-plates without being absorbed by the latter. For each micro-plate, a corresponding reflector includes a first part located underneath the micro-plate which extends as a second part not positioned underneath the micro-plate. At least the second part has surface texturing in a repeating pattern for coupling a portion of incident radiation on the second part to a guided wave that propagates towards the first part of the reflector positioned underneath micro-plate.Type: GrantFiled: September 21, 2011Date of Patent: December 3, 2013Assignee: Commissariat a l'Energie Atomique et aux Energies AlternativesInventors: Salim Boutami, Agnès Arnaud, Geoffroy Dumont, Pierre Imperinetti, Alexandre Mary, Stéphane Pocas, Wilfried Rabaud
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Publication number: 20120153151Abstract: This bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared or terahertz wavelengths comprises a substrate and an array of bolometric micro-plates for detecting said radiation that are suspended above the substrate by support arms. It comprises a metallic membrane located above and around each micro-plate and in which openings are formed; said openings in metallic membrane are periodically located in it along at least one predetermined axis with a period equal to or less than ? n , where ? is a wavelength in the wavelength range that is to be detected and n is the average refraction index of the medium that separates the micro-plate from metallic membrane.Type: ApplicationFiled: November 15, 2011Publication date: June 21, 2012Applicant: Commissariat A L'Energie Atomique Et Aux Energie AlternativesInventors: Geoffroy DUMONT, Agnès ARNAUD, Salim BOUTAMI, Pierre IMPERINETTI, Alexandre MARY, Stéphane POCAS, Wilfried RABAUD
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Publication number: 20120104258Abstract: A bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared wavelengths includes a substrate; an array of bolometric micro-plates for detecting the radiation suspended above the substrate by support arms; and metallic reflectors formed on the substrate underneath the micro-plates to reflect that portion of the radiation which has passed through said micro-plates without being absorbed by the latter. For each micro-plate, a corresponding reflector includes a first part located underneath the micro-plate which extends as a second part not positioned underneath the micro-plate. At least the second part has surface texturing in a repeating pattern for coupling a portion of incident radiation on the second part to a guided wave that propagates towards the first part of the reflector positioned underneath micro-plate.Type: ApplicationFiled: September 21, 2011Publication date: May 3, 2012Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Salim BOUTAMI, Agnès ARNAUD, Geoffroy DUMONT, Pierre IMPERINETTI, Alexandre MARY, Stéphane POCAS, Wilfried RABAUD
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Patent number: 7906362Abstract: An assembly method to enable local electrical bonds between zones located on a face of a first substrate and corresponding zones located on a face of a second substrate, the faces being located facing each other, at least one of the substrates having a surface topography. The method forms an intermediate layer including at least one burial layer on the face of the substrate or substrates having a surface topography to make it (them) compatible with molecular bonding of the faces of substrates to each other from a topographic point of view, resistivity and/or thickness of the intermediate layer being chosen to enable the local electrical bonds, brings the two faces into contact, the substrates positioned to create electrical bonds between areas on the first substrate and corresponding areas on the second substrate, and bonds the faces by molecular bonding.Type: GrantFiled: June 29, 2005Date of Patent: March 15, 2011Assignee: Commissariat a l'Energie AtomiqueInventors: Guy Feuillet, Hubert Moriceau, Stephane Pocas, Eric Jalaguier, Norbert Moussy