Abstract: A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.

Abstract: An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample in either ambient air or fluid includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value.

Abstract: A method of operating a probe-based instrument includes providing a probe assembly and a probe holder and oscillating a probe of the probe assembly with an actuator that generates oscillation energy. The method also includes mounting the probe assembly on the probe holder so as to lessen interference with the oscillation energy coupled to the tip of the probe. A corresponding probe assembly includes a base having two substantially opposed surfaces and a cantilever extending from the base and supporting a tip. The probe assembly is mounted in a probe holder such that a probe holder surface contacts one of the opposed surfaces. The one opposed surface preferably includes at least one opening such that the surface area of the one opposed surface is substantially less than the surface area of the probe holder surface.

Abstract: The present invention provides an apparatus and method for nucleotide or DNA sequencing by monitoring the molecular charge configuration as the DNA moves through a protein that is capable of transcribing the DNA. The apparatus and method provides a nanoscale electrometer that immobilizes the protein. The protein receives the DNA and transcribes the DNA. The nanoscale electrometer is a sensitive device that is capable of sensing and measuring the electronic charge that is released during the transcription process. The apparatus and method of the present invention further provides monitoring means that are attached to the nanoscale electrometer to monitor the electronic charge configuration as the DNA moves through the protein. Once the electronic charge configuration is established, a correlation is computed, using computing means, between the electronic charge configuration and a nucleotide signature of the DNA.

Abstract: A method of making a probe having a cantilever and a tip include providing a substrate having a surface and forming a tip extending substantially orthogonally from the surface. The method includes depositing an etch stop layer on the substrate, whereby the etch stop layer protects the tip during process. A silicon nitride layer is then deposited on the etch stop layer. An etch operation is used to release the cantilever and expose the etch stop layer protecting the tip. Preferably, the tip is silicon and the cantilever supporting the tip, preferably via the etch stop layer, is silicon nitride. A probe for a surface analysis instrument made according to the method includes a tip and a silicon nitride cantilever having a thickness defined during the deposition process.

Abstract: A method of fabricating carbon nanotubes in a nanotube growth apparatus including executing a nanotube growth process recipe and monitoring a safety condition during the executing step. The executing step is interlocked to the monitoring step such that the executing step can be aborted based on the output of the monitoring step.

Abstract: A carbon nanotube fabricating system and method that employs control automation to ensure safety during the fabrication of nanotubes in a variety of applications. A method of producing carbon nanotubes in a process chamber includes executing a nanotube growth recipe and purging oxygen from the process chamber in response to the executing step. The purge step is performed by flowing an inert gas through the process chamber at appropriate times and for predetermined durations during the fabrication process.

Abstract: A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.

Abstract: A tire sensor assembly that is embedded in an elastomeric tire at a particular radial depth inwardly from a contact patch of the tire includes a flexible generally pyramid-shaped body and a pair of first strain sensors disposed on first opposed faces of the pyramid-shaped body, the first strain sensors detecting a force in a first direction. In addition, the assembly includes a pair of second strain sensors disposed on second opposed faces of the pyramid-shaped body, the second strain sensors detecting a force in a second direction. Moreover, each face of the first and second opposed faces is non-planar. Preferably, the first and second opposed faces of the pyramid-shaped body are curved and generally symmetrical about an axis extending longitudinally through the apex of the body so as to allow adjustment of the sensitivity of the sensor assembly generally independent of the radial depth.

Abstract: An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample in either ambient air or fluid includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value.

Abstract: An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample in either ambient air or fluid includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value.

Abstract: A tire sensor assembly that is embedded in an elastomeric tire at a particular radial depth inwardly from a contact patch of the tire includes a flexible generally pyramid-shaped body and a pair of first strain sensors disposed on first opposed faces of the pyramid-shaped body, the first strain sensors detecting a force in a first direction. In addition, the assembly includes a pair of second strain sensors disposed on second opposed faces of the pyramid-shaped body, the second strain sensors detecting a force in a second direction. Moreover, each face of the first and second opposed faces is non-planar. Preferably, the first and second opposed faces of the pyramid-shaped body are curved and generally symmetrical about an axis extending longitudinally through the apex of the body so as to allow adjustment of the sensitivity of the sensor assembly generally independent of the radial depth.

Abstract: The present invention provides an apparatus and method for nucleotide or DNA sequencing by monitoring the molecular charge configuration as the DNA moves through a protein that is capable of transcribing the DNA. The apparatus and method provides a nanoscale electrometer that immobilizes the protein. The protein receives the DNA and transcribes the DNA. The nanoscale electrometer is a sensitive device that is capable of sensing and measuring the electronic charge that is released during the transcription process. The apparatus and method of the present invention further provides monitoring means that are attached to the nanoscale electrometer to monitor the electronic charge configuration as the DNA moves through the protein. Once the electronic charge configuration is established, a correlation is computed, using computing means, between the electronic charge configuration and a nucleotide signature of the DNA.

Abstract: A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.

Abstract: A bimorph spiral which exhibits a shape-altering response to thermal radiation and is dimensioned to have a focussing effect on light, such as a visible light, by acting as a quasi-Fresnel element. The focussing effect varies as the shape of the bimorph spiral changes due to absorption of thermal radiation. An array of such bimorph spirals can be used for efficient, high-resolution and rapid uncooled photothermal spectroscopy.

Abstract: Thermal drift and acoustic vibrations in the AFM are reduced using a probe-based detection device that references the topography measurement of the AFM to the sample surface in the proximity of the measurement probe. A differential measurement is made between the reference probe and the measurement probe for high sensitivity roughness quantification and defect detection. Multi-probe arrays may be used for large area defect detection with immunity from thermal and acoustic noise sources.

Abstract: Thermal drift and acoustic vibrations in the AFM are reduced using a probe-based detection device that references the topography measurement of the AFM to the sample surface in the proximity of the measurement probe. A differential measurement is made between the reference probe and the measurement probe for high sensitivity roughness quantification and defect detection. Multi-probe arrays may be used for large area defect detection with immunity from thermal and acoustic noise sources.

Abstract: An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value. The AFM includes a first feedback circuit nested within a second feedback circuit, wherein the first feedback circuit generates a cantilever control signal in response to vertical displacement of the self-actuated cantilever during a scanning operation, and the second feedback circuit is responsive to the cantilever control signal to generate a position control signal.

Abstract: A method for making a silicon stylus protruding through a nitride layer is used to fabricate nitride micro-apertures, silicon styluses supported by nitride cantilever arms and charge sensitive silicon styluses supported by nitride cantilever arms. The method uses an anisotropic dry etch to define the apertures of the nitride micro-apertures and the apexes of the silicon styluses. Nitride apertures made by this method are useful for supporting micro-electronics and micro-optical devices. Surface probing devices with silicon styluses supported by nitride cantilever arms have applications in AFM and STM and are particularly useful in applications that require an electrical connection between the silicon stylus and external circuitry through the cantilever arm.

Abstract: This microscope apparatus comprises two probes. The first probe is configured to interact with and measure characteristics of surfaces within an effective measurement distance of the first probe. This probe could be contact type, non-contact type, constant force mode, or constant height mode. A combination of actuation devices positions the first probe over a surface of a sample. The surface is scanned at high speeds in search of a target area. When a target area is found, a scanner moves the sample so that a second contact type probe with a sharp tip is positioned over the target area. The second probe is activated and the target area is scanned at low speeds and high resolution. The first and second probes are part of the same probe assembly. The probe assembly of the present invention does not require probe replacement as frequently as current assemblies because the sharp tip is used only at low speeds and high resolution configurations.