Patents by Inventor Stephen Matthew Barnes
Stephen Matthew Barnes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7055975Abstract: A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.Type: GrantFiled: March 12, 2002Date of Patent: June 6, 2006Assignee: MEMX, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Patent number: 6864618Abstract: A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.Type: GrantFiled: October 17, 2003Date of Patent: March 8, 2005Assignee: Memx, Inc.Inventors: Samuel Lee Miller, Stephen Matthew Barnes, Murray Steven Rodgers
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Patent number: 6847152Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: GrantFiled: October 30, 2003Date of Patent: January 25, 2005Assignee: MEMX, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Patent number: 6844657Abstract: A microelectromechanical system is disclosed that provides amplified movement without requiring the use of a displacement multiplier. Generally, a lever or the like is interconnected with a substrate on which the system is fabricated at a first location, while a free end of the lever is able to move relative to the substrate, typically at least generally about the first location. One or more actuators are movably interconnected with the substrate, and in turn are interconnected with the lever at a location that is somewhere between the free end and the first location. The lever may be configured to move at least generally away from the substrate upon movement of the actuator in one direction, at least generally toward the substrate upon movement of the actuator in another direction, or in any direction and in any manner. The movement of the “free” end of the lever may be used to perform any function, including lifting/pivoting a mirror away from/relative to the substrate.Type: GrantFiled: March 14, 2002Date of Patent: January 18, 2005Assignee: MEMX, Inc.Inventors: Samuel Lee Miller, Stephen Matthew Barnes, Murray Steven Rodgers
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Patent number: 6841464Abstract: A multi-level shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources and a method of fabricating a multi-level shielded multi-conductor interconnect bus are disclosed. In one embodiment, a multi-level shielded interconnect bus (410A) formed on a substrate (20) includes first and second level electrically conductive lines (42, 92) arranged in sets of one, two or more conductive lines between first and second level electrically conductive shield walls (46, 66, 96). The first and second level electrically conductive lines (42, 92) are surrounded by various layers of dielectric material (30, 50, 80, 100). A first level electrically conductive shield (78) overlies the first level electrically conductive lines (42) and shield walls (46, 66). A second level electrically conductive shield (112) overlies the second level electrically conductive lines (92) and shield walls (96).Type: GrantFiled: April 30, 2003Date of Patent: January 11, 2005Assignee: MEMX, Inc.Inventors: Stephen Matthew Barnes, Samuel Lee Miller, Murray Steven Rodgers
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Patent number: 6831391Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: GrantFiled: October 30, 2003Date of Patent: December 14, 2004Assignee: MEMX, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Patent number: 6831390Abstract: A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.Type: GrantFiled: March 14, 2002Date of Patent: December 14, 2004Assignee: MEMX, Inc.Inventors: Samuel Lee Miller, Stephen Matthew Barnes, Murray Steven Rodgers
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Publication number: 20040204726Abstract: A blade separation fixture (300) is disclosed. A wafer (130) is positioned on the fixture (300). This wafer (130) includes a plurality of cutting blades (56) that are initially spaced above the fixture (300). Blade handles (24) will typically already have been mounted on each of the various cutting blades (56) at this time. In any case, each of the various cutting blades (56) are separated from the wafer (130) by applying an appropriate downwardly directed force. Separated blades (56) in effect pivot into an inclined position against the fixture (300) without having their corresponding cutting edges (80) contact the fixture (300).Type: ApplicationFiled: March 17, 2003Publication date: October 14, 2004Applicant: MEMX, INC.Inventors: Samuel Lee Miller, Norman Frank Smith, Stephen Matthew Barnes, Jeffry Joseph Sniegowski
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Publication number: 20040181950Abstract: A cutting tool (20) for a microkeratome (4) is disclosed. This cutting tool (20) includes a blade handle (24) and a separate cutting blade (56). Both the blade handle (24) and cutting blade (56) include features to register or align a cutting edge (80) of the cutting blade (56) with a microkeratome registration surface (28) of the blade handle (24). This microkeratome registration surface (28) of the blade handle (24) interfaces with a cutting tool registration surface (14) of a head assembly (10) of the microkeratome (4) on which the cutting tool (20) is installed. Therefore, the cutting edge (80) of the cutting blade (56) is registered or aligned relative to the cutting tool registration surface (14) of the head assembly (10) of the microkeratome (4).Type: ApplicationFiled: March 17, 2003Publication date: September 23, 2004Inventors: Murray Steven Rodgers, Norman Frank Smith, Jeffry Joseph Sniegowski, Stephen Matthew Barnes, Paul Jackson McWhorter
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Publication number: 20040182824Abstract: A method for fabricating a cutting blade (56) from a wafer (130) is disclosed. The wafer (130) is etched to define part of the perimeter of the blade (56). This etch also defines a blade support (131) that maintains a structural interconnection between the blade (56) and the wafer (130). A score (132) is formed across at least part of the blade support tab (131). Fracturing the blade support tab (131) at least generally along the score (132) at some point in time after the completion of the etch facilitates the separation of the blade (56) from the wafer (130).Type: ApplicationFiled: May 7, 2003Publication date: September 23, 2004Inventors: Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Norman Frank Smith
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Publication number: 20040186498Abstract: A microkeratome blade (54) that that is fabricated from a wafer (130) is disclosed. The blade (54) includes a notch (110) on its rear surface (106). During fabrication of the blade (54) from the wafer (130), a blade support tab (131) provides a structural interconnection between the wafer (130) and the blade (56). This blade support tab (131) extends within the notch (110) and merges with the blade (56). A score (132) extends across at least part of the blade support tab (131) to facilitate separation of the blade (56) from the wafer (130) by fracturing or the like. This score (132) is positioned such that the surface defined by separating the blade (56) from the wafer (130) at least generally along the score (132) is “disposed within” the notch (110) or recessed relative to a rearwardmost portion of the rear surface (106) of the blade (56).Type: ApplicationFiled: May 7, 2003Publication date: September 23, 2004Inventors: Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Norman Frank Smith
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Patent number: 6794793Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: GrantFiled: September 27, 2001Date of Patent: September 21, 2004Assignee: Memx, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Publication number: 20040180524Abstract: A shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources or the like and a method of fabricating a shielded multi-conductor interconnect bus are disclosed. In one embodiment, a shielded interconnect bus formed on a substrate (20) includes a plurality of electrically conductive lines (42) arranged in sets of one, two or more conductive lines between electrically conductive shield walls (46, 66). The electrically conductive lines (42) are surrounded by layers of dielectric material (30, 50). An electrically conductive shield (78) overlies the electrically conductive lines (42) and electrically conductive shield walls (46, 66).Type: ApplicationFiled: March 31, 2004Publication date: September 16, 2004Inventors: Murray Steven Rodgers, Stephen Matthew Barnes
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Patent number: 6774535Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: GrantFiled: October 30, 2003Date of Patent: August 10, 2004Assignee: Memx, Inc.Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Patent number: 6747340Abstract: A multi-level shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources and a method of fabricating a multi-level shielded multi-conductor interconnect bus are disclosed. In one embodiment, a multi-level shielded interconnect bus (410A) formed on a substrate (20) includes first and second level electrically conductive lines (42, 92) arranged in sets of one, two or more conductive lines between first and second level electrically conductive shield walls (46, 66, 96). The first and second level electrically conductive lines (42, 92) are surrounded by various layers of dielectric material (30, 50, 80, 100). A first level electrically conductive shield (78) overlies the first level electrically conductive lines (42) and shield walls (46, 66). A second level electrically conductive shield (112) overlies the second level electrically conductive lines (92) and shield walls (96).Type: GrantFiled: March 15, 2002Date of Patent: June 8, 2004Assignee: MEMX, Inc.Inventors: Stephen Matthew Barnes, Samuel Lee Miller, Murray Steven Rodgers
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Publication number: 20040090143Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: ApplicationFiled: October 30, 2003Publication date: May 13, 2004Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Publication number: 20040090144Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: ApplicationFiled: October 30, 2003Publication date: May 13, 2004Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Publication number: 20040090142Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.Type: ApplicationFiled: October 30, 2003Publication date: May 13, 2004Inventors: Samuel Lee Miller, Murray Steven Rodgers, Stephen Matthew Barnes, Jeffry Joseph Sniegowski, Paul Jackson McWhorter
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Patent number: 6731513Abstract: A shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources or the like and a method of fabricating a shielded multi-conductor interconnect bus are disclosed. In one embodiment, a shielded interconnect bus formed on a substrate (20) includes a plurality of electrically conductive lines (42) arranged in sets of one, two or more conductive lines between electrically conductive shield walls (46, 66). The electrically conductive lines (42) are surrounded by layers of dielectric material (30, 50). An electrically conductive shield (78) overlies the electrically conductive lines (42) and electrically conductive shield walls (46, 66).Type: GrantFiled: March 15, 2002Date of Patent: May 4, 2004Assignee: Memx, Inc.Inventors: Murray Steven Rodgers, Stephen Matthew Barnes
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Publication number: 20040080240Abstract: A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.Type: ApplicationFiled: October 17, 2003Publication date: April 29, 2004Inventors: Samuel Lee Miller, Stephen Matthew Barnes, Murray Steven Rodgers