Patents by Inventor Stephen R. Hooper
Stephen R. Hooper has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10442685Abstract: Microelectronic packages having hermetic cavities are provided, as are methods for producing such packages. In one embodiment, the microelectronic package includes a sensor die having first and second Microelectromechanical Systems (MEMS) transducer structures formed thereon. First and second cap pieces are coupled to the sensor die by, for example, direct or indirect bonding. A first hermetic cavity encloses the first MEMS transducer structure and is at least partially defined by the first cap piece and the sensor die. Similarly, a second hermetic cavity encloses the second MEMS transducer structure and at least partially defined by the second cap piece and the sensor die. A vent hole is fluidly coupled to the first hermetic cavity and is sealed by the second cap piece.Type: GrantFiled: March 31, 2014Date of Patent: October 15, 2019Assignee: NXP USA, Inc.Inventors: Philip H. Bowles, Stephen R. Hooper
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Patent number: 10107779Abstract: Embodiments of sensing devices include one or more integrated circuit (IC) die, a housing, and a fluid barrier material. Each IC die includes an electrode-bearing surface and a contact surface. One of the die includes an SFET with a sensing electrode proximate to the electrode-bearing surface. The same or a different die includes a reference electrode proximate to the electrode-bearing surface. The die(s) also include IC contacts at the contact surface(s), and conductive structures coupled between the SFET, the reference electrode, and the IC contacts. The housing includes a mounting surface, and housing contacts formed at the mounting surface. The IC contacts are coupled to the housing contacts. The fluid barrier material is positioned between the mounting surface and the IC die. The fluid barrier material provides a fluid barrier between the IC and housing contacts and a space that encompasses the sensing electrode and the reference electrode.Type: GrantFiled: February 27, 2018Date of Patent: October 23, 2018Assignee: NXP USA, INC.Inventors: Raymond M. Roop, Jose Fernandez Villasenor, Stephen R. Hooper, Patrice M. Parris
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Patent number: 10053359Abstract: Microelectronic packages and methods for producing microelectronic packages are provided. In one embodiment, the method includes bonding a first Microelectromechanical Systems (MEMS) die having a first MEMS transducer structure thereon to a cap piece. The first MEMS die and cap piece are bonded such that a first hermetically-sealed cavity is formed enclosing the first MEMS transducer. A second MEMS die having a second MEMS transducer structure thereon is further bonded to one of the cap piece and the second MEMS die. The second MEMS die and the cap piece are bonded such that a second hermetically-sealed cavity is formed enclosing the second MEMS transducer. The second hermetically-sealed cavity contains a different internal pressure than does the first hermetically-sealed cavity.Type: GrantFiled: October 20, 2016Date of Patent: August 21, 2018Assignee: NXP USA, Inc.Inventors: Philip H. Bowles, Stephen R. Hooper
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Publication number: 20180188203Abstract: Embodiments of sensing devices include one or more integrated circuit (IC) die, a housing, and a fluid barrier material. Each IC die includes an electrode-bearing surface and a contact surface. One of the die includes an SFET with a sensing electrode proximate to the electrode-bearing surface. The same or a different die includes a reference electrode proximate to the electrode-bearing surface. The die(s) also include IC contacts at the contact surface(s), and conductive structures coupled between the SFET, the reference electrode, and the IC contacts. The housing includes a mounting surface, and housing contacts formed at the mounting surface. The IC contacts are coupled to the housing contacts. The fluid barrier material is positioned between the mounting surface and the IC die. The fluid barrier material provides a fluid barrier between the IC and housing contacts and a space that encompasses the sensing electrode and the reference electrode.Type: ApplicationFiled: February 27, 2018Publication date: July 5, 2018Inventors: Raymond M. ROOP, Jose FERNANDEZ VILLASENOR, Stephen R. HOOPER, Patrice M. PARRIS
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Patent number: 9927392Abstract: Embodiments of sensing devices include one or more integrated circuit (IC) die, a housing, and a fluid barrier material. Each IC die includes an electrode-bearing surface and a contact surface. One of the die includes an SFET with a sensing electrode proximate to the electrode-bearing surface. The same or a different die includes a reference electrode proximate to the electrode-bearing surface. The die(s) also include IC contacts at the contact surface(s), and conductive structures coupled between the SFET, the reference electrode, and the IC contacts. The housing includes a mounting surface, and housing contacts formed at the mounting surface. The IC contacts are coupled to the housing contacts. The fluid barrier material is positioned between the mounting surface and the IC die. The fluid barrier material provides a fluid barrier between the IC and housing contacts and a space that encompasses the sensing electrode and the reference electrode.Type: GrantFiled: August 14, 2014Date of Patent: March 27, 2018Assignee: NXP USA, INC.Inventors: Raymond M. Roop, Jose Fernandez Villasenor, Stephen R. Hooper, Patrice M. Parris
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Patent number: 9891244Abstract: Methods for fabricating microelectronic packages and microelectronic packages having split gyroscope structures are provided. In one embodiment, the microelectronic package includes a first Microelectromechanical Systems (MEMS) die having a first MEMS gyroscope structure thereon. The microelectronic package further includes a second MEMS die, which has a second MEMS gyroscope structure thereon and which is positioned in a stacked relationship with the first MEMS die. The first and second MEMS gyroscope structures overlap as taken along a first axis orthogonal to a principal axis of the first MEMS die.Type: GrantFiled: August 15, 2014Date of Patent: February 13, 2018Assignee: NXP USA, Inc.Inventors: Philip H. Bowles, Stephen R. Hooper
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Patent number: 9790089Abstract: A MEMS sensor package comprises a MEMS die that includes a substrate having a sensor formed thereon and a cap layer coupled to the substrate. The cap layer has a cavity overlying a substrate region at which the sensor resides. A port extends between the cavity and a side wall of the MEMS die and enables admittance of fluid into the cavity. Fabrication methodology entails providing a substrate structure having sensors formed thereon, providing a cap layer structure having inwardly extending cavities, and forming a channel between pairs of the cavities. The cap layer structure is coupled with the substrate structure and each channel is interposed between a pair of cavities. A singulation process produces a pair of sensor packages, each having a port formed by splitting the channel, where the port is exposed during singulation and extends between its respective cavity and side wall of the sensor package.Type: GrantFiled: March 3, 2017Date of Patent: October 17, 2017Assignee: NXP USA, Inc.Inventors: Chad S. Dawson, Stephen R. Hooper, Fengyuan Li, Arvind S. Salian
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Publication number: 20170174509Abstract: A MEMS sensor package comprises a MEMS die that includes a substrate having a sensor formed thereon and a cap layer coupled to the substrate. The cap layer has a cavity overlying a substrate region at which the sensor resides. A port extends between the cavity and a side wall of the MEMS die and enables admittance of fluid into the cavity. Fabrication methodology entails providing a substrate structure having sensors formed thereon, providing a cap layer structure having inwardly extending cavities, and forming a channel between pairs of the cavities. The cap layer structure is coupled with the substrate structure and each channel is interposed between a pair of cavities. A singulation process produces a pair of sensor packages, each having a port formed by splitting the channel, where the port is exposed during singulation and extends between its respective cavity and side wall of the sensor package.Type: ApplicationFiled: March 3, 2017Publication date: June 22, 2017Inventors: Chad S. Dawson, Stephen R. Hooper, Fengyuan Li, Arvind S. Salian
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Patent number: 9676611Abstract: Sensor device packages and related fabrication methods are provided. An exemplary sensor device package includes a first structure having a sensing arrangement thereon, a second structure having circuitry thereon, and a conductive structure within the first structure and coupled to the circuitry to provide an electrical connection to the circuitry through the first structure. Thus, circuitry on the second structure may be electrically connected to an interface of the sensor device package through the first structure.Type: GrantFiled: October 18, 2013Date of Patent: June 13, 2017Assignee: NXP USA, Inc.Inventors: Stephen R. Hooper, Philip H. Bowles
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Patent number: 9663350Abstract: A package includes a MEMS die and a cap element coupled to and stacked with the MEMS die. The MEMS die includes at least two physically isolated pressure sensors, each of which resides on its individual cantilevered platform structure. A first pressure sensor is vented to a first external environment via a first vent extending through the bottom of the MEMS die and is adapted to detect a first pressure of the first external environment. The MEMS die can be coupled to a lead frame having an opening that is aligned with the first vent. A second sensor is vented to a second external environment via a second vent extending through the cap element and is adapted to detect a second pressure of the second external environment. A difference between the first and second pressures is the differential pressure.Type: GrantFiled: December 12, 2014Date of Patent: May 30, 2017Assignee: NXP USA, Inc.Inventors: Stephen R. Hooper, Chad S. Dawson
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Patent number: 9638597Abstract: A differential pressure sensor assembly includes a transducer having a first sensing surface and a second sensing surface. The second sensing surface is contained in a cavity. An Integrated Circuit (IC) is hermetically coupled to the transducer. The IC has a first aperture aligned to the cavity. A lead frame is coupled to the IC. The lead frame has a second aperture aligned to the first aperture of the IC. A package encapsulates the transducer, the IC and the lead frame. The package has a third aperture exposed to the first sensing surface. The package includes a molding compound providing a hermetic seal between the third aperture of the package and the first aperture of the IC. The molding compound is separated from the transducer by an encroachment distance.Type: GrantFiled: September 24, 2014Date of Patent: May 2, 2017Assignee: NXP USA, Inc.Inventors: Stephen R. Hooper, Darrel R. Frear, Thomas C. Speight
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Patent number: 9604844Abstract: Embodiments of a sensor device include a sensor substrate and a first cap substrate attached to the sensor substrate with a first bond material. The first bond material is arranged to define a first device cavity. A second cap substrate is attached to the sensor substrate with a second bond material. The second bond material is arranged to define a second device cavity. The second bond material has a lower bonding temperature than the first bond material. The second cap substrate is further secured to the sensor substrate by an adhesive material disposed between the sensor substrate and the second cap substrate.Type: GrantFiled: July 20, 2015Date of Patent: March 28, 2017Assignee: NXP USA, Inc.Inventors: Philip H. Bowles, Stephen R. Hooper
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Publication number: 20170081178Abstract: A packaged semiconductor device includes a first semiconductor die including interconnect pads and a seal ring pad surrounding at least some of the interconnect pads, a first portion of an plated seal ring structure formed on the seal ring pad, and a second semiconductor die including a second portion of the plated seal ring structure formed on a major surface of the second semiconductor die. The second portion of the plated seal ring structure is coupled to the first portion of the plated seal ring structure to form a seal around a cavity between the first and second semiconductor die. A plurality of interconnect pillars are on the first major surface of the second semiconductor die. The interconnect pillars are coupled to the interconnect pads on the second semiconductor die.Type: ApplicationFiled: September 22, 2015Publication date: March 23, 2017Inventors: THOMAS C. SPEIGHT, STEPHEN R. HOOPER, NHAT D. VO
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Publication number: 20170084519Abstract: A semiconductor die is electrically connected to the leads of a flagless lead frame and is fully encapsulated by encapsulant to form a semiconductor package. A method of manufacturing the semiconductor package entails encapsulating a flagless lead frame with a first encapsulant such that a top surface of the leads of the flagless lead frame are exposed from the first encapsulant. A semiconductor die is mounted directly to the first encapsulant located in a central region of the lead frame. Electrically conductive interconnects are formed between die pads on the semiconductor die and the top surface of respective leads of the lead frame. The semiconductor die, conductive interconnects, and top surface of the leads is encapsulated with a second encapsulant so that the semiconductor die is sandwiched between the first and second encapsulants, thus isolating the semiconductor die from package stresses.Type: ApplicationFiled: September 22, 2015Publication date: March 23, 2017Inventors: THOMAS C. SPEIGHT, Stephen R. Hooper
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Publication number: 20170081179Abstract: A MEMS sensor package comprises a MEMS die that includes a substrate having a sensor formed thereon and a cap layer coupled to the substrate. The cap layer has a cavity overlying a substrate region at which the sensor resides. A port extends between the cavity and a side wall of the MEMS die and enables admittance of fluid into the cavity. Fabrication methodology entails providing a substrate structure having sensors formed thereon, providing a cap layer structure having inwardly extending cavities, and forming a channel between pairs of the cavities. The cap layer structure is coupled with the substrate structure and each channel is interposed between a pair of cavities. A singulation process produces a pair of sensor packages, each having a port formed by splitting the channel, where the port is exposed during singulation and extends between its respective cavity and side wall of the sensor package.Type: ApplicationFiled: September 22, 2015Publication date: March 23, 2017Inventors: CHAD S. DAWSON, STEPHEN R. HOOPER, FENGYUAN LI, ARVIND S. SALIAN
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Patent number: 9598280Abstract: A device in which an electronic circuit positioned within a cavity of a package housing is encased by a bubble restrictor material, with a media resistant material overlaying the bubble restrictor material. The bubble restrictor material functions to inhibit the formation and growth of moisture-related bubbles within the material, including at the interfaces of the material and surfaces within the package housing. The media resistant material is resistant to physical and chemical alterations by media within an external environment to which the device is exposed. The media resistant material and bubble resistant material function to transfer a sensed characteristic of the media to the electronic circuit.Type: GrantFiled: November 10, 2014Date of Patent: March 21, 2017Assignee: NXP USA, Inc.Inventors: Akhilesh K. Singh, Dwight L. Daniels, Darrel R. Frear, Stephen R. Hooper
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Publication number: 20170044005Abstract: Microelectronic packages and methods for producing microelectronic packages are provided. In one embodiment, the method includes bonding a first Microelectromechanical Systems (MEMS) die having a first MEMS transducer structure thereon to a cap piece. The first MEMS die and cap piece are bonded such that a first hermetically-sealed cavity is formed enclosing the first MEMS transducer. A second MEMS die having a second MEMS transducer structure thereon is further bonded to one of the cap piece and the second MEMS die. The second MEMS die and the cap piece are bonded such that a second hermetically-sealed cavity is formed enclosing the second MEMS transducer. The second hermetically-sealed cavity contains a different internal pressure than does the first hermetically-sealed cavity.Type: ApplicationFiled: October 20, 2016Publication date: February 16, 2017Inventors: Philip H. BOWLES, Stephen R. HOOPER
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Publication number: 20170038209Abstract: Methods for fabricating microelectronic packages and microelectronic packages having split gyroscope structures are provided. In one embodiment, the microelectronic package includes a first Microelectromechanical Systems (MEMS) die having a first MEMS gyroscope structure thereon. The microelectronic package further includes a second MEMS die, which has a second MEMS gyroscope structure thereon and which is positioned in a stacked relationship with the first MEMS die. The first and second MEMS gyroscope structures overlap as taken along a first axis orthogonal to a principal axis of the first MEMS die.Type: ApplicationFiled: August 15, 2014Publication date: February 9, 2017Inventors: PHILIP H. BOWLES, STEPHEN R. HOOPER
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Patent number: 9510495Abstract: Embodiments include devices and methods of their manufacture. A device embodiment includes a package housing, at least one electronic circuit (e.g., a sensor circuit), a first material, and a second material. The package housing includes a cavity that is partially defined by a cavity bottom surface, and the cavity bottom surface includes a mounting area and a non-mounting area. The at least one electronic circuit is attached to the cavity bottom surface over the mounting area. The first material has a relatively high, first modulus of elasticity, and covers the non-mounting area. The second material has a relatively low, second modulus of elasticity, and is disposed over the first material within the cavity.Type: GrantFiled: November 27, 2012Date of Patent: November 29, 2016Assignee: FREESCALE SEMICONDUCTOR, INC.Inventors: Stephen R. Hooper, Darrel R. Frear, William C. Stermer, Jr.
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Patent number: 9499397Abstract: Microelectronic packages and methods for producing microelectronic packages are provided. In one embodiment, the method includes bonding a first Microelectromechanical Systems (MEMS) die having a first MEMS transducer structure thereon to a cap piece. The first MEMS die and cap piece are bonded such that a first hermetically-sealed cavity is formed enclosing the first MEMS transducer. A second MEMS die having a second MEMS transducer structure thereon is further bonded to one of the cap piece and the second MEMS die. The second MEMS die and the cap piece are bonded such that a second hermetically-sealed cavity is formed enclosing the second MEMS transducer. The second hermetically-sealed cavity contains a different internal pressure than does the first hermetically-sealed cavity.Type: GrantFiled: March 31, 2014Date of Patent: November 22, 2016Assignee: Freescale Semiconductor, Inc.Inventors: Philip H. Bowles, Stephen R. Hooper