Patents by Inventor Steven Erik Steen

Steven Erik Steen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240045340
    Abstract: A method for controlling a process of manufacturing semiconductor devices, the method including: obtaining a first control grid associated with a first lithographic apparatus used for a first patterning process for patterning a first substrate; obtaining a second control grid associated with a second lithographic apparatus used for a second patterning process for patterning a second substrate; based on the first control grid and second control grid, determining a common control grid definition for a bonding step for bonding the first substrate and second substrate to obtain a bonded substrate; obtaining bonded substrate metrology data including data relating to metrology performed on the bonded substrate; and determining a correction for performance of the bonding step based on the bonded substrate metrology data, the determining a correction including determining a co-optimized correction for the bonding step and for the first patterning process and/or second patterning process.
    Type: Application
    Filed: September 6, 2023
    Publication date: February 8, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Peter TEN BERGE, Steven Erik STEEN, Pieter Gerardus Jacobus SMORENBERG, Khalid ELBATTAY
  • Patent number: 11768441
    Abstract: A method for controlling a process of manufacturing semiconductor devices, the method including: obtaining a first control grid associated with a first lithographic apparatus used for a first patterning process for patterning a first substrate; obtaining a second control grid associated with a second lithographic apparatus used for a second patterning process for patterning a second substrate; based on the first control grid and second control grid, determining a common control grid definition for a bonding step for bonding the first substrate and second substrate to obtain a bonded substrate; obtaining bonded substrate metrology data including data relating to metrology performed on the bonded substrate; and determining a correction for performance of the bonding step based on the bonded substrate metrology data, the determining a correction including determining a co-optimized correction for the bonding step and for the first patterning process and/or second patterning process.
    Type: Grant
    Filed: February 3, 2021
    Date of Patent: September 26, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Peter Ten Berge, Steven Erik Steen, Pieter Gerardus Jacobus Smorenberg, Khalid Elbattay
  • Publication number: 20230108481
    Abstract: A method for controlling a process of manufacturing semiconductor devices, the method including: obtaining a first control grid associated with a first lithographic apparatus used for a first patterning process for patterning a first substrate; obtaining a second control grid associated with a second lithographic apparatus used for a second patterning process for patterning a second substrate; based on the first control grid and second control grid, determining a common control grid definition for a bonding step for bonding the first substrate and second substrate to obtain a bonded substrate; obtaining bonded substrate metrology data including data relating to metrology performed on the bonded substrate; and determining a correction for performance of the bonding step based on the bonded substrate metrology data, the determining a correction including determining a co-optimized correction for the bonding step and for the first patterning process and/or second patterning process.
    Type: Application
    Filed: February 3, 2021
    Publication date: April 6, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Peter TEN BERGE, Steven Erik STEEN, Pieter Gerandus Jacobus SMORENBERG, Khalid ELBATTAY
  • Patent number: 11385554
    Abstract: Disclosed is a method of determining a characteristic of interest, in particular focus, relating to a structure on a substrate formed by a lithographic process, and an associated patterning device and lithographic system. The method comprises forming a modified substrate feature on the substrate using a corresponding modified reticle feature on a patterning device, the modified substrate feature being formed for a primary function other than metrology, more specifically for providing a support for a vertically integrated structure. The modified reticle feature is such that said modified substrate feature is formed with a geometry dependent on the characteristic of interest during formation. The modified substrate feature can be measured to determine said characteristic of interest.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: July 12, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Miguel Garcia Granda, Steven Erik Steen, Eric Jos Anton Brouwer, Bart Peter Bert Segers, Pierre-Yves Jerome Yvan Guittet, Frank Staals, Paulus Jacobus Maria Van Adrichem
  • Patent number: 10693025
    Abstract: A solar cell panel with a bottom cover plate and an electrically conductive bus bar. A top cover plate having at least one electrically conductive land in communication with a bottom surface of the top cover plate. The land having a height extending from the bottom surface of the top cover plate. An array of rows and columns of solar cell chips lying between the bottom cover plate and the top cover plate. Each solar cell chip of the array having an anode adjacent to a top surface and a cathode adjacent to a bottom surface. The bus bar in electrical communication with each cathode of each solar cell chip of the array. Each land in electrical contact with each anode of a solar cell chip of the array. An opening formed between adjacent lands wherein the opening extends at least the height of the lands.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: June 23, 2020
    Assignee: International Business Machines Corporation
    Inventors: Harold John Hovel, Rainer Klaus Krause, Xiaoyan Shao, Steven Erik Steen
  • Publication number: 20200026182
    Abstract: Disclosed is a method of determining a characteristic of interest, in particular focus, relating to a structure on a substrate formed by a lithographic process, and an associated patterning device and lithographic system. The method comprises forming a modified substrate feature on the substrate using a corresponding modified reticle feature on a patterning device, the modified substrate feature being formed for a primary function other than metrology, more specifically for providing a support for a vertically integrated structure. The modified reticle feature is such that said modified substrate feature is formed with a geometry dependent on the characteristic of interest during formation. The modified substrate feature can be measured to determine said characteristic of interest.
    Type: Application
    Filed: June 28, 2019
    Publication date: January 23, 2020
    Applicant: ASML Netherlands B.V.
    Inventors: Miguel GARCIA GRANDA, Steven Erik STEEN, Eric Jos Anton BROUWER, Bart Peter Bert SEGERS, Pierre-Yves Jerome Yvan GUITTET, Frank STAALS, Paulus Jacobus Maria VAN ADRICHEM
  • Publication number: 20170133533
    Abstract: A solar cell panel with a bottom cover plate and an electrically conductive bus bar. A top cover plate having at least one electrically conductive land in communication with a bottom surface of the top cover plate. The land having a height extending from the bottom surface of the top cover plate. An array of rows and columns of solar cell chips lying between the bottom cover plate and the top cover plate. Each solar cell chip of the array having an anode adjacent to a top surface and a cathode adjacent to a bottom surface. The bus bar in electrical communication with each cathode of each solar cell chip of the array. Each land in electrical contact with each anode of a solar cell chip of the array. An opening formed between adjacent lands wherein the opening extends at least the height of the lands.
    Type: Application
    Filed: January 10, 2017
    Publication date: May 11, 2017
    Applicant: International Business Machines Corporation
    Inventors: Harold John Hovel, Rainer Klaus Krause, Xiaoyan Shao, Steven Erik Steen
  • Patent number: 9583658
    Abstract: A solar cell panel and method of forming a solar cell panel. The method includes a: forming an electrically conductive bus bar on a top surface of a bottom cover plate; forming an electrically conductive contact frame proximate to a bottom surface of a top cover plate, the top cover plate transparent to visible light; and placing an array of rows and columns of solar cell chips between the bottom cover plate and the top cover plate, each solar cell chip of the array of solar cell chips comprising an anode adjacent to a top surface and a cathode adjacent to a bottom surface of the solar cell chip, the bus bar electrically contacting each cathode of each solar cell chip of the array of solar cell chips and the contact frame contacting each anode of each solar cell chip of the array of solar cell chips.
    Type: Grant
    Filed: August 3, 2010
    Date of Patent: February 28, 2017
    Assignee: International Business Machines Corporation
    Inventors: Harold John Hovel, Rainer Klaus Krause, Xiaoyan Shao, Steven Erik Steen
  • Patent number: 8795502
    Abstract: A method of forming patterned metallization by electrodeposition under illumination without external voltage supply on a photovoltaic structure or on n-type region of a transistor/junction.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: August 5, 2014
    Assignee: International Business Machines Corporation
    Inventors: John M. Cotte, Harold J. Hovel, Devendra K. Sadana, Xiaoyan Shao, Steven Erik Steen
  • Patent number: 8427780
    Abstract: A magnetic head in one embodiment includes a bottom pole; a top pole positioned above a plane extending through the bottom pole and parallel to a plane of deposition of the bottom pole, wherein the top pole is at least partially offset from the bottom pole in a direction parallel to a plane of deposition of the top pole; a first write gap in the top pole; and a first coil for generating a magnetic flux across the first write gap. A method in one embodiment includes forming a bottom pole; forming a top pole above a plane extending through the bottom pole and parallel to a plane of deposition of the bottom pole, wherein the top pole is at least partially offset from the bottom pole in a direction parallel to a plane of deposition of the top pole, wherein at least one write gap is formed in the top pole; forming side poles for coupling the top and bottom poles; and forming a first coil for generating a magnetic flux across the first write gap.
    Type: Grant
    Filed: January 23, 2009
    Date of Patent: April 23, 2013
    Assignee: International Business Machines Corporation
    Inventors: Robert Glenn Biskeborn, Lubomyr T. Romankiw, Steven Erik Steen, Bucknell Chapman Webb
  • Patent number: 8168045
    Abstract: An apparatus for plating a magnetic film on a substrate includes: a track including a plurality of stopping points along the track; a permanent magnet placed on the track such that the permanent magnet can be moved along the track towards and away from the stopping points; at least one plating tank positioned on the stopping point; and a removable high permeability iron flux concentrator inserted into gaps between the substrate and inside walls of the plating tank, substantially surrounding the substrate and extending around and under the substrate.
    Type: Grant
    Filed: May 20, 2011
    Date of Patent: May 1, 2012
    Assignee: International Business Corporation
    Inventors: Matteo Flotta, Lubomyr T. Romanikiw, Xiaoyan Shao, Steven Erik Steen, Bucknell Chapman Webb
  • Patent number: 8129216
    Abstract: A method of manufacturing a solar cell. The method includes the steps of providing a substrate, applying a first dopant to a first surface, applying a second dopant to a second surface, covering the doped first surface with a hard mask, applying a third dopant to the substrate side, removing the hard mask, applying a pattern of first electrical contacts to the doping pattern, and applying a pattern of second electrical contacts to the doped second surface, the pattern of second electrical contacts and the doping pattern being straight-lined opposed.
    Type: Grant
    Filed: April 29, 2009
    Date of Patent: March 6, 2012
    Assignee: International Business Machines Corporation
    Inventors: Hans-Juergen Eickelmann, Michael Haag, Harold John Hovel, Rainer Krause, Markus Schmidt, Steven Erik Steen
  • Publication number: 20110220020
    Abstract: An apparatus for plating a magnetic film on a substrate includes: a track including a plurality of stopping points along the track; a permanent magnet placed on the track such that the permanent magnet can be moved along the track towards and away from the stopping points; at least one plating tank positioned on the stopping point; and a removable high permeability iron flux concentrator inserted into gaps between the substrate and inside walls of the plating tank, substantially surrounding the substrate and extending around and under the substrate.
    Type: Application
    Filed: May 20, 2011
    Publication date: September 15, 2011
    Applicant: International Business Machines Corporation
    Inventors: MATTEO FLOTA, Lubomyr Taras Romankiw, Xiaoyan Shao, Steven Erik Steen, Bucknell Chapman Webb
  • Patent number: 7964081
    Abstract: An apparatus for plating a magnetic film on a substrate includes: a track including a plurality of stopping points along the track; a permanent magnet placed on the track such that the permanent magnet can be moved along the track towards and away from the stopping points; at least one plating tank positioned on the stopping point; and a removable high permeability iron flux concentrator inserted into gaps between the substrate and inside walls of the plating tank, substantially surrounding the substrate and extending around and under the substrate.
    Type: Grant
    Filed: August 24, 2007
    Date of Patent: June 21, 2011
    Assignee: International Business Machines Corporation
    Inventors: Matteo Flotta, Lubomyr Taras Romankiw, Xiaoyan Shao, Steven Erik Steen, Bucknell Chapman Webb
  • Patent number: 7897434
    Abstract: A method of fabricating solar cell chips. The method includes creating an integrated circuit chip process route for fabricating integrated circuit chips using integrated circuit wafers in an integrated circuit fabrication facility; creating a solar cell process route for fabricating solar cells using solar cell wafers in the integrated circuit fabrication facility; releasing integrated circuit chip wafers and solar cell wafers into tool queues of tools of the an integrated circuit fabrication facility; and processing the solar cell wafers on at least some tools of the integrated circuit fabrication facility used to process the integrated circuit wafers. Also the process used to fabricate the solar cell chips.
    Type: Grant
    Filed: August 12, 2008
    Date of Patent: March 1, 2011
    Assignee: International Business Machines Corporation
    Inventors: Hans-Juergen Eickelmann, Michael Haag, Harold J. Hovel, Rainer Klaus Krause, Markus Schmidt, Xiaoyan Shao, Steven Erik Steen
  • Publication number: 20100304519
    Abstract: A method of fabricating solar cell chips. The method includes creating an integrated circuit chip process route for fabricating integrated circuit chips using integrated circuit wafers in an integrated circuit fabrication facility; creating a solar cell process route for fabricating solar cells using solar cell wafers in the integrated circuit fabrication facility; releasing integrated circuit chip wafers and solar cell wafers into tool queues of tools of the an integrated circuit fabrication facility; and processing the solar cell wafers on at least some tools of the integrated circuit fabrication facility used to process the integrated circuit wafers. Also the process used to fabricate the solar cell chips.
    Type: Application
    Filed: August 3, 2010
    Publication date: December 2, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Hans-Juergen Eickelmann, Michael Haag, Harold J. Hovel, Rainer Klaus Krause, Markus Schmidt, Xiaoyan Shao, Steven Erik Steen
  • Publication number: 20100297800
    Abstract: A solar cell panel and method of forming a solar cell panel. The method includes a: forming an electrically conductive bus bar on a top surface of a bottom cover plate; forming an electrically conductive contact frame proximate to a bottom surface of a top cover plate, the top cover plate transparent to visible light; and placing an array of rows and columns of solar cell chips between the bottom cover plate and the top cover plate, each solar cell chip of the array of solar cell chips comprising an anode adjacent to a top surface and a cathode adjacent to a bottom surface of the solar cell chip, the bus bar electrically contacting each anode of each solar cell chip of the array of solar cell chips and the contact frame contacting each anode of each solar cell chip of the array of solar cell chips.
    Type: Application
    Filed: August 3, 2010
    Publication date: November 25, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Harold John Hovel, Rainer Klaus Krause, Xiaoyan Shao, Steven Erik Steen
  • Publication number: 20100279454
    Abstract: A method of manufacturing a solar cell. The method includes the steps of providing a substrate, applying a first dopant to a first surface, applying a second dopant to a second surface, covering the doped first surface with a hard mask, applying a third dopant to the substrate side, removing the hard mask, applying a pattern of first electrical contacts to the doping pattern, and applying a pattern of second electrical contacts to the doped second surface, the pattern of second electrical contacts and the doping pattern being straight-lined opposed.
    Type: Application
    Filed: April 29, 2009
    Publication date: November 4, 2010
    Inventors: Hans-Juergen Eickelmann, Michael Haag, Harold John Hovel, Rainer Krause, Markus Schmidt, Steven Erik Steen
  • Publication number: 20100188774
    Abstract: A magnetic head in one embodiment includes a bottom pole; a top pole positioned above a plane extending through the bottom pole and parallel to a plane of deposition of the bottom pole, wherein the top pole is at least partially offset from the bottom pole in a direction parallel to a plane of deposition of the top pole; a first write gap in the top pole; and a first coil for generating a magnetic flux across the first write gap. A method in one embodiment includes forming a bottom pole; forming a top pole above a plane extending through the bottom pole and parallel to a plane of deposition of the bottom pole, wherein the top pole is at least partially offset from the bottom pole in a direction parallel to a plane of deposition of the top pole, wherein at least one write gap is formed in the top pole; forming side poles for coupling the top and bottom poles; and forming a first coil for generating a magnetic flux across the first write gap.
    Type: Application
    Filed: January 23, 2009
    Publication date: July 29, 2010
    Inventors: Robert Glenn Biskeborn, Lubomyr T. Romankiw, Steven Erik Steen, Bucknell Chapman Webb
  • Publication number: 20100037939
    Abstract: A method of fabricating solar cell chips. The method includes creating an integrated circuit chip process route for fabricating integrated circuit chips using integrated circuit wafers in an integrated circuit fabrication facility; creating a solar cell process route for fabricating solar cells using solar cell wafers in the integrated circuit fabrication facility; releasing integrated circuit chip wafers and solar cell wafers into tool queues of tools of the an integrated circuit fabrication facility; and processing the solar cell wafers on at least some tools of the integrated circuit fabrication facility used to process the integrated circuit wafers. Also the process used to fabricate the solar cell chips.
    Type: Application
    Filed: August 12, 2008
    Publication date: February 18, 2010
    Inventors: Hans-Juergen Eickelmann, Michael Haag, Harold J. Hovel, Rainer Klaus Krause, Markus Schmidt, Xiaoyan Shao, Steven Erik Steen