Patents by Inventor Steven Keating

Steven Keating has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120280421
    Abstract: In exemplary implementations of this invention, a reconfigurable device comprises flexible bladder that encloses a jammable material. The geometry of the device can be altered by unjamming the jammable material (making it flexible), changing the shape of the device while it is flexible, and then jamming the jammable material (making it rigid). In some applications of this invention, a joint connects rigid arms. The ends of the rigid arms are enclosed in the bladder. By varying the stiffness of the jammable material in the bladder, the stiffness of the joint can be controlled.
    Type: Application
    Filed: May 3, 2012
    Publication date: November 8, 2012
    Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
    Inventors: Steven Keating, Neri Oxman
  • Patent number: 7799139
    Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may include utilizing a cleaning mixture comprising a solvent such as ethylene glycol monopropyl ether, an inorganic base, an organic base, a copper corrosion inhibitor and a surfactant to clean at least one of a polymer residue, a organic sacrificial fill material and etched or un-etched photo resist from a Damascene structure of a microelectronic structure comprising a porous oxide dielectric.
    Type: Grant
    Filed: March 28, 2007
    Date of Patent: September 21, 2010
    Assignee: Intel Corporation
    Inventor: Steven Keating
  • Publication number: 20090035911
    Abstract: A method for forming a semiconductor device having abrupt ultra shallow epi-tip regions comprises forming a gate stack on a crystalline substrate, performing a first ion implantation process to amorphisize a first pair of regions of the substrate disposed adjacent to and on laterally opposite sides of the gate stack, forming a pair of spacers on the substrate disposed on laterally opposite sides of the gate stack, performing a second ion implantation process to amorphisize a second pair of regions of the substrate that are disposed on laterally opposite sides of the gate stack and adjacent to the spacers, applying a selective wet etch chemistry to remove the amorphisized first and second pair of regions and form a pair of cavities on laterally opposite sides of the gate stack, and depositing a silicon alloy in the pair of cavities to form source and drain regions and source and drain epi-tip regions.
    Type: Application
    Filed: July 30, 2007
    Publication date: February 5, 2009
    Inventors: Willy Rachmady, Steven Keating, Bernhard Sell
  • Publication number: 20080242102
    Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may include utilizing a cleaning mixture comprising a solvent such as ethylene glycol monopropyl ether, an inorganic base, an organic base, a copper corrosion inhibitor and a surfactant to clean at least one of a polymer residue, a organic sacrificial fill material and etched or un-etched photo resist from a Damascene structure of a microelectronic structure comprising a porous oxide dielectric.
    Type: Application
    Filed: March 28, 2007
    Publication date: October 2, 2008
    Inventor: Steven Keating
  • Publication number: 20070004123
    Abstract: Embodiments are an improved transistor structure and the method of fabricating the structure. In particular, a wet etch of an embodiment forms source and drain regions with an improved tip shape to improve the performance of the transistor by improving control of short channel effects, increasing the saturation current, improving control of the metallurgical gate length, increasing carrier mobility, and decreasing contact resistance at the interface between the source and drain and the silicide.
    Type: Application
    Filed: June 30, 2005
    Publication date: January 4, 2007
    Inventors: Mark Bohr, Steven Keating, Thomas Letson, Anand Murthy, Donald O'Neill, Willy Rachmady
  • Patent number: 7045407
    Abstract: Methods of forming an amorphous etch stop layer by implanting a substrate with an element that is electrically neutral within the substrate are described. The use of elements that are electrically neutral within the substrate prevents electrical interference by the elements if they diffuse to other areas within the substrate. The amorphous etch stop layer may be used as a hard mask in the fabrication of transistors or other devices such as a cantilever.
    Type: Grant
    Filed: December 30, 2003
    Date of Patent: May 16, 2006
    Assignee: Intel Corporation
    Inventors: Steven Keating, Chris Auth
  • Publication number: 20060030104
    Abstract: At least a p-type and n-type semiconductor device deposited upon a semiconductor wafer containing metal or metal alloy gates. More particularly, a complementary metal-oxide-semiconductor (CMOS) device is formed on a semiconductor wafer having n-type and p-type metal gates.
    Type: Application
    Filed: October 11, 2005
    Publication date: February 9, 2006
    Inventors: Mark Doczy, Justin Brask, Steven Keating, Chris Barns, Brian Doyle, Michael McSwiney, Jack Kavalieros, John Barnak
  • Publication number: 20050148147
    Abstract: Methods of forming an amorphous etch stop layer by implanting a substrate with an element that is electrically neutral within the substrate are described. The use of elements that are electrically neutral within the substrate prevents electrical interference by the elements if they diffuse to other areas within the substrate. The amorphous etch stop layer may be used as a hard mask in the fabrication of transistors or other devices such as a cantilever.
    Type: Application
    Filed: December 30, 2003
    Publication date: July 7, 2005
    Inventors: Steven Keating, Chris Auth
  • Publication number: 20050040469
    Abstract: At least a p-type and n-type semiconductor device deposited upon a semiconductor wafer containing metal or metal alloy gates. More particularly, a complementary metal-oxide-semiconductor (CMOS) device is formed on a semiconductor wafer having n-type and p-type metal gates.
    Type: Application
    Filed: September 20, 2004
    Publication date: February 24, 2005
    Inventors: Mark Doczy, Justin Brask, Steven Keating, Chris Barns, Brian Doyle, Michael McSwiney, Jack Kavalieros, John Barnak
  • Patent number: 6703291
    Abstract: The wet etch stage of the salicide process normally used to fabricate polysilicon and silicon-based semiconductor transistors may not be appropriate for germanium-based transistors because the wet etch chemicals at such temperatures will dissolve the germanium leaving no source, gate, or drain for the transistor. In embodiments of the invention, nickel is blanket deposited over the source, drain, and gate regions of the germanium-based transistor, annealed to cause the nickel to react with the germanium, and wet etched to remove un-reacted nickel from dielectric regions (e.g., shallow trench isolation (STI) regions) but leave NiGe in the source, gate, and drain regions. The wet etch is a mild oxidizing solution at room temperature.
    Type: Grant
    Filed: December 17, 2002
    Date of Patent: March 9, 2004
    Assignee: Intel Corporation
    Inventors: Boyan Boyanov, Steven Keating, Anand Murthy