Publication number: 20060042938
Abstract: A sputter target composed of a ferromagnetic alloy having a base metal, and X, where X is a metal having an atomic diameter of less than 0.266 nm and an oxidation potential greater than the base metal. The base metal may be Fe, Co, or any other ferromagnetic material, and may be further comprised of elements such as Pt, Ta and/or Cr to enhance its coercivity. X may be a metal selected from the group consisting of Al, Ba, Be, Ca, Cd, Ce, Cr, Cs, Dy, Er, Eu, Ga, Gd, Hf, Ho, K, La, Li, Mg, Mn, Na, Nb, Nd, Pm, Pr, Rb, Sc, Sm, Sr, Ta, Th, Te, Th, Ti, V, Y, Zn, and Zr. The sputter target may comprise more than 0 less than 15 atomic percent X. The sputter target is reactively sputtered to form a granular medium with optimized magnetic grain size and grain-to-grain separation.
Type:
Application
Filed:
September 1, 2004
Publication date:
March 2, 2006
Inventors:
Yuanda Cheng, Steven Kennedy, Michael Racine