Patents by Inventor Steven L. Peace

Steven L. Peace has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6413436
    Abstract: In a process for treating a workpiece such as a semiconductor wafer, a processing fluid is selectively applied or excluded from an outer peripheral margin of at least one of the front or back sides of the workpiece. Exclusion and/or application of the processing fluid occurs by applying one or more processing fluids to the workpiece while the workpiece and a reactor holding the workpiece are spinning. The flow rate of the processing fluids, fluid pressure, and/or spin rate are used to control the extent to which the processing fluid is selectively applied or excluded from the outer peripheral margin.
    Type: Grant
    Filed: November 10, 1999
    Date of Patent: July 2, 2002
    Assignee: Semitool, Inc.
    Inventors: Brian Aegerter, Curt T. Dundas, Michael Jolley, Tom L. Ritzdorf, Steven L. Peace, Gary L. Curtis, Raymon F. Thompson
  • Publication number: 20020066471
    Abstract: A system for processing a workpiece includes a base having a bowl or recess for holding a liquid. A process reactor or head holds a workpiece between an upper rotor and a lower rotor. A head lifter lowers the head holding the workpiece into contact with the liquid. Sonic energy is introduced into the liquid and acts on the workpiece to improve processing. The head spins the workpiece during or after contact with the liquid. The upper and lower rotors have side openings for loading and unloading a workpiece into the head. The rotors are axially moveable to align the side openings.
    Type: Application
    Filed: July 16, 2001
    Publication date: June 6, 2002
    Inventors: Steven L. Peace, Paul Z. Wirth, Eric Lund
  • Publication number: 20020020430
    Abstract: A system for processing a workpiece includes a base having a bowl or recess for holding a liquid. A sonic energy source, such as a megasonic transducer, provides sonic energy into a liquid in the bowl. A process reactor or head holds a workpiece between an upper rotor and a lower rotor. A head lifter lowers the head holding the workpiece into the liquid. Sonic energy is provided to the workpiece through the liquid, optionally while the head spins the workpiece. The liquid may include de-ionized water and an etchant.
    Type: Application
    Filed: July 16, 2001
    Publication date: February 21, 2002
    Inventors: Paul Z. Wirth, Steven L. Peace
  • Publication number: 20020017237
    Abstract: A system for processing a workpiece includes a base having a bowl or recess for holding a liquid. A process reactor or head holds a workpiece between an upper rotor and a lower rotor. A head lifter lowers the head holding the workpiece into contact with the liquid. The head spins the workpiece during or after contact with the liquid. The upper and lower rotors have side openings for loading and unloading a workpiece into the head. The rotors are axially moveable to align the side openings.
    Type: Application
    Filed: July 16, 2001
    Publication date: February 14, 2002
    Applicant: Semitool, Inc.
    Inventors: Paul Z. Wirth, Steven L. Peace
  • Publication number: 20010050061
    Abstract: A machine for processing the front side of a flat media workpiece, such as a silicon wafer, seals the backside of the wafer from processing chemicals. A rotor has an inside ring and an outside ring protruding from the rotor face. The inside ring and outside ring are separated by an annular groove in the rotor. A O-ring is positioned between the inside ring and the outside ring. A membrane extends from the inside ring, over the annular groove and the O-ring, to the outside ring. The membrane and face of the rotor form a sealable wafer back face chamber between them. Vacuum is applied to the back face chamber to hold the wafer against the membrane. The back surface of the wafer is sealed from processing chemicals, which are allowed to contact only the front surface and edges of the wafer.
    Type: Application
    Filed: January 14, 1999
    Publication date: December 13, 2001
    Inventor: STEVEN L. PEACE
  • Patent number: 5537275
    Abstract: A magnetic head positioning mechanism for a tape backup device includes a carriage carrying the head that has an opening with a substantially conical surface, a guide rod extending through the carriage that restricts translation of the carriage to motion along a predetermined axis, a lead screw extending into the opening in the carriage that is driven by a stepper motor via a gear train, a follower nut threaded on the upper portion of the lead screw for translating the carriage and head along the axis as the lead screw is rotated by the stepper motor, and a spring for urging the carriage into contact with the follower nut. The base end of the lead screw has a conical indentation that contacts and rotates on the rounded end of a protrusion extending from the chassis. The relative positions of this indentation and protrusion can be reversed, if desired. The follower nut includes a rounded (or spherical) surface for contacting the conical surface within the opening in the carriage.
    Type: Grant
    Filed: May 4, 1995
    Date of Patent: July 16, 1996
    Assignee: Hewlett-Packard Company
    Inventors: Steven L. Peace, Warren S. Beitscher, Thomas J. Angellotti, Fred O. Stephens
  • Patent number: 5493461
    Abstract: A media lockout device and associated method for a combined media drive. The combined media drive permits the insertion of storage media into two separate insertion openings of the combined media drive to be received therein. The media lockout device permits reception within the media drive of storage media inserted through one of the insertion openings of the combined drive. Once a storage media is inserted through an insertion opening of the combined drive, the media lockout device prevents the insertion of another storage media through the other of the insertion openings while the first storage media is received within the combined drive.
    Type: Grant
    Filed: November 14, 1994
    Date of Patent: February 20, 1996
    Assignee: ComByte, Inc.
    Inventor: Steven L. Peace
  • Patent number: 5488522
    Abstract: Ejection apparatus for a computer mass storage media drive. The media drive includes two insertion openings for receiving two different storage media. An actuation arm receives an actuation force for initiating ejection of storage media position within the media drive out of the media drive. The actuation arm, when actuated, initiates the ejection of either a storage media inserted into the media drive by way of a first of the two insertion openings or a storage media inserted into the media drive by way of a second of the two insertion openings.
    Type: Grant
    Filed: November 14, 1994
    Date of Patent: January 30, 1996
    Assignee: ComByte, Inc.
    Inventors: Steven L. Peace, Terry A. Precht
  • Patent number: 5132017
    Abstract: A reverse osmosis method includes a sediment filter which cleans feed water from a source and from which that feed water is fed to a reverse osmosis membrane filter. Permeate from the latter is fed to a bladder within a storage tank. Concentrate from the membrane filter is fed to and used within the storage tank as squeeze water for the bladder. When a faucet that delivers permeate to the user is open, squeeze water is used to cause permeate to flow out of the storage tank through an impurity filter to supply the faucet. A valve unit is included to control the amount of squeeze water fed to the storage tank and to regulate permeate flow so that the water outletted from the faucet remains at a constant pressure and provides relief as against overpressure in the system. A proportioning valve within the valve unit serves to maintain at all times a constant ratio of concentrate to permeate flow through the membrane filter for adequate cleansing of the membrane.
    Type: Grant
    Filed: April 16, 1991
    Date of Patent: July 21, 1992
    Assignee: Teledyne Industries, Inc.
    Inventors: Thomas E. Birdsong, Steve O. Mork, Steven L. Peace
  • Patent number: 5131277
    Abstract: A reverse osmosis system includes a sediment filter which cleans feed water from a source and from which that feed water is fed to a reverse osmosis membrane filter. Permeate from the latter is fed to a bladder within a storage tank. Concentrate from the membrane filter is fed to and used within the storage tank as squeeze water for the bladder. When a faucet that delivers permeate to the user is open, squeeze water is used to cause permeate to flow out of the storage tank through an impurity filter to supply the faucet. A valve unit is included to control the amount of squeeze water fed to the storage tank and to regulate permeate flow so that the water outletted from the faucet remains at a constant pressure and provides relief as against overpressure in the system. A proportioning valve within the valve unit serves to maintain at all times a constant ratio of concentrate to permeate flow through the membrane filter for adequate cleansing of the membrane.
    Type: Grant
    Filed: August 20, 1991
    Date of Patent: July 21, 1992
    Assignee: Teledyne Industries, Inc.
    Inventors: Thomas E. Birdsong, Steve O. Mork, Steven L. Peace
  • Patent number: 5096574
    Abstract: A reverse osmosis system includes a sediment filter which cleans feed water from a source and from which that feed water is fed to a reverse osmosis membrane filter. Permeate from the latter is fed to a bladder within a storage tank. Concentrate from the membrane filter is fed to and used within the storage tank as squeeze water for the bladder. When a faucet that delivers permeate to the user is open, squeeze water is used to cause permeate to flow out of the storage tank through an impurity filter to supply the faucet. A valve unit is included to control the amount of squeeze water fed to the storage tank and to regulate permeate flow so that the water outletted from the faucet remains at a constant pressure and provides relief as against overpressure in the system. A proportioning valve within the valve unit serves to maintain at all times a constant ratio of concentrate to permeate flow through the membrane filter for adequate cleansing of the membrane.
    Type: Grant
    Filed: January 16, 1990
    Date of Patent: March 17, 1992
    Assignee: Teledyne Industries, Inc.
    Inventors: Thomas E. Birdsong, Steve O. Mork, Steven L. Peace
  • Patent number: 4958629
    Abstract: The housing of an oral hygiene device is attachable to a water faucet. A regulator within the housing responds to the water which is subject to pressure variation. The regulator accommodates that variation in developing automatically a stream of water at a constant pressure. A turbine within the housing is caused to rotate in response to energy in the stream. A piston pump draws water deflected by impellers on the turbine and forms that water into a series of pulses. A flexible hose coupled to the housing includes a handle for directing the pulses against the teeth and gums of a user at a desired pressure.
    Type: Grant
    Filed: June 21, 1988
    Date of Patent: September 25, 1990
    Assignee: Teledyne Industries, Inc.
    Inventors: Steven L. Peace, John E. Petrovic