Abstract: Methods and apparatus are provided for forming an array of devices. The invention includes forming a stack of material layers, forming a first hardmask over the plurality of material layers, exposing the first hardmask to ozone mixed with a halogenated additive, forming a protective layer over the first hardmask, forming a second mask on the protective layer shifted relative to the first mask, exposing the second hardmask to ozone mixed with the halogenated additive, and etching the plurality of material layers to remove material not covered by the hardmasks. Numerous other aspects are disclosed.

Abstract: An airbag inflator (10) including an elongated outer housing (12) having an interior and a plurality of orifices (22) extending collinearly therealong to enable fluid communication between the outer housing interior and an exterior of the outer housing (12). The outer housing orifice(s) (22) open from the outer housing interior toward a first side (F) of the inflator. An elongated inner housing (14) is positioned in the outer housing interior. The inner housing (14) has an interior and a plurality of orifices (20) extending collinearly therealong to enable fluid communication between the inner housing interior and an exterior of the inner housing (14). The inner housing orifice(s) (20) open from the inner housing interior toward a second side (S) of the inflator. A quantity of a gas generant composition (16) extends along a portion of the interior of the inner housing (14).