Patents by Inventor Steven V. Sansoni

Steven V. Sansoni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080101912
    Abstract: Methods for correcting motion of a robot are provided in the present invention. In one embodiment, a method for correcting motion of a robot includes transferring a first substrate supported on a robot to a processing position using a robotic motion routine, depositing a material on the first substrate in the processing position, determining an offset between a center of the deposited material and a center of the first substrate, adjusting the robotic motion routine to compensate for the offset. In another embodiment, a processing chamber is provided configured to obtain samples from which motion of a robot operated therein may be corrected to improve substrate placement on a substrate support through analysis of material deposited on the substrate.
    Type: Application
    Filed: October 26, 2006
    Publication date: May 1, 2008
    Inventors: Todd W. Martin, Steven V. Sansoni, Michael R. Rice, Eric Ng, Jeffrey C. Hudgens, Frederick Guckel, Russel Kaplan
  • Publication number: 20080089001
    Abstract: A detachable electrostatic chuck is capable of being attached to a pedestal in a process chamber. The chuck comprises an electrostatic puck having a ceramic body with an embedded electrode. The chuck also has a baseplate below the electrostatic puck with a lower surface which is bonded to a sealing assembly comprising a sealing plate and sealing ring. The sealing plate and ring are polished to form a gas-tight seal between the chuck and pedestal to prevent gas leakage from or into this region.
    Type: Application
    Filed: October 13, 2006
    Publication date: April 17, 2008
    Inventors: Vijay D. Parkhe, Cheng-Tsiung Tsai, Steven V. Sansoni
  • Publication number: 20070283884
    Abstract: A ring assembly is provided for a substrate support used in a substrate processing chamber, the substrate support comprising an annular ledge and an inner perimeter sidewall. In one version, the ring assembly comprises (i) an L-shaped isolator ring comprising a horizontal leg resting on the annular ledge of the support, and a vertical leg abutting the inner perimeter sidewall of the support, and (ii) a deposition ring comprising an annular band having an overlap ledge that overlaps the horizontal leg of the isolator ring. In another version, the deposition ring comprises a dielectric annular band that surrounds and overlaps the annular ledge of the support, and a bracket and fastener.
    Type: Application
    Filed: May 30, 2006
    Publication date: December 13, 2007
    Inventors: Jennifer Tiller, Allen K. Lau, Marc O'Donnell Schweitzer, Steven V. Sansoni, Keith A. Miller, Christopher Boitnott