Patents by Inventor Steven Zhang

Steven Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150087150
    Abstract: A method is provided for fabricating a semiconductor structure. The method includes providing a to-be-etched layer; and forming a hard mask layer on the to-be-etched layer. The method also includes forming a photoresist layer on the hard mask layer; and forming a patterned photoresist layer having openings exposing the hard mask layer by exposing and developing the photoresist layer. Further, the method includes forming sidewall spacers on side surfaces of the openings; and forming a patterned hard mask layer by etching the hard mask layer using the patterned photoresist layer and the sidewall spacers as an etching mask such that patterns in the hard mask layer have a substantially right angle at edge. Further, the method also includes forming to-be-etched patterns by etching the to-be-etched layer based on the patterned hard mask layer.
    Type: Application
    Filed: March 28, 2014
    Publication date: March 26, 2015
    Applicant: Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: DONGJIANG WANG, STEVEN ZHANG
  • Patent number: 8975186
    Abstract: Various embodiments provide double patterning methods and structures. In an exemplary method, a to-be-etched layer can be provided. A stress layer can be formed on the to-be-etched layer. The stress layer can have a tensile stress. A plurality of discrete sacrificial layers can be formed on the stress layer. A sidewall-spacer material layer covering the plurality of sacrificial layers and the stress layer can be formed. The sidewall-spacer material layer can be etched to form a sidewall spacer on a sidewall of each sacrificial layer of the plurality of sacrificial layers. The stress layer at each side of the each sacrificial layer can be etched to form a groove passing through a thickness of the stress layer. The plurality of sacrificial layers can be removed.
    Type: Grant
    Filed: February 12, 2014
    Date of Patent: March 10, 2015
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Peter Zhang, Jeffery He, Steven Zhang
  • Patent number: 8956964
    Abstract: Semiconductor devices and fabrication methods are provided. A fin can be formed on a semiconductor substrate, a gate can be formed across the fin, and sidewall spacers can be formed across the fin on both sides of the gate. A dummy contact can be formed across the fin and on each of the both sides of the sidewall spacers. After forming an interlayer dielectric layer on the semiconductor substrate, the dummy contact can be removed to form a contact trench. The dummy contact is made of a material having an etch selectivity sufficiently higher than the fin such that the removing of the dummy contact generates substantially no damage to the fin. A conductive material can be filled in the contact trench to form a trench metal contact.
    Type: Grant
    Filed: November 12, 2013
    Date of Patent: February 17, 2015
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Xinpeng Wang, Steven Zhang
  • Publication number: 20150001687
    Abstract: Various embodiments provide double patterning methods and structures. In an exemplary method, a to-be-etched layer can be provided. A stress layer can be formed on the to-be-etched layer. The stress layer can have a tensile stress. A plurality of discrete sacrificial layers can be formed on the stress layer. A sidewall-spacer material layer covering the plurality of sacrificial layers and the stress layer can be formed. The sidewall-spacer material layer can be etched to form a sidewall spacer on a sidewall of each sacrificial layer of the plurality of sacrificial layers. The stress layer at each side of the each sacrificial layer can be etched to form a groove passing through a thickness of the stress layer. The plurality of sacrificial layers can be removed.
    Type: Application
    Filed: February 12, 2014
    Publication date: January 1, 2015
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: PETER ZHANG, JEFFERY HE, STEVEN ZHANG
  • Publication number: 20140306352
    Abstract: Various embodiments provide semiconductor devices and fabrication methods. In an exemplary method, a dielectric layer can be formed on a semiconductor substrate. A plurality of pillar structures having a matrix arrangement can be formed on the dielectric layer. A plurality of sidewall spacers can be formed on the dielectric layer. Each sidewall spacer can be formed on a sidewall surface of one of the plurality of pillar structures. A distance between adjacent pillar structures in a same row or in a same column can be less than or equal to a double of a thickness of the each sidewall spacer on the sidewall surface. The plurality of pillar structures can be removed. The dielectric layer can be etched using the plurality of sidewall spacers as an etch mask to form a plurality of trenches or through holes in the dielectric layer.
    Type: Application
    Filed: February 12, 2014
    Publication date: October 16, 2014
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: PETER ZHANG, STEVEN ZHANG
  • Patent number: 8859358
    Abstract: A method is provided for fabricating a transistor. The method includes providing a semiconductor substrate; and configuring a channel region along a first direction. The method also includes forming trenches at both sides of the channel region along a second direction; and forming a magnetic material layer in each of the trenches. Further, the method includes magnetizing the magnetic material layers to form a magnetic field in the channel region between adjacent magnetic material layers; and forming source/drain regions at both ends of the channel region along the first direction.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: October 14, 2014
    Assignee: Semiconductor Manufacturing International Corp.
    Inventors: Dongjiang Wang, Steven Zhang
  • Publication number: 20140191314
    Abstract: Semiconductor devices and fabrication methods are provided. A fin can be formed on a semiconductor substrate, a gate can be formed across the fin, and sidewall spacers can be formed across the fin on both sides of the gate. A dummy contact can be formed across the fin and on each of the both sides of the sidewall spacers. After forming an interlayer dielectric layer on the semiconductor substrate, the dummy contact can be removed to form a contact trench. The dummy contact is made of a material having an etch selectivity sufficiently higher than the fin such that the removing of the dummy contact generates substantially no damage to the fin. A conductive material can be filled in the contact trench to form a trench metal contact.
    Type: Application
    Filed: November 12, 2013
    Publication date: July 10, 2014
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: XINPENG WANG, STEVEN ZHANG
  • Publication number: 20140191404
    Abstract: Local interconnect structures and fabrication methods are provided. A dielectric layer can be formed on a semiconductor substrate. A first film layer can be patterned on the dielectric layer to define a region surrounded by a local interconnect structure to be formed. A sidewall spacer can be formed and patterned surrounding the first film layer on an exposed surface portion of the dielectric layer. A second film layer can be formed on the exposed surface portion of the dielectric layer and can have a top surface substantially flushed with a top surface of the sidewall spacer. The patterned sidewall spacer can be removed to form a first opening. After forming the first opening, the dielectric layer can be etched to form a second opening through the dielectric layer. The second opening can be filled with a conductive material to form the local interconnect structure.
    Type: Application
    Filed: December 26, 2013
    Publication date: July 10, 2014
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: DONGJIANG WANG, DANNY HUANG, STEVEN ZHANG
  • Publication number: 20140191304
    Abstract: A method is provided for fabricating a transistor. The method includes providing a semiconductor substrate; and configuring a channel region along a first direction. The method also includes forming trenches at both sides of the channel region along a second direction; and forming a magnetic material layer in each of the trenches. Further, the method includes magnetizing the magnetic material layers to form a magnetic field in the channel region between adjacent magnetic material layers; and forming source/drain regions at both ends of the channel region along the first direction.
    Type: Application
    Filed: June 19, 2013
    Publication date: July 10, 2014
    Inventors: DONGJIANG WANG, STEVEN ZHANG
  • Publication number: 20140084377
    Abstract: A semiconductor device and method of fabricating the device are provided, the method including providing an insulating layer, wherein the insulating layer covers an active region and a gate of at least one semiconductor device; forming connection holes to the active region in the insulating layer to expose at least part of the active region, wherein the connection holes include a first portion of a first width and a second portion of a second width, the first portion of the connection holes being adjacent to the active region, and the first width being less than the second width; filling the connection holes with a metal material to form the contacts to the active region. As such, contacts formed for the active region also include a first portion of a first width and a second portion of a second width.
    Type: Application
    Filed: June 26, 2013
    Publication date: March 27, 2014
    Inventors: Steven ZHANG, Liya FU
  • Publication number: 20140031552
    Abstract: Provided herein are processes for preparing an isoindoline-1,3-dione compound, or an enantiomer or a mixture of enantiomers thereof; or a pharmaceutically acceptable salt, solvate, hydrate, or polymorph thereof.
    Type: Application
    Filed: July 26, 2013
    Publication date: January 30, 2014
    Applicant: Celgene Corporation
    Inventors: John F. TRAVERSE, Gregg Brian FEIGELSON, Alexander L. RUCHELMAN, Jihong LIU, Liu HONGFENG, Chengjun MA, Danyang LIU, Steven ZHANG
  • Patent number: 8365935
    Abstract: The present invention discloses a container body structure and a vehicle having the same, the container body structure comprising: a front wall, a rear wall, a left side panel, a right side panel, a roof sheet and a floor, each of them being a separate individual part; and connectors being provided at peripheries of the front wall, the rear wall, the left side panel, the right side panel, the roof sheet and the floor respectively, for cooperating with each other during assembling, in which assembly and disassembly of the container body structure can be realized through assembly and disassembly of the connectors for the front wall, the rear wall, the left side panel, the right side panel, the roof sheet and the floor. Owing to the characteristics of the container body structure of the present invention, the production, transportation and subsequent maintenance of the container body may be simplified, and thus production efficiency may be improved and maintenance cost may be reduced.
    Type: Grant
    Filed: February 3, 2010
    Date of Patent: February 5, 2013
    Assignees: China International Marine Containers (Group) Ltd., Qingdao CIMC Reefer Trailer Co., Ltd., Qingdao CIMC Reefer Container Manufacture Co., Ltd., Qingdao CIMC Special Reefer Co., Ltd.
    Inventors: T. H. Huang, Robert Wang, Ryan Xu, Eric Shan, Jack Zhang, Steven Zhang
  • Patent number: 8326497
    Abstract: A vehicle door actuating device for a vehicle includes an actuator device disposed on one of a vehicle door and a door frame of the vehicle. A bumper is disposed on the other of the vehicle door and the door frame opposite the actuator device. A door sensor is disposed on the vehicle that measures door position and door movement. A controller receives data from the door sensor relating to the door position and door movement and activates the actuator device when the vehicle is in a parked position. The controller instructs the actuator device to repel the bumper to assist a user in opening the vehicle door and attract the bumper to assist a user in closing the vehicle door during closure.
    Type: Grant
    Filed: January 12, 2009
    Date of Patent: December 4, 2012
    Assignee: Ford Global Technologies, LLC
    Inventors: Bijan K. Shahidi, XianLi Huang, Zhen Steven Zhang
  • Patent number: 8316184
    Abstract: Domain-based cache management methods and systems, including domain event based priority demotion (“EPD”). In EPD, priorities of cached data blocks are demoted upon one or more domain events, such as upon encoding of one or more macroblocks of a video frame. New data blocks may be written over lowest priority cached data blocks. New data blocks may initially be assigned a highest priority. Alternatively, or additionally, one or more new data blocks may initially be assigned one of a plurality of higher priorities based on domain-based information, such as a relative position of a requested data block within a video frame, and/or a relative direction associated with a requested data block. Domain-based cache management may be implemented with one or more other cache management techniques, such as least recently used techniques. Domain-based cache management may be implemented in associative caches, including set associative caches and fully associative caches, and may be implemented with indirect indexing.
    Type: Grant
    Filed: June 30, 2008
    Date of Patent: November 20, 2012
    Assignee: Intel Corporation
    Inventors: Zhen Fang, Erik G Hallnor, Nitin B Gupte, Steven Zhang
  • Patent number: 8068959
    Abstract: An apparatus for vehicle door deflection and movement control. The apparatus includes a primary electromagnetic device disposed generally in a vehicle door frame or generally in an area of a vehicle body adjacent the vehicle door frame, and a controller for activating the primary electromagnetic device to push or pull the vehicle door frame. The apparatus may further include a sensor for measuring vehicle door deflection during vehicle movement. The controller may activate the primary electromagnetic device based on deflection measurements by the sensor to pull the vehicle door frame to generally cancel the vehicle door deflection.
    Type: Grant
    Filed: August 7, 2007
    Date of Patent: November 29, 2011
    Assignee: Ford Global Technologies, LLC
    Inventors: Bijan K. Shahidi, XianLi Huang, Zhen Steven Zhang, Jason C. S. Tien
  • Patent number: 7930459
    Abstract: According to some embodiments, data to be exchanged via a system input output interface may be determined at a processor. It may then be arranged to exchange the data via a coherent input output device coupled to a coherent system interconnect. Other embodiments are described.
    Type: Grant
    Filed: September 28, 2007
    Date of Patent: April 19, 2011
    Assignee: Intel Corporation
    Inventors: Nagabhushan Chitlur, Linda Rankin, Dave Dunning, Shunyu Zhu, Steven Zhang, Chuanhua Song, Ling Liu, Zhihong Yu
  • Publication number: 20100213740
    Abstract: The present invention discloses a container body structure and a vehicle having the same, the container body structure comprising: a front wall, a rear wall, a left side panel, a right side panel, a roof sheet and a floor, each of them being a separate individual part; and connectors being provided at peripheries of the front wall, the rear wall, the left side panel, the right side panel, the roof sheet and the floor respectively, for cooperating with each other during assembling, in which assembly and disassembly of the container body structure can be realized through assembly and disassembly of the connectors for the front wall, the rear wall, the left side panel, the right side panel, the roof sheet and the floor. Owing to the characteristics of the container body structure of the present invention, the production, transportation and subsequent maintenance of the container body may be simplified, and thus production efficiency may be improved and maintenance cost may be reduced.
    Type: Application
    Filed: February 3, 2010
    Publication date: August 26, 2010
    Applicants: China International Marine Containers (Group) Ltd., Qingdao CIMC Reefer Trailer Co., Ltd, Qingdao CIMC Reefer Container Manufacture Co., Ltd, Qingdao CIMC Special Reefer Co., Ltd.
    Inventors: T.H. Huang, Robert Wang, Ryan Xu, Eric Shan, Jack Zhang, Steven Zhang
  • Publication number: 20100179732
    Abstract: A vehicle door actuating device for a vehicle includes an actuator device disposed on one of a vehicle door and a door frame of the vehicle. A bumper is disposed on the other of the vehicle door and the door frame opposite the actuator device. A door sensor is disposed on the vehicle that measures door position and door movement. A controller receives data from the door sensor relating to the door position and door movement and activates the actuator device when the vehicle is in a parked position. The controller instructs the actuator device to repel the bumper to assist a user in opening the vehicle door and attract the bumper to assist a user in closing the vehicle door during closure.
    Type: Application
    Filed: January 12, 2009
    Publication date: July 15, 2010
    Inventors: Bijan K. Shahidi, XianLi Huang, Zhen Steven Zhang
  • Publication number: 20090327611
    Abstract: Domain-based cache management methods and systems, including domain event based priority demotion (“EPD”). In EPD, priorities of cached data blocks are demoted upon one or more domain events, such as upon encoding of one or more macroblocks of a video frame. New data blocks may be written over lowest priority cached data blocks. New data blocks may initially be assigned a highest priority. Alternatively, or additionally, one or more new data blocks may initially be assigned one of a plurality of higher priorities based on domain-based information, such as a relative position of a requested data block within a video frame, and/or a relative direction associated with a requested data block. Domain-based cache management may be implemented with one or more other cache management techniques, such as least recently used techniques. Domain-based cache management may be implemented in associative caches, including set associative caches and fully associative caches, and may be implemented with indirect indexing.
    Type: Application
    Filed: June 30, 2008
    Publication date: December 31, 2009
    Inventors: Zhen Fang, Erik G. Hallnor, Nitin B. Gupte, Steven Zhang
  • Publication number: 20090089468
    Abstract: According to some embodiments, data to be exchanged via a system input output interface may be determined at a processor. It may then be arranged to exchange the data via a coherent input output device coupled to a coherent system interconnect. Other embodiments are described.
    Type: Application
    Filed: September 28, 2007
    Publication date: April 2, 2009
    Inventors: Nagabhushan Chitlur, Linda Rankin, Dave Dunning, Shunyu Zhu, Steven Zhang, Chuanhua Song, Ling Liu, Zhihong Yu