Abstract: A scanning probe microscope and method for operating the same are disclosed. The microscope includes a probe mount for attaching a probe, an electro-mechanical actuator, a probe position signal generator, an impulse signal generator and a servo. A probe tip is mounted on a first end of a cantilever arm, a second end of the cantilever arm being mounted on a mechanical vibrator that causes the second end to vibrate in response to a drive signal. The probe position signal generator generates a position signal indicative of a position of the probe relative to the second end of the cantilever arm. The impulse signal generator measures a quantity related to an impulse imparted to the probe tip by the interaction between the tip and the local characteristics of the sample. The servo operates the electro-mechanical actuator so as to maintain the measured quantity at a predetermined value.

Abstract: A scanning probe microscope and method for operating the same are disclosed. The microscope includes a probe mount for attaching a probe, an electromechanical actuator, a probe position signal generator, an impulse signal generator and a servo. A probe tip is mounted on a first end of a cantilever arm, a second end of the cantilever arm being mounted on a mechanical vibrator that causes the second end to vibrate in response to a drive signal. The probe position signal generator generates a position signal indicative of a position of the probe relative to the second end of the cantilever arm. The impulse signal generator measures a quantity related to an impulse imparted to the probe tip by the interaction between the tip and the local characteristics of the sample. The servo operates the electromechanical actuator so as to maintain the measured quantity at a predetermined value.

Abstract: A humidity sensor that includes a resonant structure and a structure for altering a resonant frequency of the resonant structure in response to a change in humidity. The structures of a humidity sensor according to the present teachings may be formed in relatively small form factors and are well suited to remote applications and providing mechanisms for compensating for temperature drift.

Abstract: A puck is movable within a puck field of motion defined by a boundary. Arcuate springs connect the puck to the boundary. Each arcuate spring has a first end connected to the puck and a second end connected to the boundary, and applies a force to the puck that maintains the puck in a predetermined region of the puck field of motion when no external force is applied to the puck. In an embodiment, each arcuate spring includes a planar spiral member. The arcuate springs can also apply a force that dampens any oscillations in the puck position when the puck returns to the predetermined region in the puck field of motion. The puck can also include an electrode that is electrically connected to a point outside the puck field of motion by one of the arcuate springs.

Abstract: An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.

Abstract: A pointing device includes a moveable puck that is capable of moving over a surface in a puck field of motion. The surface includes a detent feature defined within the puck field of motion for engaging with a detent feature of the moveable puck.

Abstract: A scanning probe microscope includes a scanning probe tip and an electrostatic surface actuator operatively coupled to the scanning probe tip. The electrostatic surface actuator includes a movable member that has a first surface with a first plurality of electrodes disposed on the first surface and a stationary member that has a second surface with a second plurality of electrodes disposed on the second surface. The first and second surfaces are disposed in a confronting relationship The movable and stationary members are resiliently coupled so that the movable member is capable of being displaced with respect to the stationary member. The first and second pluralities of electrodes are configured to generate electrostatic forces in response to voltages applied. The electrostatic forces laterally displace the movable member in the direction generally parallel to the first and second surfaces. The scanning probe tip is controllably positioned by displacement of the movable member.

Abstract: Several improvements have been made in inkjet print cartridges to realize 5 ng drop weights at ejection frequencies of 18 KHz. These improvements include small nozzle openings, improved heater resistor efficiency, and better ink supply reliability.

Abstract: Methods for dicing water stacks are provided. Preferably, the method includes the steps of: (1) providing a wafer stack having a first wafer and a second wafer; (2) exposing a portion of the first wafer by removing a portion of the second wafer; and (3) dicing the exposed portion of the first wafer such that a first die assembly is at least partially separated from the wafer stack. Wafer stacks and die assemblies also are provided.

Abstract: An optical module includes an active optical component, an optical fiber, a beam shaping optical component and a positioning device. The optical fiber is arranged with respect to the active optical component to be capable of propagating light along an optical path between the active optical component and the optical fiber. The beam shaping optical component is located in the optical path between the optical fiber and the active optical component. The positioning device is for moving either the beam shaping optical component with respect to the optical fiber, the beam shaping optical component with respect to the active optical component, or the active optical component with respect to the optical fiber, or a combination.

Abstract: A device includes first and second supports, a rotatable body and first and second flexible members. The first flexible member extends between the first support and a first position on the rotatable body. The second flexible member extends between the second support and a second position on the rotatable body. At least one of the supports is capable of linear movement in a first direction with respect to the other. The first position is offset from the second position in a second direction orthogonal to the first direction.

Abstract: An alignment assembly for an optics module includes an alignment stage that is enabled to provide an adjustment of the relative positioning of a light beam and a lens, but also includes a locking mechanism which disables the movement of the alignment stage following a one-time alignment procedure. The locking mechanism may include one or more heaters and meltable material which is heated during the one-time alignment procedure and cooled when the target relative position between the beam and the lens is achieved.

Abstract: The pointing device has a moveable puck that moves over a surface in a puck field of motion. A position detector measures the puck position in the puck field of motion. In one embodiment, the puck includes a user sensor that detects an interaction between a user and the puck. A controller causes a cursor to move on a display in response to the puck moving in the puck field of motion when the user sensor senses the interaction between the user and the puck. The magnitude and direction of motion of the cursor is determined by the magnitude and direction of motion of the puck in the puck field of motion. In another embodiment, a restoring mechanism is provided that returns the puck to a predetermined area in the puck field of motion when the user releases the puck.

Abstract: A puck is movable within a puck field of motion defined by a boundary. Arcuate springs connect the puck to the boundary. Each arcuate spring has a first end connected to the puck and a second end connected to the boundary, and applies a force to the puck that maintains the puck in a predetermined region of the puck field of motion when no external force is applied to the puck. In an embodiment, each arcuate spring includes a planar spiral member. The arcuate springs can also apply a force that dampens any oscillations in the puck position when the puck returns to the predetermined region in the puck field of motion. The puck can also include an electrode that is electrically connected to a point outside the puck field of motion by one of the arcuate springs.

Abstract: Several improvements have been made in inkjet print cartridges to realize 5 ng drop weights at ejection frequencies of 18 KHz. These improvements include small nozzle openings, improved heater resistor efficiency, and better ink supply reliability.

Abstract: An electrostatic stepping comb drive actuator has a first tooth and a second tooth. Each tooth has a first surface, with the first surface of the first tooth opposite the first surface of the second tooth, first conductors, and a first electrode array located on the first surfaces. The first electrode array includes first electrodes in first electrode groups. The comb drive actuator further includes a second member having a third tooth interdigitated with the first tooth and the second tooth such that relative motion is possible between the third tooth and the first and second teeth. The third tooth includes a second surface disposed opposite each of the first surfaces, second conductors, and a second electrode array located on the second surfaces. The second electrode array includes second electrodes in second electrode groups. The second electrodes in each second electrode group are electrically connected to the same one of the second conductors.

Abstract: A microelectromechanical system includes a first wafer, a second wafer including a moveable portion, and a third wafer. The movable portion is movable between the first wafer and the third wafer. The first wafer, the second wafer, and the third wafer are bonded together.

Abstract: Methods for routing optical beams are provided. One such method for routing a first optical beam comprises: providing a first mirror and a second mirror, both of which are steerable; providing a second optical beam; propagating the first optical beam such that the first optical beam is reflected by the first mirror prior to being reflected by the second mirror; propagating the second optical beam such that the second optical beam is reflected by the second mirror prior to being reflected by the first mirror; and orienting the first mirror and the second mirror such that the first and second optical beams are coincident at both the first mirror and the second mirror. Systems also are provided.

Abstract: A fluid ejection device includes a substrate, drop generators formed on the substrate at a high density, primitive select lines, and a ground line. The drop generators are arranged in primitives of drop generators. Each drop generator includes a heater resistor having a high resistance. Each primitive select line is separately electrically coupled to a corresponding one of the primitives and is configured to connect to a power source. The ground line is electrically coupled to all of the primitives.

Abstract: An electrostatic actuator having a first member and a second member. The first member has a first opposed surface that includes an array of driven electrodes. The driven electrodes have a pitch pr. The second member has a second opposed surface and includes an array of drive electrodes. A support positions the first member adjacent the second member with the first opposed surface spaced apart from the second opposed surface by a spacing d. The ratio of the spacing and the pitch should be less than eight, and is preferably less than 2.25. The support permits the first member to move relative to the second member, or vice versa. A voltage source establishes a substantially alternating voltage pattern on the array of driven electrodes.