Abstract: Data storage media are integrated into a microfabricated data storage system. Each data storage medium is located on one surface of a movable support. Flexures connected to the movable support allow the medium to move within a plane so that data can be stored at different locations on the medium, but significantly resist any out of the plane motion of the medium. Therefore, tips or other devices for writing or reading to or from the medium can be placed a small distance from the medium, thereby facilitating microfabrication of the data storage system. First electrodes are coupled to a second surface of the movable support opposite the medium. Second electrodes are located opposite the first electrodes to form an electrostatic surface actuator. Electric fields generated by the second electrodes interact with an electric field generated by the first electrodes to apply a force to the first electrodes and, hence, the movable support and the medium.

Abstract: A control device for regulating the flow of gas through a liquid utilizes capillary forces to manage gas retention and utilizes thermal energy to execute a gas release operation. A capillary path within the control device has an opening to a reservoir of liquid and has a geometry by which gas flow is inhibited by capillary forces on a liquid volume within the path. An equilibrium condition is established at the interface of the liquid and gas. However, a heater is in thermal communication with the capillary path for selectively heating the contained volume of liquid sufficiently to free the flow of air through the path. In a preferred application, the control device is employed in an ink cartridge to release accumulated air at selected times. By heating ink within the capillary path to a temperature above the boiling point of ink, the equilibrium condition at the air-to-ink interface is overcome.

Abstract: Two wafers are bonded together through an annealing process that maintains temperatures at CMOS compatible levels (i.e., below 500 degrees Celsius). A layer of palladium (Pd) is formed on a first wafer. Preferably an adhesion layer of chromium (Cr) attaches the palladium layer to the first wafer. The palladium layer is engaged with silicon (Si) from a second wafer, and the engaged wafers are annealed to form a palladium-silicide (PdSi) bond between the palladium layer of the first wafer and the silicon of the second wafer. In addition to bonding the first wafer to the second wafer, the palladium-silicon bond may be used to form an electrical connection between the two wafers so that circuits on both wafers may communicate to one another through the palladium-silicon bond.

Abstract: A palladium contact and a gasket are formed on a first wafer. The gasket and contact are simultaneously engaged with a silicon layer of a second wafer. The wafers are then heated to a temperature that both forms a bond between the palladium contact of the first wafer with the silicon layer of the second wafer and that fuses the gasket to the second wafer. Therefore, when the temperature is decreased, the palladium-silicon bond maintains the alignment of the two wafers with respect to one another, and the gasket hardens to form seal around a periphery of the two wafers. By placing the two wafers in a vacuum environment prior to engaging the two wafers, the space encompassed by the gasket and the two wafers forms a sealed vacuum during the heating process. Therefore, the heating process not only forms a palladium-silicon bond between the two wafers, but it also forms a vacuum seal around selected components included within either of the two wafers.

Abstract: An electrostatic actuator having a first member and a second member. The first member has a first opposed surface that includes an array of driven electrodes. The driven electrodes have a pitch p.sub.r. The second member has a second opposed surface and includes an array of drive electrodes. A support positions the first member adjacent the second member with the first opposed surface spaced apart from the second opposed surface by a spacing d. The ratio of the spacing and the pitch should be less than eight, and is preferably less than 2.25. The support permits the first member to move relative to the second member, or vice versa. A voltage source establishes a substantially alternating voltage pattern on the array of driven electrodes.

Abstract: A pressure regulator that sets the pressure of a liquid to a predetermined pressure differential below a reference pressure, such as atmospheric pressure. The pressure regulator comprises a liquid delivery channel and a capillary array. The liquid delivery channel includes a liquid input and a liquid output. The liquid flows through the liquid delivery channel from the liquid input to the liquid output. The capillary array is composed of ones of an elongate capillary. The capillary includes a first end in fluid communication with the liquid delivery channel and a second end in pressure communication with a source of the reference pressure. The liquid flows through the first end into the capillary to form a liquid surface in the capillary. The second end is remote from the first end.