Abstract: A micromechanical actuator for sorting hematopoietic stem cells for use in cancer therapies. The actuator operates by diverting cells into one of a number of possible pathways fabricated in the fabrication substrate of the micromechanical actuator, when fluorescence is detected emanating from the cells. The fluorescence results from irradiating the cells with laser light, which excites a fluorescent tag attached to the cell. The micromechanical actuator thereby sorts the cells individually, with an operation rate of 3.3 kHz, however with the massively parallel 1024-fold device described herein, a throughput of 3.3 million events/second is achievable.

Abstract: Pressurized fluid from a nozzle is applied against the movable member of a micromechanical device, in order to measure the mechanical properties of the device. The technique is non-destructive, non-invasive, can be applied at the wafer, row or die level, and at early or intermediate stages of fabrication.

Abstract: A surface micromachined micromagnetic actuator is described, wherein rotary actuation is accomplished by a member pivotably mounted on the surface of the substrate. Angular motion of the member about the pivot point is imparted by the interaction of a magnetic tab affixed to the member, with flux generated in the gap of an electromagnetic core. Rotary motion is restricted to less than 360 degrees by using an integrally formed hinge between the pivoting member and the pivot point, rather than by a more complex bearing. By virtue of this design, a large range of motion can be achieved without requiring a true bearing to be fabricated in the device. The pivoting member is also constrained in either of two stable positions upon de-energization of the electromagnetic core, by the attachment of a bistable spring between the pivoting member and the substrate.

Abstract: Pressurized fluid from a nozzle is applied against the movable member of a micromechanical device, in order to measure the mechanical properties of the device. The technique is non-destructive, non-invasive, can be applied at the wafer, row or die level, and at early or intermediate stages of fabrication.

Abstract: The present invention describes a parametric amplifier, which uses transverse plate modes of a mechanically elastic material as the nonlinear medium for the amplification. The device may be rendered as a filter, amplifier, oscillator or mixer, and multiple devices may be constructed in a small physical space using MEMS and photolithographic technologies. Because mechanical modes are used rather than acousto-electric interactions with a semiconductor, the parametric amplifier disclosed herein is more robust against severe environmental conditions such as temperature and ambient EM radiation.

Abstract: A micromechanical switch having a plurality of stable positions, which can be driven between the stable positions with a minimum of residual oscillation. The low oscillation results from the application of a braking force of specific magnitude and duration to exactly cancel the excess energy imparted to the switch during actuation. The braking algorithm results in a faster settling time, thereby improving the performance of the switch.

Abstract: A high frequency focused transducer may be formed by fabricating a piezoelectric or ferroelectric wafer of a thickness less than about 100 microns and bonding a malleable sheet to the wafer with a thin layer of adhesive. Thereafter, the composite may be pressed into a spherical mold to form a curved transducer without fracturing the wafer. In another embodiment, a conductive adhesive layer may be applied to the wafer to a thickness sufficient to hold the wafer in a curved state, when set. After the adhesive is set, the composite may be pressed into the mold while the adhesive is held at an elevated temperature whereat it is elastic. Thereafter the composite is cooled so that the adhesive layer is stabilized and the curved transducer is removed from the well.

Abstract: An ultrasound scanning system includes an array of transducer elements and an electrode array, movable with respect to the array to transducer elements. The electrode array is in electrical contact with transducer elements from the array of transducer elements which are immediately adjacent to the electrode array. The piezoelectric ceramic material is situated between the two-dimensional array of electrodes and the common ground electrode. Each electrode in the two-dimensional array of electrodes is electrically isolated from the other electrodes in the two-dimensional array of electrodes. The piezoelectric ceramic material may be arranged to form pillars, each pillar extending from an electrode from the two-dimensional array of electrodes to the common ground electrode. The movable electrode array is mounted on, for example, a thin Mylar membrane. The movable electrode array may be arranged in a variety of patterns.