Patents by Inventor Stuart L Friedman

Stuart L Friedman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Tandem microchannel plate and solid state electron detector
    Publication number: 20020175283
    Abstract: A compact detector for secondary and backscattered electrons in a scanning electron beam system includes a microchannel plate detector and a solid state detector connected in a tandem manner. The detector offers large bandwidth and high dynamic range. The detector can be used for article inspection, lithography, metrology, and other related applications. The compactness of the detector makes it ideally suited for utilization in a miniature electron beam column, such as a microcolumn.
    Type: Application
    Filed: May 24, 2001
    Publication date: November 28, 2002
    Applicant: ETEC SYSTEMS, INC.
    Inventors: Tai-Hon Philip Chang, Stuart L. Friedman, Ming L. Yu