Abstract: Disclosed is a locking device having applied thereto a colorimetric sensor for detecting hazardous chemical leak. The locking device for a fitting, according to an embodiment, may include: a fitting locking portion made of a transparent material and provided to surround a fitting of a pipe or valve; and a colorimetric sensor which is disposed inside the fitting locking portion and which changes in color due to a hazardous chemical leaked from the fitting.

Abstract: Disclosed are a colorimetric sensor for detecting harmful gas leakage in a product manufacturing process and a method for manufacturing the colorimetric sensor. The colorimetric sensor according to an embodiment may comprise: a colorimetric composition formed such that a dye including a metal component of which the own color changes when reacting with a harmful gas is bound to submicron fibers in the form of fine particles; and an adhesive band of a mesh structure to which the colorimetric composition is bound.

Abstract: Provided is a substrate polishing apparatus. The substrate polishing apparatus includes a carrier configured to grip a substrate, a polishing pad configured to polish a surface to be polished of the substrate gripped by the carrier while rotating, and a temperature control assembly configured to control a temperature of the polishing pad, and the temperature control assembly includes Deionized water (DIW) spraying module configured to spray DIW toward the polishing pad and a guide vane configured to guide at least a portion of the DIW sprayed from the DIW spraying module to an outside of the polishing pad.

Abstract: The present disclosure relates to an automatic metal sorting system using laser induced breakdown spectroscopy. The system may include: a conveyer configured to move waste metals at a constant speed; a shape measurer configured to measure a position and a shape of at least one waste metal on the conveyer; a laser induced breakdown spectroscopic device configured to determine the kind of the waste metal by emitting a laser to the waste metal and receiving and analyzing a plasma spectrum signal generated by the emitted laser; and a discharger configured to separate and discharge the waste metal in accordance with the determined kind of the waste metal.

Abstract: Provided are a membrane and carrier head using the membrane for polishing apparatus. The membrane comprises a first fixing flap extending inwards from the upper part of a side portion, a second fixing flap extending upwards from the upper part of the side portion, wherein the second fixing flap has a first inclined part, a second inclined part and a third extending part of extending upwards whereby a compensation force generated by the inclined parts realize the constant pressing force to the edge of a substrate during a polishing process.

Abstract: Disclosed is an operating method of a metal sorting system using laser induced breakdown spectroscopy (LIBS), which may include: analyzing a metal component distribution for various metals using LIBS library information; setting multiple clusters according to the metal component distribution; performing first regression component analysis with respect to spectral data of a metal sample; calculating a probability that the spectral data will belong to each of the set multiple clusters using the first regress component analysis result; performing second regression component analysis with respect to the spectral data which belong to each cluster; and discriminating a type of metal sample by a weighted sum of the calculated probability and the second regression component analysis result.

Abstract: A substrate polishing method for polishing a substrate through a polishing pad according to an embodiment may comprise: a preheating step of increasing the temperature of the polishing pad by supplying heated pure water to the polishing pad before polishing the substrate; and a temperature control step of controlling the temperature of the polishing pad by adjusting the temperature of the slurry supplied to the polishing pad in a polishing process of the substrate.

Abstract: A substrate polishing apparatus according to an example embodiment may include a substrate carrier configured to grasp and move a substrate, a polishing pad configured to come into contact with a polishing target surface of the substrate and polish the polishing target surface of the substrate, and a spray unit including a spray member configured to spray a fluid toward the substrate carrier.

Abstract: The present disclosure relates to an automatic metal sorting system using laser induced breakdown spectroscopy. The system may include: a conveyer configured to move waste metals at a constant speed; a shape measurer configured to measure a position and a shape of at least one waste metal on the conveyer; a laser induced breakdown spectroscopic device configured to determine the kind of the waste metal by emitting a laser to the waste metal and receiving and analyzing a plasma spectrum signal generated by the emitted laser; and a discharger configured to separate and discharge the waste metal in accordance with the determined kind of the waste metal.

Abstract: Provided are a membrane and carrier head using the membrane for polishing apparatus. The membrane comprises a first fixing flap extending inwards from the upper part of a side portion, a second fixing flap extending upwards from the upper part of the side portion, wherein the second fixing flap has a first inclined part, a second inclined part and a third extending part of extending upwards whereby a compensation force generated by the inclined parts realize the constant pressing force to the edge of a substrate during a polishing process.

Abstract: A pressure sensor includes a semiconductor layer, a gate electrode, a gate insulating layer, and a source electrode, and may be incorporated as a switching transistor in a display device. The gate electrode is configured to overlap the semiconductor layer. The gate insulating layer is disposed between the semiconductor layer and the gate electrode and includes a first insulating layer disposed on a surface of the semiconductor layer that faces the gate electrode and a second insulating layer comprising an elastic material disposed at least between the first insulating layer and the gate electrode. The source electrode and a drain electrode respectively coupled to spaced portions of the semiconductor layer.

Abstract: Disclosed is an operating method of a metal sorting system using laser induced breakdown spectroscopy (LIBS), which may include: analyzing a metal component distribution for various metals using LIBS library information; setting multiple clusters according to the metal component distribution; performing first regression component analysis with respect to spectral data of a metal sample; calculating a probability that the spectral data will belong to each of the set multiple clusters using the first regress component analysis result; performing second regression component analysis with respect to the spectral data which belong to each cluster; and discriminating a type of metal sample by a weighted sum of the calculated probability and the second regression component analysis result.

Abstract: A fixing apparatus for a sprinkler comprises a fixed frame horizontally extending above a ceiling material in a lengthwise direction, an installation frame horizontally extending above the fixed frame in a widthwise direction, an end bracket fastened with the fixed frame and the installation frame to fix an installation position of the sprinkler, and a center bracket having a first side allowing the installation frame to pass therethrough and a second side configured to surround the sprinkler.

Abstract: A pressure sensor includes a semiconductor layer, a gate electrode, a gate insulating layer, and a source electrode, and may be incorporated as a switching transistor in a display device. The gate electrode is configured to overlap the semiconductor layer. The gate insulating layer is disposed between the semiconductor layer and the gate electrode and includes a first insulating layer disposed on a surface of the semiconductor layer that faces the gate electrode and a second insulating layer comprising an elastic material disposed at least between the first insulating layer and the gate electrode. The source electrode and a drain electrode respectively coupled to spaced portions of the semiconductor layer.

Abstract: Disclosed is a cell culture tube, having in opposite end walls two respective eccentric openings which communicate with each other through an inner straight passage formed in the cell culture tube, in which the inner straight passage is tilted at an angle relative to a longitudinal axis of the cell culture tube to allow a culture medium to smoothly flow into and out of the inner passage through the openings. Also, provided is a multiple cell culture system using a plurality of the culture tubes.

Abstract: An end bracket for a sprinkler includes a first vertical plate where a first insertion hole is formed at an upper portion thereof and a first pressing screw, a hooking plate extending from both sides of the first vertical plate in the widthwise direction and where a vertical wall insertion groove where the vertical wall is inserted is formed downward at a lower portion of the hooking plate, and a fitting protrusion mating with a hook portion formed at an upper end of the vertical wall to be bent downward is formed at an inside of the vertical wall insertion groove to protrude upward, and a horizontal plate extending horizontally from an upper end of the first vertical plate in the widthwise direction and where a second pressing screw inserted into an inside thereof to press an upper surface of the installation frame is fastened at a center thereof.

Abstract: A polishing head of a chemical mechanical polishing apparatus includes a housing moving up and down, a base assembly connected to a bottom of the housing to support the housing, a membrane on a bottom of the base assembly and a retainer ring surrounding the membrane and connected to the bottom of the base assembly, the membrane including a pressing portion to adsorb and press a substrate, a first partition on the pressing portion and extending from an edge of the pressing portion along a height direction, a first horizontal extending portion extending from an upper end portion of the first partition toward a center of the membrane, and a second horizontal extending portion from the upper end portion of the first partition toward the center of the membrane, the second horizontal extending portion being above the first horizontal extending portion and including a curved portion expanding by pneumatic pressure.

Abstract: Disclosed are a cache synchronization system, a cache synchronization method and a local cache to perform synchronization. The local cache is configured to determine whether to perform synchronization for specific content on the basis of synchronization policy information, if it is determined that synchronization is to be performed, to set a dispersion parameter that defines a synchronization range for the specific content according to the synchronization policy information, and to transmit synchronization information about the specific content, which includes the dispersion parameter, to at least one neighboring local cache.