Patents by Inventor Sunil K. Singh

Sunil K. Singh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11901304
    Abstract: The disclosure provides an integrated circuit (IC) structure with fluorescent materials, and related methods. An IC structure according to the disclosure may include a layer of fluorescent material on an IC component. The layer of fluorescent material defines a portion of an identification marker for the IC structure.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: February 13, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Sunil K. Singh, Vibhor Jain, Siva P. Adusumilli, Sebastian T. Ventrone, Johnatan A. Kantarovsky, Yves T. Ngu
  • Publication number: 20230290855
    Abstract: The invention discloses a transistor structure including a substrate, a semiconductor layer disposed on the substrate and a gate layer disposed on the semiconductor layer, wherein the gate layer includes at least one gate having a first height, a first side and a second side opposite to the first side, a first dielectric spacer is disposed at the first side of the at least one gate, a first air spacer having a second height is disposed inside the first dielectric spacer, and the second height is lower than the first height.
    Type: Application
    Filed: March 11, 2022
    Publication date: September 14, 2023
    Inventors: John H Zhang, Chun Yu Wong, Sunil K Singh, Liang Li, Heng Yang
  • Patent number: 11699650
    Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure. With capacitor electrodes in different ILD layers. The structure includes a first inter-level dielectric (ILD) layer having a top surface, a first vertical electrode within the first ILD layer, a capacitor dielectric film on a top surface of the first vertical electrode, a second ILD layer over the first ILD layer, and a second vertical electrode within the second ILD layer and on the capacitor dielectric film. The capacitor dielectric film is vertically between the first vertical electrode and the second vertical electrode.
    Type: Grant
    Filed: January 18, 2021
    Date of Patent: July 11, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Alamgir M. Arif, Sunil K. Singh, Dewei Xu, Seung-Yeop Kook, Roderick A. Augur
  • Publication number: 20220375871
    Abstract: The disclosure provides an integrated circuit (IC) structure with fluorescent materials, and related methods. An IC structure according to the disclosure may include a layer of fluorescent material on an IC component. The layer of fluorescent material defines a portion of an identification marker for the IC structure.
    Type: Application
    Filed: May 18, 2021
    Publication date: November 24, 2022
    Inventors: Sunil K. Singh, Vibhor Jain, Siva P. Adusumilli, Sebastian T. Ventrone, Johnatan A. Kantarovsky, Yves T. Ngu
  • Publication number: 20220320015
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a backside structure for optical attack mitigation and methods of manufacture. The structure includes: at least one device on a front side of a semiconductor substrate; and a plurality of grating layers under the at least one device. The plurality of grating layers includes at least a first material having a first refractive index alternating with a second material having a second refractive index.
    Type: Application
    Filed: April 6, 2021
    Publication date: October 6, 2022
    Inventors: Vibhor JAIN, Yusheng BIAN, Yves T. NGU, Sunil K. SINGH, Sebastian T. VENTRONE, Johnatan A. KANTAROVSKY
  • Publication number: 20220230955
    Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure. With capacitor electrodes in different ILD layers. The structure includes a first inter-level dielectric (ILD) layer having a top surface, a first vertical electrode within the first ILD layer, a capacitor dielectric film on a top surface of the first vertical electrode, a second ILD layer over the first ILD layer, and a second vertical electrode within the second ILD layer and on the capacitor dielectric film. The capacitor dielectric film is vertically between the first vertical electrode and the second vertical electrode.
    Type: Application
    Filed: January 18, 2021
    Publication date: July 21, 2022
    Inventors: Alamgir M. Arif, Sunil K. Singh, Dewei Xu, Seung-Yeop Kook, Roderick A. Augur
  • Patent number: 11380622
    Abstract: The disclosure provides a method to authenticate an integrated circuit (IC) structure. The method may include forming a first authentication film (AF) material within the IC structure. A composition of the first AF material is different from an adjacent material within the IC structure. The method includes converting the first AF material into a void within the IC structure. Additionally, the method includes creating an authentication map of the IC structure to include a location of the void in the IC structure for authentication of the IC structure.
    Type: Grant
    Filed: November 20, 2020
    Date of Patent: July 5, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Sunil K. Singh, Johnatan A. Kantarovsky, Siva P. Adusumilli, Sebastian T. Ventrone, John J. Ellis-Monaghan, Yves T. Ngu
  • Patent number: 11348867
    Abstract: Embodiments of the disclosure provide a capacitor for an integrated circuit (IC). The capacitor may include a first vertical electrode on an upper surface of a first conductor within a first wiring layer. A capacitor dielectric may be on an upper surface of the first vertical electrode. A second vertical electrode may be on an upper surface of the capacitor dielectric. The second vertical electrode is vertically between the capacitor dielectric and a second conductor. An inter-level dielectric (ILD) layer is adjacent to each of the first vertical electrode, the capacitor dielectric, and the second vertical electrode. The ILD layer is vertically between the first conductor and the second conductor.
    Type: Grant
    Filed: November 5, 2020
    Date of Patent: May 31, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Dewei Xu, Sunil K. Singh, Seung-Yeop Kook, Roderick A. Augur
  • Publication number: 20220165676
    Abstract: The disclosure provides a method to authenticate an integrated circuit (IC) structure. The method may include forming a first authentication film (AF) material within the IC structure. A composition of the first AF material is different from an adjacent material within the IC structure. The method includes converting the first AF material into a void within the IC structure. Additionally, the method includes creating an authentication map of the IC structure to include a location of the void in the IC structure for authentication of the IC structure.
    Type: Application
    Filed: November 20, 2020
    Publication date: May 26, 2022
    Inventors: Vibhor Jain, Sunil K. Singh, Johnatan A. Kantarovsky, Siva P. Adusumilli, Sebastian T. Ventrone, John J. Ellis-Monaghan, Yves T. Ngu
  • Publication number: 20220139819
    Abstract: Embodiments of the disclosure provide a capacitor for an integrated circuit (IC). The capacitor may include a first vertical electrode on an upper surface of a first conductor within a first wiring layer. A capacitor dielectric may be on an upper surface of the first vertical electrode. A second vertical electrode may be on an upper surface of the capacitor dielectric. The second vertical electrode is vertically between the capacitor dielectric and a second conductor. An inter-level dielectric (ILD) layer is adjacent to each of the first vertical electrode, the capacitor dielectric, and the second vertical electrode. The ILD layer is vertically between the first conductor and the second conductor.
    Type: Application
    Filed: November 5, 2020
    Publication date: May 5, 2022
    Inventors: Dewei Xu, Sunil K. Singh, Seung-Yeop Kook, Roderick A. Augur
  • Patent number: 11211448
    Abstract: A capacitor structure for an integrated circuit (IC) is provided. The capacitor structure includes a plurality of spaced metal pillars with each metal pillar positioned on a corresponding underlying metal wire of an underlying metal layer. A metal-insulator-metal layer is positioned over and between the metal pillars. At least one contact is operatively coupled to a first metal pillar of the plurality of metal pillars. The metal-insulator-metal layer creates a MIM capacitor that undulates over the metal pillars, creating a higher density capacitance compared to conventional planar MIM capacitors. The metal pillars extend into the metal-insulator-metal layer, which reduces contact resistance. The capacitor structure can be integrated into an IC with no major integration issues. A related method is also provided.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: December 28, 2021
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Sunil K. Singh, Eswar Ramanathan
  • Publication number: 20210352424
    Abstract: A method of confirming an accessory functionality of an accessory device includes obtaining an accessory device description that includes information regarding the accessory device and identifying a test case based on the accessory device description. The test case is configured to evaluate the accessory functionality and includes a test standard. The method also includes performing, by a test device, a test procedure that corresponds to the test case. The test procedure causes the accessory device to perform an action that corresponds to the accessory functionality. The method also includes recording an observation regarding the action, and determining whether a test result corresponds to a pass condition or a fail condition based on a comparison of the observation to the test standard.
    Type: Application
    Filed: May 8, 2020
    Publication date: November 11, 2021
    Inventors: Jonathan M. VanKeulen, Sunil K. Singh
  • Patent number: 11107880
    Abstract: Embodiments of the disclosure provide a capacitor structure for an integrated circuit (IC), and methods to form the capacitor structure. The capacitor structure may include: a first ring electrode in an inter-level dielectric (ILD) layer on a substrate; an inner electrode positioned within the first ring electrode; and a capacitor dielectric separating the first ring electrode and the inner electrode, and separating a bottom surface of the inner electrode from the ILD layer.
    Type: Grant
    Filed: May 10, 2019
    Date of Patent: August 31, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Dewei Xu, Sunil K. Singh, Siva R. Dangeti, Seung-Yeop Kook
  • Publication number: 20210175323
    Abstract: A capacitor structure for an integrated circuit (IC) is provided. The capacitor structure includes a plurality of spaced metal pillars with each metal pillar positioned on a corresponding underlying metal wire of an underlying metal layer. A metal-insulator-metal layer is positioned over and between the metal pillars. At least one contact is operatively coupled to a first metal pillar of the plurality of metal pillars. The metal-insulator-metal layer creates a MIM capacitor that undulates over the metal pillars, creating a higher density capacitance compared to conventional planar MIM capacitors. The metal pillars extend into the metal-insulator-metal layer, which reduces contact resistance. The capacitor structure can be integrated into an IC with no major integration issues. A related method is also provided.
    Type: Application
    Filed: December 5, 2019
    Publication date: June 10, 2021
    Inventors: Sunil K. Singh, Eswar Ramanathan
  • Publication number: 20200357880
    Abstract: Embodiments of the disclosure provide a capacitor structure for an integrated circuit (IC), and methods to form the capacitor structure. The capacitor structure may include: a first ring electrode in an inter-level dielectric (ILD) layer on a substrate; an inner electrode positioned within the first ring electrode; and a capacitor dielectric separating the first ring electrode and the inner electrode, and separating a bottom surface of the inner electrode from the ILD layer.
    Type: Application
    Filed: May 10, 2019
    Publication date: November 12, 2020
    Inventors: Dewei Xu, Sunil K. Singh, Siva R. Dangeti, Seung-Yeop Kook
  • Patent number: 10832842
    Abstract: A first layer on a substrate includes an insulator material portion adjacent an energy-reactive material portion. The energy-reactive material portion evaporates upon application of energy during manufacturing. Processing patterns the first layer to include recesses extending to the substrate in at least the energy-reactive material portion. The recesses are filled with a conductor material, and a porous material layer is formed on the first layer and on the conductor material. Energy is applied to the porous material layer to: cause the energy to pass through the porous material layer and reach the energy-reactive material portion; cause the energy-reactive material portion to evaporate; and fully remove the energy-reactive material portion from an area between the substrate and the porous material layer, and this leaves a void between the substrate and the porous material layer and adjacent to the conductor material.
    Type: Grant
    Filed: August 26, 2019
    Date of Patent: November 10, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Sunil K. Singh, Jagar Singh
  • Patent number: 10818557
    Abstract: This disclosure is directed to an integrated circuit (IC) structure. The IC structure may include a semiconductor structure including two source/drain regions; a metal gate positioned on the semiconductor structure adjacent to and between the source/drain regions; a metal cap with a different metal composition than the metal gate and having a thickness in the range of approximately 0.5 nanometer (nm) to approximately 5 nm positioned on the metal gate; a first dielectric cap layer positioned above the semiconductor structure; an inter-layer dielectric (ILD) positioned above the semiconductor structure and laterally abutting both the metal cap and the metal gate, wherein an upper surface of the ILD has a greater height above the semiconductor structure than an upper surface of the metal gate; a second dielectric cap layer positioned on the ILD and above the metal cap; and a contact on and in electrical contact with the metal cap.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: October 27, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Sipeng Gu, Akshey Sehgal, Xinyuan Dou, Sunil K. Singh, Ravi P. Srivastava, Haiting Wang, Scott H. Beasor
  • Patent number: 10777413
    Abstract: Methods of fabricating an interconnect structure. A hardmask is deposited over a dielectric layer, and a block mask is formed that is arranged over an area on the hardmask. After forming the block mask, a first mandrel and a second mandrel are formed on the hardmask. The first mandrel is laterally spaced from the second mandrel, and the area on the hardmask is arranged between the first mandrel and the second mandrel. The block mask may be used to provide a non-mandrel cut separating the tips of interconnects subsequently formed in the dielectric layer.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: September 15, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Yuping Ren, Guoxiang Ning, Haigou Huang, Sunil K. Singh
  • Patent number: 10741495
    Abstract: In an exemplary method, a first dielectric layer is formed on a substrate. A second dielectric layer is formed on the first dielectric layer. The second dielectric layer is a carbon rich film and different from the first dielectric layer. A trench is formed through the first and second dielectric layers. A conductive line is formed in the trench. A third dielectric layer is formed on the second dielectric layer and conductive line. The material of the third dielectric layer is different from the second dielectric layer. A via opening is formed through the third dielectric layer and stops at the second dielectric layer with a portion of the conductive line exposed to the via opening. At the bottom of the via opening, a recess is formed in the second dielectric layer adjacent to the conductive line. The via opening and recess are filled with a conductive material contacting the conductive line.
    Type: Grant
    Filed: January 18, 2018
    Date of Patent: August 11, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Sunil K. Singh, Vinit O. Todi, Shao Beng Law
  • Patent number: 10714380
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to smooth sidewall structures and methods of manufacture. The method includes: forming a plurality of mandrel structures; forming a first spacer material on each of the plurality of mandrel structures; forming a second spacer material over the first spacer material; and removing the first spacer material and the plurality of mandrel structures to form a sidewall structure having a sidewall smoothness greater than the plurality of mandrel structures.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: July 14, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ravi P. Srivastava, Sipeng Gu, Sunil K. Singh, Xinyuan Dou, Akshey Sehgal, Zhiguo Sun