Abstract: A method of forming a semiconductor device includes forming a plurality of substantially equal-spaced first spacers having a first pitch over a substrate and forming first metal interconnecting wires utilizing the first spacers. The method also includes forming a plurality of substantially equal-spaced second spacers in such a way to abut, respectively, the plurality of first metal interconnecting wires and define a plurality of substantially equal-spaced trenches. A plurality of second metal interconnecting wires are disposed, respectively, within the trenches and the second spacers are removed, thereby defining a plurality of substantially equal-spaced channels.

Abstract: Disclosed are a method to fabricate interconnection wires of a semiconductor device in a way to utilize benefits of copper interconnection and low k dielectric insulation while avoiding the problem of low k damage due to etching processes, and so fabricated interconnection wires. The method saves fabrication time and cost by reduced number of steps and also resolves metal gap fill issue. The method may comprise providing layers of a substrate, an etch stop layer and a sacrificial layer, forming first spacers, forming first copper interconnecting wires, removing the first spacers; forming polymer-like second spacers by depositing plasma gases in an etching chamber, forming second metal interconnecting wires, removing the second spacers to define channels interwoven with alternating first and second metal interconnecting wires, forming an anti-diffusion barrier around each of the first and second metal interconnecting wires, and filling the channels with a dielectric material for insulation.

Abstract: Feed-forward and feedback strategies are used to control local oscillator power and transimpedance amplifier gain in a high-speed coherent optical receiver.

Abstract: A method of forming a dual damascene metal interconnect for a semiconductor device. The method includes forming a layer of low-k dielectric, forming vias through the low-k dielectric layer, depositing a sacrificial layer, forming trenches through the sacrificial layer, filling the vias and trenches with metal, removing the sacrificial layer, then depositing an extremely low-k dielectric layer to fill between the trenches. The method allows the formation of an extremely low-k dielectric layer for the second level of the dual damascene structure while avoiding damage to that layer by such processes as trench etching and trench metal deposition. The method has the additional advantage of avoiding an etch stop layer between the via level dielectric and the trench level dielectric.

Abstract: A method of forming a dual damascene metal interconnect for a semiconductor device. The method includes forming a layer of low-k dielectric, forming vias through the low-k dielectric layer, depositing a sacrificial layer, forming trenches through the sacrificial layer, filling the vias and trenches with metal, removing the sacrificial layer, then depositing an extremely low-k dielectric layer to fill between the trenches. The method allows the formation of an extremely low-k dielectric layer for the second level of the dual damascene structure while avoiding damage to that layer by such processes as trench etching and trench metal deposition. The method has the additional advantage of avoiding an etch stop layer between the via level dielectric and the trench level dielectric.

Abstract: I/Q data skew in a QPSK modulator may be detected by sending identical or complementary data streams to I and Q channel PSK modulators, setting the relative carrier phase between I and Q to zero or ?, and monitoring the average QPSK output power, where the data streams sent to the I and Q channels include streams of alternating ones and zeroes.

Abstract: Digital timing error detection systems and techniques are described. The described techniques are independent of polarization and differential-group-delay and are used to perform timing recovery of polarization-multiplexed coherent optical systems.

Abstract: A method for extracting admin information from a modulated optical signal. A coherent optical receiver receives the modulated optical signal, where a nominal carrier frequency of the modulated optical signal was modulated using a first slow frequency and second slow frequency associated with an electronic admin signal. The receiver converts the modulated optical signal to an electronic signal, and estimates estimating a plurality of carrier phases of the electronic signal. The receiver determines a plurality of offset values by calculating the time derivative of at least some of the estimated carrier phases, wherein each of the plurality of offset values are proportional to an associated frequency offset component, and the frequency of each offset value corresponds to the first slow frequency or the second slow frequency. The receiver extracts information corresponding to the electronic admin signal using the determined plurality of offset values.

Abstract: A method for determining, by a modulator assembly, an optimal drive point for a Mach-Zehnder modulator (MZM). The modulator assembly applies an electrical modulation signal to the MZM to modulate an optical input signal and create a modulated optical output signal, the modulated optical output having a spectrum that includes a first and third harmonic. The modulator assembly measures the difference in magnitude between the first harmonic and the third harmonic as the amplitude of the electrical modulation signal is varied, and determines a value for the amplitude of the electrical modulation signal that corresponds to a maximum difference between the first harmonic and the third harmonic.

Abstract: A coherent optical receiver measures a portion of a spectra of a multi-channel optical signal that includes at least one signal adjacent to a selected signal. The coherent optical receiver determines structure and bandwidth information for the measured portion of spectra, and determines one or more filter parameters for the selected signal based on the structure and bandwidth information of the at least one signal adjacent to the selected signal. The coherent optical receiver adjusts one or more active filter parameters of a carrier phase estimator in the optical coherent receiver to have values corresponding to the determined one or more filter parameters.

Abstract: A method of forming a dual damascene metal interconnect for a semiconductor device. The method includes forming a layer of low-k dielectric, forming vias through the low-k dielectric layer, depositing a sacrificial layer, forming trenches through the sacrificial layer, filling the vias and trenches with metal, removing the sacrificial layer, then depositing an extremely low-k dielectric layer to fill between the trenches. The method allows the formation of an extremely low-k dielectric layer for the second level of the dual damascene structure while avoiding damage to that layer by such processes as trench etching and trench metal deposition. The method has the additional advantage of avoiding an etch stop layer between the via level dielectric and the trench level dielectric.

Abstract: A method for detecting and measuring time skew in high-speed DP-QPSK coherent optical receivers is described.

Abstract: Patterns detected by a low-speed receiver at the output of a high-speed multiplexer are used to determine when multiplexer input lanes are deskewed.

Abstract: Coherent optical receiver performance is optimized and made adaptable to changing optical channel conditions by providing feedback loops to adjust receiver parameters based on measured receiver performance.

Abstract: I/Q data skew in a QPSK modulator may be detected by sending identical or complementary data streams to I and Q channel PSK modulators, setting the relative carrier phase between I and Q to zero or ?, and monitoring the average QPSK output power, where the data streams sent to the I and Q channels include pseudorandom streams of ones and zeroes.

Abstract: Feed-forward and feedback strategies are used to control local oscillator power and transimpedance amplifier gain in a high-speed coherent optical receiver.

Abstract: Digital timing error detection systems and techniques are described. The described techniques are independent of polarization and differential-group-delay and are used to perform timing recovery of polarization-multiplexed coherent optical systems.

Abstract: I/Q data skew in a QPSK modulator may be detected by sending identical or complementary data streams to I and Q channel PSK modulators, setting the relative carrier phase between I and Q to zero or ?, and monitoring the average QPSK output power, where the data streams sent to the I and Q channels include pseudorandom streams of ones and zeroes.

Abstract: Patterns detected by a low-speed receiver at the output of a high-speed multiplexer are used to determine when multiplexer input lanes are deskewed.

Abstract: I/Q data skew in a QPSK modulator may be detected by sending identical or complementary data streams to I and Q channel PSK modulators, setting the relative carrier phase between I and Q to zero or ?, and monitoring the average QPSK output power, where the data streams sent to the I and Q channels include streams of alternating ones and zeroes.