Patents by Inventor Sushant S. Koshti

Sushant S. Koshti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS AND APPARATUS FOR AN EFFICIENT HANDSHAKE BETWEEN MATERIAL HANDLING AND MATERIAL PROCESSING DEVICES FOR SAFE MATERIAL TRANSFER
    Publication number: 20090202336
    Abstract: Methods and systems are provided. The invention includes performing a handshake directly between a load port associated with process equipment and material handling equipment; and transferring a carrier between the material handling equipment and the load port based on the handshake. Numerous other aspects are provided.
    Type: Application
    Filed: February 11, 2009
    Publication date: August 13, 2009
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Vinay K. Shah, Sushant S. Koshti
  • USE OF LOGICAL LOTS IN SEMICONDUCTOR SUBSTRATE PROCESSING
    Publication number: 20080294282
    Abstract: In some embodiments, a method of processing substrates is provided that includes (1) grouping substrates in a plurality of substrate carriers as a logical lot; (2) processing the logical lot as if the substrates were stored in a single substrate carrier; and (3) performing metrology on a representative subset of substrates in the logical lot. Numerous other embodiments are provided.
    Type: Application
    Filed: May 24, 2008
    Publication date: November 27, 2008
    Applicant: Applied Materials, Inc.
    Inventors: Sushant S. Koshti, Vinay K. Shah, Eric A. Englhardt
  • METHODS AND APPARATUS FOR SENSING SUBSTRATES IN CARRIERS
    Publication number: 20080156689
    Abstract: In some aspects, a method is provided for mapping contents of a substrate carrier. The method includes (1) moving a carrier to a sensor; and (2) determining, with the sensor, a presence or an absence of a substrate in the carrier based upon a position of a substrate clamp in the carrier. Numerous other aspects are provided.
    Type: Application
    Filed: December 19, 2007
    Publication date: July 3, 2008
    Inventors: Sushant S. Koshti, Eric A. Englhardt, Vinay K. Shah