Patents by Inventor Tadamasa Iwamoto

Tadamasa Iwamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11004714
    Abstract: A load port includes a door and a mapping sensor. The door moves upward and downward between a closing position for closing an opening connected into a container with multiple stages for placing a plurality of substrates and an opening position for opening the opening. The mapping sensor is disposed integrally with the door and detects a state of the substrates. The mapping sensor includes a light emitting portion and an imaging portion. The light emitting portion emits an imaging light toward the substrates. The imaging portion captures an image of a reflected light of the imaging light.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: May 11, 2021
    Assignee: TDK CORPORATION
    Inventors: Tadamasa Iwamoto, Takuya Kudo
  • Publication number: 20210104424
    Abstract: A load port apparatus connects a main opening of a wafer transportation container to a frame opening. The apparatus includes an installation unit, a frame unit, a flange clamp unit, and a detection unit. The installation unit includes an installation table configured to install the container and relatively move to the frame opening. The frame unit is upright upward from the installation unit and includes the frame opening. The flange clamp unit includes an engagement section and a drive section. The engagement section is engageable with a flange surrounding an outer circumference of the main opening. The drive section drives the engagement section to carry out an engagement operation and a separation operation. The detection unit detects the engagement operation by the flange clamp unit with classification into a normal engagement operation and an abnormal engagement operation.
    Type: Application
    Filed: October 7, 2020
    Publication date: April 8, 2021
    Applicant: TDK CORPORATION
    Inventors: Tomoshi ABE, Hiroshi HASEGAWA, Nozomu KATO, Hiroshi IGARASHI, Tadamasa IWAMOTO
  • Publication number: 20200303227
    Abstract: A load port apparatus includes a mount member, a purge nozzle, and a plurality of pins. The mount member mounts a container. The nozzle introduces a cleaning gas into the container mounted on the mount member via a purge port disposed on a bottom of the container. The pins support the container from below by each contacting with a predetermined position of the bottom of the container. The pins are relatively vertically movable to the mount member between a first position and a second position where an upper tip of each of the pins is located lower than that at the first position. The upper tip of each of the pins at the first position contacts with the predetermined position of the container. The upper tip of each of the pins at the second position contacts with the predetermined position of the container.
    Type: Application
    Filed: March 13, 2020
    Publication date: September 24, 2020
    Applicant: TDK Corporation
    Inventor: Tadamasa IWAMOTO
  • Publication number: 20200266085
    Abstract: A load port includes a door and a mapping sensor. The door moves upward and downward between a closing position for closing an opening connected into a container with multiple stages for placing a plurality of substrates and an opening position for opening the opening. The mapping sensor is disposed integrally with the door and detects a state of the substrates. The mapping sensor includes a light emitting portion and an imaging portion. The light emitting portion emits an imaging light toward the substrates. The imaging portion captures an image of a reflected light of the imaging light.
    Type: Application
    Filed: May 31, 2019
    Publication date: August 20, 2020
    Applicant: TDK CORPORATION
    Inventors: Tadamasa IWAMOTO, Takuya KUDO
  • Patent number: 10665488
    Abstract: A load port apparatus connects a main opening of a wafer transportation container with a frame opening. The load port apparatus includes an installation part, a frame, and a flange clamp. The installation part has an installation table configured to install the wafer transportation container and move to and from the frame opening. The frame is upright from the installation part and has the frame opening. The flange clamp includes an engagement portion and a drive portion. The engagement portion is configured to be engaged with a flange surrounding an outer circumference of the main opening. The drive portion is configured to drive the engagement portion. The engagement portion is engaged from above or the side with a flange groove formed in the flange and opening radially outwardly.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: May 26, 2020
    Assignee: TDK CORPORATION
    Inventors: Tadamasa Iwamoto, Hiroshi Igarashi
  • Publication number: 20200114403
    Abstract: Provided is a bottom gas purge device including a nozzle that can be appropriately connected to a purge port. A bottom gas purge device configured to introduce a cleaning gas into a container from a bottom portion of the container accommodating a substrate includes: a mounting table on which the container is mounted; a nozzle provided so as to be movable relative to the mounting table in an upward-downward direction and connectable from below to a purge port provided in the bottom portion of the container; a gas supply unit configured to supply the cleaning gas to the nozzle; and a pressure sensor provided at a tip end portion of the nozzle and configured to detect a pressure rising between the purge port and the nozzle when the nozzle is connected to the purge port.
    Type: Application
    Filed: October 10, 2019
    Publication date: April 16, 2020
    Applicant: TDK CORPORATION
    Inventor: Tadamasa IWAMOTO
  • Patent number: 10512948
    Abstract: A gas purge unit 20 introduces a cleaning gas into a purging container 2 with an opening 2b therethrough. The gas purge unit 20 includes a first nozzle outlet 26 and a second nozzle outlet 28. The first nozzle outlet 26 blows out the cleaning gas from a lateral side line part of the opening 2b toward the inside of the purging container 2. The second nozzle outlet 28 blows out the cleaning gas from the lateral side line part of the opening 2b toward an opening surface of the opening 2b.
    Type: Grant
    Filed: November 19, 2015
    Date of Patent: December 24, 2019
    Assignee: TDK CORPORATION
    Inventors: Tadamasa Iwamoto, Jun Emoto
  • Publication number: 20190168268
    Abstract: A gas purge unit introduces a cleaning gas into a purge container with an opening therethrough. The gas purge unit includes a first blowout member second blowout member. The first blowout member is disposed along a lateral the opening and includes a first nozzle port. The first nozzle port blows the cleaning gas into the purge container. The second blowout member is disposed along the lateral side and includes a second nozzle port. The second nozzle port is disposed farther from the opening than the first nozzle port and blows the cleaning gas into the purge container. A load port apparatus includes the gas purge unit.
    Type: Application
    Filed: November 21, 2018
    Publication date: June 6, 2019
    Applicant: TDK CORPORATION
    Inventors: Tadamasa IWAMOTO, Jun EMOTO
  • Publication number: 20190096728
    Abstract: A load port apparatus connects a main opening of a wafer transportation container with a frame opening. The load port apparatus includes an installation part, a frame, and a flange clamp. The installation part has an installation table configured to install the wafer transportation container and move to and from the frame opening. The frame is upright from the installation part and has the frame opening. The flange clamp includes an engagement portion and a drive portion. The engagement portion is configured to be engaged with a flange surrounding an outer circumference of the main opening. The drive portion is configured to drive the engagement portion. The engagement portion is engaged from above or the side with a flange groove formed in the flange and opening radially outwardly.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 28, 2019
    Applicant: TDK CORPORATION
    Inventors: Tadamasa IWAMOTO, Hiroshi IGARASHI
  • Patent number: 9929033
    Abstract: In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container can be filled with a cleaning gas without inclining the purging container. A control means drives a nozzle driving mechanism to move a purge nozzle toward a purge port based on a fixing detection signal detected by a fixing detection sensor showing that the purging container is fixed on a table.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: March 27, 2018
    Assignee: TDK CORPORATION
    Inventors: Jun Emoto, Tadamasa Iwamoto
  • Patent number: 9895723
    Abstract: In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container is filled with a cleaning gas until just before transportation, and a placement failure does not happen to the next purging container to be placed. A purge nozzle is moved to a direction separating from a purge port after detecting a movement of a table on which the purging container is installed to an undock position and a stop of a feeding of the cleaning gas.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: February 20, 2018
    Assignee: TDK CORPORATION
    Inventor: Tadamasa Iwamoto
  • Patent number: 9607871
    Abstract: An object is to prevent down flow gas from entering into a pod in an open state in an EFEM system. An upper canopy is provided along the upper edge of an opening portion on the mini-environment side to block down flow along the opening portion. The upper canopy provides a space in which inert gas supplied through a supply port provided in the pod flows into the mini-environment through the opening of the pod after circulating inside the pod. The down flow has no effect in this space, and the entrance of down flow into the pod can be prevented.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: March 28, 2017
    Assignee: TDK Corporation
    Inventor: Tadamasa Iwamoto
  • Publication number: 20170025296
    Abstract: In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container can be filled with a cleaning gas without inclining the purging container. A control means drives a nozzle driving mechanism to move a purge nozzle toward a purge port based on a fixing detection signal detected by a fixing detection sensor showing that the purging container is fixed on a table.
    Type: Application
    Filed: March 31, 2016
    Publication date: January 26, 2017
    Inventors: Jun EMOTO, Tadamasa IWAMOTO
  • Publication number: 20170025298
    Abstract: In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container is filled with a cleaning gas until just before transportation, and a placement failure does not happen to the next purging container to be placed. A purge nozzle is moved to a direction separating from a purge port after detecting a movement of a table on which the purging container is installed to an undock position and a stop of a feeding of the cleaning gas.
    Type: Application
    Filed: March 31, 2016
    Publication date: January 26, 2017
    Inventor: Tadamasa IWAMOTO
  • Patent number: 9543177
    Abstract: An object is to prevent the partial pressure of oxidative gas over time in an FOUP mounted on an FIMS system and left open. A surface purge unit is provided on a side opposite to the opening of the FOUP in such a way that wafers supported in the FOUP is located between the opening and the surface purge unit. The surface purge unit ejects inert gas from a plurality of vent holes provided in its surface toward the opening. Uniform purging or replacement of the interior of the FOUP with inert gas can be achieved by creating inert gas flow from an inert gas supply part extending over a surface in the direction from the interior of the FOUP toward the opening along the wafer surface.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: January 10, 2017
    Assignee: TDK Corporation
    Inventors: Toshihiko Miyajima, Tadamasa Iwamoto, Jun Emoto
  • Patent number: 9536765
    Abstract: A load port unit can prevent or control leakage of inert gas from an EFEM system to the outside. The load port unit used in the EFEM system is provided with an air inlet that opens on a side facing a mini-environment between the upper end of an opener driving unit and the lower end of the pod. The width of the air inlet opening is larger than the width of the opening of the pod. With this arrangement, surplus gas is sucked from the pod when gas purging is performed on the pod.
    Type: Grant
    Filed: May 30, 2014
    Date of Patent: January 3, 2017
    Assignee: TDK Corporation
    Inventors: Tadamasa Iwamoto, Jun Emoto, Toshihiko Miyajima, Hidenori Tsutsui
  • Publication number: 20160207082
    Abstract: A gas purge unit 20 introduces a cleaning gas into a purging container 2 with an opening 2b therethrough. The gas purge unit 20 includes a first nozzle outlet 26 and a second nozzle outlet 28. The first nozzle outlet 26 blows out the cleaning gas from a lateral side line part of the opening 2b toward the inside of the purging container 2. The second nozzle outlet 28 blows out the cleaning gas from the lateral side line part of the opening 2b toward an opening surface of the opening 2b.
    Type: Application
    Filed: November 19, 2015
    Publication date: July 21, 2016
    Inventors: Tadamasa IWAMOTO, Jun EMOTO
  • Publication number: 20150294888
    Abstract: An object is to prevent down flow gas from entering into a pod in an open state in an EFEM system. An upper canopy is provided along the upper edge of an opening portion on the mini-environment side to block down flow along the opening portion. The upper canopy provides a space in which inert gas supplied through a supply port provided in the pod flows into the mini-environment through the opening of the pod after circulating inside the pod. The down flow has no effect in this space, and the entrance of down flow into the pod can be prevented.
    Type: Application
    Filed: March 23, 2015
    Publication date: October 15, 2015
    Applicant: TDK Corporation
    Inventor: Tadamasa IWAMOTO
  • Patent number: 9153468
    Abstract: To prevent an inert gas from stagnating in an internal space of a mount base of a load port apparatus, the load port apparatus includes: an outside air supply device for introducing an air from an external space, in which an operator works, into the internal space of the mount base; a casing surrounding a space in which a drive mechanism for a door is arranged; and a duct through which a gas inside the internal space of the casing is dischargeable.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: October 6, 2015
    Assignee: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima
  • Publication number: 20150243538
    Abstract: An object is to prevent the partial pressure of oxidative gas over time in an FOUP mounted on an FIMS system and left open. A surface purge unit is provided on a side opposite to the opening of the FOUP in such a way that wafers supported in the FOUP is located between the opening and the surface purge unit. The surface purge unit ejects inert gas from a plurality of vent holes provided in its surface toward the opening. Uniform purging or replacement of the interior of the FOUP with inert gas can be achieved by creating inert gas flow from an inert gas supply part extending over a surface in the direction from the interior of the FOUP toward the opening along the wafer surface.
    Type: Application
    Filed: February 27, 2015
    Publication date: August 27, 2015
    Applicant: TDK Corporation
    Inventors: Toshihiko MIYAJIMA, Tadamasa IWAMOTO, Jun EMOTO