Patents by Inventor Tadamasa Iwamoto

Tadamasa Iwamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150235885
    Abstract: A system prevents oxidative gases in a FOUP which is fixed to an FIMS system in an open state from increasing over time. A tower type gas supply port extending from the bottom of the FOUP to inside is provided. Nitrogen can be supplied into the FOUP through the gas supply port in addition to nitrogen purge through the pod opening, when the pod is mounted on the FIMS. Two gas flows thus formed cooperate to create a gas flow flowing along the side of the FOUP opposite to the opening and to the opening. Thus, the gas in the interior of the FOUP is remounted with nitrogen uniformly.
    Type: Application
    Filed: February 20, 2015
    Publication date: August 20, 2015
    Applicant: TDK Corporation
    Inventor: Tadamasa IWAMOTO
  • Publication number: 20150214078
    Abstract: To prevent an increase with the passage of time in partial pressure of oxidizing gas in a FOUP, which is fixed to a FIMS system in an open state, a gas feed port is arranged on a lower surface of the FOUP so as to feed nitrogen to an inside of the FOUP through the gas feed port in a state where the FOUP is mounted on the FIMS system, in addition to nitrogen purge from an opening of the FOUP. A nitrogen feed system, which feeds nitrogen in a state where the FOUP is mounted on the FIMS system, is controlled so as to feed nitrogen at a low flow rate and a low pressure capable of suppressing the stirring-up of dust, which has a size that may cause a problem in wiring to be formed on a wafer, from the gas feed port and the like.
    Type: Application
    Filed: January 26, 2015
    Publication date: July 30, 2015
    Applicant: TDK Corporation
    Inventors: Tadamasa IWAMOTO, Jun EMOTO
  • Publication number: 20150194328
    Abstract: Provided is a load port apparatus capable of suppressing leakage of an inert gas from a mini-environment. The load port apparatus includes: a main base configured to partition the mini-environment from an external space, the main base including an opening portion facing an opening of a pod and communicating the mini-environment to the external space; and a door configured to open and close the opening portion and hold a lid. With this, wafers are insertable and removable between the pod and the mini-environment. The load port apparatus further includes a flexible sealing plate arranged so as to project from the main base toward an inside of the opening portion, the flexible sealing plate being configured to abut against an abutment surface surrounding the opening of the pod.
    Type: Application
    Filed: December 29, 2014
    Publication date: July 9, 2015
    Applicant: TDK Corporation
    Inventors: Jun EMOTO, Tadamasa IWAMOTO
  • Patent number: 8978718
    Abstract: To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening portion; a gas supply pipe arranged in parallel to each purge nozzle, for supplying an inert gas to the purge nozzle and the curtain nozzle, the gas being supplied from the gas supply pipe to the purge nozzle in a direction orthogonal to an extending direction of the gas supply pipe; and a conductance adjusting unit arranged at an end portion of the gas supply pipe, for generating a pressure loss in a gas flow in a configuration in which the gas is supplied to the curtain nozzle at the end portion of the gas supply pipe.
    Type: Grant
    Filed: August 14, 2012
    Date of Patent: March 17, 2015
    Assignee: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima
  • Publication number: 20140363258
    Abstract: A load port unit can prevent or control leakage of inert gas from an EFEM system to the outside. The load port unit used in the EFEM system is provided with an air inlet that opens on a side facing a mini-environment between the upper end of an opener driving unit and the lower end of the pod. The width of the air inlet opening is larger than the width of the opening of the pod. With this arrangement, surplus gas is sucked from the pod when gas purging is performed on the pod.
    Type: Application
    Filed: May 30, 2014
    Publication date: December 11, 2014
    Applicant: TDK Corporation
    Inventors: Tadamasa Iwamoto, Jun Emoto, Toshihiko Miyajima, Hidenori Tsutsui
  • Publication number: 20140157722
    Abstract: The partial pressure of an oxidizing gas within a FOUP fixed to a FIMS system and placed in an open state is prevented from increasing with the lapse of time. To that end, a gas supply port is arranged in the bottom face of the FOUP to enable nitrogen supply into the FOUP through the gas supply port with a pod mounted on the FIMS system. A nitrogen supply system for supplying nitrogen with the FOUP mounted is controlled so as to make a nitrogen supply at such a low flow rate and pressure as to be able to prevent dust or the like having such sizes as to possibly cause problems in wiring lines to be formed on a wafer from being stirred up from the gas supply port or the like.
    Type: Application
    Filed: December 3, 2013
    Publication date: June 12, 2014
    Applicant: TDK Corporation
    Inventors: Tadamasa IWAMOTO, Jun Emoto, Toshihiko Miyajima
  • Publication number: 20130042945
    Abstract: To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening portion; a gas supply pipe arranged in parallel to each purge nozzle, for supplying an inert gas to the purge nozzle and the curtain nozzle, the gas being supplied from the gas supply pipe to the purge nozzle in a direction orthogonal to an extending direction of the gas supply pipe; and a conductance adjusting unit arranged at an end portion of the gas supply pipe, for generating a pressure loss in a gas flow in a configuration in which the gas is supplied to the curtain nozzle at the end portion of the gas supply pipe.
    Type: Application
    Filed: August 14, 2012
    Publication date: February 21, 2013
    Applicant: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima
  • Publication number: 20130011223
    Abstract: To prevent an inert gas from stagnating in an internal space of a mount base of a load port apparatus, the load port apparatus includes: an outside air supply device for introducing an air from an external space, in which an operator works, into the internal space of the mount base; a casing surrounding a space in which a drive mechanism for a door is arranged; and a duct through which a gas inside the internal space of the casing is dischargeable.
    Type: Application
    Filed: July 3, 2012
    Publication date: January 10, 2013
    Applicant: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima