Abstract: Provided is a fuel cell separator which can achieve a stable power generation over a prolonged period of time and a method of producing the fuel cell separator. The fuel cell separator has a recess for gas flow path whose surface is roughened in such a manner that the arithmetic mean roughness Ra is 0.5 to 10 ?m, and the recess for gas flow path is brought into contact with a fluorine-containing gas or a gas containing both fluorine and oxygen. Whereby a hydrophilic surface most suitable for prevention of flooding is formed and a fuel cell separator which can achieve a stable power generation over a prolonged period of time can be obtained. The thus obtained fuel cell separator can retain a uniform liquid film formed on the surface thereof for at least 10 seconds when a test piece prepared from the fuel cell separator is immersed in water for 30 seconds and pulled out therefrom to a position at not less than 1 cm from the water surface within 1 second.

Abstract: A curable composition comprising: (A) a hydrocarbon compound having a plurality of carbon-carbon double bonds, and (B) a carbonaceous material. The hydrocarbon compound may preferably be 1,2-polybutadiene. The curable composition may be used for a fuel cell separator.

Abstract: A curable composition comprising: (A) a hydrocarbon compound having a plurality of carbon-carbon double bonds, and (B) a carbonaceous material. The hydrocarbon compound may preferably be 1,2-polybutadiene. The curable composition may be used for a fuel cell separator.

Abstract: A thermal head that includes a bonding portion and a protective layer. The thermal head prevents electrostatic discharge damage from occurring in the bonding portion of the thermal head due to the protective layer being electrostatically charged.

Abstract: Water vapor is mixed to O3 gas generated by an ozone generator of discharge type. The mixed fluid is cooled by a cooler, thereby impurities such as metals and nitrogen oxides contained in the O3 gas dissolve into condensed water. Subsequently, a gas-liquid separator separates the O3 gas from the condensed water. Water vapor is mixed with the O3 gas again. The mixed fluid passes through a metal trap composed of a container containing plural silicon chips as a metal adsorbent, thereby to remove the remaining metals therefrom.

Abstract: [Problem] To provide a substrate processing apparatus capable of preventing adherence of hydrogen fluoride to an inner surface the like of a chamber. [Means for Solving] An apparatus housing and processing a substrate W in a chamber includes a hydrogen fluoride gas supply path 61 for supplying a hydrogen fluoride gas into a chamber 40, wherein a part or whole of an inner surface of the chamber 40 is formed of Al or Al alloy which has not been subjected to surface oxidation treatment. The chamber 40 includes a lid 52 closing an upper opening of a chamber main body 51, and at least an inner surface of the lid 52 is formed of the Al or Al alloy which has not been subjected to alumite treatment.

Abstract: A substrate processing method which removes an ArF resist film from a wafer having the ArF resist film. As an ultraviolet irradiation process is performed on the ArF resist film, and then an ozone gas and water vapor are fed to the ArF resist film, the ArF resist film is altered in a water-soluble state. Thereafter, the ArF resist film is removed from the substrate by feeding pure water to the ArF resist film altered into the water-soluble state.

Abstract: A substrate processing method for removing a resist film from a substrate having the resist film formed thereon comprises maintaining the inner region of the chamber at a prescribed temperature by putting a substrate in a chamber, denaturing the resist film by supplying ozone and a water vapor in such a manner that ozone is supplied into the chamber while a water vapor is supplied into the chamber at a prescribed flow rate, the amount of ozone relative to the amount of the water vapor being adjusted such that the dew formation within the chamber is prevented, and processing the substrate with a prescribed liquid material so as to remove the denatured resist film from the substrate.

Abstract: A resist film removing method for removing a resist film disposed on a substrate and having a cured layer at a surface includes covering the surface of the resist film with a protection film; causing popping in the resist film covered with the protection film; denaturing the resist film and the protection film after causing popping, to be soluble in water; and performing purified water cleaning to remove from the substrate the resist film and the protection film denatured to be soluble in water.

Abstract: An electroconductive resin composition, comprising at least: a multi-component polymer-type resin binder (A) comprising a dispersed phase and a continuous phase, and having a number-average particle size of dispersed phase of 0.001-2 ?m, and an electroconductive material (B) in the form of powder and/or fiber. The electroconductive resin composition may preferably be used for a fuel cell separator.

Abstract: A high-performance separator for a fuel cell and a high-performance cell unit (single cell unit or short stack unit) for a fuel cell, each ensuring lightweight and compact fabrication necessary to enhance output density, enabling stacking without use of a gas seal member and making the insulating treatment of the outer circumference of the stack not necessary, and production methods thereof are provided. By a processing method of forming a thermoplastic resin composition highly filled with a carbonaceous material into a thin sheet form, heating the sheet to a melted state, and cold-shaping the melt at a high speed, a lightweight, compact and high-performance thin fuel cell separator having a corrugated flow path may be provided.

Abstract: A high-performance fuel cell separator ensuring lightweight and compact fabrication necessary to enhance output density and enabling stacking without use of a gas seal member, and a production method thereof, are provided. By a processing method of forming a thermoplastic resin composition highly filled with a carbonaceous material into a thin sheet form, heating the sheet to a melted state, and cold-shaping the melt at a high speed, a thin separator having a corrugated flow path can be molded at a high speed, and a lightweight, compact and high-performance separator for a fuel cell can be provided. Also, by forming the sheet in a multilayer structure and heat-welding it, the contact resistance with the gas diffusing electrode can be reduced, and a compact integrated fuel cell separator requiring no gasket can be provided.

Abstract: The object of the invention is to provide a reliable thermal head designed to prevent electrostatic discharge damage from occurring in the bonding pad portion due to the protective layer being electrostatically charged; a method for manufacture of the thermal head; and a printing head for the thermal head. The present invention relates to the thermal head including: the heat elements 24 provided on the substrate 25; the wiring patterns 27 and 47 for applying electric power to the heat elements; and the bonding pad portion 52; wherein the heat elements 24 being covered by the protective layer 5; wherein the substrate 25 is secured on the metallic mount 21; and wherein the protective layer 51 is electrically connected to the mount 21.

Abstract: A fuel cell separator having a surface layer on one side or both sides thereof. The surface layer includes at least two layers, wherein the surface layer includes a low-elastic modulus layer (1) having a bending elastic modulus of 1.0×10<sp>1</sp>-6.0×10<sp>3</sp> MPa, and a bending strain of 1% or more; and a high-elastic modulus layer (2) having a bending elastic modulus exceeding 6.0×10<sp>3</sp> MPa, as at least one layer constituting the surface layer, other than the low-elastic modulus layer (1).

Abstract: Resists can be removed while metal contamination of wafers, etc. and generation of particles, and growth of oxide films are suppressed. A substrate processing method comprises feeding a processing gas, such as ozone gas, into a processing vessel to pressurize an atmosphere surrounding a substrate. A solvent gas, such as steam, is fed into the processing vessel while the processing gas is fed into the processing vessel, whereby a resist of the substrate can be removed with the solvent gas and the processing gas while metal corrosion, etc. can be prevented.

Abstract: There is provided a conductive curable resin composition comprising (A) a curable resin composition comprising an elastomer with a Mooney viscosity (ML1+4 (100° C.)) of 25 or greater at 2-80 wt % and (B) a carbon material, with a weight ratio of component (A) to component (B) of 70-5:30-95. The curable resin composition of component (A) preferably comprises (A1) an elastomer at 80-2 wt %, (A2) a radical reactive resin at 20-98 wt % and (A3) an organic peroxide at 0.2-10 parts by weight to 100 parts by weight of (A1+A2). Also provided are a process for production of a conductive cured resin by shaping and curing of the conductive curable resin composition, and a fuel cell separator, an assembly for a cell, an electrode or a heat releasing plate, obtained thereby.

Abstract: There is provided a conductive curable resin composition comprising (A) a curable resin composition comprising an elastomer with a Mooney viscosity (ML1+4 (100° C.)) of 25 or greater at 2-80 wt % and (B) a carbon material, with a weight ratio of component (A) to component (B) of 70-5:30-95. The curable resin composition of component (A) preferably comprises (A1) an elastomer at 80-2 wt %, (A2) a radical reactive resin at 20-98 wt % and (A3) an organic peroxide at 0.2-10 parts by weight to 100 parts by weight of (A1+A2). Also provided are a process for production of a conductive cured resin by shaping and curing of the conductive curable resin composition, and a fuel cell separator, an assembly for a cell, an electrode or a heat releasing plate, obtained thereby.

Abstract: Semiconductor wafers are cleaned by placing the semiconductor wafers in a processing vessel, forming a pure water film on the surfaces of the wafers, forming an ozonic water film by dissolving ozone gas in the pure water film, and removing resist films formed on the wafers by the agency of the ozonic water film. The pure water film is formed by condensing steam on the surfaces of the wafers. The resist films formed on the surfaces of the wafers can be removed by also using hydroxyl radicals produced by interaction between steam and ozone gas supplied into the processing vessel. Thus, the resist films can be removed highly effectively.

Abstract: A fuel cell separator having a surface layer on one side or both sides thereof. The surface layer includes at least two layers, wherein the surface layer includes a low-elastic modulus layer (1) having a bending elastic modulus of 1.0×10<sp>1</sp>-6.0×10<sp>3</sp> MPa, and a bending strain of 1% or more; and a high-elastic modulus layer (2) having a bending elastic modulus exceeding 6.0×10<sp>3</sp> MPa, as at least one layer constituting the surface layer, other than the low-elastic modulus layer (1).

Abstract: An electroconductive resin composition, comprising at least: a multi-component polymer-type resin binder (A) comprising a dispersed phase and a continuous phase, and having a number-average particle size of dispersed phase of 0.001-2 ?m, and an electroconductive material (B) in the form of powder and/or fiber. The electroconductive resin composition may preferably be used for a fuel cell separator.