Abstract: An electrical contact device (X1) includes a first contactor with contact portions (C1, C2) and a second contactor with contact portions (C3, C4). The device (X1) also includes an electrical circuit having a branch path (YA) provided by the contact portions (C1, C3) and a branch path (YB) provided by the contact portions (C2, C4). When closed, the branch path (YA) has a smaller resistance, and the branch path (YB) a greater resistance. In a closing operation, the first and second contactors approach each other. Then the contact portion (C1) and the contact portion (C3) contact with each other after the contact portion (C2) and the contact portion (C4) contact with each other. In an opening operation, the first and second contactors separate from each other. Then the contact portion (C1) and the contact portion (C3) separate after the contact portion (C2) and the contact portion (C4) separate.

Abstract: A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.

Abstract: A microswitching element includes a base substrate, a fixing portion attached to the base substrate, and a movable portion including a fixed end fixed to the fixing portion. The movable portion is surrounded by the fixing portion via a slit having a pair of closed ends. The movable portion includes a first surface and a second surface. The first surface faces the base substrate, and the second surface is opposite to the first surface. The microswitching element also includes a movable contact portion provided on the second surface of the movable portion, and a pair of fixed contact electrodes each including a contact surface facing the movable contact portion. The fixed contact electrodes are attached to the fixing portion.

Abstract: The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By adjusting a voltage to be applied between the first movable electrode and the second movable electrode, an arbitrary distance is secured between the two electrodes by the electrostatic attractive force generated between the two electrodes, and a desired electrostatic capacitance is obtained. When the distance between the two electrodes is shortened, first, at the center, a part of the first movable electrode and a part of the second movable electrode come into contact with each other with the dielectric layer between them. Then, the first movable electrode and the dielectric layer (second movable electrode) come into contact with each other successively from the contact part towards the periphery side, and the contact area gradually increases.

Abstract: An electrical contact device (X1) includes a first contactor with contact portions (C1, C2) and a second contactor with contact portions (C3, C4). The device (X1) also includes an electrical circuit having a branch path (YA) provided by the contact portions (C1, C3) and a branch path (YB) provided by the contact portions (C2, C4). When closed, the branch path (YA) has a smaller resistance, and the branch path (YB) a greater resistance. In a closing operation, the first and second contactors approach each other. Then the contact portion (C1) and the contact portion (C3) contact with each other after the contact portion (C2) and the contact portion (C4) contact with each other. In an opening operation, the first and second contactors separate from each other. Then the contact portion (C1) and the contact portion (C3) separate after the contact portion (C2) and the contact portion (C4) separate.

Abstract: An electrical contacting device includes a plurality of current paths connected in parallel to each other, and a plurality of electrical contact points each having a first contact and a second contact that are mechanically opened and closed. Each current path is provided with a corresponding one of the contact points. For prevention of the occurrence of arc discharge at the contact points, each current path has its electrical characteristics adjusted in order not to allow the passage of the minimum discharge current.

Abstract: A field-emission cathode having an emitter provided with a substrate, an emitter electrode layer, an insulating layer, a gate electrode layer, the layers being formed on the substrate in this order, needlelike projections for electron emission provided on the emitter electrode layer in a gate opening from which the insulating layer and the gate electrode layer are removed and each grown from one point in a given direction, and different projections for electron emission formed on all or part of the projections. The projections of the emitter are made of metallic particles, and thereby the manufacturing cost is lowered.

Abstract: A tunable capacitor includes a substrate, a stationary electrode and a movable electrode supported by the substrate, piezoelectric actuators that are supported by the substrate and drive the movable electrode, and a dielectric layer interposed between the stationary electrode and the movable electrode.

Abstract: A surface acoustic wave filter includes series-arm resonators and parallel-arm resonators that are connected in a ladder-like fashion. This surface acoustic wave filter satisfies conditions expressed as: 1×106?4?2f02R2CopCos?3.1×106 where Cop is the electrostatic capacitance of the parallel-arm resonators, Cos is the electrostatic capacitance of the series-arm resonators, f0 is the center frequency, and R is the nominal impedance.

Abstract: A micro-switching device includes a base substrate and a cantilever fixed to the base substrate via a spacer or anchor portion. The cantilever has an inner surface facing the substrate and an outer surface opposite to the inner surface. A conductive strip is formed on the outer surface of the cantilever. The switching device also includes a pair of stationary electrodes fixed to the base substrate. Each of the electrodes includes a downward contacting part spaced from the conductive strip on the cantilever. As the cantilever bends upward, the conductive strip is brought into contact with the contacting parts of the respective stationary electrodes.

Abstract: A method is provided for making a micro-switching element. The switching element includes a substrate, two supporting members fixed to the substrate, and a movable beam bridging between the supporting members. The beam includes a membrane, a movable contact electrode and a movable driving electrode, both disposed on the membrane. The switching element also includes a pair of stationary contact electrodes facing the movable contact electrode, and a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force. The method includes the steps of making a sacrifice layer on the substrate, making the membrane on the sacrifice layer, and subjecting the sacrifice layer to etching with the membrane intervening, so that the supporting members are formed as remaining portions of the sacrifice layer between the substrate and the membrane.

Abstract: A film bulk acoustic resonator is fabricated in the following manner. First, a base layer is formed on an insulating substrate. Then, a resonator assembly is formed on the base layer. The resonator assembly includes a first electrode held in contact with the base layer, a second electrode, and a piezoelectric layer held between the first and the second electrodes. Then, a resist layer is formed to cover the resonator assembly and the base layer. Then, a through-hole is formed in the resist layer so that the base layer is exposed via the through-hole. Then, etchant is supplied via the through-hole to make a space in the base layer under the resonator assembly. Finally, the resist layer is removed.

Abstract: A film bulk acoustic resonator is fabricated in the following manner. First, a base layer is formed on an insulating substrate. Then, a resonator assembly is formed on the base layer. The resonator assembly includes a first electrode held in contact with the base layer, a second electrode, and a piezoelectric layer held between the first and the second electrodes. Then, a resist layer is formed to cover the resonator assembly and the base layer. Then, a through-hole is formed in the resist layer so that the base layer is exposed via the through-hole. Then, etchant is supplied via the through-hole to make a space in the base layer under the resonator assembly. Finally, the resist layer is removed.

Abstract: An electrical contacting device includes a plurality of current paths connected in parallel to each other, and a plurality of electrical contact points each having a first contact and a second contact that are mechanically opened and closed. Each current path is provided with a corresponding one of the contact points. For prevention of the occurrence of arc discharge at the contact points, each current path has its electrical characteristics adjusted in order not to allow the passage of the minimum discharge current.

Abstract: A surface acoustic wave filter includes series-arm resonators and parallel-arm resonators that are connected in a ladder-like fashion.

Abstract: A film bulk acoustic resonator is fabricated in the following manner. First, a base layer is formed on an insulating substrate. Then, a resonator assembly is formed on the base layer. The resonator assembly includes a first electrode held in contact with the base layer, a second electrode, and a piezoelectric layer held between the first and the second electrodes. Then, a resist layer is formed to cover the resonator assembly and the base layer. Then, a through-hole is formed in the resist layer so that the base layer is exposed via the through-hole. Then, etchant is supplied via the through-hole to make a space in the base layer under the resonator assembly. Finally, the resist layer is removed.

Abstract: A field-emission cathode having an emitter provided with a substrate, an emitter electrode layer, an insulating layer, a gate electrode layer, the layers being formed on the substrate in this order, needlelike projections for electron emission provided on the emitter electrode layer in a gate opening from which the insulating layer and the gate electrode layer are removed and each grown from one point in a given direction, and different projections for electron emission formed on all or part of the projections. The projections of the emitter are made of metallic particles, and thereby the manufacturing cost is lowered.

Abstract: A tunable capacitor includes a substrate, a stationary electrode and a movable electrode supported by the substrate, piezoelectric actuators that are supported by the substrate and drive the movable electrode, and a dielectric layer interposed between the stationary electrode and the movable electrode.

Abstract: A film bulk acoustic resonator is fabricated in the following manner. First, a base layer is formed on an insulating substrate. Then, a resonator assembly is formed on the base layer. The resonator assembly includes a first electrode held in contact with the base layer, a second electrode, and a piezoelectric layer held between the first and the second electrodes. Then, a resist layer is formed to cover the resonator assembly and the base layer. Then, a through-hole is formed in the resist layer so that the base layer is exposed via the through-hole. Then, etchant is supplied via the through-hole to make a space in the base layer under the resonator assembly. Finally, the resist layer is removed.

Abstract: A display device includes a cathode plate having a minute field emission cathode to emit electrons into an area defining a pixel, a spacer support member, and an anode plate placed between the cathode plate and the spacer support member, the anode plate having a fluorescent layer in the area defining the pixel, wherein the spacer support member is provided with a plurality of pole members for contacting the cathode plate and supporting the cathode plate against atmospheric pressure, the pole members extending vertically toward the cathode plate from a surface of the spacer support member and passing through a plurality of through-holes provided on the anode plate without contacting the anode plate.