Abstract: A hydrogen communication hole of a water electrolysis apparatus is formed to penetrate in a stacking direction through an anode separator, an electrolyte membrane, and a cathode separator. A communication hole body, which is disposed between an anode current collector and the hydrogen communication hole, includes an inside member facing toward the hydrogen communication hole, and an outside member facing toward the anode current collector. On the outside member, there are provided accommodating chambers in which seal members are accommodated, and an opposing surface that faces toward the inside member without the seal members being interposed therebetween. The accommodating chambers and the hydrogen communication hole communicate via through holes, which are formed in the inside member in a manner so that openings on one end thereof face toward the opposing surface, and openings on another end thereof face toward the hydrogen communication hole.

Abstract: This method includes: a step of imaging, by an imaging apparatus in a substrate treatment system, a reference substrate which is a reference for condition setting and acquiring a captured image of the reference substrate; a step of imaging, by the imaging apparatus, a treated substrate on which the predetermined treatment has been performed under a current treatment condition and acquiring a captured image of the treated substrate; a step of calculating a deviation amount in color information between the captured image of the treated substrate and the captured image of the reference substrate; a step of calculating a correction amount of the treatment condition based on a correlation model acquired in advance and on the deviation amount in the color information; and a step of setting the treatment condition based on the correction amount, wherein steps other than the step of acquiring a captured image of the reference substrate are performed for each of the treatment apparatuses.

Abstract: A substrate inspection apparatus includes: a storage configured to store inspection image data obtained from a captured image of a periphery of a substrate on which a plurality of films is formed, and an inspection recipe; and an edge detector configured to detect a target edge as an edge of an inspection target film among the films on the basis of the inspection image data stored in the storage by using the inspection recipe stored in the storage. Each of edges of the films extends along the periphery of the substrate. The inspection recipe is configured by combining parameters each of which has one option specified among a plurality of options.

Abstract: A substrate inspection method includes a first process of taking, while rotating a holding table where a reference substrate is held, an image of an end surface of the reference substrate; a second process of obtaining shape data on the end surface of the reference substrate by processing the image; a third process of taking, while rotating the holding table where a target substrate is held, an image of an end surface of the target substrate; a fourth process of obtaining shape data on the end surface of the target substrate by processing the image; and a fifth process of calculating a warpage amount of the target substrate by obtaining a difference between the shape data obtained in the second process and in the fourth process under a condition that a rotational position of the holding table in the first process coincides with that in the third process.

Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.

Abstract: A first end plate that constitutes a fuel cell stack is provided with an oxidant gas supply manifold member that connects an oxidant gas inlet communication hole and a circular external pipe. The oxidant gas supply manifold member has a non-circular opening portion that communicates with the oxidant gas inlet communication hole and a circular opening portion that communicates with the circular external pipe. The non-circular opening portion is disposed within an area covered by the circular opening portion.

Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.

Abstract: A processing method in one embodiment includes: a step that takes an image of the end face of a reference substrate, whose warp amount is known, over the whole periphery thereof using a camera to obtain shape data of the end face of the reference substrate over the whole periphery of the reference substrate; a step that takes an image of the end face of a substrate over the whole periphery thereof using a camera to obtain shape data of the end face of the substrate over the whole periphery of the substrate; a step that calculates warp amount of the substrate based on the obtained shape data; a step that forms a resist film on a surface of the substrate; a step that determines the supply position from which an organic solvent is to be supplied to a peripheral portion of the resist film and dissolves the peripheral portion by the solvent supplied from the supply position to remove the same from the substrate.

Abstract: A processing method in one embodiment includes: a step that takes an image of the end face of a reference substrate, whose warp amount is known, over the whole periphery thereof using a camera to obtain shape data of the end face of the reference substrate over the whole periphery of the reference substrate; a step that takes an image of the end face of a substrate over the whole periphery thereof using a camera to obtain shape data of the end face of the substrate over the whole periphery of the substrate; a step that calculates warp amount of the substrate based on the obtained shape data; a step that forms a resist film on a surface of the substrate; a step that determines the supply position from which an organic solvent is to be supplied to a peripheral portion of the resist film and dissolves the peripheral portion by the solvent supplied from the supply position to remove the same from the substrate.

Abstract: A water electrolysis system includes a water electrolysis stack, a gas-liquid separator, a water supply path, a water introduction unit, a water lead-out unit, a water discharge path, and a circulation pump. The water lead-out unit includes a first water lead-out unit and a second water lead-out unit, which are provided in the water electrolysis stack. The water introduction unit is positioned in a stacking direction between the first water lead-out unit and the second water lead-out unit, together with being disposed in a water electrolysis cell which is positioned between both ends in the stacking direction among a plurality of the water electrolysis cells.

Abstract: A fuel cell stack includes a stack body formed by stacking a plurality of fuel cells together in a stacking direction. A second end plate is provided at one end of the stack body in the stacking direction. A pair of coolant supply passages are provided at upper and lower positions of the second end plate for allowing a coolant to flow into the fuel cells. A coolant supply manifold member is attached to the second end plate, and an insulating plate is provided between the second end plate and the coolant supply manifold member.

Abstract: A hydrogen communication hole of a water electrolysis apparatus is formed to penetrate in a stacking direction through an anode separator, an electrolyte membrane, and a cathode separator. A communication hole body, which is disposed between an anode current collector and the hydrogen communication hole, includes an inside member facing toward the hydrogen communication hole, and an outside member facing toward the anode current collector. On the outside member, there are provided accommodating chambers in which seal members are accommodated, and an opposing surface that faces toward the inside member without the seal members being interposed therebetween. The accommodating chambers and the hydrogen communication hole communicate via through holes, which are formed in the inside member in a manner so that openings on one end thereof face toward the opposing surface, and openings on another end thereof face toward the hydrogen communication hole.

Abstract: A fuel cell stack includes a stacked body, a first insulator and a second insulator. The stacked body includes power generation cells. The power generation cells are stacked in a stacking direction. The power generation cells include a first end power generation cell a second end power generation cell. Each of the power generation cells includes a membrane electrode assembly, a cathode separator and an anode separator. The first end power generation cell has an outermost cathode separator. The second end power generation cell has an outermost anode separator. The first insulator has a first recess in which a first heat-insulating body and a first terminal plate are accommodated. The second insulator has a second recess in which a second heat-insulating body and a second terminal plate are accommodated. A first number of first stacked heat-insulating layers is larger than a second number of second stacked heat-insulating layers.

Abstract: A fuel cell stack includes a stack body formed by stacking a plurality of fuel cells together in a stacking direction. A second end plate is provided at one end of the stack body in the stacking direction. A pair of coolant supply passages are provided at upper and lower positions of the second end plate for allowing a coolant to flow into the fuel cells. A coolant supply manifold member is attached to the second end plate, and an insulating plate is provided between the second end plate and the coolant supply manifold member.

Abstract: A method of adjusting a sensitivity parameter value for substrate defect inspection used in a substrate defect inspection apparatus compares, for each pixel value of a selected virtual inspection substrate, using reference pixel data to be used after adjustment, the deviation amount from an allowable range corresponding to the position thereof and the sensitivity parameter value before the adjustment when each pixel value is deviated from the allowable range, and updates the deviation amount as a new sensitivity parameter value when the deviation amount exceeds the sensitivity parameter value and a difference between the deviation amount and the sensitivity parameter value is equal to or less than a threshold value.

Abstract: A fuel cell stack includes a stacked body including a plurality of power generation cells stacked in a stacking direction. Insulation members and end plates are provided to sandwich the stacked body therebetween in the stacking direction. A coolant passage is provided between each of the insulation members and each of the end plates. The coolant passage includes a first coolant passage and a second coolant passage. A surface area of a region in which the first coolant passage is provided is larger than a surface area of a region in which the second coolant passage is provided. A flow rate of the coolant flowing through the first coolant passage is larger than a flow rate of the coolant flowing through the second coolant passage.

Abstract: A fuel cell stack includes a bracket and a boss. The bracket includes an attachment surface. The bracket includes an attachment and detachment hole and an opening hole. The boss includes a bearing surface and a locking surface part. The locking surface part is connected to the bearing surface and protrudes in an outside direction such that at least a part of the locking surface part overlaps with the attachment surface part viewed from an attachment direction when a center of the attachment and detachment hole coincides with a center of the bearing surface.

Abstract: A fuel cell stack includes unit cells, a resin load receiver, and a connecting member. The resin load receiver is provided in each of a first and second separators. The resin load receiver has a projecting portion that projects outwardly from an outer peripheral edge of each of the first and second separators and that has a projecting portion lateral face. The connecting member includes an engagement portion engaged with the resin load receiver and having a depressed portion into which the projecting portion is inserted and which has a depressed portion lateral face facing the projecting portion lateral face. A distance between the projecting portion lateral face and the depressed portion lateral face at a root portion of the projecting portion is smaller than a distance between the projecting portion lateral face and the depressed portion lateral face at an end of the projecting portion.

Abstract: A fuel cell includes a power generation unit. A first resin frame member is provided in an outer portion of a first membrane electrode assembly of the power generation unit. The first metal separator has a heating portion subjected to spot heating from a surface of the first metal separator for allowing the first resin frame member to be melted partially. The first metal separator and the first membrane electrode assembly are welded together by a plurality of welding portions to form a first structural body.

Abstract: A fuel cell vehicle includes a fuel cell stack and a housing that has first and second end plates and four side plates connecting the sides of the first and second end plates. Projections provided on the first and second end plates have openings communicating with a space formed between an inner wall of the housing and a fuel cell laminate.