Patents by Inventor Tadashi Ohashi

Tadashi Ohashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220244707
    Abstract: A substrate processing apparatus includes a plurality of storage containers mounted on a load port, each storage container storing a plurality of substrates; a plurality of process chambers for accommodating the substrates; a transfer part for transferring the substrates; a memory for storing data tables, including first count data, for the process chambers; an operation part, when multiple substrates in the first storage container is transferred to the process chambers in a predetermined order and performs a predetermined process in the process chambers in a state in which no substrate is present in a first process chamber, counting first count data for the first process chamber; and a controller assigns flag data to a data table of a process chamber having largest first count data and when multiple substrates in the second storage container is transferred, control the transfer part based on the flag data from a different process chamber.
    Type: Application
    Filed: April 20, 2022
    Publication date: August 4, 2022
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Naofumi OHASHI, Toshiyuki KIKUCHI, Shun MATSUI, Tadashi TAKASAKI
  • Publication number: 20220230897
    Abstract: Described herein is a technique capable of reducing an amount of moisture in a low temperature region in a substrate processing apparatus provided with a transfer chamber. According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber provided with a heater; a load lock chamber; a transfer chamber provided between the process chamber and the load lock chamber and including a first region provided adjacent to the process chamber and a second region provided more adjacent to the load lock chamber than the first region and whose temperature is lower than a temperature of the first region; a detector capable of detecting an amount of moisture in the transfer chamber; and an inert gas supplier capable of supplying an inert gas toward the second region in the transfer chamber.
    Type: Application
    Filed: March 18, 2021
    Publication date: July 21, 2022
    Applicant: Kokusai Electric Corporation
    Inventors: Teruo Yoshino, Naofumi Ohashi, Tadashi Takasaki
  • Patent number: 11380540
    Abstract: There is provided a technique that includes: substrate mounting plate where substrates are arranged circumferentially; rotator rotating the substrate mounting plate; gas supply structure disposed above the substrate mounting plate from center to outer periphery thereof; gas supplier including the gas supply structure and controlling supply amount of gas supplied from the gas supply structure; gas exhaust structure installed above the substrate mounting plate at downstream side of the gas supply structure in rotation direction; gas exhauster including the gas exhaust structure and controlling exhaust amount of gas exhausted from the gas exhaust structure; and gas main component amount controller including the gas supplier and the gas exhauster and controlling gas main component amount in the gas supplied from the gas supply structure to the substrates and the gas main component amount in the gas supplied to the substrates from the center to the outer periphery of the mounting plate.
    Type: Grant
    Filed: March 11, 2020
    Date of Patent: July 5, 2022
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Takashi Nakagawa, Yoshiro Hirose, Naofumi Ohashi, Tadashi Takasaki
  • Publication number: 20150317148
    Abstract: Electric equipment is very high-performance so that system sustainability tends to be downgraded. Once a user gets the system, it is very difficult to catch up with latest version of hardware functions and software products from marketplaces. To solve the problem, this upgrade and downgrade invention must be applied to electric equipment is able to access dynamically to hardware functions in the form of emulator and software products through web Linked Open Data (LOD). The invented means make it possible to upgrade or downgrade for the latest version or old version of hardware functions superseded by emulators and software products which are directly loaded into storage component like FPGA by means of web LOD. The system sustainability of proposed electric equipment with Linked Open Data can be performed by Sustainability Manager which deals with operating system, emulator, firmware and applications with results of software management information.
    Type: Application
    Filed: November 3, 2014
    Publication date: November 5, 2015
    Inventor: Tadashi Ohashi
  • Publication number: 20100258436
    Abstract: An electrolysis apparatus is disclosed as including an electrolysis cell (10) accommodating therein electrolyte (70), a heating section (20) located around the electrolysis cell to heat the electrolysis cell, an electrode section (30) having an electrode unit (30a) immersed in the electrolyte and a power-conducting electrode portion (30b) supporting the electrode unit to apply the electrode unit with electric power, a lid body (45) defining a space region (40) in an area above the electrolysis cell, an exhaust section (50) located in the lid body to allow the space region to communicate with an outside for exhausting by-product gas, resulting from electrolysis of the electrolyte, from the space region to the outside, and an evaporation restraining member (60, 80, 80A, 80B, 90, 90A, 90B) floating on a liquid surface of the electrolyte so as to cover the liquid surface of the electrolyte for permitting by-product gas, resulting from electrolysis of the electrolyte, to escape to the space region while restrainin
    Type: Application
    Filed: October 27, 2008
    Publication date: October 14, 2010
    Applicant: Kinotech Solar Energy Corporation
    Inventors: Yoshinori Takeuchi, Dalsuke Sakaki, Tadashi Ohashi, Hisashi Matsumura
  • Publication number: 20100247416
    Abstract: A silicon manufacturing apparatus is disclosed as having a reactor tube (10) in which reaction occurs between zinc and silicon compound, zinc supply pipes (30, 30?) having heating portions to heat zinc for generating zinc gas and zinc ejecting portions ejecting and supplying zinc gas to the reactor tube, a zinc feeding section (40A, 40B) feeding zinc into the zinc supply pipes, a silicon compound supply pipe (50, 50A, 50B, 50C, 50c, 54, 57, 90) having a silicon compound ejecting portion to eject and supply silicon compound gas to the reactor tube so as to allow silicon compound gas to flow from a lower side to an upper side in the reactor tube, and a heating furnace (20) disposed outside the reactor tube to define a heating region (a) accommodating therein a part of the reactor tube, the heating portion and the zinc ejecting section for heating the same so as to allow the reactor tube, through which zinc gas and silicon compound gas flow, to have the temperature distribution such that a temperature closer to
    Type: Application
    Filed: October 20, 2008
    Publication date: September 30, 2010
    Inventors: Yoshinori Takeuchi, Daisuke Sakaki, Tadashi Ohashi, Hisashi Matsumura
  • Publication number: 20090277377
    Abstract: The crucible for melting silicon according to the present invention is a crucible for melting silicon including a crucible main body including a heat-resistant member, and a protective film formed at least on an inner surface of the crucible main body, in which the protective film has a composition of SiOXNY in which X>0 and Y>0. The crucible for melting silicon according to the present invention has excellent releasability to a silicon block, reduces the amount of impurities dissolved in a silicon melt, and can be produced at low cost. Furthermore, the present invention provides a release agent for use in the production of the crucible for melting silicon.
    Type: Application
    Filed: April 8, 2009
    Publication date: November 12, 2009
    Inventors: Tadashi OHASHI, Seijiro UMEMOTO, Go HITOKI
  • Patent number: 7321896
    Abstract: A component management system comprises a storage device for storing a plurality of components related to hardware and firmware which are necessary for the development, manufacture, inspection, and the like of a product as a component data base. The hardware and the firmware constituting the product are at the same management level. The system further comprises a management server for managing the component data base. A reception-related client is connected to the management server via a network N and it can take out a predetermined component from the component data base via the network N.
    Type: Grant
    Filed: July 27, 2000
    Date of Patent: January 22, 2008
    Assignee: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Patent number: 7322006
    Abstract: An integrated document management system comprises a storage unit which stores therein a document database consisting of a plurality of documents based on a hierarchical structure and a management information database consisting of a information indicating a relation between a document in an upper layer and a document in a lower layer and a plurality of management information including information on a version number of each document. A server is connected to the storage unit and is provided with the manager of the documents. A client is connected via a network to the server and retrieves, by accessing the server, a document in the upper layer and a document in the lower layer each having a specified version number according to the management information.
    Type: Grant
    Filed: December 23, 1999
    Date of Patent: January 22, 2008
    Assignee: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Patent number: 7296012
    Abstract: A name obtaining unit obtains name information. An ontology generating unit sets a specific element from an installation space where each element to be given a name is hierarchically expressed, generates an ontology as a group of name candidates with the set element as a top level based on the name information, and links each name constituting the ontology with multimedia information. The ontology generating unit registers the linked multimedia information at a multimedia information database.
    Type: Grant
    Filed: August 5, 2003
    Date of Patent: November 13, 2007
    Assignee: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Patent number: 7276125
    Abstract: The barrel type susceptor for use in the semiconductor epitaxial growth is characterized in that a face plate 5 of a susceptor main body 2 having the shape of a truncated cone is partitioned into two or more in a longitudinal direction thereof, each partition being provided with a wafer mounting concave portion 6a, 6b, 6c on which a wafer is laid, and the inclination angle ?a, ?b, ?c of a bottom face 6a1, 6b1, 6c1 of the concave portion for each partition to the vertical line is gradually decreased in each partition from the upper part to the lower part.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: October 2, 2007
    Assignees: Toshiba Ceramics Co., Ltd., Tokuyama Toshiba Ceramics Co., Ltd.
    Inventors: Toshikazu Miyamoto, Tadashi Ohashi
  • Patent number: 7236984
    Abstract: A digital document discussion apparatus includes a user profile information database storing user profile information on a user, a responsible organization profile information database storing responsible organization profile information, and a control section providing a template to a discussion requester by a frame with a work process, the user profile information and the responsible organization profile information corresponding to a digitized discussion document used as keys, allowing the discussion document to be created based on this template, and requesting the discussion participant to discuss the created discussion document.
    Type: Grant
    Filed: December 20, 2001
    Date of Patent: June 26, 2007
    Assignee: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Patent number: 7225221
    Abstract: In an information retrieving system, an index server is provided to retrieve design/manufacturing information registered in a plurality of web servers. A register processing agent delivers an abstract and storage location information of registered information of each web server, to a registration accept processing agent.
    Type: Grant
    Filed: March 14, 2001
    Date of Patent: May 29, 2007
    Assignee: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Patent number: 7152208
    Abstract: A document management apparatus having a constitution for periodically checking whether the attribute information in a document managed by a user conflicts with master information of the attribute information managed by a Personnel server or Enterprise-Department servers or not, and changing the attribute information in the document to the attribute information in the servers when both of the information conflict with each other.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: December 19, 2006
    Assignee: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Patent number: 6993565
    Abstract: Service processor control has enhanced versatility by delivering and maintaining component information with less labor and lower cost. A system includes a client storing component information on all hardware and firmware constituting a product (with the client connected to a drawing server), an EC sheet server, a program server, a manual server, and a service processor connected to the Internet. The service processor has a console function for at least the service processor, extracting component information through an SVP browser, and allowing the service processor to conduct a maintenance service, and further includes a console service and the like relating to a host.
    Type: Grant
    Filed: October 27, 2000
    Date of Patent: January 31, 2006
    Assignee: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Publication number: 20060004776
    Abstract: A digital document discussion apparatus includes a user profile information database storing user profile information on a user, a responsible organization profile information database storing responsible organization profile information, and a control section providing a template to a discussion requester by a frame with a work process, the user profile information and the responsible organization profile information corresponding to a digitized discussion document used as keys, allowing the discussion document to be created based on this template, and requesting the discussion participant to discuss the created discussion document.
    Type: Application
    Filed: August 1, 2005
    Publication date: January 5, 2006
    Applicant: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Patent number: 6983302
    Abstract: The present invention aims to register, receive or make reference to the component easily, accurately and at a low cost. The present invention comprises a manufacturer server for storing a component information with respect to a wholeness of a hardware and a firmware for composing a product, a rule server for storing a registration rule information upon registering the component information in the manufacturer server and a registration system client for registering the component information in the manufacturer server on the basis of the registration rule information.
    Type: Grant
    Filed: October 30, 2000
    Date of Patent: January 3, 2006
    Assignee: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Publication number: 20050267880
    Abstract: A digital document discussion apparatus includes a user profile information database storing user profile information on a user, a responsible organization profile information database storing responsible organization profile information, and a control section providing a template to a discussion requester by a frame with a work process, the user profile information and the responsible organization profile information corresponding to a digitized discussion document used as keys, allowing the discussion document to be created based on this template, and requesting the discussion participant to discuss the created discussion document.
    Type: Application
    Filed: August 1, 2005
    Publication date: December 1, 2005
    Applicant: Fujitsu Limited
    Inventor: Tadashi Ohashi
  • Publication number: 20050160991
    Abstract: The barrel type susceptor for use in the semiconductor epitaxial growth is characterized in that a face plate 5 of a susceptor main body 2 having the shape of a truncated cone is partitioned into two or more in a longitudinal direction thereof, each partition being provided with a wafer mounting concave portion 6a, 6b, 6c on which a wafer is laid, and the inclination angle ?a, ?b, ?c of a bottom face 6a1, 6b1, 6c1 of the concave portion for each partition to the vertical line is gradually decreased in each partition from the upper part to the lower part.
    Type: Application
    Filed: December 22, 2004
    Publication date: July 28, 2005
    Inventors: Toshikazu Miyamoto, Tadashi Ohashi
  • Publication number: 20050066264
    Abstract: A process simulation step supports manual artwork development planning for manual artwork development through simulation of processes from manual preparation request to delivery based on information entered by the requesting side. A preparation request step transmits a manual preparation request prepared by the requesting side to the developing side. A process management step accepts the preparation request, acquires an assigned number, and provides the progress status of processes from draft forwarding to artwork development and bookbinding in a visible manner on the developing side. An artwork development step prepares artwork by way of receipt of draft from the requesting side, and editing, proofreading and technical check on the developing and requesting sides. A bookbinding/distribution step handles manual bookbinding and/or recording to an electronified medium based on the prepared artwork.
    Type: Application
    Filed: August 5, 2004
    Publication date: March 24, 2005
    Applicant: FUJITSU LIMITED
    Inventors: Tadashi Ohashi, Yukiharu Hashiguchi