Abstract: Described herein is a technique capable of reducing an amount of moisture in a low temperature region in a substrate processing apparatus provided with a transfer chamber. According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber provided with a heater; a load lock chamber; a transfer chamber provided between the process chamber and the load lock chamber and including a first region provided adjacent to the process chamber and a second region provided more adjacent to the load lock chamber than the first region and whose temperature is lower than a temperature of the first region; a detector capable of detecting an amount of moisture in the transfer chamber; and an inert gas supplier capable of supplying an inert gas toward the second region in the transfer chamber.

Abstract: A bracket (1) includes a bracket body (2) made of a synthetic resin and a reinforcement member (3) made of a fiber reinforced plastic. The bracket body (2) has a surrounding portion (20). The reinforcement member (3) extends in a surrounding direction. A reinforcement member arrangement portion (20a) of the surrounding portion (20) is formed of an outer circumference (211), an inner circumference (212), and a connecting portion (213). The reinforcement member arrangement portion (20a) is in the shape of a letter I in cross section in which the cross sectional width (W3) of the connecting portion (213) is narrower than the cross sectional width (W1) of the outer circumference (211) and the cross sectional width (W2) of the inner circumference (212). The reinforcement member (3) is arranged on the outer circumference (211).

Abstract: A technique includes at least one chamber including a process chamber that is capable of processing a substrate and a shower head arranged in an upstream of the process chamber; a gas supplier that is capable of supplying a gas into the process chamber via the shower head; a first exhaust pipe communicating with the shower head; a second exhaust pipe communicating with the process chamber; a first exhaust controller installed in the first exhaust pipe; a first heater installed in the first exhaust pipe; and a controller configured to be capable of: (a) controlling the gas supplier so as to supply a processing gas as the gas to the shower head, and (b) controlling the gas supplier so as to supply a non-processing gas as the gas to the shower head.

Abstract: There is provided a technique capable of improving a uniformity of a substrate processing on a substrate surface. According to one aspect thereof, there is provided a substrate processing apparatus including: a substrate processing room; a plasma generation room; a gas supplier supplying a gas into the plasma generation room; a first coil surrounding the plasma generation room and to which an electric power is supplied; and a second coil surrounding the plasma generation room and to which an electric power is supplied. An axial direction of the second coil is equal to that of the first coil, a winding diameter of the second coil is different from that of the first coil, and a peak of a voltage distribution generated by supplying the electric power to the second coil does not overlap with a peak of a voltage distribution generated by the first coil.

Abstract: Electric equipment is very high-performance so that system sustainability tends to be downgraded. Once a user gets the system, it is very difficult to catch up with latest version of hardware functions and software products from marketplaces. To solve the problem, this upgrade and downgrade invention must be applied to electric equipment is able to access dynamically to hardware functions in the form of emulator and software products through web Linked Open Data (LOD). The invented means make it possible to upgrade or downgrade for the latest version or old version of hardware functions superseded by emulators and software products which are directly loaded into storage component like FPGA by means of web LOD. The system sustainability of proposed electric equipment with Linked Open Data can be performed by Sustainability Manager which deals with operating system, emulator, firmware and applications with results of software management information.

Abstract: An electrolysis apparatus is disclosed as including an electrolysis cell (10) accommodating therein electrolyte (70), a heating section (20) located around the electrolysis cell to heat the electrolysis cell, an electrode section (30) having an electrode unit (30a) immersed in the electrolyte and a power-conducting electrode portion (30b) supporting the electrode unit to apply the electrode unit with electric power, a lid body (45) defining a space region (40) in an area above the electrolysis cell, an exhaust section (50) located in the lid body to allow the space region to communicate with an outside for exhausting by-product gas, resulting from electrolysis of the electrolyte, from the space region to the outside, and an evaporation restraining member (60, 80, 80A, 80B, 90, 90A, 90B) floating on a liquid surface of the electrolyte so as to cover the liquid surface of the electrolyte for permitting by-product gas, resulting from electrolysis of the electrolyte, to escape to the space region while restrainin

Abstract: A silicon manufacturing apparatus is disclosed as having a reactor tube (10) in which reaction occurs between zinc and silicon compound, zinc supply pipes (30, 30?) having heating portions to heat zinc for generating zinc gas and zinc ejecting portions ejecting and supplying zinc gas to the reactor tube, a zinc feeding section (40A, 40B) feeding zinc into the zinc supply pipes, a silicon compound supply pipe (50, 50A, 50B, 50C, 50c, 54, 57, 90) having a silicon compound ejecting portion to eject and supply silicon compound gas to the reactor tube so as to allow silicon compound gas to flow from a lower side to an upper side in the reactor tube, and a heating furnace (20) disposed outside the reactor tube to define a heating region (a) accommodating therein a part of the reactor tube, the heating portion and the zinc ejecting section for heating the same so as to allow the reactor tube, through which zinc gas and silicon compound gas flow, to have the temperature distribution such that a temperature closer to

Abstract: The crucible for melting silicon according to the present invention is a crucible for melting silicon including a crucible main body including a heat-resistant member, and a protective film formed at least on an inner surface of the crucible main body, in which the protective film has a composition of SiOXNY in which X>0 and Y>0. The crucible for melting silicon according to the present invention has excellent releasability to a silicon block, reduces the amount of impurities dissolved in a silicon melt, and can be produced at low cost. Furthermore, the present invention provides a release agent for use in the production of the crucible for melting silicon.

Abstract: An integrated document management system comprises a storage unit which stores therein a document database consisting of a plurality of documents based on a hierarchical structure and a management information database consisting of a information indicating a relation between a document in an upper layer and a document in a lower layer and a plurality of management information including information on a version number of each document. A server is connected to the storage unit and is provided with the manager of the documents. A client is connected via a network to the server and retrieves, by accessing the server, a document in the upper layer and a document in the lower layer each having a specified version number according to the management information.

Abstract: A component management system comprises a storage device for storing a plurality of components related to hardware and firmware which are necessary for the development, manufacture, inspection, and the like of a product as a component data base. The hardware and the firmware constituting the product are at the same management level. The system further comprises a management server for managing the component data base. A reception-related client is connected to the management server via a network N and it can take out a predetermined component from the component data base via the network N.

Abstract: A name obtaining unit obtains name information. An ontology generating unit sets a specific element from an installation space where each element to be given a name is hierarchically expressed, generates an ontology as a group of name candidates with the set element as a top level based on the name information, and links each name constituting the ontology with multimedia information. The ontology generating unit registers the linked multimedia information at a multimedia information database.

Abstract: The barrel type susceptor for use in the semiconductor epitaxial growth is characterized in that a face plate 5 of a susceptor main body 2 having the shape of a truncated cone is partitioned into two or more in a longitudinal direction thereof, each partition being provided with a wafer mounting concave portion 6a, 6b, 6c on which a wafer is laid, and the inclination angle ?a, ?b, ?c of a bottom face 6a1, 6b1, 6c1 of the concave portion for each partition to the vertical line is gradually decreased in each partition from the upper part to the lower part.

Abstract: A digital document discussion apparatus includes a user profile information database storing user profile information on a user, a responsible organization profile information database storing responsible organization profile information, and a control section providing a template to a discussion requester by a frame with a work process, the user profile information and the responsible organization profile information corresponding to a digitized discussion document used as keys, allowing the discussion document to be created based on this template, and requesting the discussion participant to discuss the created discussion document.

Abstract: In an information retrieving system, an index server is provided to retrieve design/manufacturing information registered in a plurality of web servers. A register processing agent delivers an abstract and storage location information of registered information of each web server, to a registration accept processing agent.

Abstract: A document management apparatus having a constitution for periodically checking whether the attribute information in a document managed by a user conflicts with master information of the attribute information managed by a Personnel server or Enterprise-Department servers or not, and changing the attribute information in the document to the attribute information in the servers when both of the information conflict with each other.

Abstract: Service processor control has enhanced versatility by delivering and maintaining component information with less labor and lower cost. A system includes a client storing component information on all hardware and firmware constituting a product (with the client connected to a drawing server), an EC sheet server, a program server, a manual server, and a service processor connected to the Internet. The service processor has a console function for at least the service processor, extracting component information through an SVP browser, and allowing the service processor to conduct a maintenance service, and further includes a console service and the like relating to a host.

Abstract: A digital document discussion apparatus includes a user profile information database storing user profile information on a user, a responsible organization profile information database storing responsible organization profile information, and a control section providing a template to a discussion requester by a frame with a work process, the user profile information and the responsible organization profile information corresponding to a digitized discussion document used as keys, allowing the discussion document to be created based on this template, and requesting the discussion participant to discuss the created discussion document.

Abstract: The present invention aims to register, receive or make reference to the component easily, accurately and at a low cost. The present invention comprises a manufacturer server for storing a component information with respect to a wholeness of a hardware and a firmware for composing a product, a rule server for storing a registration rule information upon registering the component information in the manufacturer server and a registration system client for registering the component information in the manufacturer server on the basis of the registration rule information.

Abstract: A digital document discussion apparatus includes a user profile information database storing user profile information on a user, a responsible organization profile information database storing responsible organization profile information, and a control section providing a template to a discussion requester by a frame with a work process, the user profile information and the responsible organization profile information corresponding to a digitized discussion document used as keys, allowing the discussion document to be created based on this template, and requesting the discussion participant to discuss the created discussion document.

Abstract: The barrel type susceptor for use in the semiconductor epitaxial growth is characterized in that a face plate 5 of a susceptor main body 2 having the shape of a truncated cone is partitioned into two or more in a longitudinal direction thereof, each partition being provided with a wafer mounting concave portion 6a, 6b, 6c on which a wafer is laid, and the inclination angle ?a, ?b, ?c of a bottom face 6a1, 6b1, 6c1 of the concave portion for each partition to the vertical line is gradually decreased in each partition from the upper part to the lower part.