Abstract: Proposed is a substrate heating unit including: a laser generator providing a laser beam for heating a substrate; and a beam shaper processing the laser beam from the laser generator and selectively providing one of a first beam having a uniform energy distribution and a second beam having an edge-enhanced energy distribution to the substrate.

Abstract: A method of processing a substrate includes an etchant supplying operation of supplying an etchant to a substrate; a puddle operation of, by rotating the substrate at a first rotational speed, forming a liquid film of the etchant supplied to the substrate in a puddle shape; and a thickness adjusting operation of changing a rotational speed of the substrate to a rotational speed different from the first rotational speed to adjust a thickness of the liquid film of the etchant. Using the method, dispersion of the etching rate may be effectively controlled.

Abstract: Disclosed are an electrode structure including: an electrode plate; and a flow path guide disposed on one side of the electrode plate along the circumference of the electrode plate, and an electrolyzer including the electrode structure.

Abstract: The present invention provides a substrate treating facility, including: a process chamber including an annular beam emitting unit which emits an annular laser beam to a substrate and heats the substrate; and a laser beam generator configured to generate the laser beam emitted to the substrate through the annular beam emitting unit of the process chamber.

Abstract: A thin layer etching apparatus includes an etchant supply unit configured to supply an etchant onto a substrate to etch a thin layer formed on the substrate, a temperature measuring unit configured to measure a temperature of the substrate while an etching process is performed by the etchant, a laser irradiating unit configured to irradiate a first laser beam on a first portion including a central portion of the substrate and to irradiate a second laser beam in a ring shape on a second portion surrounding the first portion so that the temperature of the substrate is maintained at a predetermined temperature during the etching process, and a process control unit configured to control power of the first and second laser beams based on the temperature of the substrate measured by the temperature measuring unit to reduce a temperature difference between the first and second portions of the substrate.

Abstract: Discussed is a battery module that may include a cell assembly having battery cells arranged to face each other in an arrangement direction, a bus bar assembly coupled to a side surface of the cell assembly on which electrode leads of the battery cells are located, and guide blades arranged in front of the bus bar assembly in a direction corresponding to the arrangement direction of the battery cells, wherein each of the guide blades can have a plate surface facing at least one battery cell from among the battery cells, and is coupled to the bus bar assembly to rotate by a certain angle due to a gas pressure of a gas, when the gas is generated in the at least one battery cell.

Abstract: A substrate treatment apparatus includes a substrate support unit, a chemical supply unit supplying a chemical solution onto an upper surface of a substrate supported on the substrate support unit, a laser irradiation unit applying a laser pulse to the substrate to heat the substrate, and a controller controlling the laser irradiation unit to emit the laser pulse such that the substrate is repeatedly heated and cooled to maintain a preset temperature.

Abstract: One aspect of the present invention provides a sodium hydroxide production device, which includes: a first tank configured to store a sodium salt including two or more sodium ions in a molecule; a first electrolysis unit including a first anode chamber and a first cathode chamber which are partitioned by a first separator; and a water supply unit configured to supply water to the first tank and the first cathode chamber, wherein the first tank, a pipe configured to supply an aqueous sodium salt solution produced in the first tank to the first anode chamber, the first anode chamber, and a pipe configured to supply a material produced in the first anode chamber to the first tank constitute a closed loop, and a sodium hypochlorite production device including the same.

Abstract: A tablet form of an epoxy resin composition for encapsulation of semiconductor elements, where the tablet form of the epoxy resin composition: (i) includes 97 wt % or more of tablets having a diameter of 0.1 mm to less than 2.8 mm and a height of 0.1 mm to less than 2.8 mm, as measured using an ASTM standard sieve; (ii) satisfies the following Equation 1, ? ? ? D × ? ? ? H ? ? ? D + ? ? ? H ? 1.0 , where ?D is a standard deviation of tablet diameters and ?H is a standard deviation of tablet heights, as measured with respect to 50 tablets arbitrarily selected from the tablets; and (iii) the tablets have a compression density of 1.2 g/mL to 1.7 g/mL.

Abstract: One aspect of the present invention provides a sodium hypochlorite producing system, which includes: a first means configured to obtain saturated salt water and purified water; a second means including a anode chamber and a cathode chamber which are partitioned by a separator, the anode chamber allowing the saturated salt water to be converted into a anodic product including chlorine gas and anodic water, and the cathode chamber allowing the purified water to be converted into a cathodic product including sodium hydroxide, hydrogen gas, and hydroxide ions (OH?); a third means configured to react the anodic product and the cathodic product to produce a mixture including sodium hypochlorite and hydrogen gas; and a fourth means configured to prevent the sodium hydroxide or hydroxide ions (OH?) of the cathodic product or a combination thereof from moving to the anode chamber through the separator.

Abstract: The inventive concept provides a mask treatment apparatus. The mask treatment may include a support unit that supports the mask, and a light irradiation unit that irradiate the mask with a light to adjust a critical dimension of a pattern formed in the mask, wherein the light irradiation unit includes a light source that generates the light, and a light modulation element that modulates the light generated by the light source and forms an irradiation pattern.

Abstract: Provided is an apparatus for treating a substrate, which includes: a chamber having a treating space; a substrate support unit supporting and rotating a substrate in the treating space; a liquid supply unit supplying a chemical liquid to the substrate supported on the substrate support unit; a laser irradiation unit irradiating a laser to a bottom of the substrate supported on the substrate support unit; and a laser reflection unit coupled to the laser irradiation unit, and reflecting the laser irradiated and reflected to the bottom of the substrate, in which the laser reflection unit includes a reflection member reflecting the laser reflected from the substrate, and a driving member tilting the reflection member at a predetermined tilt angle.

Abstract: Provided is a method for treating a substrate. The method for treating the substrate may include heating a substrate formed with a plurality of thin film layers including a photoresist layer formed on a surface, and irradiating light to a first thin film layer including a metal among the plurality of thin film layers to heat the first thin film layer.

Abstract: A tableted epoxy resin composition for encapsulation of semiconductor devices and a semiconductor device encapsulated using the tableted epoxy resin composition, the tableted epoxy resin composition satisfying the following conditions (i) a proportion of tablets of the tableted epoxy resin composition having a diameter of greater than or equal to 0.1 mm and less than 2.8 mm and a height of greater than or equal to 0.1 mm and less than 2.8 mm is about 97 wt % or more, as measured by sieve analysis using ASTM standard sieves; (ii) the tablets have a packed density of greater than about 1.7 g/mL; and (iii) a ratio of packed density to cured density of the tablets is about 0.6 to about 0.87.

Abstract: Provided, according to one aspect of the present invention, are a sodium hypochlorite production system and a water treatment method using same, the sodium hypochlorite production system comprising: a first means for obtaining saturated brine and purified water using a first sub-stream branching off from a main stream of water to be treated; a second means for obtaining an anodic product and cathodic product by electrolyzing the saturated brine and purified water; and a third means for obtaining sodium hypochlorite by reacting the anodic product and cathodic product using a second sub-stream branching off from the main stream of the water to be treated.

Abstract: A refrigerator includes a cabinet, a cooling module including a compressor, a condenser, an expansion valve, and an evaporator, and attachable to or detachable from the cabinet so that the cooling module is removably mounted to the cabinet, an electronic device arranged in the cabinet, and an electrical box configured to be electrically connected to the electronic device and the compressor, receive power from outside and supply the received power to the electronic device and the compressor.

Abstract: Disclosed are an electrode structure including: an electrode plate; and a flow path guide disposed on one side of the electrode plate along the circumference of the electrode plate, and an electrolyzer including the electrode structure.

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit horizontally maintaining a substrate; a laser irradiation unit for irradiating the substrate with a laser; a photo-detector for detecting an energy of a reflective light reflected from the substrate among a laser irradiated on the substrate; and a processor, and wherein the processor irradiates a first laser of a first output to the substrate, and sets a second output of a second laser for irradiating the substrate to heat the substrate, based on an energy of a first reflective light reflected from the substrate by the first laser detected from the photo-detector.

Abstract: Provided is a refrigerator having only a second door opened/closed or having both of a first door and a second door opened/closed using one handing by allowing a latch device to fix the second door to the first door or release the second door from being fixed to the first door. The refrigerator includes a main body having a storage compartment, a first door that is rotatably disposed in front of the main body and has an opening formed therein, a second door that is rotatably disposed in front of the first door to open/close the opening, a handle coupled to a front side of the second door to open/close the first door and the second door, and a latch device allowing the second door to be fixed and released to/from the first door.

Abstract: Method and apparatus for etching a thin layer including silicon nitride formed on a substrate are disclosed. Etchant including phosphoric acid and water is supplied on the substrate so that a liquid layer is formed on the substrate. The thin layer is etched by reaction between the thin layer and the etchant. Thickness of the liquid layer is measured to detect variation in the thickness of the liquid layer while etching the thin layer. Variation in the concentration of the phosphoric acid and the water is calculated based on the variation in the thickness of the liquid layer. Water is supplied on the substrate based on the variation in the concentration of the phosphoric acid and the water so that the concentration of the phosphoric acid and the water becomes a predetermined value.