Abstract: Provided is a refrigerator. The refrigerator includes: a cabinet forming a storage chamber therein and including a cooling module mounting portion, a cabinet sealing portion formed on an outer surface of the cooling module mounting portion; a cooling module detachably mounted to the cooling module mounting portion and including an evaporator, a condenser, and a compressor, wherein the cooling module includes a module housing, and the module housing includes a module sealing portion facing the cabinet sealing portion, and the module sealing portion includes a module inclination portion positioned at an inclination with respect to a direction in which the cooling module is insertable into the cabinet to be mounted to the cabinet; and a sealing member positioned between the cabinet sealing portion and the module sealing portion.

Abstract: Substrate treating equipment includes a first process chamber group including a plurality of process chambers, each of which includes a laser beam emitting unit that applies a laser beam to a substrate to heat the substrate, one laser beam generator that generates the laser beam applied to the substrate through the laser beam emitting unit of each of the plurality of process chambers included in the first process chamber group, and a beam shifting module including one or more mirrors corresponsable to the plurality of process chambers included in the first process chamber group. Each of the one or more mirrors is shifted to a position in which the mirror forms an optical path of the laser beam toward a predetermined one of the plurality of process chambers.

Abstract: The present disclosure provides a substrate treating apparatus. The substrate treating apparatus includes a support unit that supports a substrate, and a heating unit that irradiates a beam to the substrate and heat the substrate, and the heating unit further includes an irradiation part that irradiates the beam, and a rotation part that rotates the beam.

Abstract: The present disclosure provides a substrate treating apparatus. The substrate treating apparatus includes a support unit that supports a substrate, and a laser unit that irradiates a laser beam to the substrate supported by the support unit, the laser unit includes an irradiation member that irradiates the laser beam, a lens disposed on a travel path of the laser beam irradiated by the irradiation member to be rotatable, and a reflection member having an inclined surface for changing the travel path of the laser beam that passed through the lens.

Abstract: In a refrigerator including a sliding door configured to open and close a storage chamber, a storage basket provided on a rear portion of the sliding door, and a support frame configured to support the sliding door and the storage basket, sidewalls of the storage basket may be formed so as to protrude outwardly except a lower portion in which the support frame is disposed between an inner case and the sidewalls, thereby increasing a storage space of the storage basket. In addition, a front protrusion, an auxiliary protrusion, and a rear protrusion are formed in an upper portion of the storage basket, and therefore a relative position of an auxiliary basket to the storage basket may be limited, and the auxiliary basket may be drawn into and out in conjunction with drawn-in and -out movements of the storage basket.

Abstract: Proposed is a substrate heating unit including: a laser generator providing a laser beam for heating a substrate; and a beam shaper processing the laser beam from the laser generator and selectively providing one of a first beam having a uniform energy distribution and a second beam having an edge-enhanced energy distribution to the substrate.

Abstract: A thin layer etching apparatus includes an etchant supply unit configured to supply an etchant onto a substrate to etch a thin layer formed on the substrate, a temperature measuring unit configured to measure a temperature of the substrate while an etching process is performed by the etchant, a laser irradiating unit configured to irradiate a first laser beam on a first portion including a central portion of the substrate and to irradiate a second laser beam in a ring shape on a second portion surrounding the first portion so that the temperature of the substrate is maintained at a predetermined temperature during the etching process, and a process control unit configured to control power of the first and second laser beams based on the temperature of the substrate measured by the temperature measuring unit to reduce a temperature difference between the first and second portions of the substrate.

Abstract: Method and apparatus for etching a thin layer including silicon nitride formed on a substrate are disclosed. Etchant including phosphoric acid and water is supplied on the substrate so that a liquid layer is formed on the substrate. The thin layer is etched by reaction between the thin layer and the etchant. Thickness of the liquid layer is measured to detect variation in the thickness of the liquid layer while etching the thin layer. Variation in the concentration of the phosphoric acid and the water is calculated based on the variation in the thickness of the liquid layer. Water is supplied on the substrate based on the variation in the concentration of the phosphoric acid and the water so that the concentration of the phosphoric acid and the water becomes a predetermined value.

Abstract: In a refrigerator including a sliding door configured to open and close a storage chamber, a storage basket provided on a rear portion of the sliding door, and a support frame configured to support the sliding door and the storage basket, sidewalls of the storage basket may be formed so as to protrude outwardly except a lower portion in which the support frame is disposed between an inner case and the sidewalls, thereby increasing a storage space of the storage basket. In addition, a front protrusion, an auxiliary protrusion, and a rear protrusion are formed in an upper portion of the storage basket, and therefore a relative position of an auxiliary basket to the storage basket may be limited, and the auxiliary basket may be drawn into and out in conjunction with drawn-in and -out movements of the storage basket.

Abstract: A substrate treatment apparatus includes a substrate support unit, a chemical supply unit supplying a chemical solution onto an upper surface of a substrate supported on the substrate support unit, a laser irradiation unit applying a laser pulse to the substrate to heat the substrate, and a controller controlling the laser irradiation unit to emit the laser pulse such that the substrate is repeatedly heated and cooled to maintain a preset temperature.

Abstract: Disclosed is a substrate treatment apparatus including a rotation unit that supports and rotates a substrate, a chemical discharge unit that discharges a chemical solution to the rotation unit, a chemical recovery unit disposed close to the rotation unit and configured to recover the chemical solution scattering from the rotation unit, and a laser irradiation unit that applies a laser beam to the substrate and heats the substrate.

Abstract: A beam homogenizer for surface modification comprises: a first lens array configured to split a laser beam, irradiated from a laser beam irradiation unit, into a plurality of beamlets; a second lens array configured to transmit the plurality of beamlets and comprising a plurality of lenslets corresponding to the first lens array; and a focusing lens configured to focus the plurality of beamlets, transmitted through the second lens array, onto a surface of a target. The beam homogenizer further comprises: a plasma generation-preventing unit disposed between the first and second lens arrays and configured to prevent plasma from being generated in the focal zone of the beamlets; or a damage-preventing unit disposed between the focusing lens and the target and configured to prevent the focusing lens from being damaged by energy generated when the plurality of beamlets is irradiated onto the target.

Abstract: Provided is a refrigerator having only a second door opened/closed or having both of a first door and a second door opened/closed using one handing by allowing a latch device to fix the second door to the first door or release the second door from being fixed to the first door. The refrigerator includes a main body having a storage compartment, a first door that is rotatably disposed in front of the main body and has an opening formed therein, a second door that is rotatably disposed in front of the first door to open/close the opening, a handle coupled to a front side of the second door to open/close the first door and the second door, and a latch device allowing the second door to be fixed and released to/from the first door.

Abstract: In a refrigerator including a sliding door configured to open and close a storage chamber, a storage basket provided on a rear portion of the sliding door, and a support frame configured to support the sliding door and the storage basket, sidewalls of the storage basket may be formed so as to protrude outwardly except a lower portion in which the support frame is disposed between an inner case and the sidewalls, thereby increasing a storage space of the storage basket. In addition, a front protrusion, an auxiliary protrusion, and a rear protrusion are formed in an upper portion of the storage basket, and therefore a relative position of an auxiliary basket to the storage basket may be limited, and the auxiliary basket may be drawn into and out in conjunction with drawn-in and -out movements of the storage basket.

Abstract: The present invention relates to an epoxy resin composition for sealing a semiconductor device, a preparation method therefor, and a semiconductor device sealed by using the same, the epoxy resin composition, which comprises an epoxy resin, a curing agent, an inorganic filler, and one or more additives selected from the group consisting of a curing accelerator, a coupling agent, a release agent, and a colorant, and has a gel content of approximately 1 ppm or less.

Abstract: Provided is a refrigerator having only a second door opened/closed or having both of a first door and a second door opened/closed using one handing by allowing a latch device to fix the second door to the first door or release the second door from being fixed to the first door. The refrigerator includes a main body having a storage compartment, a first door that is rotatably disposed in front of the main body and has an opening formed therein, a second door that is rotatably disposed in front of the first door to open/close the opening, a handle coupled to a front side of the second door to open/close the first door and the second door, and a latch device allowing the second door to be fixed and released to/from the first door.

Abstract: In a refrigerator including a sliding door configured to open and close a storage chamber, a storage basket provided on a rear portion of the sliding door, and a support frame configured to support the sliding door and the storage basket, sidewalls of the storage basket may be formed so as to protrude outwardly except a lower portion in which the support frame is disposed between an inner case and the sidewalls, thereby increasing a storage space of the storage basket. In addition, a front protrusion, an auxiliary protrusion, and a rear protrusion are formed in an upper portion of the storage basket, and therefore a relative position of an auxiliary basket to the storage basket may be limited, and the auxiliary basket may be drawn into and out in conjunction with drawn-in and-out movements of the storage basket.

Abstract: The present invention relates to a battery energy storage system including: a plurality of battery boxes provided with a plurality of battery packs; a plurality of power converter systems respectively connected to the plurality of battery boxes to selectively charge or discharge the plurality of battery boxes through alternating current supplied from an external power source device; a transformer disposed between the external power source device and the plurality of power converter systems; and a controller controlling the plurality of power converter systems to selectively charge or discharge the plurality of battery boxes.