Abstract: A wafer cleaning method is provided. The wafer cleaning method includes providing a wafer on a stage that is inside of a chamber. The wafer is fixed to the stage by moving a grip pin connected to an edge of the stage. First ultrapure water is supplied onto the wafer while the wafer is rotating at a first rotation speed. The grip pin is released from the wafer by moving the grip pin. A development process is performed by supplying liquid chemical onto the wafer while the wafer is rotating at a second rotation speed that is less than the first rotation speed.

Abstract: A battery pack fire extinguishing system includes: a compressor configured to compress a refrigerant; a condenser connected to the compressor through a first conduit and configured to condense the refrigerant; an evaporator connected to the condenser through a second conduit and connected to the compressor through a third conduit, the evaporator being configured to absorb ambient heat; a battery cell on the evaporator; and a refrigerant injector connected to the second conduit, above the battery cell, and configured to melt when vent gas is discharged from a vent hole in the battery cell to inject the refrigerant into the battery cell.

Abstract: A motor may include a stator with a coil disposed on an inner side thereof, a rotor at least partially surrounded by the coil and having an accommodation space in which a refrigerant for cooling the coil may be accommodated, a shaft connected to the rotor to rotate integrally with the rotor, and a pipe communicating with the accommodation space so that the refrigerant may be introduced from an external source and the refrigerant flows into the accommodation space therethrough.

Abstract: A flexible display device includes a first flexible substrate that includes a signal line formed on one side of the first flexible substrate. A second flexible substrate is disposed on a second side of the first flexible substrate that is located opposite to the first side of the first flexible substrate. An opening penetrates the first flexible substrate and the second flexible substrate. A driver is attached to the second flexible substrate. A connection portion electrically connects the driver and the signal line to each other through the opening.

Abstract: The present disclosure relates to a rotary machine configured to maximize a power by reducing an air gap between a stator and a rotor, for example, in a rotary machine such as a superconducting motor, and a method for manufacturing the same. The rotary machine may include: a stator; a rotor disposed to be separated from the stator by an air gap and configured to be rotatable; and a coating layer formed on at least one of a first opposite surface of the stator and a second opposite surface of the rotor, the first opposite surface and the second opposite surface facing each other.

Abstract: A bitstream reconstruction method and apparatus are provided. The method includes constructing an initial bitstream by rendering sound source information and geometry information within a reference radius from an initial location of a user accessing a virtual space into spatial audio, collecting location information according to a movement of the user within the virtual space, and reconstructing, based on a relationship between the reference radius and a movement radius identified according to the collected location information, the initial bitstream constructed by corresponding to the initial location of the user.

Abstract: A sensor shifting module includes a fixed body; a movable body movably, disposed in the fixed body, comprising an image sensor having an imaging plane oriented in a first direction; a substrate configured to deform based on a movement of the movable body with respect to the fixed body; and a driver, configured to move the movable body in a direction orthogonal to the first direction, comprising a driving coil coupled to one of the fixed body and the movable body, and a driving yoke coupled to another of the fixed body and the movable body. The driving yoke is disposed to oppose the driving coil in the direction orthogonal to the first direction. When current is applied to the driving coil, the movable body is configured to move in the direction orthogonal to the first direction by electromagnetic interaction between the driving coil and the driving yoke.

Abstract: An electroluminescent device, a method of manufacturing the same, and a display device including the same. The electroluminescent device includes a first electrode and a second electrode facing each other; an emission layer disposed between the first electrode and the second electrode, the emission layer including light emitting particles; an electron transport layer disposed between the first electrode and the emission layer; and a hole transport layer disposed between the second electrode and the emission layer, wherein the electron transport layer includes inorganic oxide particles and a metal-organic compound, the metal-organic compound or a thermal decomposition product of the metal-organic compound being soluble a non-polar solvent.

Abstract: A lung phantom unit for radiotherapy according to an embodiment of the present disclosure may arrange, at a location not affected by a magnetic field, a phantom driving cylinder and a driving device which may move a lung mimic and a tumor mimic in a lung simulation block. The lung phantom unit may be used for general purpose even as a phantom for MRI-based and CT image-based radiotherapy. Since lung and tumor motions are implemented by air injection, it may be possible to precisely measure the motion and volume change of a lung according to subtle changes in air pressure so that customized radiotherapy suitable for a patient having various breathing patterns is possible.

Abstract: The present disclosure relates to an internal pressure control apparatus capable of uniformly processing an upper surface of a semiconductor substrate and a substrate processing apparatus including the same. The substrate processing apparatus comprising a chamber housing including an exhaust hole for exhausting a process gas flowing thereinto, a substrate support unit inside the chamber housing, supporting a semiconductor substrate, a process gas supply unit providing the process gas to the inside of the chamber housing, a plasma generating unit generating plasma inside the chamber housing by using the process gas, and a ring body installed around the substrate support unit and provided as one body, and further comprising an internal pressure control apparatus controlling an internal pressure of the chamber housing, wherein the internal pressure control apparatus controls a posture of the ring body to control an exhaust amount of the process gas flowing into the chamber housing.

Abstract: The present disclosure is a conductive paste for a solar cell electrode comprising a metal powder, a glass frit, and an organic vehicle, wherein the discharge amount factor A of the bus-bar electrode can be calculated by Equation 1 below, and the discharge amount factor B of the finger electrode can be calculated by the following Equation 2, and |AB| relates to a conductive paste for a solar cell electrode, characterized in that it is 0.100 or less. A=(Slip velocity×10)/(G?×0.01)??[Equation 1] B=1/(G?×0.

Abstract: Provided are an oxazole derivative, a preparation method therefor, and a pharmaceutical composition comprising the same as an active ingredient for preventing or treating an allergic disease such as asthma or atopy, where the oxazole derivative exhibits an excellent inhibitory effect on the intracellular signaling of IL-33 and thus can be advantageously used as an active ingredient in a pharmaceutical composition for prevention or treatment of an allergic disease such as asthma or atopy.

Abstract: The chuck for supporting a target substrate for a display device, the chuck includes: a base having a first surface to support an object and a second surface opposite the first surface, the first surface including a first area and a second area; and indentations formed in the second area and recessed from the first area in a thickness direction of the base. The indentations include a first indentation extending in a first direction and a second indentation extending in a second direction intersecting the first direction.

Abstract: A display device including: a substrate; a plurality of light-emitting elements on the substrate; and a touch sensing layer disposed on the plurality of light-emitting elements, wherein the touch sensing layer includes: a first touch conductive layer; a first insulating layer disposed on the first touch conductive layer; and a second touch conductive layer disposed on the first insulating layer, and wherein the first insulating layer includes a light-converting material that converts light into near-infrared light.

Abstract: A display device includes a first pixel including a first emission area formed to emit light having a first color in a third direction, a second pixel including a second emission area formed to emit light having a second color different from the first color, a first partition wall in which a first opening overlapping the first emission area in a plan view is defined, a second partition wall in which a second opening overlapping the second emission area in the plan view is defined, and a first layer covering the first partition wall and the second partition wall. The first partition may be provided with a first height in the third direction. The second partition wall may be provided with a second height different from the first height.

Abstract: A camera module includes: a lens module including a lens and movably disposed in a housing; a first displacement identification layer disposed on the lens module, configured to move according to movement of the lens module, and having a width varying according to coordinates in one direction in the lens module; and a second displacement identification layer disposed on the lens module, configured to move according to the movement of the lens module, and having a width varying according to the coordinates in the one direction in the lens module. The first and second displacement identification layers are arranged such that a coordinate, among the coordinates in the one direction, corresponding to a maximum width of the first displacement identification layer is different from a coordinate, among the coordinates in the one direction in the lens module, corresponding to a maximum width of the second displacement identification layer.

Abstract: The present invention relates to a novel pyrrolo-pyrimidine derivative compound, a preparation method therefor, and a pharmaceutical composition comprising the same compound as an effective ingredient for preventing or treating a protein kinase-related disease. The compound represented by Chemical Formula 1 according to the present invention, an optical isomer thereof, or a pharmaceutically acceptable salt thereof, and a pharmaceutical composition comprising the same as an effective ingredient has outstanding inhibitory activity against LRRK2 kinase and against phosphorylation in the NIH-3T3 cell line, which is an LRRK2-expressing cell line, and NCC01 and 448T cell lines, which are both derived from patients with brain tumors. Verified to have inhibitory activity against various protein kinases in addition to LRRK2, the compound can find effective applications in the treatment or prevention of protein kinase-related diseases.

Abstract: The present invention relates to a novel imidazopyridine derivative, a method for preparing the same, and a pharmaceutical composition containing the same as an active ingredient for preventing or treating cancer. The novel imidazopyridine derivative according to the present invention, a stereoisomer thereof and a pharmaceutically acceptable salt thereof can effectively inhibit cancer-related kinases, are excellent in inhibiting proliferation of cancer cells in a cancer cell line, and effectively inhibit proliferation of cancer cells (cancer cell apoptosis) in a cancer cell heterograft model, and thus can be useful as a pharmaceutical composition containing the same as an active ingredient for preventing or treating cancer.

Abstract: The present invention relates to a novel pyrrolo-pyrimidine derivative compound, a preparation method therefor, and a pharmaceutical composition comprising the same compound as an effective ingredient for preventing or treating a protein kinase-related disease. The compound represented by Chemical Formula 1 according to the present invention, an optical isomer thereof, or a pharmaceutically acceptable salt thereof, and a pharmaceutical composition comprising the same as an effective ingredient has outstanding inhibitory activity against LRRK2 kinase and against phosphorylation in the NIH-3T3 cell line, which is an LRRK2-expressing cell line, and NCC01 and 448T cell lines, which are both derived from patients with brain tumors. Verified to have inhibitory activity against various protein kinases in addition to LRRK2, the compound can find effective applications in the treatment or prevention of protein kinase-related diseases.

Abstract: The present invention relates to a novel imidazopyridine derivative, a method for preparing the same, and a pharmaceutical composition containing the same as an active ingredient for preventing or treating cancer. The novel imidazopyridine derivative according to the present invention, a stereoisomer thereof and a pharmaceutically acceptable salt thereof can effectively inhibit cancer-related kinases, are excellent in inhibiting proliferation of cancer cells in a cancer cell line, and effectively inhibit proliferation of cancer cells (cancer cell apoptosis) in a cancer cell heterograft model, and thus can be useful as a pharmaceutical composition containing the same as an active ingredient for preventing or treating cancer.