Abstract: A signal processing portion obtains the reciprocal of a composite impedance of gap static capacitance and a plasma impedance, obtains composite static capacitance which is the sum of the gap static capacitance and a static capacitance component included in the plasma impedance from an imaginary part of the reciprocal, and obtains a resistance component included in the plasma impedance from a real part of the reciprocal. A gap detection device obtains the static capacitance component by using a model representing the characteristics of the reciprocal of the plasma impedance and the resistance component and obtains the gap static capacitance by subtracting the static capacitance component from the composite static capacitance. The gap detection device obtains a gap from the obtained gap static capacitance. Thus provided is a technique to detect a gap between a nozzle of a laser beam machine for outputting a laser beam and an object to be machined with high accuracy.

Abstract: To provide a method of manufacturing a field emission display having an improved electron emission effect by means of laser irradiation and accordingly mitigating a luminance fluctuation among pixels, and other such techniques. Provided is a method of manufacturing a field emission display which includes a cathode substrate and a fluorescent screen glass opposed to the cathode substrate and emits light when an electron emitted from a carbon nanotube printed layer (7) containing a carbon nanotube of the cathode electrode enters a fluorescent material of the fluorescent screen glass, the method including a laser beam irradiation step of irradiating a surface of the carbon nanotube printed layer (7) with a laser beam having its energy density to be spatially modulated to expose and raise the carbon nanotube of the carbon nanotube printed layer so as to form a laser irradiation part (B) and a non-laser irradiation part (C).

Abstract: A detection unit (8) is disposed for detecting the magnitudes of f1 and f2 frequency components of a composite signal which is passed through a center electrode cable (4). A detecting signal generating unit (9) generates a detecting signal corresponding to a gap between a nozzle (5) and a workpiece (6) from the magnitudes of the f1 and f2 frequency components of the composite signal, which are detected by the detection unit (8). As a result, even if plasma occurs in the gap between the nozzle (5) and the workpiece (6), the gap can be detected with a high degree of precision.

Abstract: A signal processing portion obtains the reciprocal of a composite impedance of gap static capacitance and a plasma impedance, obtains composite static capacitance which is the sum of the gap static capacitance and a static capacitance component included in the plasma impedance from an imaginary part of the reciprocal, and obtains a resistance component included in the plasma impedance from a real part of the reciprocal. A gap detection device obtains the static capacitance component by using a model representing the characteristics of the reciprocal of the plasma impedance and the resistance component and obtains the gap static capacitance by subtracting the static capacitance component from the composite static capacitance. The gap detection device obtains a gap from the obtained gap static capacitance. Thus provided is a technique to detect a gap between a nozzle of a laser beam machine for outputting a laser beam and an object to be machined with high accuracy.

Abstract: A laser beam processing apparatus includes a laser oscillator for producing a laser beam for processing a processing object, a focus head for focusing the laser beam output from the laser oscillator onto the processing object, a photo detector for detecting light emanating from the processing object in response to irradiation with the laser beam and a reference light generated from a reference light generating unit via a nozzle attached to the focus head, a correlation adjusting unit for adjusting correlation between the light detected during the processing and processing state of the processing object from the reference light detected by the photo detector, and a control unit for controlling the laser oscillator by monitoring the processing situation of the processing object from the light detected during the processing and that is adjusted by the correlation adjusting unit.

Abstract: A detection unit (8) is disposed for detecting the magnitudes of f1 and f2 frequency components of a composite signal which is passed through a center electrode cable (4). A detecting signal generating unit (9) generates a detecting signal corresponding to a gap between a nozzle (5) and a workpiece (6) from the magnitudes of the f1 and f2 frequency components of the composite signal, which are detected by the detection unit (8). As a result, even if plasma occurs in the gap between the nozzle (5) and the workpiece (6), the gap can be detected with a high degree of precision.

Abstract: A laser beam positioning device for a laser processing equipment includes a beam scanning unit that scans a laser beam to process a work piece according to a command value; a measurement unit that measures a processed position on the work piece; and a control unit that calculates the command value from coordinates of the processed position and coordinates of a target position. The control unit calculates an unknown parameter matrix, which optimally determines the command value to guide the laser beam onto the target position on the work piece, by weighting the coordinates of the processed position and the command value, according to a distance between the coordinates of the target position and the coordinates of the processed position.

Abstract: To provide a method of manufacturing a field emission display having an improved electron emission effect by means of laser irradiation and accordingly mitigating a luminance fluctuation among pixels, and other such techniques. Provided is a method of manufacturing a field emission display which includes a cathode substrate and a fluorescent screen glass opposed to the cathode substrate and emits light when an electron emitted from a carbon nanotube printed layer (7) containing a carbon nanotube of the cathode electrode enters a fluorescent material of the fluorescent screen glass, the method including a laser beam irradiation step of irradiating a surface of the carbon nanotube printed layer (7) with a laser beam having its energy density to be spatially modulated to expose and raise the carbon nanotube of the carbon nanotube printed layer so as to form a laser irradiation part (B) and a non-laser irradiation part (C).

Abstract: A laser beam processing apparatus includes a laser oscillator for producing a laser beam for processing a processing object, a focus head for focusing the laser beam output from the laser oscillator onto the processing object, a photo detector for detecting light emanating from the processing object in response to irradiation with the laser beam and a reference light generated from a reference light generating unit via a nozzle attached to the focus head, a correlation adjusting unit for adjusting correlation between the light detected during the processing and processing state of the processing object from the reference light detected by the photo detector, and a control unit for controlling the laser oscillator by monitoring the processing situation of the processing object from the light detected during the processing and that is adjusted by the correlation adjusting unit.

Abstract: In a laser beam positioning device for a laser processing equipment equipped with an optical device that leads a laser beam to a work piece placed on the stage, a measurement device that measures a processed position, and a control device that computes the command value to a beam scanning means using the coordinates of a processed position and a target position, while having a stage on which a work piece is placed, a laser oscillator, and a beam scanning means to scan a laser beam, a control device calculates the unknown parameter matrix that optimally determines the command value to the beam scanning means for pointing the laser beam to a target position on a work piece, by putting weight to the coordinates of the processed position and the command value to the beam scanning means at that time according to the distance of the coordinates of a target position and a processing position.