Abstract: A liquid ejection module includes a pressure chamber, a supply flow channel that supplies a liquid to the pressure chamber, a collection flow channel that collects the liquid from the pressure chamber, a liquid feeding chamber connected to one of the supply flow channel and the collection flow channel, and a connection flow channel connecting the liquid feeding chamber to the other of the supply flow channel and the collection flow channel. The liquid feeding chamber includes a liquid feeding mechanism that circulates the liquid in the supply flow channel, the pressure chamber, the collection flow channel, the liquid feeding chamber, and the connection flow channel. A ratio of a sum of flow channel resistance of the supply flow channel, the pressure chamber, and the collection flow channel relative to flow channel resistance of the connection flow channel is equal to or above 0.5.

Abstract: A method includes a step of forming a sacrificial layer on a first film, a step of forming a second film on the sacrificial layer, a step of forming an etching opening that extends through at least one of the first film and the second film so as to communicate with the sacrificial layer, and a step of forming a hollow portion by etching the sacrificial layer using a gas containing a fluorine-containing gas and hydrogen via the etching opening, wherein a composition ratio of silicon to nitrogen in a first region having a face in contact with the sacrificial layer is larger than a composition ratio of silicon to nitrogen in a second region not including the first region.

Abstract: A light emitting device comprising a plurality of pixels arranged on a substrate to form a plurality of columns parallel to a first direction and a plurality of rows parallel to a second direction orthogonal to the first direction is provided. Each of the plurality of pixels includes a light emitting element, and a driving circuit configured to drive the light emitting element, the substrate includes a transistor region in which a plurality of transistors that form the driving circuit are arranged, the plurality of pixels include a first pixel and a second pixel, which are adjacent to each other in the first direction, and a virtual line parallel to the second direction, which passes through the transistor region of the first pixel, passes through the transistor region of the second pixel.

Abstract: A driving method enables a liquid feeding apparatus using a driving element in the form of a membrane to feed a liquid at high liquid feeding accuracy. To this end, a voltage applied to the driving element is controlled in such a way as to repeat a first period in which the voltage is changed from a first voltage to a second voltage and a second period which is a longer period than the first period and in which the voltage is changed from the second voltage to the first voltage, and such that an inflection point is provided in each predetermined interval during the first period based on a Helmholtz vibration period unique to the liquid feeding apparatus.

Abstract: An apparatus includes a plurality of pixels arranged in an array on a substrate, the plurality of pixels each including a light emitting element, a first transistor, and a second transistor, a drain region of the first transistor being connected to an anode of the light emitting element, a drain region or a source region of the second transistor being connected to a gate electrode of the first transistor. In a plan view perpendicular to the substrate, a length of a current path from the first region to a gate electrode of the second transistor is greater than a length of a current path from a third region to the gate electrode of the second transistor.

Abstract: A high output and high reliability capacitive micromachined ultrasonic transducer (CMUT) is provided. The capacitive micromachined ultrasonic transducer has a concave portion on a surface of at least one insulating film. The surface faces an air gap.

Abstract: A light emitting device comprising a plurality of pixels arranged on a substrate to form a plurality of columns parallel to a first direction and a plurality of rows parallel to a second direction orthogonal to the first direction is provided. Each of the plurality of pixels includes a light emitting element, and a driving circuit configured to drive the light emitting element, the substrate includes a transistor region in which a plurality of transistors that form the driving circuit are arranged, the plurality of pixels include a first pixel and a second pixel, which are adjacent to each other in the first direction, and a virtual line parallel to the second direction, which passes through the transistor region of the first pixel, passes through the transistor region of the second pixel.

Abstract: A liquid ejection module includes a pressure chamber, a supply flow channel that supplies a liquid to the pressure chamber, a collection flow channel that collects the liquid from the pressure chamber, a liquid feeding chamber connected to one of the supply flow channel and the collection flow channel, and a connection flow channel connecting the liquid feeding chamber to the other of the supply flow channel and the collection flow channel. The liquid feeding chamber includes a liquid feeding mechanism that circulates the liquid in the supply flow channel, the pressure chamber, the collection flow channel, the liquid feeding chamber, and the connection flow channel. A ratio of a sum of flow channel resistance of the supply flow channel, the pressure chamber, and the collection flow channel relative to flow channel resistance of the connection flow channel is equal to or above 0.5.

Abstract: A driving method enables a liquid feeding apparatus using a driving element in a membrane shape to feed a liquid at high liquid feeding accuracy. To this end, a voltage applied to the driving element is controlled in such a way as to repeat a first period in which a first voltage is applied and a second period which is a longer period than the first period and used to effect a change between the first voltage and a second voltage lower than the first voltage, and in such a way as to switch between application and non-application of the first voltage during the first period.

Abstract: A liquid ejection module includes a pressure chamber, a supply flow channel that supplies a liquid to the pressure chamber, a collection flow channel that collects the liquid from the pressure chamber, a liquid feeding chamber connected to one of the supply flow channel and the collection flow channel, and a connection flow channel connecting the liquid feeding chamber to the other of the supply flow channel and the collection flow channel. The liquid feeding chamber includes a liquid feeding mechanism that circulates the liquid in the supply flow channel, the pressure chamber, the collection flow channel, the liquid feeding chamber, and the connection flow channel. A ratio of a sum of flow channel resistance of the supply flow channel, the pressure chamber, and the collection flow channel relative to flow channel resistance of the connection flow channel is equal to or above 0.5.

Abstract: A liquid ejection module includes a pressure chamber, a supply flow channel that supplies a liquid to the pressure chamber, a collection flow channel that collects the liquid from the pressure chamber, a liquid feeding chamber connected to one of the supply flow channel and the collection flow channel, and a connection flow channel connecting the liquid feeding chamber to the other of the supply flow channel and the collection flow channel. The liquid feeding chamber includes a liquid feeding mechanism that circulates the liquid in the supply flow channel, the pressure chamber, the collection flow channel, the liquid feeding chamber, and the connection flow channel. A ratio of a sum of flow channel resistance of the supply flow channel, the pressure chamber, and the collection flow channel relative to flow channel resistance of the connection flow channel is equal to or above 0.5.

Abstract: A driving method is provided which enables a liquid feeding apparatus using a driving element in a membrane shape to feed a liquid at high liquid feeding accuracy. To this end, a voltage applied to the driving element is controlled in such a way as to repeat a first period in which a first voltage is applied and a second period which is a longer period than the first period and used to effect a change between the first voltage and a second voltage lower than the first voltage, and in such a way as to switch between application and non-application of the first voltage during the first period.

Abstract: A driving method is provided which enables a liquid feeding apparatus using a driving element in a membrane shape to feed a liquid at high liquid feeding accuracy. To this end, a voltage applied to the driving element is controlled in such a way as to repeat a first period in which the voltage is changed from a first voltage to a second voltage and a second period which is a longer period than the first period and in which the voltage is changed from the second voltage to the first voltage, and such that an inflection point is provided to each predetermined interval during the first period based on a Helmholtz vibration period unique to the liquid feeding apparatus.

Abstract: A method includes a step of forming a sacrificial layer on a first film, a step of forming a second film on the sacrificial layer, a step of forming an etching opening that extends through at least one of the first film and the second film so as to communicate with the sacrificial layer, and a step of forming a hollow portion by etching the sacrificial layer using a gas containing a fluorine-containing gas and hydrogen via the etching opening, wherein a composition ratio of silicon to nitrogen in a first region having a face in contact with the sacrificial layer is larger than a composition ratio of silicon to nitrogen in a second region not including the first region.

Abstract: A capacitive transducer includes at least one element. The element is provided on a flexible substrate. The elements can be deformed and placed in a plurality of directions on the basis of the flexibility of the substrate.

Abstract: A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation.

Abstract: A high output and high reliability capacitive micromachined ultrasonic transducer (CMUT) is provided. The capacitive micromachined ultrasonic transducer has a concave portion on a surface of at least one insulating film. The surface faces an air gap.